公开(公告)号：US07862918B2

公开(公告)日：2011-01-04

申请号：US11826918

申请日：2007-07-19

申请人： Tsukasa Matsuda ,  Eizo Kurihara ,  Shoji Yamaguchi ,  Kunihiro Takahashi ,  Mario Fuse ,  Tomofumi Tokiyoshi

发明人： Tsukasa Matsuda ,  Eizo Kurihara ,  Shoji Yamaguchi ,  Kunihiro Takahashi ,  Mario Fuse ,  Tomofumi Tokiyoshi

IPC分类号： B32B17/08 ,  B32B15/12

CPC分类号： G11B5/70 ,  Y10T428/31703 ,  Y10T428/31993

摘要： A recording medium includes a magnetic material and a pulp-fiber, a minimum value of shortest distances between the magnetic material and an edge of the recording medium substantially parallel to the pulp-fiber orientation direction being about 1 mm or more.

摘要翻译： 记录介质包括磁性材料和纸浆纤维，磁性材料与基本上平行于纸浆纤维取向方向的记录介质的边缘之间的最短距离的最小值为约1mm以上。

公开(公告)号：US20100227473A1

公开(公告)日：2010-09-09

申请号：US12714571

申请日：2010-03-01

申请人： Tsukasa Matsuda ,  Gilheyun Choi ,  Jongmyeong Lee

发明人： Tsukasa Matsuda ,  Gilheyun Choi ,  Jongmyeong Lee

IPC分类号： H01L21/768

CPC分类号： H01L21/76814 ,  H01L21/02063 ,  H01L21/3105 ,  H01L21/32051 ,  H01L21/76831 ,  H01L21/76843 ,  H01L21/76846 ,  H01L21/76864 ,  H01L21/76867 ,  H01L21/76873 ,  H01L23/53238 ,  H01L2221/1089 ,  H01L2924/0002 ,  H01L2924/00

摘要： A method of forming a semiconductor device is disclosed. A dielectric layer having a opening therein is formed on a semiconductor substrate. An inner surface of the opening is treated by plasma. A barrier metal layer is formed on the plasma-treated inner surface of the opening. A seed layer is formed on the barrier metal layer. A metal bulk layer is formed on the seed layer. High quality semiconductor devices can be fabricated by using these methods, which may stably fill the opening formed in the dielectric layer.

摘要翻译： 公开了一种形成半导体器件的方法。 其中具有开口的电介质层形成在半导体衬底上。 开口的内表面用等离子体处理。 在等离子体处理的开口的内表面上形成阻挡金属层。 在阻挡金属层上形成种子层。 在种子层上形成金属体层。 可以通过使用这些方法来制造高质量的半导体器件，这些方法可以稳定地填充形成在电介质层中的开口。

公开(公告)号：US20100082948A1

公开(公告)日：2010-04-01

申请号：US12493951

申请日：2009-06-29

申请人： Tsukasa Matsuda ,  Hideki Yamanaka

发明人： Tsukasa Matsuda ,  Hideki Yamanaka

IPC分类号： G06F9/30 ,  G06F3/00

CPC分类号： G06F3/0237 ,  G06F9/3802 ,  G06F9/383 ,  G06F9/3832 ,  G06F9/3842 ,  G06F9/3853 ,  G06F9/3885 ,  G06F13/385 ,  G06F17/279

摘要： In a CCW fetching section, for each input/output device being a control objective, a result prediction table in which prediction values of status values to be returned from an input/output device as execution results of CCW commands, is referred to. Then, based on the prediction values, commands being pre-fetching objectives are pre-fetched from a CCW program stored in a memory, and transmitted to a CCW executing section. On the other hand, in the CCW executing section, the pre-fetched commands are sequentially executed, and the actual status values as the execution results are received from the input/output device. Then, when the received actual status values are not same as the predicted status values, success or failure in prediction is notified to the CCW fetching section, and also, the result prediction table is updated in the CCW fetching section.

摘要翻译： 在CCW提取部分中，对于作为控制目标的每个输入/输出设备，参考其中将作为CCW命令的执行结果从输入/输出设备返回的状态值的预测值的结果预测表。 然后，基于预测值，从存储在存储器中的CCW程序中取出预取目标的命令，并发送给CCW执行部。 另一方面，在CCW执行部中，依次执行预取命令，并且从输入/输出装置接收作为执行结果的实际状态值。 然后，当接收的实际状态值与预测状态值不相同时，将预测成功或失败通知给CCW取出部，并且在CCW取出部中更新结果预测表。

公开(公告)号：US07600868B2

公开(公告)日：2009-10-13

申请号：US11020268

申请日：2004-12-27

申请人： Chizuru Koga ,  Kiyoshi Hosoi ,  Takashi Ogino ,  Tsukasa Matsuda

发明人： Chizuru Koga ,  Kiyoshi Hosoi ,  Takashi Ogino ,  Tsukasa Matsuda

IPC分类号： B41M5/50

CPC分类号： B41M5/52 ,  B41M5/5218 ,  B41M5/5236 ,  B41M5/5245 ,  G03G7/0013 ,  G03G7/002 ,  G03G7/0026 ,  G03G7/004 ,  G03G7/0046 ,  Y10T428/24802

摘要： The present invention provides a recording paper comprising pulp fibers and filler as main components and containing at least a cationic substance and a water-soluble polymer in a surface of the recording paper, wherein conductivity of water is not less than 0.002 S/m as measured at 1 second after immersing a piece of the recording paper with an area of 0.05 m2 in 40 ml of pure water.

摘要翻译： 本发明提供一种记录纸，其包含纸浆纤维和填料作为主要成分，并且在记录纸的表面中至少含有阳离子物质和水溶性聚合物，其中水的电导率不小于0.002S / m 在将一块面积为0.05m 2的记录纸浸入40ml纯水中1秒后。

公开(公告)号：US20090191721A1

公开(公告)日：2009-07-30

申请号：US12018813

申请日：2008-01-24

申请人： Frank M. Cerio, JR. ,  Shigeru Mizuno ,  Tsukasa Matsuda ,  Adam Selsey

发明人： Frank M. Cerio, JR. ,  Shigeru Mizuno ,  Tsukasa Matsuda ,  Adam Selsey

IPC分类号： H01L21/31

CPC分类号： H01L21/76843 ,  C23C14/046 ,  C23C14/32 ,  C23C14/541 ,  H01L21/2855 ,  H01L21/76846 ,  H01L21/76865

摘要： An iPVD system is programmed to deposit uniform material, such as barrier material, into high aspect ratio nano-size features on semiconductor substrates using a multi-step process within a vacuum chamber which enhances the sidewall coverage compared to the field and bottom coverage(s) while minimizing or eliminating overhang.

摘要翻译： iPVD系统被编程为在真空室内使用多步骤的方法将均匀的材料（例如阻挡材料）沉积在半导体衬底上的高纵横比纳米尺寸特征中，这增强了与场和底部覆盖（s ）同时最小化或消除突出。

公开(公告)号：US07515264B2

公开(公告)日：2009-04-07

申请号：US10321646

申请日：2002-12-18

申请人： Hayashi Otsuki ,  Tsukasa Matsuda ,  Kyoko Ikeda

发明人： Hayashi Otsuki ,  Tsukasa Matsuda ,  Kyoko Ikeda

IPC分类号： G01N21/00

CPC分类号： G01N1/24 ,  C23C16/4405 ,  C23C16/4412 ,  G01N15/06 ,  G01N2015/0693 ,  H01L21/67069 ,  H01L21/67115 ,  H01L21/67253 ,  H01L21/68742 ,  Y10T137/8593 ,  Y10T137/87652 ,  Y10T137/8766

摘要： The present invention provides a particle measuring system which is provided in a processing system 40 which generates an atmosphere obtained by exhausting air or a gas in a processing chamber 48 by a vacuum pump 98 and applies a process concerning semiconductor manufacture to a wafer W in the atmosphere, attached to an exhaust pipe 90 which connects an exhaust opening 86 of the processing chamber 48 with the vacuum pump 98, and measures the number of the particles in the exhaust gas, and a measuring method thereof, the system and method providing a processing system and a cleaning method which terminate etching process by determining an end point based on the number of the particles in the exhaust gas and perform cleaning of unnecessary films.

摘要翻译： 本发明提供一种粒子测量系统，其设置在处理系统40中，该处理系统40产生通过真空泵98排出处理室48中的空气或气体而获得的气氛，并将与半导体制造有关的工艺应用于晶片W 附着在排气管90上，排气管90将处理室48的排气口86与真空泵98连接，并测量废气中的颗粒数量及其测量方法，该系统和方法提供处理 系统和清洁方法，其通过基于废气中的颗粒数量确定终点并执行不需要的膜的清洁来终止蚀刻工艺。

公开(公告)号：US20090072969A1

公开(公告)日：2009-03-19

申请号：US12073784

申请日：2008-03-10

申请人： Shoji Yamaguchi ,  Yasunori Koda ,  Kunihiro Takahashi ,  Mario Fuse ,  Hiroyoshi Inoue ,  Tsukasa Matsuda

发明人： Shoji Yamaguchi ,  Yasunori Koda ,  Kunihiro Takahashi ,  Mario Fuse ,  Hiroyoshi Inoue ,  Tsukasa Matsuda

IPC分类号： G08B21/00

CPC分类号： G01R33/04 ,  G01R33/02

摘要： A baggage management gate including an exciting coil, a detecting coil and signal processing unit. The exciting coil forms an alternating magnetic field in a passage to an area from which manages objects to be carried in or carried out. The detecting coil detects a variation in the alternating magnetic field when magnetization of a magnetic material showing a large Barkhausen effect is reversed in the alternating magnetic field. The signal processing unit determines as to whether the magnetization reversal occurs in the alternating magnetic field due to the large Barkhausen effect or not, based on a signal detected by the detecting coil. The signal processing unit includes amplifier that amplifies the signal detected by the detecting coil with plural different amplification factors and output the amplified signals with each of the plural different amplification factors.

摘要翻译： 包括励磁线圈，检测线圈和信号处理单元的行李管理门。 励磁线圈在通过管道运送或执行物体的区域中形成交变磁场。 当在交变磁场中表现出大的巴克豪森效应的磁性材料的磁化反转时，检测线圈检测交变磁场的变化。 信号处理单元基于由检测线圈检测到的信号，确定由于大的巴克豪森效应而导致的交变磁场中的磁化反转是否发生。 信号处理单元包括放大器，其放大由多个不同放大系数由检测线圈检测的信号，并以多个不同放大系数中的每一个输出放大的信号。

公开(公告)号：US07456109B2

公开(公告)日：2008-11-25

申请号：US10536322

申请日：2003-11-14

申请人： Hideaki Yamasaki ,  Kazuhito Nakamura ,  Koumei Matsuzawa ,  Tsukasa Matsuda ,  Yumiko Kawano

发明人： Hideaki Yamasaki ,  Kazuhito Nakamura ,  Koumei Matsuzawa ,  Tsukasa Matsuda ,  Yumiko Kawano

IPC分类号： H01L21/302

CPC分类号： C23C16/4405 ,  H01J37/32357 ,  H01J37/32862

摘要： A cleaning method of a substrate processor that reduces damage to a member in a substrate processing container. The method of cleaning the substrate processing container of the substrate processor that processes a target substrate according to the present invention includes: introducing gas into a remote plasma generating unit of the substrate processor; exciting the gas by the remote plasma generating unit, and generating reactive species; and supplying the reactive species to the processing container from the remote plasma generating unit, and pressurizing the processing container at 1333 Pa or greater.

摘要翻译： 一种基板处理器的清洁方法，其减少对基板处理容器中的部件的损坏。 根据本发明的清理处理目标衬底的衬底处理器的衬底处理容器的方法包括：将气体引入到衬底处理器的远程等离子体产生单元中; 通过远程等离子体发生单元激发气体，并产生反应物种; 并从远程等离子体发生单元向处理容器提供反应物质，并且在1333Pa或更大压力下加压处理容器。

公开(公告)号：US20080078325A1

公开(公告)日：2008-04-03

申请号：US11537562

申请日：2006-09-29

申请人： Tsukasa Matsuda ,  Isamu Sakuragi

发明人： Tsukasa Matsuda ,  Isamu Sakuragi

IPC分类号： C23C16/00

CPC分类号： C23C16/18 ,  C23C16/0218 ,  C23C16/34 ,  C23C16/44 ,  C23C16/45536 ,  H01L21/02063 ,  H01L21/02126 ,  H01L21/02321 ,  H01L21/02337 ,  H01L21/02362 ,  H01L21/2855 ,  H01L21/28556 ,  H01L21/28562 ,  H01L21/31633 ,  H01L21/67069 ,  H01L21/76814 ,  H01L21/76846 ,  H01L21/76873

摘要： A processing system for integrated substrate processing in a substrate processing tool. The processing system contains a substrate holder configured for supporting and controlling the temperature of the substrate, a hot filament hydrogen radical source for generating hydrogen radicals, and a controller configured for controlling the processing system. The hot filament hydrogen radical source includes a showerhead assembly containing an internal volume and a showerhead plate having gas passages facing the substrate for exposing the substrate to the hydrogen radicals, and at least one metal wire filament within the internal volume to thermally dissociate H2 gas into the hydrogen radicals.

摘要翻译： 一种用于基板处理工具中的集成基板处理的处理系统。 所述处理系统包括：衬底保持器，其构造成用于支撑和控制所述衬底的温度，用于产生氢自由基的热丝氢自由基源;以及被配置为控制所述处理系统的控制器。 热丝氢自由基源包括含有内部体积的喷头组件和具有面向衬底的气体通道的喷头组件，用于将衬底暴露于氢自由基，以及内部体积内的至少一个金属丝细丝以使H

公开(公告)号：US20080063958A1

公开(公告)日：2008-03-13

申请号：US11979437

申请日：2007-11-02

申请人： Chizuru Koga ,  Kiyoshi Hosoi ,  Takashi Ogino ,  Tsukasa Matsuda

发明人： Chizuru Koga ,  Kiyoshi Hosoi ,  Takashi Ogino ,  Tsukasa Matsuda

IPC分类号： G03G13/04 ,  B41J2/17

CPC分类号： G03G7/0073 ,  A63F1/02 ,  B41M5/508 ,  B41M5/5227 ,  D21H17/14 ,  D21H17/67 ,  D21H23/24 ,  G03G7/002 ,  G03G7/006 ,  Y10T428/24455 ,  Y10T428/24802 ,  Y10T428/31993

摘要： A recording sheet including base paper including pulp fiber and filler, wherein the recording sheet further includes carboxylic acid. An ink jet recording method and an electrophotographic image recording method using the recording sheet.

摘要翻译： 一种包括纸浆纤维和填料的原纸的记录纸，其中记录纸还包括羧酸。 一种使用记录纸的喷墨记录方法和电子照相图像记录方法。