公开(公告)号：US07714288B2

公开(公告)日：2010-05-11

申请号：US12149218

申请日：2008-04-29

申请人： Tasuku Yano ,  Zhaohui Cheng ,  Takashi Furukawa ,  Osamu Nasu

发明人： Tasuku Yano ,  Zhaohui Cheng ,  Takashi Furukawa ,  Osamu Nasu

IPC分类号： G21K7/00 ,  G21G5/00 ,  G01N23/00 ,  H01J3/14

CPC分类号： G01N23/225 ,  H01J37/026 ,  H01J37/248 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/004 ,  H01J2237/28

摘要： Electrification affected on a surface of a sample which is caused by irradiation of a primary charged particle beam is prevented when plural frames are integrated to obtain an image of a predetermined area of the sample in a charged particle beam apparatus. The predetermined area of the sample is scanned with a primary electron beam from an electron gun, and plural frames are generated and integrated while detecting generated secondary electrons with a detector to obtain the image of the predetermined area. If it is determined by a detection signal of the detector that an electrification amount at the predetermined area becomes a specified value when generating plural frames, an electricity removal voltage is applied to a boosting electrode to remove or reduce the electrification, prior to generation of the next frame. Accordingly, the signal-to-noise ratio of the image obtained by integrating plural frames can be improved.

摘要翻译： 当多个帧被一体化以防止在带电粒子束装置中的样品的预定区域的图像时，防止了由一次带电粒子束的照射引起的样品表面影响的电气化。 用来自电子枪的一次电子束扫描样品的预定区域，并且用检测器检测产生的二次电子并产生并整合多个帧以获得预定区域的图像。 如果通过检测器的检测信号确定当产生多个帧时，预定区域的通电量变为规定值，则在生成多个帧之前将电去除电压施加到升压电极以去除或减少通电， 下一帧。 因此，可以提高通过对多个帧进行积分而获得的图像的信噪比。

公开(公告)号：US07680398B2

公开(公告)日：2010-03-16

申请号：US10560331

申请日：2004-06-09

申请人： Hideaki Mita ,  Yoshiho Gotoh ,  Tatsushi Bannai ,  Takashi Furukawa ,  Hideki Ando ,  Hisao Tanaka ,  Motohiro Terao

发明人： Hideaki Mita ,  Yoshiho Gotoh ,  Tatsushi Bannai ,  Takashi Furukawa ,  Hideki Ando ,  Hisao Tanaka ,  Motohiro Terao

IPC分类号： H04N5/00 ,  H04N5/91 ,  H04N7/00 ,  H04N7/26

CPC分类号： H04N9/8042 ,  G11B27/034 ,  G11B27/036 ,  G11B27/3027 ,  G11B2220/20 ,  H04N5/85 ,  H04N9/8063 ,  H04N9/8205 ,  H04N9/8227

摘要： The recording apparatus of the present invention includes: a file generating section for receiving video data and audio data and generating a video data file and an audio data file; a dividing section for dividing the video data file into a plurality of video data elements and dividing the audio data file into a plurality of audio data elements, an arranging section for arranging data such that the video data elements and the audio data elements are recorded within a predetermined recording unit; and a recording section for recording the arranged data on an information recording medium.

摘要翻译： 本发明的记录装置包括：文件生成部分，用于接收视频数据和音频数据并产生视频数据文件和音频数据文件; 分割部分，用于将视频数据文件分割成多个视频数据元素，并将音频数据文件分成多个音频数据元素;一个排列部分，用于排列数据，使得视频数据元素和音频数据元素被记录在 预定记录单元; 以及用于将排列的数据记录在信息记录介质上的记录部分。

公开(公告)号：US07603520B2

公开(公告)日：2009-10-13

申请号：US11400228

申请日：2006-04-10

申请人： Takashi Furukawa ,  Motohiro Terao

发明人： Takashi Furukawa ,  Motohiro Terao

IPC分类号： G06F12/00

CPC分类号： G11B27/329 ,  G11B20/00007 ,  G11B20/10046 ,  G11B20/10212 ,  G11B20/10527 ,  G11B27/034 ,  G11B27/105 ,  G11B27/3027 ,  G11B2220/216 ,  G11B2220/2537 ,  H04N5/85 ,  H04N9/8042 ,  H04N9/8063 ,  H04N9/8205 ,  H04N9/8227

摘要： A record apparatus is disclosed. The record apparatus has a memory, a record section, and a record control section. The memory stores data in a first unit. The record section writes data to an optical disc in a second unit larger than the first unit. The record control section controls the record section, which writes data to the optical disc. The record control section reads data in the second unit from the memory, causes the record section to write data that have been read from the memory to the optical disc, closes the second unit in which the data of the optical disc have been written, and sets a write start position of the optical disc to a second unit followed by the closed second unit.

摘要翻译： 公开了一种记录装置。 记录装置具有存储器，记录部分和记录控制部分。 存储器将数据存储在第一单元中。 记录部分将数据写入大于第一单元的第二单元中的光盘。 记录控制部分控制将数据写入光盘的记录部分。 记录控制部分从存储器读取第二单元中的数据，使得记录部分将从存储器读取的数据写入光盘，关闭其中已写入光盘的数据的第二单元，以及 将光盘的写入开始位置设置为第二单元，随后是闭合的第二单元。

公开(公告)号：US20090230984A1

公开(公告)日：2009-09-17

申请号：US12471907

申请日：2009-05-26

申请人： Eiichi HAZAKI ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi HAZAKI ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： G01R31/02

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于 第一名

公开(公告)号：US07582885B2

公开(公告)日：2009-09-01

申请号：US11401878

申请日：2006-04-12

申请人： Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato ,  Takashi Furukawa

发明人： Souichi Katagiri ,  Takashi Ohshima ,  Toshihide Agemura ,  Mitsugu Sato ,  Takashi Furukawa

IPC分类号： H01J1/50

CPC分类号： H01J41/14 ,  H01J37/28 ,  H01J41/12 ,  H01J2237/0245 ,  H01J2237/062 ,  H01J2237/06341 ,  H01J2237/1825

摘要： A small-sized charged particle beam apparatus capable of maintaining high vacuum even during emission of an electron beam is provided. A nonevaporative getter pump is placed upstream of differential pumping of an electron optical system of the charged particle beam apparatus, and a minimum number of ion pumps are placed downstream, so that both the pumps are used in combination. Further, by mounting a detachable coil on an electron gun part, the inside of a column can be maintained under high vacuum with a degree of vacuum in the order of 10−8 Pa.

摘要翻译： 提供即使在电子束的发射期间也能保持高真空的小尺寸带电粒子束装置。 将非蒸发性吸气泵放置在带电粒子束装置的电子光学系统的差分泵浦的上游，并且将最少数量的离子泵放置在下游，使得两个泵组合使用。 此外，通过将可拆卸线圈安装在电子枪部件上，可以将真空度保持在10-8Pa以下的真空度的高真空下。

公开(公告)号：US20080185292A1

公开(公告)日：2008-08-07

申请号：US12098056

申请日：2008-04-04

申请人： Akihiro Goto ,  Masao Akiyoshi ,  Katsuhiro Matsuo ,  Hiroyuki Ochiai ,  Mitsutoshi Watanabe ,  Takashi Furukawa

发明人： Akihiro Goto ,  Masao Akiyoshi ,  Katsuhiro Matsuo ,  Hiroyuki Ochiai ,  Mitsutoshi Watanabe ,  Takashi Furukawa

IPC分类号： C25D3/56 ,  B22F7/00

CPC分类号： C23C26/00

摘要： An electrode for an electrical-discharge surface-treatment method is molded with a metallic powder or a metallic compound powder having an average grain diameter of 6 micrometers to 10 micrometers. A coat on a surface of a workpiece is formed with a material constituting the electrode or a substance that is generated by a reaction of the material due to a pulse-like electrical discharge. The coat is built up with a material containing metal as a main constituent under conditions of a width of a current pulse for the pulse-like electrical discharge in a range of 50 microseconds to 500 microseconds and a peak of the current pulse equal to or less than 30 amperes.

公开(公告)号：US20080118664A1

公开(公告)日：2008-05-22

申请号：US11792410

申请日：2005-11-25

申请人： Akihiro Goto ,  Masao Akiyoshi ,  Kazushi Nakamura ,  Takashi Furukawa ,  Hiroyuki Ochiai ,  Mitsutoshi Watanabe

发明人： Akihiro Goto ,  Masao Akiyoshi ,  Kazushi Nakamura ,  Takashi Furukawa ,  Hiroyuki Ochiai ,  Mitsutoshi Watanabe

IPC分类号： C23C16/503 ,  H01T14/00

CPC分类号： C23C26/02 ,  B23H9/008 ,  B23H9/10

摘要： In a discharge surface-treatment apparatus a discharge pulse current of a high current value and a short pulse width at least having rising speed equal to or higher than 40 A/μs is applied between an electrode and a workpiece.

摘要翻译： 在放电表面处理装置中，在电极和工件之间施加至少具有等于或高于40A /μs的上升速度的高电流值和短脉冲宽度的放电脉冲电流。

公开(公告)号：US07372283B2

公开(公告)日：2008-05-13

申请号：US11397677

申请日：2006-04-05

申请人： Takashi Furukawa ,  Takayuki Mizuno ,  Eiichi Hazaki ,  Hirofumi Sato

发明人： Takashi Furukawa ,  Takayuki Mizuno ,  Eiichi Hazaki ,  Hirofumi Sato

IPC分类号： G01R31/02 ,  G01R31/00

CPC分类号： G01R31/307 ,  G01R31/2887

摘要： A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.

摘要翻译： 探针导航方法，导航装置和缺陷检查装置，其中在具有用于电特性评估的探针的带电粒子束系统中，探测可以容易地进行，而不管设备用户的技能水平如何。 为了达到这个目的，探针和放置测试片的试片台由独立的驱动装置驱动。 此外，提供一体地驱动探针和试片台的大台驱动装置。 另外还采用CAD导航。 这样可以提高设备用户在探测过程中的便利性。

公开(公告)号：US20080048699A1

公开(公告)日：2008-02-28

申请号：US11976238

申请日：2007-10-23

申请人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： G01R31/02

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且在第二位置处的测量精度优于 第一名

公开(公告)号：US07221634B2

公开(公告)日：2007-05-22

申请号：US10694380

申请日：2003-10-27

申请人： Motohiro Terao ,  Hideki Ando ,  Satoshi Katsuo ,  Takashi Furukawa ,  Hisao Tanaka ,  Masaki Hirose ,  Takayoshi Kawamura

发明人： Motohiro Terao ,  Hideki Ando ,  Satoshi Katsuo ,  Takashi Furukawa ,  Hisao Tanaka ,  Masaki Hirose ,  Takayoshi Kawamura

IPC分类号： G11B11/00

CPC分类号： G11B7/006 ,  G11B19/04

摘要： The rewriting counts in respective areas of a rewritable medium are uniformized. If empty areas are present on the rewritable medium rearward of a recording start position in terms of addresses, then data is recorded in those empty areas. When no empty areas become available rearward of the recording start position, data is then recorded in empty areas forward of the recording start position. The numbers of times that data is recorded in recording areas of the recording medium are thus averaged.

摘要翻译： 在可重写介质的各个区域中的重写计数是均匀的。 如果在地址方面在记录开始位置后方的可重写介质上存在空白区域，则在这些空白区域中记录数据。 当在记录开始位置之后没有空区域变得可用时，数据然后被记录在记录开始位置前方的空白区域中。 因此记录在记录介质的记录区域中的数据的次数被平均。