-
31.发明申请UNIAXIAL OR BIAXIAL MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED SENSITIVITY TO ANGULAR VELOCITY DETECTION 有权具有提高灵敏度的单向或双向微电子陀螺仪对角速度检测公开(公告)号：US20130061672A1
公开(公告)日：2013-03-14
申请号：US13615353
申请日：2012-09-13
申请人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
发明人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
CPC分类号： G01C19/5712
摘要： An integrated microelectromechanical structure is provided with: a driving mass, anchored to a substrate via elastic anchorage elements and moved in a plane with a driving movement; and a first sensing mass, suspended inside, and coupled to, the driving mass via elastic supporting elements so as to be fixed with respect to the driving mass in the driving movement and to perform a detection movement of rotation out of the plane in response to a first angular velocity; the elastic anchorage elements and the elastic supporting elements cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass at an end portion thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the end portion.
摘要翻译： 集成的微机电结构设置有：驱动质量块，通过弹性锚固元件锚固到基底并在具有驱动运动的平面中移动; 以及通过弹性支撑元件悬挂在驱动质量块内并耦合到驾驶体的第一感测质量块，以在驱动运动中相对于驱动质量块固定，并响应于 第一角速度; 弹性锚固元件和弹性支撑元件使得检测运动与驱动运动分离。 弹性支撑元件在其端部处联接到第一感测块，并且检测运动的旋转轴线在第一感测质量块内仅在端部部分延伸。
-
32.发明授权公开(公告)号：US08042394B2
公开(公告)日：2011-10-25
申请号：US12208977
申请日：2008-09-11
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01P15/125 , G01P15/14 , G01P15/18 , G01P2015/0828
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the detection movement. The detection movement is a rotation about an axis lying in a plane. The sensing mass has, in plan view, a non-rectangular shape; in particular, the sensing mass has a radial geometry and, in plan view, the overall shape of a radial annulus sector.
摘要翻译： 集成微电子机械结构的驱动质量以围绕旋转轴线的旋转运动移动，并且感测质量块通过弹性支撑元件连接到驱动质量块，以便在存在外部应力的情况下执行检测运动。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内提供一个开口，并且传感块布置在开口内。 弹性支撑和锚固元件使得感测质量在旋转运动中固定到驱动质量块，并且在检测运动中基本上与驱动质量分离。 检测运动是围绕位于平面中的轴的旋转。 在平面图中，感测质量具有非矩形形状; 特别地，感测质量具有径向几何形状，并且在平面图中是径向环形扇区的整体形状。
-
33.发明授权Microelectromechanical inertial sensor, in particular for free-fall detection applications 有权微机电惯性传感器，特别适用于自由落体检测应用公开(公告)号：US07793544B2
公开(公告)日：2010-09-14
申请号：US11777702
申请日：2007-07-13
IPC分类号： G01P15/08
CPC分类号： G11B19/04 , G01P15/0891 , G01P15/125 , G01P15/18 , G01P2015/082
摘要： An inertial sensor provided with a detection structure sensitive to a first, a second and a third component of acceleration along respective directions of detection, and generating respective electrical quantities as a function of said components of acceleration. The detection structure supplies at output a resultant electrical quantity obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration acting on the inertial sensor, given by a vector sum of the components of acceleration. In particular, the detection structure is of a microelectromechanical type, and comprises a mobile portion made of semiconductor material forming with a fixed portion a first, a second and a third detection capacitor, and an electrical-interconnection portion, connecting the detection capacitors in parallel; the resultant electrical quantity being the capacitance obtained from said connection in parallel.
摘要翻译： 一种惯性传感器，其具有对沿着检测方向的加速度的第一，第二和第三分量敏感的检测结构，并且产生作为所述加速度分量的函数的相应的电量。 检测结构在输出时提供作为所述电量的组合获得的合成电量，并且与由加速度分量的矢量和给出的作用在惯性传感器上的合成加速度的值相关联。 特别地，检测结构是微机电型的，并且包括由半导体材料制成的可移动部分，该半导体材料形成有固定部分，第一，第二和第三检测电容器以及并联连接检测电容器的电互连部分 ; 所得到的电量是从所述连接并联获得的电容。
-
34.发明授权公开(公告)号：US07520171B2
公开(公告)日：2009-04-21
申请号：US11226930
申请日：2005-09-14
申请人： Angelo Merassi , Sarah Zerbini , Benedetto Vigna
发明人： Angelo Merassi , Sarah Zerbini , Benedetto Vigna
IPC分类号： G01P15/125 , G01P3/00
CPC分类号： G01P15/125 , G01P2015/082
摘要： In a micro-electromechanical structure of semiconductor material, a detection structure is formed by a stator and by a rotor, which are mobile with respect to one another in presence of an external stress and are subject to thermal stress; a compensation structure of a micro-electromechanical type, subject to thermal stress and invariant with respect to the external stress, is connected to the detection structure thereby the micro-electromechanical structure supplies an output signal correlated to the external stress and compensated in temperature.
摘要翻译： 在半导体材料的微机电结构中，通过定子和转子形成检测结构，转子在外部应力的存在下可相对移动，并受到热应力; 受到热应力和相对于外部应力不变的微机电类型的补偿结构连接到检测结构，由此微机电结构提供与外部应力相关并且被补偿的输出信号。
-
35.发明申请公开(公告)号：US20070214883A1
公开(公告)日：2007-09-20
申请号：US11684243
申请日：2007-03-09
IPC分类号： G01C19/00
CPC分类号： G01C19/5712
摘要： A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a first sensing mass is connected to the driving mass via elastic supporting elements so as to perform a first detection movement in a presence of a first external stress. The driving mass is anchored to an anchorage arranged along the axis of rotation by elastic anchorage elements. An opening is provided within the driving mass and the first sensing mass is arranged within the opening. The elastic supporting and anchorage elements render the first sensing mass fixed to the driving mass in the rotary motion, and substantially decoupled from the driving mass in the first detection movement. A second sensing mass is connected to the driving mass so as to perform a second detection movement in a presence of a second external stress. A first movement is a rotation about an axis lying in a plane, and a second movement is a linear movement along an axis of the plane.
摘要翻译： 集成的微机电结构的驱动质量以围绕旋转轴线的旋转运动移动，并且第一感测质量块通过弹性支撑元件连接到驱动质量块，以便在存在第一外部部件的情况下执行第一检测运动 强调。 驱动质量块通过弹性锚固元件锚固到沿旋转轴线布置的锚固件。 在驱动质量块内设有开口，第一传感块布置在开口内。 弹性支撑和锚固元件使得第一感测质量在旋转运动中固定到驱动质量块，并且在第一检测运动中基本上与驱动质量分离。 第二感测质量体连接到驱动质量块，以便在存在第二外部应力的情况下执行第二检测运动。 第一运动是围绕位于平面中的轴的旋转，并且第二运动是沿着平面的轴线的线性运动。
-
公开(公告)号：US06858810B2
公开(公告)日：2005-02-22
申请号：US10650452
申请日：2003-08-27
CPC分类号： G01P1/127 , G01P15/06 , G01P15/0802 , G01P15/0891 , G01P15/18 , G01P2015/0814 , H01H1/0036 , H01H35/146
摘要： An inertial sensor with failure threshold includes a first body and a second body, which can move relative to one another and are constrained by a plurality of elastic elements, and a sample element connected between the first body and the second body and shaped so as to be subjected to a stress when the second body is outside of a relative resting position with respect to the first body. The sample element has at least one weakened region. The sensor may also include additional sample elements connected between the first and second bodies.
摘要翻译： 具有故障阈值的惯性传感器包括第一主体和第二主体，其可以相对于彼此移动并被多个弹性元件约束;以及样本元件，其连接在第一主体和第二主体之间，并且成形为 当第二主体相对于第一主体位于相对静止位置之外时受到应力。 样品元件具有至少一个弱化区域。 传感器还可以包括连接在第一和第二主体之间的附加样本元件。
-
37.发明授权Method for manufacturing a hard disk read/write unit, with micrometric actuation 有权制造硬盘读/写单元的方法，具有微动作动公开(公告)号：US06446326B1
公开(公告)日：2002-09-10
申请号：US09305862
申请日：1999-05-05
IPC分类号： G11B5127
CPC分类号： H02N1/006 , G11B5/5552 , G11B5/58 , Y10T29/49027 , Y10T29/49032 , Y10T29/49052 , Y10T29/49053
摘要： The method comprises the steps of: forming an integrated device including a microactuator in a semiconductor material wafer; forming an immobilization structure of organic material on the wafer; simultaneously forming a securing flange integral with the microactuator and electrical connections for connecting the integrated device to a read/write head; bonding a transducer supporting the read/write head to the securing flange; connecting the electrical connections to the read/write head; cutting the wafer into dices; bonding the microactuator to a suspension; and removing the immobilization structure.
摘要翻译： 该方法包括以下步骤：在半导体材料晶片中形成包括微致动器的集成器件; 在晶片上形成有机材料的固定结构; 同时形成与微致动器一体的固定凸缘和用于将集成装置连接到读/写头的电连接; 将支撑读/写头的换能器接合到固定凸缘; 将电气连接连接到读/写头; 将晶片切成骰子; 将微致动器粘合到悬浮液上; 并去除固定结构。
-
38.发明授权Magnetic field sensor having anisotropic magnetoresisitive elements, with improved arrangement of magnetization elements thereof 有权具有各向异性磁感应元件的磁场传感器，具有改进的磁化元件排列公开(公告)号：US09018946B2
公开(公告)日：2015-04-28
申请号：US13333848
申请日：2011-12-21
申请人： Dario Paci , Sarah Zerbini
发明人： Dario Paci , Sarah Zerbini
CPC分类号： G01R33/093 , B82Y25/00 , G01R33/0011
摘要： An integrated magnetic-field sensor designed to detect an external magnetic field, comprising a first magnetoresistive structure for detecting the external magnetic field, the first magnetoresistive structure including first magnetoresistive means having a main axis of magnetization and a secondary axis of magnetization set orthogonal to one another. The magnetic-field sensor further comprises a magnetic-field generator, including a first portion configured for generating a first magnetic field having field lines in a first field direction, and a second portion, which is coplanar and is connected to the first portion, configured for generating a second magnetic field having field lines in a second field direction, the first magnetoresistive means being configured so that the main axis of magnetization extends parallel to the first field direction, and the secondary axis of magnetization extends parallel to the second field direction.
摘要翻译： 设计成检测外部磁场的集成磁场传感器，包括用于检测外部磁场的第一磁阻结构，所述第一磁阻结构包括具有主轴的磁化的第一磁阻装置和与其正交的磁化的次级轴 另一个。 磁场传感器还包括磁场发生器，包括被配置为产生具有第一场方向上的场线的第一磁场的第一部分和共面并连接到第一部分的第二部分，配置 为了产生具有第二场方向上的场线的第二磁场，第一磁阻装置构造成使得主磁化轴平行于第一场方向延伸，并且磁化的次级轴平行于第二场方向延伸。
-
39.发明授权Uniaxial or biaxial microelectromechanical gyroscope with improved sensitivity to angular velocity detection 有权具有改进的角速度检测灵敏度的单轴或双轴微机电陀螺仪公开(公告)号：US08312769B2
公开(公告)日：2012-11-20
申请号：US12626442
申请日：2009-11-25
申请人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
发明人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
IPC分类号： G01C19/56
CPC分类号： G01C19/5712
摘要： An integrated microelectromechanical structure is provided with: a driving mass, anchored to a substrate via elastic anchorage elements and moved in a plane with a driving movement; and a first sensing mass, suspended inside, and coupled to, the driving mass via elastic supporting elements so as to be fixed with respect to the driving mass in the driving movement and to perform a detection movement of rotation out of the plane in response to a first angular velocity; the elastic anchorage elements and the elastic supporting elements cause the detection movement to be decoupled from the driving movement. The elastic supporting elements are coupled to the first sensing mass at an end portion thereof, and the axis of rotation of the detection movement extends, within the first sensing mass, only through the end portion.
摘要翻译： 集成的微机电结构设置有：驱动质量块，通过弹性锚固元件锚固到基底并在具有驱动运动的平面中移动; 以及通过弹性支撑元件悬挂在驱动质量块内并耦合到驾驶体的第一感测质量块，以在驱动运动中相对于驱动质量块固定，并响应于 第一角速度; 弹性锚固元件和弹性支撑元件使得检测运动与驱动运动分离。 弹性支撑元件在其端部处联接到第一感测块，并且检测运动的旋转轴线在第一感测质量块内仅在端部部分延伸。
-
40.发明申请MICROELECTROMECHANICAL GYROSCOPE WITH ROTARY DRIVING MOTION AND IMPROVED ELECTRICAL PROPERTIES 有权具有旋转驱动运动的微电子陀螺仪和改进的电气特性公开(公告)号：US20100126269A1
公开(公告)日：2010-05-27
申请号：US12626433
申请日：2009-11-25
申请人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
发明人： Luca Coronato , Gabriele Cazzaniga , Sarah Zerbini
CPC分类号： G01C19/56 , G01C19/5712 , Y10T29/49002
摘要： An integrated microelectromechanical structure is provided with: a die, having a substrate and a frame, defining inside it a detection region and having a first side extending along a first axis; a driving mass, anchored to the substrate, set in the detection region, and designed to be rotated in a plane with a movement of actuation about a vertical axis; and a first pair and a second pair of first sensing masses, suspended inside the driving mass via elastic supporting elements so as to be fixed with respect thereto in the movement of actuation and so as to perform a detection movement of rotation out of the plane in response to a first angular velocity; wherein the first sensing masses of the first pair and the first sensing masses of the second pair are aligned in respective directions, having non-zero inclinations of opposite sign with respect to the first axis.
摘要翻译： 集成的微机电结构设置有：具有衬底和框架的管芯，在其内部限定检测区域，并具有沿第一轴线延伸的第一侧面; 固定在基板上的驱动质量块，设置在检测区域中，并被设计成在垂直轴线的致动运动的平面内旋转; 以及第一对和第二对第一感测质量块，其通过弹性支撑元件悬挂在驱动质量块内，以在致动的运动中相对于其固定，以便执行旋转的检测运动 响应于第一角速度; 其中第一对的第一感测质量和第二对的第一感测质量体在相对于第一轴线具有相反符号的非零倾斜的相应方向上对齐。
-
-
-
-
-
-
-
-
-
搜索结果
47 条记录 (耗时 0.025 秒)
