摘要:
An MISFET type semiconductor sensor, which can avoid deterioration of characteristics, and a method for fabricating same are disclosed. Silicon oxide films and a silicon nitride film are formed on an upper surface of a p-type silicon substrate, and a movable portion is disposed above the silicon nitride film with a predetermined interval interposed therebetween. A movable gate electrode portion exists on a portion of the movable portion and is displaced by acceleration. Fixed electrodes (a source/drain portion) composed of an impurity diffusion layer are formed on the p-type silicon substrate, and a flowing current changes due to a change in a relative position with the movable gate electrode portion due to acceleration. Projections for movable-range restriction use are provided on a lower surface of the movable portion other than the movable gate electrode portion, and form a gap which is narrower than a gap between the p-type silicon substrate and movable gate electrode portion.
摘要:
A ring oscillator for circulating pulse edges of two types therein includes an even number of inverting circuits connected in a ring. Each of the inverting circuits is operative to invert an input signal and output an inversion of the input signal. One of the inverting circuits is a first start inverting circuit which starts an operation of inverting an input signal in response to a first control signal applied from an external input. One of the inverting circuits except the first start inverting circuit and an inverting circuit immediately following the first start inverting circuit is a second start inverting circuit which starts an operation of inverting an input signal in response to a second control signal. A control signal inputting arrangement serves to input the second control signal to the second start inverting circuit during an interval from a first moment at which the first control signal is input into the first start inverting circuit and the first start inverting circuit starts the inverting operation to a second moment at which a pulse edge initially generated by the start of the inverting operation of the first start inverting circuit and travelling while being sequentially inverted by the inverting circuits enters the second start inverting circuit.
摘要:
A magnetic detecting circuit has a magneto resistance element which converts a change of magnetism detected into a signal. A plurality of these magneto resistive elements are provided on a plane, and are oriented on the plane in two opposite directions having angles, relative to a bias direction, having substantially equal absolute values. The placement in opposite directions allows the resistance values from the elements to change in approximately the same direction as the object moves, to allow a monotonic change in the bias magnetic field. The change of the bias magnetic field can be detected from the change of resistance values of the magneto resistive elements.
摘要:
A device for detecting pressure of a high temperature pressurized fluid. A sensing element having a diaphragm adjacent to one end and a lead wire outlet adjacent to another end in the longitudinal direction of a rectangular parallelopiped configuration of the sensing element including the diaphragm. Thus, the lead wire outlet is a predetermined distance from the diaphragm heated by high temperature fluid. This prevents the lead wire outlet and the other electrical assemblies from suffering deterioration or misoperation caused by high temperature. The reliability of the pressure detecting device can be improved.
摘要:
A toner supply device for supplying toner to a developing device includes: a first toner supply portion for supplying toner to a developing hopper; a second toner supply portion for supplying the stored toner to the first toner supply portion; a first toner supply driver for driving the first toner supply portion; a first residual toner quantity detector for detecting the residual toner quantity in the first toner supply portion; a second toner supply driver for driving the second toner supply portion; a second residual toner quantity detector for detecting the residual toner quantity in the second toner supply portion; and a controller for controlling the drives of the first and second toner supply drivers by switching on and off the drives of the first and second toner supply drivers in accordance with the residual toner quantities detected by the first and second residual toner quantity detectors.
摘要:
A depression is formed on the surface of a lower magnetic pole layer in a thin film magnetic head. A lower auxiliary magnetic pole is defined in the lower magnetic pole layer between the depression and a medium-opposed surface of a head slider. The depression is filled up with a non-magnetic material. When the thin film magnetic head is to be formed, no magnetic layer is formed on the lower magnetic pole layer for forming the lower auxiliary magnetic pole. A dry process such as sputtering and vapor-deposition can be employed to form the lower magnetic pole layer, so that a wider choice can be provided for the material of the lower magnetic pole layer and the lower auxiliary magnetic pole.
摘要:
A depression is formed on the surface of a lower magnetic pole layer in a thin film magnetic head. A lower auxiliary magnetic pole is defined in the lower magnetic pole layer between the depression and a medium-opposed surface of a head slider. The depression is filled up with a non-magnetic material. When the thin film magnetic head is to be formed, no magnetic layer is formed on the lower magnetic pole layer for forming the lower auxiliary magnetic pole. A dry process such as sputtering and vapor-deposition can be employed to form the lower magnetic pole layer, so that a wider choice can be provided for the material of the lower magnetic pole layer and the lower auxiliary magnetic pole.
摘要:
A soft magnetic film comprising Fe, Co, a metallic element (M), and oxygen (O) is provided. The soft magnetic film is represented by a composition formula of (Fe1-aCoa)xMyOz. The metallic element (M) is one selected from a group consisting of Al, B, Ga, Si, Ge, Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Rh, Ru, Ni, Pd and Pt, or is an alloy composed of at least two selected from this group. The composition formula fulfills the following conditions: a=0.05-0.65; y=0.2-9 at %, z=1-12 at %, and y+z=
摘要翻译:提供了包含Fe,Co,金属元素(M)和氧(O)的软磁性膜。 软磁性膜由(Fe1-aCoa)xMyOz的组成式表示。 金属元素(M)是选自Al,B,Ga,Si,Ge,Y,Ti,Zr,Hf,V,Nb,Ta,Cr,Mo,W,Rh,Ru,Ni, Pd和Pt,或由选自该组的至少两种组成的合金。 组成式满足以下条件:a = 0.05-0.65; y = 0.2-9at%,z = 1-12at%,y + z = <15at%; x =(100-y-z)at%。 以bcc相为主相,形成晶体结构。 bcc相的晶粒直径不超过50nm。 bcc相包括金属元素(M)和氧(O)的固溶体。
摘要:
A semiconductor sensor having a thin-film structure body, in which thin-film structure is prevented from bending due to the internal stress distribution in the thickness direction, is disclosed. A silicon-oxide film is formed as a sacrificial layer on a silicon substrate, and a polycrystalline-silicon thin film is formed on the silicon-oxide film. Thereafter, phosphorus (P) is ion-implanted in the surface of the polycrystalline-silicon thin film, and thereby the surface state of the polycrystalline-silicon thin film is modified. A portion of distribution of stress existing in the thickness direction of the polycrystalline-silicon thin film is changed by this modification, and stress distribution is adjusted. By removal of the silicon-oxide film, a movable member of the polycrystalline-silicon thin film is disposed above the silicon substrate with a gap interposed therebetween.
摘要:
An acceleration sensor is constructed by a substrate, a cylindrical dead-weight movable electrode to be displaced by acceleration, a fixed electrode from the inside of which a cylinder is hollowed, a cylindrical anchor arranged on the substrate for supporting the dead-weight movable electrode with elastic transformable structural material and beams. When acceleration is applied from the outside, the cylindrical detecting face of the dead-weight movable electrode and the cylindrical detected face of the fixed electrode are in contact on a two-dimensional plane parallel to the substrate and the acceleration sensor detects the contact. A radial interval between the detecting face of the dead-weight movable electrode and the detected face of the fixed electrode is set in view of the elastic modulus of the beams so that external force can be detected isotropically and the acceleration sensor detects acceleration on a two-dimensional plane nondirectionally.