公开(公告)号：US20150180449A1

公开(公告)日：2015-06-25

申请号：US14643286

申请日：2015-03-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Keiichi Umeda ,  Takehiko Kishi ,  Toshio Nishimura ,  Takashi Hase

IPC: H03H9/21 ,  H01L41/29 ,  H01L41/31

CPC classification number: H03H9/21 ,  H01L41/29 ,  H01L41/31 ,  H03H3/0072 ,  H03H9/02448 ,  H03H9/2489 ,  Y10T29/42

Abstract: A vibrating device having vibrating arms connected to a supporter. The vibrating arms have an n-type Si layer which is a degenerated semiconductor and an exciter provided on the n-type Si layer. The exciter has a piezoelectric thin film and a first and second electrodes with the piezoelectric thin film interposed therebetween.

Abstract translation: 具有连接到支撑件的振动臂的振动装置。 振动臂具有作为退化半导体的n型Si层和设置在n型Si层上的激励器。 励磁机具有压电薄膜和插入压电薄膜的第一和第二电极。

公开(公告)号：US20130241360A1

公开(公告)日：2013-09-19

申请号：US13895445

申请日：2013-05-16

Applicant: Murata Manufacturing Co., Ltd

Inventor： Toshio Nishimura ,  Masanaga Nishikawa ,  Kazuhiko Sashisaki

IPC: H01L41/047 ,  H01L41/29

CPC classification number: H01L41/0472 ,  H01L41/047 ,  H01L41/257 ,  H01L41/29 ,  H01L41/338 ,  H03H3/02 ,  H03H9/02031 ,  Y10T29/42

Abstract: A method of manufacturing a piezoelectric element, which includes a first electrode adjacent a first main surface of a mother piezoelectric substrate and a second electrode adjacent a second main surface. During formation of the first electrode and the second electrode, cutouts are provided in the first electrode and the second electrode so that the shapes of the first electrode and the second electrode are different from each other when the mother piezoelectric substrate is inverted.

Abstract translation: 一种制造压电元件的方法，其包括邻近母压电基片的第一主表面的第一电极和与第二主表面相邻的第二电极。 在第一电极和第二电极的形成期间，当母压电基板反转时，在第一电极和第二电极中设置切口，使得第一电极和第二电极的形状彼此不同。

公开(公告)号：US11831297B2

公开(公告)日：2023-11-28

申请号：US17038519

申请日：2020-09-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ryota Kawai ,  Toshio Nishimura

IPC: H03H9/24 ,  H10N30/20 ,  H10N30/50 ,  H10N30/87

CPC classification number: H03H9/24 ,  H10N30/20 ,  H10N30/50 ,  H10N30/87

Abstract: A resonator includes a vibration portion that has a substrate having a main surface, a lower electrode on the main surface of the substrate, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. A frame surrounds at least part of the vibration portion. Opening grooves having different widths in a first direction in a plan view of the main surface are provided in a periphery of the vibration portion. In a plan view of the main surface, the upper electrode is provided so as to be spaced from an outer edge of the substrate by a gap which is along the first direction, such that a length of the gap in a region where a width of the opening groove is large is larger than a length of the gap in a region where a width of the opening groove is small.

公开(公告)号：US11509283B2

公开(公告)日：2022-11-22

申请号：US16435729

申请日：2019-06-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshihiko Unami ,  Toshio Nishimura

IPC: H03H9/02 ,  G01K1/16 ,  G01K7/16 ,  H03H9/13 ,  H03H9/17 ,  H03H9/24 ,  H03H9/15 ,  G01K7/18

Abstract: A resonance device with improved precision of temperature control. The resonance device includes a platform; a resonator including a vibrator and one or more holding arms that connect the vibrator and the platform to each other such that a first groove is provided around the vibrator. Moreover, the resonance device includes a sensor with a measurement portion that measures temperature and a heater formed on the platform. A second groove is provided between the measurement portion and the heater.

公开(公告)号：US11368140B2

公开(公告)日：2022-06-21

申请号：US15904906

申请日：2018-02-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/24 ,  H03H9/10 ,  H03H9/02 ,  H03H9/05

Abstract: A resonator that includes a piezoelectric vibrating portion; a retainer provided in at least part of an area surrounding the piezoelectric vibrating portion; a first node generating portion disposed between the piezoelectric vibrating portion and the retainer; a first connecting arm that connects the first node generating portion to a region in the piezoelectric vibrating portion that faces the first node generating portion; and a first retaining arm that connects the first node generating portion to a region in the retainer that faces the first node generating portion. The first node generating portion is substantially symmetrical with respect to each of two lines passing through a center of the first node generating portion along a first direction and a second direction orthogonal to the first direction, with the first direction being a direction that the first connecting arm connects the first node generating portion to the piezoelectric vibrating portion.

公开(公告)号：US20220006442A1

公开(公告)日：2022-01-06

申请号：US17478437

申请日：2021-09-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/24 ,  H03H9/17 ,  H01L41/18

Abstract: A resonator is provided that includes a vibration member that includes a substrate, a metal layer formed along one of main surfaces of the substrate, and a piezoelectric thin film disposed between the substrate and the metal layer. The vibration member vibrates such that a main vibration is a contour vibration. Moreover, a frame surrounds at least a portion of the vibration member, and a support unit connects the vibration member to the frame. The vibration member includes depressed portions on or above the one of main surfaces where the piezoelectric thin film is removed.

公开(公告)号：US10778182B2

公开(公告)日：2020-09-15

申请号：US15695505

申请日：2017-09-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Daisuke Nakamura ,  Toshio Nishimura ,  Ville Kaajakari

IPC: H03H9/05 ,  H03H9/13 ,  H03H9/17 ,  H03H9/02 ,  H03H9/24 ,  H03H9/10 ,  H03H9/15

Abstract: A resonator including a vibrating portion with first and second electrodes and a piezoelectric film formed therebetween. Moreover, a frame surrounds the vibrating portion with a pair of holding units opposite to each other and connecting the vibrating portion with the frame. An extended electrode extends from the holder to the holding unit and either the first or second electrode extends to the holding unit, and is connected to the extended electrode. Furthermore, the resonator includes an electrical resistance value per unit area of the extended electrode that is smaller than an electrical resistance value per unit area of the first electrode or the second electrode that extends to the holding unit.

公开(公告)号：US10707831B2

公开(公告)日：2020-07-07

申请号：US15483161

申请日：2017-04-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Yuichi Goto ,  Daisuke Nakamura

IPC: H01L41/053 ,  H01L41/047 ,  H01L41/09 ,  H03H9/13 ,  H03H9/02 ,  H03H9/24 ,  H03H9/10 ,  H03H9/05 ,  H03H9/17

Abstract: A resonator includes a support frame, a rectangular vibrating plate that performs contour vibration in a predetermined direction, and two pairs of support arms. The vibrating plate includes four vibration regions arranged in a row in the lengthwise direction and electrodes disposed in the vibration regions. Each of the vibration regions vibrate with a phase opposite to phases with which the adjacent vibration regions vibrate upon excitation. A center line of a pair of the electrodes in the lengthwise direction is offset from a center line, in the lengthwise direction, of a corresponding vibration region that includes the electrode disposed thereon.

公开(公告)号：US09905748B2

公开(公告)日：2018-02-27

申请号：US14939270

申请日：2015-11-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Toshio Nishimura ,  Keiichi Umeda ,  Takashi Hase ,  Keisuke Takeyama ,  Takehiko Kishi ,  Hiroshi Yamada

IPC: H03H9/02 ,  H01L41/09 ,  H03H9/05 ,  H03H9/24 ,  H01L41/047 ,  H01L41/083 ,  H03H9/15

CPC classification number: H01L41/09 ,  H01L41/047 ,  H01L41/083 ,  H03H9/02448 ,  H03H9/0595 ,  H03H9/2452 ,  H03H2009/155

Abstract: A vibrating device that is in the form of a rectangular plate having opposed long sides and opposed short sides, and that utilizes an expanding and contracting vibration mode in a direction of the short sides. The vibrating device includes a Si layer made of a degenerate semiconductor, a silicon oxide layer, a piezoelectric layer, and first and second electrodes through which a voltage is applied to the piezoelectric layer. When a total thickness of the Si layer is denoted by T1, a total thickness of the silicon oxide layer is denoted by T2, and the TCF in the vibrating device when the silicon oxide layer 3 is not provided is denoted by x(ppm/K), T2/(T1+T2) is within a range of (−0.0003x2−0.0256x+0.0008)±0.05.

公开(公告)号：US20160111627A1

公开(公告)日：2016-04-21

申请号：US14978242

申请日：2015-12-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takashi Hase ,  Toshio Nishimura ,  Hiroaki Kaida

IPC: H01L41/053

CPC classification number: H01L41/053 ,  H01L41/0933 ,  H02N2/0055 ,  H03H9/02244 ,  H03H9/02448 ,  H03H2009/02385 ,  H03H2009/0244 ,  H03H2009/02511 ,  H03H2009/2442

Abstract: A vibration device that includes a vibration portion, a support portion connected to the vibration portion, a bending-vibrating portion connected to the support portion, and a frame-shaped base portion connected to the bending-vibration portion and disposed so as to surround the vibration portion. The base portion defines a slit that extends in a first direction crossing a second direction in which the support portion extends from the vibration portion, the slit defining first and second fixed ends of the bending-vibrating portion and which are continuous with the base portion. A length between a portion of the bending-vibrating portion connected to the support portion to one of the first and second fixed ends of the bending-vibrating portion is in a range of λ/8 to 3λ/8, where λ denotes a wavelength of a bending vibration corresponding to a frequency of a characteristic vibration of the vibration portion.

Abstract translation: 一种振动装置，包括振动部分，与振动部分连接的支撑部分，连接到支撑部分的弯曲振动部分和连接到弯曲振动部分并且被布置成围绕着振动部分的框状基部 振动部分。 基部限定狭缝，该狭缝在与支撑部从振动部延伸的第二方向交叉的第一方向延伸，狭缝限定弯曲振动部的第一和第二固定端，并且与基部连续。 连接到支撑部分的弯曲振动部分与弯曲振动部分的第一和第二固定端之一之间的长度在λ/ 8至3λ/ 8的范围内，其中λ表示 对应于振动部分的特征振动频率的弯曲振动。