公开(公告)号：US08230562B2

公开(公告)日：2012-07-31

申请号：US11938078

申请日：2007-11-09

Applicant: Ronald S. Fazzio ,  Richard C. Ruby

Inventor： Ronald S. Fazzio ,  Richard C. Ruby

IPC: H04R17/10 ,  B05D1/32

CPC classification number: H03H9/132 ,  H03H9/02149 ,  H03H9/13 ,  H03H9/173 ,  H03H9/175 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: A method for fabricating an acoustic resonator comprises providing a substrate; fabricating a first electrode adjacent the substrate; fabricating a piezoelectric layer adjacent the first electrode; depositing electrode material to form a second electrode up to a first thickness adjacent the piezoelectric layer; depositing a first photo mask over the second electrode; depositing additional electrode material to form the second electrode up to a second thickness; removing the photo mask thereby forming a recessed region in the second electrode; and filling the recessed region with a fill material.

Abstract translation: 一种用于制造声谐振器的方法包括：提供一个基片; 制造邻近衬底的第一电极; 制造邻近第一电极的压电层; 沉积电极材料以形成第二电极，直到邻近压电层的第一厚度; 在第二电极上沉积第一光掩模; 沉积额外的电极材料以形成第二电极直到第二厚度; 去除所述光掩模，从而在所述第二电极中形成凹陷区域; 并用填充材料填充凹陷区域。

公开(公告)号：US07868522B2

公开(公告)日：2011-01-11

申请号：US11223386

申请日：2005-09-09

Applicant: Richard C. Ruby

Inventor： Richard C. Ruby

IPC: H01L41/04

CPC classification number: H03H9/02102 ,  H03H3/04 ,  H03H9/585 ,  H03H9/587 ,  H03H2003/021 ,  H03H2003/0407 ,  H03H2003/0471

Abstract: A temperature compensated pair of resonators. The temperature compensated pair of resonators comprises a first resonator configured to resonate at a first frequency and having a first frequency temperature coefficient and a second resonator configured to resonate at a second frequency and having a second frequency temperature coefficient. The second frequency is greater than the first frequency; the second frequency temperature coefficient is less than the first frequency temperature coefficient; and the first and the second resonators are fabricated on a common substrate.

Abstract translation: 一个温度补偿的谐振器对。 温度补偿对谐振器包括被配置为以第一频率谐振并具有第一频率温度系数的第一谐振器和被配置为以第二频率谐振并具有第二频率温度系数的第二谐振器。 第二频率大于第一频率; 第二频率温度系数小于第一频率温度系数; 并且第一和第二谐振器被制造在公共衬底上。

公开(公告)号：US07800457B2

公开(公告)日：2010-09-21

申请号：US11950644

申请日：2007-12-05

Applicant: Mark A. Unkrich ,  Richard C. Ruby ,  Wei Pang

Inventor： Mark A. Unkrich ,  Richard C. Ruby ,  Wei Pang

IPC: H03B5/32

CPC classification number: H03L1/026 ,  H03L1/022 ,  H03L7/099

Abstract: A self-calibrating temperature compensated oscillator includes a monolithic structure having a first resonator, a second resonator, and a heating element to heat the first and second resonators. The temperature coefficient of the second resonator is substantially greater than the temperature coefficient of the first resonator. A first oscillator circuit operates with the first resonator and outputs a first oscillator output signal having a first oscillating frequency. A second oscillator circuit operates with the second resonator and outputs a second oscillator output signal having a second oscillating frequency. A temperature determining circuit determines the temperature of the first resonator using the second oscillating frequency. A temperature compensator provides a control signal to the first oscillator in response to the determined temperature to adjust the first oscillating frequency and maintain it at a desired operating frequency.

Abstract translation: 自校准温度补偿振荡器包括具有第一谐振器，第二谐振器和加热元件的单片结构，以加热第一和第二谐振器。 第二谐振器的温度系数基本上大于第一谐振器的温度系数。 第一振荡器电路与第一谐振器一起工作并输出具有第一振荡频率的第一振荡器输出信号。 第二振荡器电路与第二谐振器一起工作并输出具有第二振荡频率的第二振荡器输出信号。 温度确定电路使用第二振荡频率确定第一谐振器的温度。 温度补偿器响应于所确定的温度向第一振荡器提供控制信号，以调整第一振荡频率并将其保持在期望的工作频率。

公开(公告)号：US07795997B2

公开(公告)日：2010-09-14

申请号：US11526948

申请日：2006-09-25

Applicant: John D. Larson, III ,  Storrs T. Hoen ,  Annette C. Grot ,  Richard C. Ruby ,  Graham M. Flower

Inventor： John D. Larson, III ,  Storrs T. Hoen ,  Annette C. Grot ,  Richard C. Ruby ,  Graham M. Flower

IPC: H03H9/00

CPC classification number: G01N29/022 ,  G01N29/036 ,  G01N2291/0253 ,  G01N2291/0256 ,  G01N2291/02845 ,  G01N2291/0426

Abstract: A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environmental condition. The environmental condition may be relative humidity and the layer of material may be a moisture absorptive material.

Abstract translation: 传感器感测环境条件。 传感器包括膜体声波谐振器，其包括响应于环境条件的变化而引起膜体声波谐振器的谐振频率和/或质量因子偏移的材料层。 环境条件可以是相对湿度，并且材料层可以是吸湿材料。

公开(公告)号：US20090273415A1

公开(公告)日：2009-11-05

申请号：US12112633

申请日：2008-04-30

Applicant: Michael L. Frank ,  Richard C. Ruby ,  Tiberiu Jamneala

Inventor： Michael L. Frank ,  Richard C. Ruby ,  Tiberiu Jamneala

IPC: H03H9/54

CPC classification number: H03H9/587 ,  H03H9/0095 ,  H03H9/132 ,  H03H9/583

Abstract: An electrical impedance transformer comprises a first film bulk acoustic resonator (FBAR), having a first electrical impedance and a first resonance frequency. The electrical impedance transformer also comprises: a second FBAR, having a second electrical impedance and a second resonance frequency, and being disposed over the first FBAR. The electrical impedance transformer also includes a decoupling layer disposed between the first and the second FBARs. The first electrical impedance differs from the second electrical impedance and the first and second resonance frequencies are substantially the same.

Abstract translation: 电阻抗变压器包括具有第一电阻抗和第一谐振频率的第一膜体声波谐振器（FBAR）。 电阻抗变压器还包括：第二FBAR，具有第二电阻抗和第二谐振频率，并且设置在第一FBAR上。 电阻抗变压器还包括设置在第一和第二FBAR之间的去耦层。 第一电阻抗与第二电阻抗不同，第一和第二谐振频率基本上相同。

公开(公告)号：US07563475B2

公开(公告)日：2009-07-21

申请号：US11203003

申请日：2005-08-11

Applicant: Richard C. Ruby ,  John D. Larson, III

Inventor： Richard C. Ruby ,  John D. Larson, III

IPC: B05D5/12

CPC classification number: H03H9/605 ,  H03H9/587 ,  H03H9/60 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49155

Abstract: An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.

Abstract translation: 公开了一种包括垂直分离的声谐振器的装置。 该装置包括在基板上的第一声谐振器和在第一声谐振器之上垂直分离的第二声谐振器。 由于谐振器在另一个上方垂直分离，所以实现谐振器所需的总面积减小，从而实现了芯片尺寸和成本的节省。 垂直分离的谐振器由制造在衬底上或在谐振器上的支座支撑。

公开(公告)号：US20090146746A1

公开(公告)日：2009-06-11

申请号：US11950644

申请日：2007-12-05

Applicant: Mark A. Unkrich ,  Richard C. Ruby ,  Wei Pang

Inventor： Mark A. Unkrich ,  Richard C. Ruby ,  Wei Pang

IPC: H03L1/04

CPC classification number: H03L1/026 ,  H03L1/022 ,  H03L7/099

Abstract: A self-calibrating temperature compensated oscillator includes a monolithic structure having a first resonator, a second resonator, and a heating element to heat the first and second resonators. The temperature coefficient of the second resonator is substantially greater than the temperature coefficient of the first resonator. A first oscillator circuit operates with the first resonator and outputs a first oscillator output signal having a first oscillating frequency. A second oscillator circuit operates with the second resonator and outputs a second oscillator output signal having a second oscillating frequency. A temperature determining circuit determines the temperature of the first resonator using the second oscillating frequency. A temperature compensator provides a control signal to the first oscillator in response to the determined temperature to adjust the first oscillating frequency and maintain it at a desired operating frequency.

Abstract translation: 自校准温度补偿振荡器包括具有第一谐振器，第二谐振器和加热元件的单片结构，以加热第一和第二谐振器。 第二谐振器的温度系数基本上大于第一谐振器的温度系数。 第一振荡器电路与第一谐振器一起工作并输出具有第一振荡频率的第一振荡器输出信号。 第二振荡器电路与第二谐振器一起工作并输出具有第二振荡频率的第二振荡器输出信号。 温度确定电路使用第二振荡频率确定第一谐振器的温度。 温度补偿器响应于所确定的温度向第一振荡器提供控制信号，以调整第一振荡频率并将其保持在期望的工作频率。

公开(公告)号：US20090146531A1

公开(公告)日：2009-06-11

申请号：US11748970

申请日：2007-05-15

Applicant: Richard C. Ruby ,  John D. Larson ,  Paul D. Bradley

Inventor： Richard C. Ruby ,  John D. Larson ,  Paul D. Bradley

IPC: H01L41/22 ,  H04R17/00

CPC classification number: H03H3/04 ,  H03H3/02 ,  H03H9/02149 ,  H03H2003/0471 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.

Abstract translation: 在具有顶面的基板上制造声学谐振器的方法。 首先，产生上表面的凹陷。 接下来，凹陷填充有牺牲材料。 填充的凹陷具有与所述基底的所述顶表面相对的上表面水平。 接下来，在所述上表面上沉积第一电极。 然后，在所述第一电极上沉积一层压电材料。 使用质量负载剥离工艺将第二电极沉积在压电材料层上。

公开(公告)号：US20090101999A1

公开(公告)日：2009-04-23

申请号：US12341122

申请日：2008-12-22

Applicant: R. Shane Fazzio ,  Richard C. Ruby ,  Christopher P. Wade ,  Michael Louis Frank ,  David A. Feld

Inventor： R. Shane Fazzio ,  Richard C. Ruby ,  Christopher P. Wade ,  Michael Louis Frank ,  David A. Feld

IPC: H01L29/78

CPC classification number: H03H9/02118 ,  H03H3/02 ,  H03H9/02125 ,  H03H9/172

Abstract: An electronic device. The electronic device includes a first electrode and a coating layer. The electronic device is fabricated on a substrate; the substrate has a cavity created in a top surface of the substrate; and the first electrode is electrically coupled to the substrate. The coating layer coats at least part of a substrate surface in the cavity, and the presence of the coating layer results in a mitigation of at least one parasitic leakage path between the first electrode and an additional electrode fabricated on the substrate.

Abstract translation: 电子设备。 电子器件包括第一电极和涂层。 电子器件制造在衬底上; 衬底具有在衬底的顶表面中产生的空腔; 并且第一电极电耦合到衬底。 涂层涂覆在空腔中的基底表面的至少一部分，并且涂层的存在导致在第一电极和在基底上制造的附加电极之间的至少一个寄生泄漏路径的减轻。

公开(公告)号：US07436269B2

公开(公告)日：2008-10-14

申请号：US11109596

申请日：2005-04-18

Applicant: Kun Wang ,  Paul D. Bradley ,  Richard C. Ruby

Inventor： Kun Wang ,  Paul D. Bradley ,  Richard C. Ruby

IPC: H03H9/70 ,  H03H9/54

CPC classification number: H03H9/587 ,  H03H3/02 ,  H03H7/1708 ,  H03H9/0095 ,  H03H9/0571 ,  H03H9/583 ,  H03H9/584 ,  H03H9/706 ,  H03H2003/0428 ,  Y10T29/49002

Abstract: An apparatus includes a substrate with a cavity and a two-stage resonator filter fabricated over the cavity. The two-stage resonator filter includes a first stage and a second stage. The first stage includes a first resonator and a second resonator, the second resonator acoustically coupled to the first resonator. The second stage includes a third resonator and a fourth resonator, the fourth resonator acoustically coupled to the third resonator. The second resonator and the third resonators are electrically coupled. A decoupling layer couples the first resonator and the second resonator. The decoupling layer extends between the third resonator and the fourth resonator. The first resonator and the fourth resonator are above the substrate. The decoupling layer is above the first resonator and the fourth resonator. The second resonator and the third resonators are above the decoupling layer.

Abstract translation: 一种装置包括具有空腔的衬底和在空腔上制造的两级谐振器滤波器。 两级谐振滤波器包括第一级和第二级。 第一级包括第一谐振器和第二谐振器，第二谐振器声耦合到第一谐振器。 第二级包括第三谐振器和第四谐振器，第四谐振器声耦合到第三谐振器。 第二谐振器和第三谐振器电耦合。 去耦层耦合第一谐振器和第二谐振器。 解耦层在第三谐振器和第四谐振器之间延伸。 第一谐振器和第四谐振器在衬底之上。 去耦层位于第一谐振器和第四谐振器之上。 第二谐振器和第三谐振器在去耦层之上。