Abstract:
Provided are a semiconductor device, adapted to be capable of fabricating the device having improved resistance characteristic by decreasing dishing of solid phase epitaxy (SPE) silicon during planarization in a landing plug forming process via use of SPE silicon, and a method of manufacturing the same. The method of manufacturing a semiconductor device in accordance with the present invention comprises, forming a plurality of gates on a semiconductor substrate; forming an interlayer dielectric film thereon, such that the gates are embedded; selectively etching the interlayer dielectric film to open a landing plug-forming region; depositing SPE silicon, such that the opened landing plug-forming region in the interlayer dielectric film is embedded; implanting boron ions into the SPE silicon; and annealing the resulting boron ion-implanted structure.
Abstract:
Liquid detection sensors are attached to both sides of a robotic arm end effector of a semiconductor wafer process system. The sensor mechanism or probe is situated on the front side and backside of the end effector, designed with electrical lines that are traced onto a polyester base material. The electrical lines are positioned in a serpentine formation. The high conductance of the sulfuric acid in the copper sulfate solution acts as the conductor between the traced lines. When the conductive liquid comes in contact with the traced lines, the lines short and the sensor activates or turns on.
Abstract:
Disclosed herein is a heat exchanger for use in an air conditioner. The heat exchanger is provided with a path switching unit at a tube that forms a refrigerant path. The path switching unit is used to switch the flow path of a refrigerant passing through the tube in accordance with a cooling or heating load, thereby regulating the flow rate of the refrigerant. The use of the path switching unit has the effect of achieving an effective control of cooling or heating capacity thereof based on an external load.
Abstract:
The present invention relates to a liquid crystal display, which comprises: a lower substrate having a reflective electrode; a lower alignment film formed on the lower substrate; an upper substrate having a color filter and disposed opposite to the lower substrate; an upper alignment film formed on the upper substrate; a liquid crystal layer sandwiched between the lower and upper substrates; a phase compensation film adhered on the outer surface of the upper substrate and serving to convert linearly polarized light into circularly polarized light; and a polarizer adhered on the phase compensation film and serving to convert natural light into linearly polarized light. The lower alignment film has an alignment angle of −10 to 20° with respect to a horizontal line, the upper alignment film has an alignment angle of 40 to 55° with respect to a horizontal line, the liquid crystal layer has a phase delay value (dΔn) of 0.24-0.27 μm, the phase compensation film has a phase compensation function of λ/4 and also has an optical axis making 140-146° with a horizontal line, and the polarizer has a absorption axis making 120 to 122.5° with a horizontal line. According to the present invention, the design of a liquid crystal cell can be optimized to provide a liquid crystal display having excellent display characteristics. Furthermore, cell gap can be increased to improve process margin.
Abstract:
Air conditioner including a case having air inlet and outlet passages therein perpendicular to each other, and a plurality of air inlet and outlets at ends of the air inlet and outlet passages, a regenerative heat exchanger at a cross point of the air inlet and outlet passages for making indirect heat exchange of the external air and room air flowing through the air inlet and outlet passages, a compressor, a flow path control valve for shifting, and guiding a flow path of refrigerant from the compressor proper to respective operation modes, first and second heat exchangers, an expansion device, a first fan in the air inlet passage for blowing external air into a room through the first heat exchanger, and a second fan in the air outlet passage for blowing the room air to an exterior through the second heat exchanger, thereby ventilating as well as heating or cooling the room at the same time.
Abstract:
Disclosed are photoresist cleaning solutions, which are used to clean semiconductor substrates before or after an exposing step when photoresist patterns are formed. Methods for forming patterns using the same are also disclosed. The cleaning solutions include H2O and a nonionic surfactant compound represented by Formula 1. By spraying the disclosed cleaning solutions on a surface of the semiconductor substrate before or after exposing step to form a photoresist pattern, the desired pattern only is obtained and unnecessary patterns generated in undesired regions by ghost images are avoided as excess acid generated by the photoacid generator is neutralized and removed and damage to unexposed portions of the photoresist polymer is avoided. wherein R1 and R2 are independently H, C1-C20 alkyl, C5-C25 alkyl aryl or C1-C10 ester; m is 1 or 2; n is an integer ranging from 10 to 300; and o is 0 or 1.
Abstract:
An apparatus for winding, in the form of a quadrupole, an optical fiber used for forming a sensor coil of a fiber optic gyroscope. A center shaft is supported by a pair of support sections. A cylindrical spool is fitted around the center shaft. A pair of winding disks are arranged adjacent to both ends of the spool so that they can be rotated about the center shaft. A pair of reels are mounted to facing surfaces of the winding disks so that both halves of the optical fiber to be wound on the spool can be wound on the reels, respectively. The winding disks can be rotated at the same velocity in opposite directions. The cylindrical spool is installed to be reciprocated along an axis of the center shaft. The respective reels mounted to the winding disks are spaced apart from each other by a predetermined interval.
Abstract:
The present invention provides an apparatus and method for compensating for the variation of a gain spectrum attributable to the temperature variation of a fiber amplifier, and a long-wavelength band dispersion-compensating hybrid amplifier equipped with the gain spectrum compensating apparatus. The apparatus includes a DCF located between a first amplification stage and a second amplification stage to compensate for dispersion of an optical signal output from the first amplification stage and perform Raman amplification of the optical signal using input pumping light; at least one pumping light provision means for providing forward or backward pumping light to the DCF; first and second temperature detection means for detecting temperature variations of the first and second amplification stages, respectively; and control means for controlling intensity of the pumping light of the pumping light provision means according to the detected temperature variations.
Abstract:
A delay locked loop is provided. The delay locked loop controls the number of delay cells that delay the phase of an input clock during a locking operation and controls a phase delay value of at least one delay cell among a plurality of delay cells after the locking operation is completed.
Abstract:
A delay locked loop controls a plurality of delay blocks included in a delay line and thus generate a plurality of clock signals which have a frequency obtained by multiplying a frequency of a reference clock signal, an accurate phase delay, and a constant duty cycle. The delay locked loop calculates an initial delay value and applies it to the delay blocks, thereby preventing harmonic locking and reducing locking time.