公开(公告)号：US20070171557A1

公开(公告)日：2007-07-26

申请号：US11716616

申请日：2007-03-12

申请人： Takeshi Shimano ,  Masatoshi Kanamaru ,  Masaya Horino

发明人： Takeshi Shimano ,  Masatoshi Kanamaru ,  Masaya Horino

IPC分类号： G02B5/08

CPC分类号： G11B7/08576 ,  G11B7/123 ,  G11B7/1374

摘要： A method of manufacturing an optical head includes joining of a first substrate on which a plurality of lenses are formed in an array, a second substrate on which a plurality of prisms and mirrors are formed in an array, and a third substrate on which a plurality of detectors and light sources are formed in an array, after positioning of the individual substrates, and cutting the joined substrates along the rows and columns of the array.

摘要翻译： 一种光学头的制造方法包括以阵列形式形成有多个透镜的第一基板与其上形成有多个棱镜和反射镜的第二基板的接合，在该第二基板上形成有多个透镜 检测器和光源在定位各个基板之后以阵列形成，并且沿阵列的行和列切割连接的基板。

公开(公告)号：US07795597B2

公开(公告)日：2010-09-14

申请号：US11779498

申请日：2007-07-18

申请人： Kenichi Nagae ,  Masatoshi Kanamaru

发明人： Kenichi Nagae ,  Masatoshi Kanamaru

IPC分类号： G21K1/087

CPC分类号： H01J37/1477 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/30 ,  H01J37/3174 ,  H01J2237/0437 ,  H01J2237/1518

摘要： A deflector array in which a plurality of deflectors, which deflect charged particle beams, are arrayed on a substrate. The plurality of deflectors include respective openings different from each other formed on the substrate. Each of the plurality of deflectors includes a pair of electrodes opposing each other through a corresponding opening, and the plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors which are located nearest to each other.

摘要翻译： 偏转器阵列，其中偏转带电粒子束的多个偏转器排列在基板上。 多个偏转器包括形成在基板上的彼此不同的开口。 多个偏转器中的每一个包括通过相应的开口彼此相对的一对电极，并且多个偏转器被排列成使得该对电极在其纵向方向上的长度不小于两个中心之间的距离 的多个偏转器彼此最靠近。

公开(公告)号：US07457206B2

公开(公告)日：2008-11-25

申请号：US11211438

申请日：2005-08-26

申请人： Takeshi Shimano ,  Masatoshi Kanamaru ,  Masaya Horino

发明人： Takeshi Shimano ,  Masatoshi Kanamaru ,  Masaya Horino

IPC分类号： G11B7/00

CPC分类号： G11B7/08576 ,  G11B7/123 ,  G11B7/1374

摘要： In an optical head, if a lens is reduced in size so that it can be integrated with a light source and a photodetector, other optical components as well as the lens must be reduced in size, which would result in greater difficulties in handling for assembly and adjustment purposes. The invention allows large quantities of ultra-small optical heads to be produced accurately and at low cost, the optical heads being easy to adjust and not requiring the handling of minute components for adjustment purposes. A first substrate includes lenses for focusing light on an information storage medium, a second substrate includes detectors and disposed on the surface thereof, and a layer, which is disposed between the first and second substrates, includes prisms and mirrors. The layer also includes cavities in which light sources are disposed. The individual substrates are formed in the form of wafers with the lenses, mirrors, prisms, light sources, and photodetectors disposed thereon.

摘要翻译： 在光学头中，如果透镜的尺寸减小以使其能够与光源和光电检测器集成，则其它光学部件以及透镜的尺寸必须减小，这将导致更大的装配难度 和调整目的。 本发明允许以低成本准确地，低成本地制造大量的超小型光学头，光学头易于调节，并且不需要处理用于调整目的的微小部件。 第一基板包括用于将光聚焦在信息存储介质上的透镜，第二基板包括检测器并设置在其表面上，并且布置在第一和第二基板之间的层包括棱镜和反射镜。 该层还包括其中设置有光源的空腔。 各个基板以晶片的形式形成，其上设置有透镜，反射镜，棱镜，光源和光电探测器。

公开(公告)号：US20060193214A1

公开(公告)日：2006-08-31

申请号：US11211438

申请日：2005-08-26

申请人： Takeshi Shimano ,  Masatoshi Kanamaru ,  Masaya Horino

发明人： Takeshi Shimano ,  Masatoshi Kanamaru ,  Masaya Horino

IPC分类号： G11B7/00

CPC分类号： G11B7/08576 ,  G11B7/123 ,  G11B7/1374

摘要： In an optical head, if a lens is reduced in size so that it can be integrated with a light source and a photodetector, other optical components as well as the lens must be reduced in size, which would result in greater difficulties in handling for assembly and adjustment purposes. The invention allows large quantities of ultra-small optical heads to be produced accurately and at low cost, the optical heads being easy to adjust and not requiring the handling of minute components for adjustment purposes. A first substrate includes lenses for focusing light on an information storage medium, a second substrate includes detectors and disposed on the surface thereof, and a layer, which is disposed between the first and second substrates, includes prisms and mirrors. The layer also includes cavities in which light sources are disposed. The individual substrates are formed in the form of wafers with the lenses, mirrors, prisms, light sources, and photodetectors disposed thereon.

摘要翻译： 在光学头中，如果透镜的尺寸减小以使其能够与光源和光电检测器集成，则其它光学部件以及透镜的尺寸必须减小，这将导致更大的装配难度 和调整目的。 本发明允许以低成本准确地，低成本地制造大量的超小型光学头，光学头易于调节，并且不需要处理用于调整目的的微小部件。 第一基板包括用于将光聚焦在信息存储介质上的透镜，第二基板包括检测器并设置在其表面上，并且布置在第一和第二基板之间的层包括棱镜和反射镜。 该层还包括其中设置有光源的空腔。 各个基板以晶片的形式形成，其上设置有透镜，反射镜，棱镜，光源和光电探测器。

公开(公告)号：US06864695B2

公开(公告)日：2005-03-08

申请号：US09925375

申请日：2001-08-10

申请人： Ryuji Kohno ,  Hideo Miura ,  Masatoshi Kanamaru ,  Hiroya Shimizu ,  Naoto Ban

发明人： Ryuji Kohno ,  Hideo Miura ,  Masatoshi Kanamaru ,  Hiroya Shimizu ,  Naoto Ban

IPC分类号： G01R1/073 ,  G01R3/00 ,  G01R31/28 ,  H01L21/66 ,  G01R31/02

CPC分类号： G01R3/00 ,  G01R1/07357

摘要： Since each wiring line is formed on one surface of the associated beam at a prescribed width over the entire length of the beam, the beam has the same sectional shape taken in the width direction at any point along an arbitrary longitudinal direction of the beam. As a result, the second moment of area, which is determined by the shapes of the beam and the wiring line, is uniform. This prevents a problem of the curvature of a beam varying locally when the beam is bent by a prescribed amount due to contact of the probe with a pad of a subject body. This, in turn, prevents local concentration of stress in the beams and thereby prevents breakage of the beam. Therefore, the probe structure can be miniaturized while the strength of the beams is kept at a required level, whereby a semiconductor device testing apparatus capable of accommodating many probes can be realized.

摘要翻译： 由于每个布线在波束的整个长度上以规定的宽度形成在相关联的光束的一个表面上，所以光束在沿着光束的任意纵向方向的任何点处具有在宽度方向上取下的截面形状。 结果，由光束和布线的形状确定的面积的第二时刻是均匀的。 这防止了当由于探针与被检体的垫接触而使光束弯曲预定量时局部变化的光束曲率的问题。 这反过来又防止梁中的局部应力集中，从而防止梁的断裂。 因此，能够将光束的强度保持在所要求的水平，能够使探头结构小型化，能够实现容纳多个探针的半导体装置的测试装置。

公开(公告)号：US06290908B1

公开(公告)日：2001-09-18

申请号：US09281098

申请日：1999-03-29

申请人： Masao Fukunaga ,  Tamio Ishihara ,  Koji Saito ,  Katsutoshi Yamada ,  Hideo Enoki ,  Sadao Mori ,  Ryo Miyake ,  Takao Terayama ,  Masatoshi Kanamaru

发明人： Masao Fukunaga ,  Tamio Ishihara ,  Koji Saito ,  Katsutoshi Yamada ,  Hideo Enoki ,  Sadao Mori ,  Ryo Miyake ,  Takao Terayama ,  Masatoshi Kanamaru

IPC分类号： G01N1500

CPC分类号： C02F1/008 ,  C02F2103/02 ,  C02F2201/008 ,  C02F2201/009 ,  C02F2209/11 ,  C02F2209/29 ,  C02F2209/40 ,  G01N33/1893 ,  Y02A20/212

摘要： A water quality meter is composed of a plurality of analyzing units for analyzing water samples introduced from a water distribution pipe, each analyzing unit including a reagent mixing cell and a measuring cell, and a liquid introducing unit integrated with the analyzing units, which is composed of a single member in which a plurality of fluid flow paths for feeding various types of liquid including the water sample into the analyzing unit are formed. Furthermore, the cells and the plurality of three-dimensional fluid flow paths formed in the single member are fabricated by a micro-fabrication technique using photo-curing resin.

摘要翻译： 水质计由多个用于分析从配水管引入的水样的分析单元构成，每个分析单元包括试剂混合室和测量池，以及与分析单元一体化的液体导入单元，其组成 其中形成有用于将包括水样本的各种类型的液体供给到分析单元中的多个流体流路的单个构件。 此外，通过使用光固化树脂的微制造技术来制造在单个构件中形成的电池和多个三维流体流动路径。

公开(公告)号：US5163209A

公开(公告)日：1992-11-17

申请号：US510875

申请日：1990-04-18

申请人： Takeshi Harada ,  Masatoshi Kanamaru ,  Akiomi Kohno ,  Shigeru Jomura

发明人： Takeshi Harada ,  Masatoshi Kanamaru ,  Akiomi Kohno ,  Shigeru Jomura

IPC分类号： H01L41/047 ,  H01L41/083 ,  H01L41/297

CPC分类号： H01L41/297 ,  H01L41/0477 ,  H01L41/083 ,  Y10T29/42

摘要： In an overall stacked piezoelectric element, the material for the electrode was selected from aluminum, nickel and copper each alone or alloys based on aluminum, nickel or copper, and further the parts of the electrode which contact with molding resin on the side face of the stacked body and the parts which have to be insulated from the lead-out terminals were subjected to an oxidation or nitriding treatment. As the result, an improved element was obtained which is of a high reliability, suited to low voltage operation and suffers no short-circuit of the electrode even when water permeates to the side face of the stacked body during operation in humid atmosphere.

公开(公告)号：US09249011B2

公开(公告)日：2016-02-02

申请号：US14378102

申请日：2012-03-30

申请人： Masatoshi Kanamaru ,  Takanori Aono ,  Kengo Suzuki

发明人： Masatoshi Kanamaru ,  Takanori Aono ,  Kengo Suzuki

IPC分类号： H01L23/02 ,  H01L23/053 ,  B81B7/00 ,  B81C1/00

CPC分类号： B81B7/007 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0353 ,  B81B2203/0384 ,  B81B2207/095 ,  B81C1/00103 ,  B81C1/00595

摘要： There are provided a process for fabricating MEMS device that includes a plurality of through-holes capable being arranged at a high density, the through-holes having a tapered end portion. Through-holes having vertical side surfaces and tapered bottoms are provided by a processing method including the steps of: disposing quadrilateral patterning having desired dimensions on a silicon substrate having a flat surface of a crystal plane, etching the substrate to a desired depth by dry etching that can realize a high aspect ratio etching, and anisotropic wet etching the dry etched substrate with a KOH aqueous solution containing isopropyl alcohol mixed thereinto.

摘要翻译： 提供了一种用于制造MEMS器件的方法，该器件包括能够以高密度布置的多个通孔，该通孔具有锥形端部。 通过一种处理方法提供具有垂直侧面和锥形底部的通孔，该方法包括以下步骤：将具有期望尺寸的四边形图案设置在具有平坦表面平面的硅衬底上，通过干蚀刻将衬底蚀刻到所需深度 可以实现高纵横比蚀刻，并且用含有异丙醇的KOH水溶液进行各向异性湿蚀刻干蚀刻基板。

公开(公告)号：US20100248166A1

公开(公告)日：2010-09-30

申请号：US12815507

申请日：2010-06-15

申请人： Kenichi Nagae ,  Masatoshi Kanamaru

发明人： Kenichi Nagae ,  Masatoshi Kanamaru

IPC分类号： H01J37/147 ,  H01J37/30 ,  G03F7/20

CPC分类号： H01J37/1477 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/30 ,  H01J37/3174 ,  H01J2237/0437 ,  H01J2237/1518

摘要： A deflector array includes a plurality of deflectors, which deflect charged particle beams, arrayed on a substrate. Each of the plurality of deflectors includes a single opening formed in the substrate, and each of the plurality of deflectors includes a pair of electrodes that oppose each other through the opening and are configured to deflect a single charged particle beam. The plurality of deflectors are arrayed such that a length of the pair of electrodes in a longitudinal direction thereof is not less than a distance between centers of two of the plurality of deflectors that are located nearest to each other. The plurality of deflectors is arrayed to form a checkerboard lattice, and two openings of the two of the plurality of deflectors overlap in the longitudinal direction.

摘要翻译： 偏转器阵列包括多个偏转器，其偏转排列在基板上的带电粒子束。 多个偏转器中的每一个包括形成在基板中的单个开口，并且多个偏转器中的每一个包括通过开口彼此相对的一对电极，并且被配置为偏转单个带电粒子束。 多个偏转器被排列成使得一对电极在其纵向方向上的长度不小于彼此最靠近的多个偏转器中的两个偏转器的中心之间的距离。 排列多个偏转器以形成棋盘格格，并且多个偏转器中的两个的两个开口在纵向方向上重叠。

公开(公告)号：US20080043481A1

公开(公告)日：2008-02-21

申请号：US10589983

申请日：2004-02-25

申请人： Shingo Yokoyama ,  Masatoshi Kanamaru ,  Masaya Horino ,  Tatsuhiko Monji ,  Ken Ohsumi

发明人： Shingo Yokoyama ,  Masatoshi Kanamaru ,  Masaya Horino ,  Tatsuhiko Monji ,  Ken Ohsumi

IPC分类号： B60Q1/04 ,  F21V7/00

CPC分类号： G02B26/085 ,  F21S41/675

摘要： A vehicle headlight having a light source to emit light and a reflector for illuminating forward the light emitted from the light source, wherein the reflector is comprising a plurality of movable mirrors to be operated independently and optionally and a fixed mirror disposed outside these movable mirrors, whereby the light emitted from the light source to the movable mirrors are not blocked mutually so that a distribution of light illuminated from the vehicle headlight is minutely and quickly controlled.

摘要翻译： 具有用于发光的光源的车辆头灯和用于向前照射从所述光源发出的光的反射器，其中所述反射器包括独立地操作的多个可移动镜和可选地以及设置在所述可动镜外部的固定镜， 从而从光源发射到可动反射镜的光不被相互阻挡，使得从车辆前灯照射的光的分布被微小和快速地控制。