摘要:
The object of the present invention is to provide a chemically amplified resist composition excellent in a resolution and a mask error enhancement factor.By employing the salt represented by the formulae (A1) as an acid generator of a resist composition, the above mentioned object is achieved. wherein Z+ represents an organic cation, Q1 and Q2 each independently represent a fluorine atom or a perfluoroalkyl group, Ra2 represents a divalent alicyclic hydrocarbon group pr the like, Ra2 represents an elimination group represented by the formulae (II-1) or (II-2). In the formulae (II-1) or (II-2), Ra3 and Ra4 each independently represent a hydrogen atom or an aliphatic hydrocarbon group, Ra5 represents an aliphatic hydrocarbon group, Ra6 represents a divalent aliphatic hydrocarbon group, and Ra7 represents an aliphatic hydrocarbon group.
摘要:
The present invention provides a salt represented by the formula (I): wherein P1, P2, P3, Q1, Q2 and R are defined in the specification and the present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).
摘要:
An extended area uniform light source providing uniform luminance is taught for displays and other applications where the light emission can be planar or have curvature. The uniform light source is achieved using a combination of a blue light-emitting electroluminescent layer and a highly stable inorganic photoluminescent colour conversion layer to tailor the colour spectrum of the emitted light. The invention thus encompasses the uniform light source, displays incorporating the uniform light sources as well of methods of making such light sources and displays.
摘要:
A salt represented by the formula (I): wherein X represents a C1-C12 divalent linear or branched chain hydrocarbon group, Y represents a C1-C30 hydrocarbon group which may be substituted with at least one substituent, and at least one —CH2— in the C1-C30 hydrocarbon group may be substituted with —O— or —CO—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents an organic counter ion. The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).
摘要:
The present invention provides a salt of the formula (I): wherein ring X represents monocyclic or bicyclic hydrocarbon group having 3 to 30 carbon atoms, and one or more hydrogen atom in the ring X is optionally substituted with alkyl group having 1 to 6 carbon atoms, alkenyl group having 2 to 6 carbon atoms, alkoxy group having 2 to 6 carbon atoms or perfluoroalkyl group having 1 to 4 carbon atoms; Q1 and Q2 each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A+ represents organic counter ion; and n shows an integer of 1 to 12. The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
摘要翻译:本发明提供式(I)的盐:其中环X表示具有3-30个碳原子的单环或双环烃基,并且环X中的一个或多个氢原子任选被具有1至6个碳原子的烷基取代 碳原子数2〜6的烯基,碳原子数2〜6的烷氧基或碳原子数1〜4的全氟烷基; Q 1和Q 2各自独立地表示氟原子或具有1至6个碳原子的全氟烷基; A + SUP>代表有机抗衡离子; 并且n表示1至12的整数。本发明还提供包含式(I)的盐的化学放大抗蚀剂组合物。
摘要:
The present invention provides a resin which generates an acid by irradiation and is a salt of an organic cation and an anionic polymer wherein the anionic polymer has no carbon-carbon unsaturated bond. The present invention further provides a chemically amplified resist composition comprising the same.
摘要:
A thin film phosphor for an electroluminescent device, the phosphor being selected from the group consisting of thioaluminates, thiogallates and thioindates having at least one cation selected from elements of Groups IIA and IIB of the Periodic Table of Elements. The phosphor being activated by a rare earth metal and containing oxygen as a partial substitute for a portion of the sulphur in the crystal lattice of the thiogallate, thioindate or thioaluminate. The phosphor is a single phase homogeneous compound and provides improved luminance stability. An electroluminescent device comprising the thin film phosphor is also described and methods of making the phosphor of the invention.
摘要:
A thin film phosphor for an electroluminescent device, the phosphor being selected from the group consisting of thioaluminates, thiogallates and thioindates having at least one cation selected from elements of Groups IIA and IIB of the Periodic Table of Elements. The phosphor being activated by a rare earth metal and containing oxygen as a partial substitute for a portion of the sulphur in the crystal lattice of the thiogallate, thioindate or thioaluminate. The phosphor is a single phase homogeneous compound and provides improved luminance stability. An electroluminescent device comprising the thin film phosphor is also described and methods of making the phosphor of the invention.
摘要:
An endless track includes an iron link belt, a continuous pad, and a connecting device. The iron link belt includes a link unit assembly constructed of a plurality of link units connected to each other. Each link unit includes a pair of links. The iron link belt may include a plate welded to the pair of links and extending perpendicularly to a direction in which the link unit assembly extends. The continuous pad includes the same number of core metal plates as that of the link units, and a single rubber belt covering and being vulcanization-adhered to a ground opposing surface of each of the core metal plates. The rubber belt extends continuously over all of the core metal plates. The rubber belt may include a small thickness portion positioned between two adjacent core metal plates. The connecting device connects the iron link belt and the continuous pad.
摘要:
A power transmission belt comprising: a body comprising rubber comprising an ethylene-&agr;-olefin elastomer and N,N′-m-phenylene dimaleimide added in an amount of 0.2-10 parts by weight per 100 parts by weight of ethylene-&agr;-olefin elastomer.