Abstract:
A method of fabricating a semiconductor device comprises the following steps (a) to (f): (a) a step of forming a the contact hole in an interlayer dielectric formed on a semiconductor substrate including an electronic element; (b) a degassing step for removing gaseous components included within the interlayer dielectric, by thermal processing under a reduced pressure at a substrate temperature of 300° C. to 550° C.; (c) a step of forming a barrier layer on the interlayer dielectric and the contact hole; (d) a step of cooling the substrate to a temperature of no more than 100° C.; (e) a step of forming a first aluminum layer on the barrier layer, at a temperature of no more than 200° C., including aluminum or an alloy in which aluminum is the main component; and (f) a step is of forming a second aluminum layer on the first aluminum layer, at a temperature of at least 300° C., including aluminum or an alloy in which aluminum is the main component.
Abstract:
A method for manufacturing a semiconductor device that fills contact holes with conductive material such as aluminum or an aluminum alloy. A semiconductor device is manufactured by the process of forming an opening such as a contact hole in an interlayer dielectric film formed on a semiconductor substrate having a device element formed thereon. A first film and a second film made of conductive material such as aluminum or an alloy containing aluminum are formed on the interlayer dielectric film and the opening. The second film is then gradually cooled.
Abstract:
Support electrodes are provided for individually supporting a plurality of dynodes arranged inside of a vessel of an electron tube, such as photomultiplier tube. A black spacer formed from a ceramic material is disposed between the support electrodes. The black spacers are formed with elemental composition having content of MnO suppressed to 3 wt % or less. Current leaks, which are the cause of dark current, and abnormal generations of light during photomultiplication can be reduced, thereby improving the signal-to-noise ratio of the electron tube.
Abstract:
In a network system of this invention including a plurality of network devices that transfer frames by repeating, in a constant cycle, a reserved transfer interval that is a time band, in which a frame is transferred with a reservation and a free transfer interval that is a time band, in which a frame is freely transferred, a relay network device that links a first network device that is a transmission source of a frame and a second network device that is a transmission destination of the frame and the first network device execute a reservation processing such that the same time band within the reserved transfer interval is reserved and transfer the frame from the first network device to the second network device on the basis of the reservation result.
Abstract:
A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film.
Abstract:
A two-way communication circuit is connected to one end of a cable performing half-duplex communication. The two-way communication circuit includes a controller register storing a control signal including switch indication information switching a transmission direction and a reception direction; a communication controller managing timing depending on the control signal stored in the controller register; and a transmission and reception circuit periodically switching the transmission direction and the reception direction according to an indication by the communication controller depending on the control signal.
Abstract:
Disclosed is a travel-time prediction apparatus that is capable of making a mid-term prediction of travel time accurately by combining present conditions and statistical information. The apparatus includes a travel-time transition pattern database storing travel-time transition patterns obtained by statistically processing past time-series data of each road link according to type of data. Upon accepting a travel-time transition pattern corresponding to a specified link and day type from the database, the apparatus calculates conversion parameters of a travel-time transition pattern for which an error between the travel-time transition pattern and a sequentially input travel-time time-series data will be reduced, and then makes a prediction using a prediction function obtained by converting the travel-time transition pattern by the calculated conversion parameters. The calculated predicted value and the conversion parameters are distributed as traffic information.
Abstract:
A sliding contact material containing 40 to 60% by weight of Au, 15 to 25% by weight of Pd, and Sn and In as essential elements, the total amount of Sn and In being 1 to 4% by weight and the balance being Ag, and a sliding contact material containing 40 to 60% by weight of Au, 15 to 25% by weight of Pd, and Zn, the amount of Zn being 0.1 to 5% by weight and the balance being Ag. The sliding contact material is insusceptible to the interaction with grease essential for the use of such contact materials, and has stable contact resistance, and therefore can be used for a long time.
Abstract:
When the temperature of an engine and a main battery is low at the time of activating a vehicle system, an ECU starts the engine in advance and outputs a running permission signal after completion of engine startup. At this stage, the ECU suspends a defect diagnosis operation on a subsidiary load and feedback-controls the DC/DC converter by setting the voltage control value to a level lower than the output voltage from the subsidiary battery and at least the lower limit of the operating voltage of the ECU. The ECU feedback-controls the DC/DC converter by setting the voltage control value to a level of at least the output voltage of the subsidiary battery in response to completion of engine start-up. Then, the suspension of the defect diagnosis operation on the subsidiary load is canceled and a running permission signal is output.
Abstract:
A disk brake has a mount and a pad. The pad has a guide portion and outer and inner push bearing portions on a disk rotor rotation outlet side. The mount has a support portion to support the guide portion movably in a rotor axial direction. The outer and inner push bearing portions are provided on each position outwardly or inwardly of the rotor rotation outlet side guide portion in the radial direction of the rotor, and project toward the mount in the radial direction of the rotor to abut against the mount. The outer push bearing portion has an abutment surface to abut against the mount on a tangent to an outer peripheral side in a central position of the outer peripheral side of a friction surface of the pad radially outwardly in the radial direction of the rotor, or in a position outwardly of the tangent.