公开(公告)号：US3892827A

公开(公告)日：1975-07-01

申请号：US87227869

申请日：1969-10-29

申请人： SIEMENS AG

发明人： KELLER WOLFGANG ,  KERSTING ARNO ,  REUSCHEL KONRAD

IPC分类号： C23C16/44 ,  C23C16/01 ,  C30B29/60 ,  H01L21/22 ,  B29C23/00

CPC分类号： C23C16/01

摘要： Process of producing a hollow semiconductor body, particularly of silicon, by precipitating through a reaction with a gaseous semiconductor compound on an electrically heated mandrel, the improvement comprising coating the mandrel with soot prior to precipitating the semiconductor material.

公开(公告)号：US3880599A

公开(公告)日：1975-04-29

申请号：US34245773

申请日：1973-03-19

申请人： SIEMENS AG

发明人： KELLER WOLFGANG

IPC分类号： H05B6/32 ,  C30B13/28 ,  C30B13/30 ,  H01L21/208 ,  B01J17/00 ,  B01J17/20

CPC分类号： C30B13/30 ,  Y10T117/1008

摘要： A method for controlling the course of a floating melting zone process, in which a melting zone is electromagnetically induced in a semiconductor rod includes the steps of monitoring the r.f. frequency of the signal applied to induce heating in the rod, monitoring the voltage drop across the induction heating coil, and monitoring the current drawn by the r.f. generator, and controlling, in response to these three variables, the frequency of the signal and the velocity at which the silicon rod is pulled, in order to bring all three of the independent variables into agreement with desired values, to produce a rod of a constant desired diameter.

摘要翻译： 用于控制熔融区在半导体棒中电磁感应的浮动熔融区过程的过程的方法包括以下步骤：监测r.f. 施加信号的频率在杆中感应加热，监测感应加热线圈上的电压降，并监测由r.f.绘制的电流。 发生器，并且响应于这三个变量，控制信号的频率和拉伸硅棒的速度，以便使所有三个独立变量与期望值一致以产生一个棒 恒定所需直径。

公开(公告)号：US3868924A

公开(公告)日：1975-03-04

申请号：US29517372

申请日：1972-10-05

申请人： SIEMENS AG

发明人： REUSCHEL KONRAD ,  KELLER WOLFGANG ,  KERSTING ARNO ,  EMEIS REIMER

IPC分类号： C23C16/44 ,  C30B31/10 ,  C30B31/12 ,  C23C13/08

CPC分类号： C30B31/10 ,  C23C16/44 ,  C30B31/12 ,  Y10S118/90

摘要： Apparatus for indiffusing dopant into a semiconductor material. The apparatus comprises a heatable tube of the same semiconductor material, the wall of which is from 0.5 to 20 mm thick and is gas-tight under reaction conditions. Heating means include an induction coil spaced from the heatable tube and a relatively narrow graphite ring fixed about the tube to accelerate such heating.

摘要翻译： 用于将掺杂剂掺杂到半导体材料中的装置。 该装置包括相同半导体材料的可加热管，其壁厚为0.5至20mm，在反应条件下气密。 加热装置包括与可加热管隔开的感应线圈和围绕管固定的相对窄的石墨环以加速这种加热。

公开(公告)号：US3705789A

公开(公告)日：1972-12-12

申请号：US3705789D

申请日：1967-04-13

申请人： SIEMENS AG

发明人： KELLER WOLFGANG

IPC分类号： C30B13/20 ,  B01J17/10

CPC分类号： C30B13/20 ,  Y10S117/901 ,  Y10S117/917

摘要： FLOATING ZONE MELTING OF A VERTICALLY MOUNTED ROD IS PERFORMED WHILE ENERGIZING A LEVITATING FIELD WINDING BY ALTERNATING CURRENT OF MEDIUM FREQUENCY (500 HZ.-500 KHZ.) AND MAINTAINING THE LOW-FREQUENCY (BELOW 300 HZ.) AMPLITUDE FLUCTUATIONS OF THE ENERGIZING CURRENT BELOW 5%, PREFERABLY BELOW 1%. USED AS CURRENT SOURCE IS AN ALTERNATING-CURRET GENERATOR WHOSE EXCITATION OR FEEDER DIRECT CURRENT IS SMOOTHED BY ELECTRONIC FILTERING.

公开(公告)号：US3685973A

公开(公告)日：1972-08-22

申请号：US3685973D

申请日：1970-09-16

申请人： SIEMENS AG

发明人： KELLER WOLFGANG ,  REUSCHEL KONRAD

IPC分类号： C30B13/28 ,  B01J17/10

CPC分类号： C30B13/28

摘要： IN A METHOD OF ZONE MELTING A SEMICONDUCTOR ROD, THE ROD IS SUBSTANTIALLY VERTICALLY SUPPORTED AT ONE END BY A FIRST END HOLDER LOCATED IN THE SUBSTANTIALLY VERTICAL AXIS OF THE ROD, A SEED CRYSTAL BEING ATTACHED TO THE OTHER END OF THE ROD AND HAVING A FREE END SUPPORTED BY A SECOND END HOLDER, AND A MOLTEN ZONE IS FORMED IN THE ROD BY AN ANNULAR HEATING DEVICE SURROUNDING THE ROD AND DIVIDING IT INTO TWO ROD PORTIONS, THE ANNULAR HEATING DEVICE AND THE ROD BEING MOVED RELATIVE TO ONT ANOTHER IN THE AXIAL DIRECTION OF THE ROD FROM THE SEED CRYSTAL TO THE FIRST END HOLDER SO THAT ONE OF THE PORTIONS OF THE ROD IS SUPPLIED TO THE MELT AND THE OTHER PORTION THEREOF CRYSTALLIZES OUT OF THE MELT. THE IMPROVEMENT IN THE METHOD INCLUDES LATERALLY DISPLACING THE ANNULAR HEATING DEVICE TO A POSITION ECCENTRIC TO THE AXIS OF THE ROD BUT NEVERTHELESS STILL SURROUNDING THE ROD, AND MAINTAINING THE ECCENTRIC RELATIONSHIP OF THE ANNULAR HEATING DEVICE TO THE ROD FOR AT LEAST PART OF THE MOLTEN ZONE PASS ALONG THE ROD.

公开(公告)号：US3671703A

公开(公告)日：1972-06-20

申请号：US3671703D

申请日：1970-03-27

申请人： SIEMENS AG

发明人： KELLER WOLFGANG

IPC分类号： C30B13/20 ,  F27D11/00 ,  H01L21/208 ,  H05B6/32 ,  H05B9/06

CPC分类号： H05B6/32 ,  C30B13/20 ,  F27D11/00

摘要： Device for zone melting a crystalline rod includes a vessel, an induction heating coil mounted in the vessel for heating a molten zone formed in a crystalline rod, and an electric current supply for the induction heating coil extending into the vessel through an opening formed in a wall of the vessel, the current supply including a plurality of mutually telescoped conductor tubes radially spaced from one another, the plurality of telescoped conductor tubes including a first sequence of alternately disposed tubes and a second sequence of tubes disposed in alternating relationship with the first sequence of alternately disposed tubes, all of the tubes of the first sequence of alternately disposed tubes being electrically connected at both ends thereof, and all of the tubes of the second sequence of alternately disposed tubes being electrically connected at both ends thereof.

摘要翻译： 用于区域熔化结晶棒的装置包括容器，安装在容器中用于加热形成在结晶棒中的熔融区域的感应加热线圈，以及用于感应加热线圈的电流供应件，该感应加热线圈通过形成在 所述电流源包括彼此径向间隔开的多个相互伸缩的导体管，所述多个可伸缩导体管包括交替设置的管的第一序列和与所述第一序列交替关系设置的第二序列的管 交替设置的管的交替设置的管的第一序列的所有管在其两端电连接，并且第二序列交替设置的管的所有管在其两端电连接。

公开(公告)号：US3622280A

公开(公告)日：1971-11-23

申请号：US3622280D

申请日：1968-04-26

申请人： SIEMENS AG

发明人： KELLER WOLFGANG

IPC分类号： C30B13/32 ,  B01J17/10 ,  H05B5/18

CPC分类号： C30B13/32 ,  Y10T117/1068 ,  Y10T117/1072 ,  Y10T117/1088

摘要： Device for crucible-free zone melting a crystalline rod, particularly a semiconductor rod, includes two induction heating coils annularly surrounding the crystalline rod, and driving means for adjusting the position of the induction heating coils relative to one another in a direction transverse to the rod axis. Method of using the device includes relatively moving the induction heating coils away from one another transversely to the rod axis at the junction of a seed crystal with one end of the rod so as to fuse the seed crystal to the rod, relatively moving the induction heating coils on the one hand and the rod on the other hand along the axis of the rod and simultaneously relatively displacing the induction heating coils gradually toward one another in a direction transverse to the rod axis in conformity with an outwardly flaring conical portion of the rod extending from the seed crystal, until the induction heating coils substantially coaxially surround the main cylindrical portion of the rod.

公开(公告)号：US3594132A

公开(公告)日：1971-07-20

申请号：US3594132D

申请日：1967-02-27

申请人： SIEMENS AG

发明人： KELLER WOLFGANG

IPC分类号： C30B13/28 ,  B01J17/10

CPC分类号： C30B13/28 ,  Y10S117/91 ,  Y10S117/912 ,  Y10T117/1072

摘要： METHOD OF CRUCIBLE-FREE ZONE MELTING A CRYSTALLINE ROD WHICH COMPRISES ROTATING A PAIR OF SPACED AND SUBSTANTIALLY VERTICALLY ALIGNED END HOLDERS SUPPORTING A CRYSTALLINE ROD THEREBETWEEN, HEATING THE ROD WITH AN ANNULAR HEATING DEVICE SURROUNDING THE ROD TO A TEMPERATURE AT WHICH A MOLTEN ZONE IS FORMED IN THE ROD DIVIDING THE ROD INTO A SUPPLY ROD PORITION BEING SUPPLIED TO THE MELT IN THE MOLTEN ZONE AND A ROD PORTION RESOLIDIFYING FROM THE MELT, RELATIVELY DISPLACING THE END HOLDERS AND THE HEATING DEVICE IN THE DIRECTION OF THE ROD AXIS AT A GIVEN RELATIVE SPEED SO THAT THE RESOLIDIFYING ROD PORTION HAS A THICKNESS OF PREDETERMINED NOMINAL VALUE, AND LATERALLY DISPLACING THE END HOLDER FOR THE SUPPLY ROD PORTION OUT OF VERTICAL ALIGNMENT WITH THE OTHER END HOLDER.

公开(公告)号：US3592611A

公开(公告)日：1971-07-13

申请号：US3592611D

申请日：1968-10-25

申请人： SIEMENS AG

发明人： EDER GEORG ,  EMEIS REIMER ,  KELLER WOLFGANG

IPC分类号： C30B13/28 ,  C30B13/32 ,  B01J17/10

CPC分类号： C30B13/285 ,  C30B13/32 ,  Y10S117/911 ,  Y10T74/18656 ,  Y10T117/1084

摘要： APPARATUS FOR REFINING A ROD ACCORDING TO THE FLOATINGZONE MELTING TECHNIQUE INCLUDES ROTARY SHAFT MEANS ADAPTED TO CARRY AND ROTATE A ROD DURING SUBJECTION THEREOF TO THE FLOATING-ZONE MELTING TECHNIQUE, PLAY-FREE WORMDRIVE MEANS OPERATIVELY CONNECTED TO THE ROTARY SHAFT MEANS FOR ROTATING THE LATTER, CARRIAGE MEANS CARRYING THE ROTARY SHAFT MEANS, BALL-BEARING GUIDE MEANS GUIDING THE CARRIAGE MEANS FOR MOVEMENT, AND ROTARY BALL-BEARING SPINDLE MEANS OPERATIVELY CONNECTED TO THE CARRIAGE MEANS FOR DISPLACING THE LATTER, SO THAT THE ROD IS MAINTAINED FREE OF MECHANICAL VIBRATIONS DURING TREATMENT OF THE ROD ACCORDING TO THE FLOATING-ZONE MELTING TECHNIQUE.

D R A W I N G

公开(公告)号：US3585008A

公开(公告)日：1971-06-15

申请号：US3585008D

申请日：1967-09-22

申请人： SIEMENS AG

发明人： KELLER WOLFGANG ,  KRAMER HERBERT

IPC分类号： C30B13/20 ,  B01J17/10

CPC分类号： C30B13/20

摘要： METHOD OF CRUCIBLE-FREE ZONE MELTING A CRYSTALLINE ROD WHICH COMPRISES SUCCESSIVELY PASSING ALONG THE ROD IN THE AXIAL DIRECTION THEREOF AN ADVANCE MELTING ZONE FORMED IN THE ROD TO A DEPTH SMALLER THAN THE RADIAL THICKNESS OF THE ROD AND A SUBSEQUENT MELTING ZONE FORMED IN THE ROD AND EXTENDING ACROSS THE ENTIRE CROSS SECTION OF THE ROD.