SUBSTRATE PROCESSING APPARATUS AND ANALYSIS METHOD THEREFOR
    31.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND ANALYSIS METHOD THEREFOR 有权
    基板加工设备及其分析方法

    公开(公告)号:US20080110233A1

    公开(公告)日:2008-05-15

    申请号:US11931145

    申请日:2007-10-31

    IPC分类号: G12B13/00 G01P21/00

    CPC分类号: H01L22/26

    摘要: An analysis method for a substrate processing apparatus capable of accurately detecting a state in a housing chamber. Emission intensities of processing gas before being introduced into the chamber and processing gas having passed therethrough are measured before an inter-chamber part is replaced. If an emission intensity measured after the replacement coincides with that measured before the replacement, an emission intensity of the processing gas having passed through the chamber is measured, and a variation between the emission intensities of the processing gas having passed through the chamber measured before and after the replacement is calculated. After start of plasma processing on wafers, an emission intensity of the processing gas having passed through the chamber is measured and the variation is removed therefrom to calculate an emission intensity really representing a state in the chamber, thus detecting an end point of plasma processing therefrom.

    摘要翻译: 一种能够精确地检测收纳室内的状态的基板处理装置的分析方法。 在更换腔室间部分之前,测量在引入室内的处理气体的排放强度和处理通过其中的气体之前。 如果在更换之后测量的发射强度与更换之前测量的发射强度一致,则测量已经通过室的处理气体的发射强度,并且测量了之前经过腔室的处理气体的发射强度之间的变化, 更换后计算。 在开始对晶片进行等离子体处理之后,测量已经通过室的处理气体的发射强度,并从其中去除变化,从而计算出真实表示室内状态的发射强度,从而检测等离子体处理的终点 。

    BELT-CONVEYOR DEVICE AND IMAGE FORMING APPARATUS
    32.
    发明申请
    BELT-CONVEYOR DEVICE AND IMAGE FORMING APPARATUS 有权
    皮带输送装置和图像形成装置

    公开(公告)号:US20070144871A1

    公开(公告)日:2007-06-28

    申请号:US11610775

    申请日:2006-12-14

    IPC分类号: B65G39/16

    摘要: A belt-conveyor device includes a detecting unit that detects a belt position in a width direction of the endless belt for a plurality of times within more than a cycle of the endless belt, the width direction being a direction orthogonal to direction of travel of the endless belt; an average calculating unit that calculates an average belt position from the belt positions detected by the detecting unit; a storing unit that stores therein a plural sets of correction values and belt positions; and a meander correcting unit that corrects meander of the endless belt based on a correction value that corresponds with the average belt position in the storing unit.

    摘要翻译: 带式输送装置包括检测单元,该检测单元在环形带的不止一个循环内检测环形带的宽度方向上的带位置多次,宽度方向是与所述环形带的行进方向正交的方向 无尽腰带 平均计算单元,其从由所述检测单元检测到的所述带位置计算平均带位置; 存储单元,其中存储多组校正值和带位置; 以及弯道校正单元,其基于与存储单元中的平均带位置相对应的校正值校正环形带的曲折。

    Particle monitoring device and processing apparatus including same
    34.
    发明申请
    Particle monitoring device and processing apparatus including same 有权
    粒子监测装置及包括其的处理装置

    公开(公告)号:US20050264810A1

    公开(公告)日:2005-12-01

    申请号:US11082652

    申请日:2005-03-18

    摘要: A particle monitoring device includes a light source for emitting a measurement light; and a light projecting/receiving unit, connected to a depressurized vessel of a processing apparatus, for projecting the emitted measurement light into the depressurized vessel and receiving a scattered light from a particle floating in the depressurized vessel. The light projecting/receiving unit is disposed such that the scattered light is received substantially parallel to the measurement light. The particle monitoring device further includes a received light intensity detection unit. The received light intensity detection unit has a received light intensity detection unit for determining whether or not the detected intensity is greater than a predetermined value and an instruction unit for instructing the processing apparatus to start, continue or stop a processing operation of the processing apparatus depending on the determined result.

    摘要翻译: 粒子监测装置包括用于发射测量光的光源; 以及与处理装置的减压容器连接的光投射/接收单元,用于将发射的测量光投射到减压容器中并接收来自浮动在减压容器中的颗粒的散射光。 光投射/接收单元被布置成使得散射光基本上平行于测量光被接收。 粒子监测装置还包括接收光强检测单元。 所接收的光强检测单元具有接收光强检测单元,用于确定检测强度是否大于预定值;以及指令单元,用于指示处理设备启动,继续或停止处理设备的处理操作依赖 对确定的结果。

    Plasma etching termination detecting method
    36.
    发明授权
    Plasma etching termination detecting method 有权
    等离子蚀刻终止检测方法

    公开(公告)号:US06541388B1

    公开(公告)日:2003-04-01

    申请号:US09661446

    申请日:2000-09-13

    申请人: Susumu Saito

    发明人: Susumu Saito

    IPC分类号: H01L21302

    摘要: A method detects an etching termination time point at which a to-be-processed layer formed on an underlayer is etched using plasma. Two types of light components of different wavelengths are applied to the to-be-processed layer, during plasma etching, thereby causing light to reflect from the surface of the to-be-processed layer and from a boundary between the to-be-processed layer and the underlayer, those waveforms of two reflected light components of different wavelengths and included in the reflected light, which result from interference, are detected. An approximate etching termination time point is detected on the basis of a phase difference between the detected waveforms.

    摘要翻译: 一种方法检测使用等离子体蚀刻形成在底层上的被处理层的蚀刻终止时间点。 在等离子体蚀刻期间,将不同波长的两种类型的光分量施加到待处理层,从而使光从待处理层的表面和待处理层之间的边界反射 层和底层,检测由干涉产生的包括在反射光中的不同波长的两个反射光分量的波形。 基于检测到的波形之间的相位差来检测近似蚀刻终止时间点。

    Synchromesh unit for transmission
    37.
    发明授权
    Synchromesh unit for transmission 有权
    用于传输的同步单元

    公开(公告)号:US06533091B1

    公开(公告)日:2003-03-18

    申请号:US09702848

    申请日:2000-11-01

    IPC分类号: F16D1100

    摘要: Spline teeth 66 formed in the inner periphery of a sleeve 45 slidably supported on a hub 63 fixed to a rotation shaft each comprise a projecting portion 66a constituted by a first inclined surface &agr;, a flat surface &ggr; and a second inclined surface &bgr;, and these projecting portions 66a bias a blocking ring via a synchro-spring 71 in an axial direction to thereby generte a synchronizing load between the sleeve 45 and a gear 37. Immediately before the projecting portions 66a of the spline teeth 66 of the sleeve 45 moving rightward mesh with dog teeth 37a of the gear 37, the second inclined surfaces &bgr; of the projecting portions 66a move and ride on the synchro-spring 71 so as to gradually reduce a pressing force axially applied to the blocking ring 67, thereby making it possible to provide a smooth mesh engagement between the spline teeth 66 of the sleeve 45 and the dog teeth 37a of the gear 37.

    摘要翻译: 形成在可滑动地支撑在固定到旋转轴的轮毂63上的套筒45的内周中的花键齿66各自包括由第一倾斜面α,平坦表面γ和第二倾斜面β构成的突出部66a, 突出部分66a通过同步弹簧71在轴向上偏压阻挡环,从而在套筒45和齿轮37之间产生同步负载。在套筒45的花键齿66的突出部分66a刚好在向右移动的网格之前 通过齿轮37的齿齿37a,突出部分66a的第二倾斜面βa移动并骑在同步弹簧71上,以便逐渐减小轴向施加到阻挡环67上的按压力,从而可以提供 套筒45的花键齿66与齿轮37的齿齿37a之间的光滑啮合。

    Laminated piezoelectric transformer and method for manufacturing the same
    38.
    发明授权
    Laminated piezoelectric transformer and method for manufacturing the same 失效
    层叠压电变压器及其制造方法

    公开(公告)号:US06333589B1

    公开(公告)日:2001-12-25

    申请号:US09289384

    申请日:1999-04-12

    IPC分类号: H01L4108

    摘要: A laminated piezoelectric transformer has one through-hole formed in the laminated piezoelectric transformer at a center position which becomes a node of vibration of the laminated piezoelectric transformer, and a support rod member is inserted in the through-hole and bonded to the through-hole by a bonding agent, for supporting the laminated piezoelectric transformer.

    摘要翻译: 叠层压电变压器在层压压电变压器中形成一个通孔,该中心位置成为层叠压电变压器的振动节点,并且支撑杆构件插入到通孔中并结合到通孔 通过粘合剂,用于支撑层压压电变压器。

    Laser printer and light source suitable for the same
    39.
    发明授权
    Laser printer and light source suitable for the same 失效
    激光打印机和光源适合相同

    公开(公告)号:US6091439A

    公开(公告)日:2000-07-18

    申请号:US966193

    申请日:1997-11-07

    IPC分类号: H01S5/042 H01S3/08

    CPC分类号: H01S5/0425 H01S2301/18

    摘要: A laser printer is provided printing with a high precision simply and at a high speed, and the laser printer uses a semiconductor laser which can vary the diameter of the emitted light while the light density is held constant. In the laser printer, laser rays emitted from a semiconductor laser are irradiated onto a photoconductor to vary its surface potential to produce a charge pattern particles adhere, and printing is performed by transferring the changed particles to a printing object. The semiconductor laser has a plurality of waveguide type resonators, the emitted beams of the resonators having a spatial superposition, and light emission is possible so that the emitted beams of the resonators having a spatial superposition with respect to each other among the resonators of the semiconductor laser are not substantially superimposed in time.

    摘要翻译: 提供了一种激光打印机,其简单且高速地以高精度进行打印,并且激光打印机使用半导体激光器,其可以在光密度保持恒定的同时改变发射光的直径。 在激光打印机中,将从半导体激光器发射的激光照射到光电导体上以改变其表面电位以产生电荷图案颗粒粘附,并且通过将改变的颗粒转印到印刷对象来进行印刷。 半导体激光器具有多个波导型谐振器,发射的谐振器的光束具有空间叠加,并且发光是可能的,使得谐振器的发射光束在半导体的谐振器之间具有相对于彼此的空间叠加 激光器在时间上基本上没有重叠。

    Stacked piezoelectric transformer and method of manufacturing the same
    40.
    发明授权
    Stacked piezoelectric transformer and method of manufacturing the same 失效
    堆叠压电变压器及其制造方法

    公开(公告)号:US6078127A

    公开(公告)日:2000-06-20

    申请号:US211000

    申请日:1998-12-15

    CPC分类号: H01L41/107

    摘要: A stacked piezoelectric transformer is formed by stacking piezoelectric ceramic sheets each formed with internal electrodes at their predetermined regions, and has portions formed with the internal electrodes as input portions, and a portion not formed with the internal electrodes as an output portion. Ceramic layers, which are formed by mixing a small amount of metal powder to a ceramic powder made of the same material as that of the piezoelectric ceramic sheets, are formed among layers of the output portion. A method of manufacturing a stacked piezoelectric transformer includes the steps of forming an internal electrode at a predetermined region of a piezoelectric ceramic sheet, forming a ceramic material at the remaining region of the piezoelectric ceramic sheet, and stacking a plurality of piezoelectric ceramic sheets each obtained in this manner. The ceramic material is obtained by mixing a small amount of metal powder to a ceramic powder made of the same material as that of the piezoelectric ceramic sheet, and is formed to have the same thickness as that of the internal electrode.

    摘要翻译: 堆叠式压电变压器通过在其预定区域堆叠各自形成有内部电极的压电陶瓷片而形成,并且具有形成有内部电极作为输入部分的部分,以及未形成有内部电极作为输出部分的部分。 通过将少量金属粉末与由与压电陶瓷片材料相同的材料制成的陶瓷粉末混合形成的陶瓷层形成在输出部分的各层之间。 层压型压电变压器的制造方法包括以下步骤:在压电陶瓷片的预定区域形成内部电极,在压电陶瓷片的其余区域形成陶瓷材料,并将多个压电陶瓷片层叠, 以这种方式。 通过将少量金属粉末与由与压电陶瓷片材相同的材料制成的陶瓷粉末混合而获得陶瓷材料,并且形成为具有与内部电极相同的厚度。