公开(公告)号：US20060027804A1

公开(公告)日：2006-02-09

申请号：US11187988

申请日：2005-07-25

申请人： Shunpei Yamazaki ,  Hironobu Shoji ,  Shinji Maekawa ,  Osamu Nakamura ,  Tatsuya Honda ,  Gen Fujii ,  Yukie Suzuki ,  Ikuko Kawamata

发明人： Shunpei Yamazaki ,  Hironobu Shoji ,  Shinji Maekawa ,  Osamu Nakamura ,  Tatsuya Honda ,  Gen Fujii ,  Yukie Suzuki ,  Ikuko Kawamata

IPC分类号： H01L29/04

CPC分类号： H01L21/02667 ,  G02F1/1368 ,  G02F2202/104 ,  H01L21/2022 ,  H01L21/2026 ,  H01L27/124 ,  H01L27/1277 ,  H01L27/1292 ,  H01L27/3246 ,  H01L27/3248 ,  H01L27/3262 ,  H01L27/3276 ,  H01L51/56

摘要： A manufacturing method of a display device having TFTs capable of high-speed operation with few variations of threshold voltage is provided, in which materials are used with high efficiency and a small number of photomasks is required. The display device of the invention comprises a gate electrode layer and a pixel electrode layer formed over an insulating surface, a gate insulating layer formed over the gate electrode layer, a crystalline semiconductor layer formed over the gate insulating layer, a semiconductor layer having one conductivity type formed in contact with the crystalline semiconductor layer, a source electrode layer and a drain electrode layer formed in contact with the semiconductor layer having one conductivity type, an insulating later formed over the source electrode layer, the drain electrode layer, and the pixel electrode layer, a first opening formed in the insulating layer to reach the source electrode layer or the drain electrode layer, a second opening formed in the gate insulating layer and the insulating layer to reach the pixel electrode layer, and a wiring layer formed in the first opening and the second opening to electrically connect the source electrode layer or the drain electrode layer to the pixel electrode layer.

公开(公告)号：US08518760B2

公开(公告)日：2013-08-27

申请号：US13050117

申请日：2011-03-17

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L21/84

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US08322847B2

公开(公告)日：2012-12-04

申请号：US13049078

申请日：2011-03-16

申请人： Shunpei Yamazaki ,  Jun Koyama ,  Yasuyuki Arai ,  Shinji Maekawa ,  Yohei Kanno

发明人： Shunpei Yamazaki ,  Jun Koyama ,  Yasuyuki Arai ,  Shinji Maekawa ,  Yohei Kanno

IPC分类号： B41J2/01 ,  B05B7/06 ,  H01L21/36

CPC分类号： H01L51/0004 ,  H01L51/56 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/1241

摘要： When using a liquid droplet ejection method, a conventional photomask is not required, however, it is required instead that a moving path of a nozzle or a substrate is controlled with accuracy at least in ejecting liquid droplets. According to the characteristics of compositions to be ejected or their pattern, such ejection conditions are desirably set as the moving rate of a nozzle or a substrate, ejection quantity, ejection distance and ejection rate of compositions, atmosphere of the space that the compositions are ejected, the temperature and moisture of the space, and heating temperature of the substrate. A liquid droplet ejection system in accordance with the invention comprises an input means for inputting data of a thin film pattern, a set means for setting a nozzle for a ejecting a composition containing a material for forming the thin film or setting a moving path of the substrate to which the composition is ejected, an image pick-up means for detecting an alignment marker formed on a substrate and a control means for controlling the moving path of the nozzle or the substrate.

摘要翻译： 当使用液滴喷射方法时，不需要常规的光掩模，然而，需要至少在喷射液滴时精确地控制喷嘴或基板的移动路径。 根据要喷射的组合物或其图案的特征，这种喷射条件期望设置为喷嘴或基底的移动速率，喷射量，喷射距离和组合物的喷射速率，组合物喷出的空间的气氛 ，空间的温度和湿度，以及基板的加热温度。 根据本发明的液滴喷射系统包括用于输入薄膜图案的数据的输入装置，用于设置用于喷射包含用于形成薄膜的材料的组合物的喷嘴的设定装置或设置该薄膜图案的移动路径 用于检测形成在基板上的取向标记的图像拾取装置和用于控制喷嘴或基板的移动路径的控制装置。

公开(公告)号：US08228453B2

公开(公告)日：2012-07-24

申请号：US12984627

申请日：2011-01-05

申请人： Shunpei Yamazaki ,  Shinji Maekawa ,  Yohei Kanno

发明人： Shunpei Yamazaki ,  Shinji Maekawa ,  Yohei Kanno

IPC分类号： G02F1/1368

CPC分类号： H01L21/288 ,  H01L21/28008 ,  H01L21/76838 ,  H01L27/1292 ,  H01L29/66765 ,  H01L29/78669 ,  H01L29/78678 ,  H01L2224/73265

摘要： As a wiring becomes thicker, discontinuity of an insulating film covering the wiring has become a problem. It is difficult to form a wiring with width thin enough for a thin film transistor used for a current high definition display device. As a wiring is made thinner, signal delay due to wiring resistance has become a problem. In view of the above problems, the invention provides a structure in which a conductive film is formed in a hole of an insulating film, and the surfaces of the conductive film and the insulating film are flat. As a result, discontinuity of thin films covering a conductive film and an insulating film can be prevented. A wiring can be made thinner by controlling the width of the hole. Further, a wiring can be made thicker by controlling the depth of the hole.

摘要翻译： 随着布线变厚，覆盖布线的绝缘膜的不连续性成为问题。 对于用于当前的高分辨率显示装置的薄膜晶体管，难以形成宽度足够薄的布线。 由于布线变薄，由于布线电阻引起的信号延迟已经成为问题。 鉴于上述问题，本发明提供一种在绝缘膜的孔中形成导电膜，并且导电膜和绝缘膜的表面平坦的结构。 结果，可以防止覆盖导电膜和绝缘膜的薄膜的不连续性。 通过控制孔的宽度可以使布线更薄。 此外，通过控制孔的深度，可以使布线变厚。

公开(公告)号：US07964452B2

公开(公告)日：2011-06-21

申请号：US12857809

申请日：2010-08-17

申请人： Shunpei Yamazaki ,  Shinji Maekawa ,  Gen Fujii ,  Hideaki Kuwabara

发明人： Shunpei Yamazaki ,  Shinji Maekawa ,  Gen Fujii ,  Hideaki Kuwabara

IPC分类号： H01L21/84

CPC分类号： G02F1/13458 ,  G02F1/136227 ,  G02F1/136286 ,  G02F2001/13415 ,  G02F2001/136295 ,  H01L27/1292

摘要： As a substrate gets larger, time of manufacture is increased due to the repetition of film formations and etchings; waste disposal costs of etchant and the like are increased; and material efficiency is significantly reduced. A base film for improving adhesion between a substrate and a material layer formed by a droplet discharge method is formed in the invention. Further, a manufacturing method of a liquid crystal display device according to the invention includes at least one step for forming the following patterns required for manufacturing a liquid crystal display device without using a photomask: a pattern of a material layer typified by a wiring (or an electrode) pattern, an insulating layer pattern; or a mask pattern for forming another pattern.

摘要翻译： 由于重复膜形成和蚀刻，衬底越来越大，制造时间增加; 蚀刻剂等的废物处理成本增加; 材料效率显着降低。 在本发明中形成了用于改善基板和通过液滴喷射方法形成的材料层之间的粘附性的基膜。 此外，根据本发明的液晶显示装置的制造方法包括至少一个步骤，用于形成在不使用光掩模的情况下制造液晶显示装置所需的以下图案：以布线为代表的材料层的图案（或 电极）图案，绝缘层图案; 或用于形成另一图案的掩模图案。

公开(公告)号：US07939888B2

公开(公告)日：2011-05-10

申请号：US11857729

申请日：2007-09-19

申请人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Osamu Nakamura ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： H01L27/01 ,  H01L27/12 ,  H01L31/0392

CPC分类号： H01L51/0022 ,  G09G3/3208 ,  G09G3/3225 ,  G09G2300/0842 ,  G09G2300/0861 ,  G09G2310/0251 ,  H01L27/1285 ,  H01L27/1292 ,  H01L27/3244 ,  H01L51/055 ,  H01L51/529

摘要： The invention provides a display device and a method for manufacturing thereof by increasing a material efficiently as well as simplifying steps. Also, the invention provides a technique for forming a pattern such as a wiring, that is used for forming a display device, to have a predetermined shape with an excellent controllability. The method for manufacturing a display device includes the steps of: forming a lyophobic region; selectively irradiating laser beam in the lyophobic region to form a lyophilic region; selectively discharging a composition, that contains a conductive material, in the lyophilic region to form a gate electrode layer; forming a gate insulating layer and a semiconductor layer over the gate electrode layer; discharging a composition containing a conductive material over the semiconductor layer to form a source electrode layer and a drain electrode layer; and forming a pixel electrode layer on the source or drain electrode layer.

摘要翻译： 本发明提供一种显示装置及其制造方法，其通过有效地增加材料以及简化步骤来制造。 此外，本发明提供了一种用于形成用于形成显示装置的布线等图案以具有优异的可控性的预定形状的技术。 制造显示装置的方法包括以下步骤：形成疏液区域; 选择性地将激光束照射在疏液区域以形成亲液性区域; 选择性地将含有导电材料的组合物在亲液区域中排出以形成栅极电极层; 在栅电极层上形成栅极绝缘层和半导体层; 在半导体层上排出含有导电材料的组合物，以形成源电极层和漏电极层; 以及在源极或漏极电极层上形成像素电极层。

公开(公告)号：US07709843B2

公开(公告)日：2010-05-04

申请号：US10574880

申请日：2004-10-25

申请人： Shunpei Yamazaki ,  Shinji Maekawa ,  Makoto Furuno ,  Osamu Nakamura ,  Keitaro Imai

发明人： Shunpei Yamazaki ,  Shinji Maekawa ,  Makoto Furuno ,  Osamu Nakamura ,  Keitaro Imai

IPC分类号： H01L29/786

CPC分类号： H01L27/12 ,  H01L27/1292 ,  H01L27/3276 ,  H01L29/66757 ,  H01L29/66765 ,  H01L51/56

摘要： According to the present invention, which is a display device in which a light-emitting element where an organic substance generating luminescence referred to as electroluminescence or a medium including a mixture of an organic substance and an inorganic substance is sandwiched between electrodes is connected to a TFT, the invention is to manufacture a display panel by forming at least one or more of a conductive layer which forms a wiring or an electrode and a pattern necessary for manufacturing a display panel such as a mask layer for forming a predetermined pattern is formed by a method capable of selectively forming a pattern. A droplet discharge method capable of forming a predetermined pattern by selectively discharging a droplet of a composition in accordance with a particular object and by forming a conductive layer or an insulating layer is used as a method capable of selectively forming a pattern.

摘要翻译： 根据本发明，其中将发出被称为电致发光的有机物质的发光元件或包含有机物和无机物的混合物的介质夹在电极之间的发光元件连接到 TFT，本发明通过形成至少一个或多个形成布线或电极的导电层以及用于制造用于形成预定图案的掩模层等显示面板所需的图案来制造显示面板，由 能够选择性地形成图案的方法。 使用能够通过选择性地排出根据特定目的的组合物的液滴并且通过形成导电层或绝缘层来形成预定图案的液滴喷射方法作为能够选择性地形成图案的方法。

公开(公告)号：US07499117B2

公开(公告)日：2009-03-03

申请号：US10577058

申请日：2004-11-05

申请人： Shinji Maekawa ,  Shunpei Yamazaki ,  Hideaki Kuwabara ,  Yoshitaka Moriya

发明人： Shinji Maekawa ,  Shunpei Yamazaki ,  Hideaki Kuwabara ,  Yoshitaka Moriya

IPC分类号： G02F1/136

CPC分类号： G02F1/1368 ,  H01L2224/16225 ,  H01L2224/32225 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48464 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2924/181 ,  H01L2924/00014 ,  H01L2924/00012 ,  H01L2924/00

摘要： By using one photo mask in the manufacturing steps of a liquid crystal display device, steps such as resist coating, prebaking, exposure, development, and postbaking, as well as the formation of a covering film, etching, resist peeling, rinsing, drying and the like before and after the aforementioned steps are required, which make the process complicated. To solve the problem, a channel-etch type bottom gate TFT (inverted staggered TFT) is employed to pattern source and drain regions and a pixel electrode with the same mask. Moreover, according to the invention, among the patterns required to form a liquid crystal display device such as a conductive layer for a wiring layer or an electrode, a mask for forming a predetermined pattern and the like, at least one or more of them is formed by a method by which a pattern can selectively be formed, thereby manufacturing a liquid crystal display device.

摘要翻译： 通过在液晶显示装置的制造步骤中使用一个光掩模，诸如抗蚀涂层，预烘烤，曝光，显影和后烘烤之类的步骤，以及形成覆盖膜，蚀刻，抗蚀剂剥离，漂洗，干燥和 需要上述步骤之前和之后，这使得该过程变得复杂。 为了解决这个问题，采用沟道蚀刻型底栅TFT（反交错TFT）来对源极和漏极区域以及具有相同掩模的像素电极进行图案化。 此外，根据本发明，形成布线层或电极用导电层等液晶显示装置所需的图案，形成规定图案的掩模等，其中至少一个或多个是 通过可以选择性地形成图案的方法形成，从而制造液晶显示装置。

公开(公告)号：US07365805B2

公开(公告)日：2008-04-29

申请号：US11038212

申请日：2005-01-21

申请人： Shinji Maekawa ,  Shunpei Yamazaki ,  Hironobu Shoji

发明人： Shinji Maekawa ,  Shunpei Yamazaki ,  Hironobu Shoji

IPC分类号： H01L21/00 ,  H01L21/84

CPC分类号： H01L27/12 ,  H01L27/1285 ,  H01L27/1292

摘要： The present invention discloses a method for manufacturing a display device comprising the steps of forming a first film pattern using a photosensitive material over a substrate, forming a second film pattern in such a way that the first film pattern is exposed by being irradiated with a laser beam, modifying a surface of the second film pattern into a droplet-shedding surface, forming a source electrode and a drain electrode by discharging a conductive material to an outer edge of the droplet-shedding surface by a droplet-discharging method, and forming a semiconductor region, a gate-insulating film, and a gate electrode over the source electrode and the drain electrode.

摘要翻译： 本发明公开了一种制造显示装置的方法，包括以下步骤：使用感光材料在衬底上形成第一胶片图形，形成第二胶片图案，使第一胶片图案通过照射激光曝光 将第二膜图案的表面修改为液滴脱落表面，通过通过液滴喷射方法将导电材料排放到液滴脱落表面的外边缘来形成源电极和漏极，并形成 半导体区域，栅极绝缘膜和源电极和漏电极上的栅电极。

公开(公告)号：US20070085938A1

公开(公告)日：2007-04-19

申请号：US10578001

申请日：2004-11-29

申请人： Shunpei Yamazaki ,  Hideaki Kuwabara ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

发明人： Shunpei Yamazaki ,  Hideaki Kuwabara ,  Shinji Maekawa ,  Gen Fujii ,  Toshiyuki Isa

IPC分类号： G02F1/136 ,  H01L29/04 ,  H01L21/84 ,  H01L29/10 ,  H01L21/00 ,  H01L31/00

CPC分类号： H01L27/1292 ,  H01L27/12 ,  H01L27/124 ,  H01L27/3262

摘要： An object of the present invention is to provide a display device which can be manufactured with usability of a material improved and with a manufacturing step simplified and to provide a manufacturing technique thereof. One feature of a display device of the present invention is to comprise an insulating layer having an opening, a first conductive layer formed in the opening, and a second conductive layer formed over the insulating layer and the first conductive layer, wherein the first conductive layer is wider and thicker than the second conductive layer, and the second conductive layer is formed by spraying a droplet including a conductive material.

摘要翻译： 本发明的一个目的是提供一种显示装置，其能够改善材料的可用性并且简化制造步骤并提供其制造技术。 本发明的显示装置的一个特征是包括具有开口的绝缘层，形成在开口中的第一导电层和形成在绝缘层和第一导电层上的第二导电层，其中第一导电层 比第二导电层宽且厚，并且通过喷射包括导电材料的液滴形成第二导电层。