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    Plasma reactor
    31.
    发明申请
    Plasma reactor 失效
    等离子体反应器

    公开(公告)号：US20080072574A1

    公开(公告)日：2008-03-27

    申请号：US11723721

    申请日：2007-03-21

    申请人： Masaaki Masuda ,  Michio Takahashi ,  Takeshi Sakuma

    发明人： Masaaki Masuda ,  Michio Takahashi ,  Takeshi Sakuma

    IPC分类号： F01N3/01 ,  H05H1/24

    CPC分类号： H01J37/32431 ,  B01D53/32 ,  B01D53/944 ,  B01D2258/012 ,  B01D2259/818 ,  F01N3/01 ,  F01N3/023 ,  F01N2240/28 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2245/1215

    摘要： The present invention provides a plasma reactor which can suppress deactivation of components (active components) activated by plasma when causing exhaust gas to flow through a plasma generating space to ensure efficient reaction between the active components and particulate matter, whereby the particulate matter can be efficiently purified via reaction. The plasma reactor includes a plasma reactor main body 1, a positive electrode 11 disposed on an inlet side 2 of the plasma reactor main body 1, a conductive honeycomb filter 21 disposed so that a filter inlet side 22 faces an outlet side 3 of the plasma reactor main body 1, and a pulse power supply 31 which is connected with the positive electrode 11 and the honeycomb filter 21 and is capable of applying a pulse voltage between the positive electrode 11 and the honeycomb filter 21 as plasma generating electrodes to generate plasma.

    摘要翻译： 本发明提供了一种等离子体反应器，其可以抑制当等离子体产生的废气流过等离子体产生空间时由等离子体活化的组分（活性组分）失活，以确保活性组分与颗粒物质之间的有效反应，由此颗粒物质可以有效地 通过反应纯化。 等离子体反应器包括等离子体反应器主体1，设置在等离子体反应器主体1的入口侧2上的正极11，设置成使过滤器入口侧22面向等离子体的出口侧3的导电蜂窝过滤器21 反应器主体1和与正极11和蜂窝过滤器21连接并能够在正极11和蜂窝过滤器21之间施加脉冲电压的脉冲电源31作为等离子体产生电极产生等离子体。

    Plasma reactor
    32.
    发明授权
    Plasma reactor 失效
    等离子体反应器

    公开(公告)号：US07863540B2

    公开(公告)日：2011-01-04

    申请号：US11723721

    申请日：2007-03-21

    申请人： Masaaki Masuda ,  Michio Takahashi ,  Takeshi Sakuma

    发明人： Masaaki Masuda ,  Michio Takahashi ,  Takeshi Sakuma

    IPC分类号： B23K10/00

    CPC分类号： H01J37/32431 ,  B01D53/32 ,  B01D53/944 ,  B01D2258/012 ,  B01D2259/818 ,  F01N3/01 ,  F01N3/023 ,  F01N2240/28 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2245/1215

    摘要： The present invention provides a plasma reactor which can suppress deactivation of components (active components) activated by plasma when causing exhaust gas to flow through a plasma generating space to ensure efficient reaction between the active components and particulate matter, whereby the particulate matter can be efficiently purified via reaction. The plasma reactor includes a plasma reactor main body 1, a positive electrode 11 disposed on an inlet side 2 of the plasma reactor main body 1, a conductive honeycomb filter 21 disposed so that a filter inlet side 22 faces an outlet side 3 of the plasma reactor main body 1, and a pulse power supply 31 which is connected with the positive electrode 11 and the honeycomb filter 21 and is capable of applying a pulse voltage between the positive electrode 11 and the honeycomb filter 21 as plasma generating electrodes to generate plasma.

    摘要翻译： 本发明提供了一种等离子体反应器，其可以抑制当等离子体产生的废气流过等离子体产生空间时由等离子体活化的组分（活性组分）失活，以确保活性组分与颗粒物质之间的有效反应，由此颗粒物质可以有效地 通过反应纯化。 等离子体反应器包括等离子体反应器主体1，设置在等离子体反应器主体1的入口侧2上的正极11，设置成使过滤器入口侧22面向等离子体的出口侧3的导电蜂窝过滤器21 反应器主体1和与正极11和蜂窝过滤器21连接并能够在正极11和蜂窝过滤器21之间施加脉冲电压的脉冲电源31作为等离子体产生电极产生等离子体。

    PARTICULATE MATTER DETECTION DEVICE
    34.
    发明申请
    PARTICULATE MATTER DETECTION DEVICE 失效
    颗粒物检测装置

    公开(公告)号：US20100229724A1

    公开(公告)日：2010-09-16

    申请号：US12715598

    申请日：2010-03-02

    申请人： Masahiro TOKUDA ,  Atsuo Kondo ,  Takeshi Sakuma ,  Takashi Egami

    发明人： Masahiro TOKUDA ,  Atsuo Kondo ,  Takeshi Sakuma ,  Takashi Egami

    IPC分类号： B03C3/45 ,  B03C3/68

    CPC分类号： G01N27/68 ,  G01N15/0656

    摘要： A particulate matter detection device (100) includes a first electrode (10) that includes a conductive section (12) and a dielectric (14) that covers the conductive section (12), and a second electrode (20) that is disposed opposite to the first electrode (10) at an interval of 0.3 to 3.0 mm. Charged particulate matter contained in a fluid that passes through the space between the first electrode (10) and the second electrode (20), or particulate matter that is contained in a fluid and charged by a discharge that occurs due to application of a voltage between the electrodes (10) and (20) is electrically adsorbed on at least one of the electrodes (10) and (20), and the particulate matter adsorbed on the electrodes (10) and (20) is detected by measuring a change in electrical properties of the first electrode (10), or a change in electrical properties of the electrodes (10) and (20).

    摘要翻译： 一种颗粒物质检测装置（100）包括：第一电极（10），其包括导电部分（12）和覆盖所述导电部分（12）的电介质（14）;和第二电极（20） 第一电极（10）以0.3至3.0mm的间隔。 包含在通过第一电极（10）和第二电极（20）之间的空间的流体中的带电粒子物质或由流体中包含的颗粒物质引起的放电，由于施加电压而发生的放电 电极（10）和（20）被电吸附在至少一个电极（10）和（20）上，并且通过测量电极（10）和（20）的电位 第一电极（10）的特性，或电极（10）和（20）的电性能变化。

    Instrument for measuring concentration of particulates in fluid, measuring method, and measuring program
    35.
    发明授权
    Instrument for measuring concentration of particulates in fluid, measuring method, and measuring program 失效
    用于测量流体中微粒浓度的仪器，测量方法和测量程序

    公开(公告)号：US07772855B2

    公开(公告)日：2010-08-10

    申请号：US12506591

    申请日：2009-07-21

    申请人： Takeshi Sakuma ,  Kyosuke Katsuyama ,  Kenshin Kitoh

    发明人： Takeshi Sakuma ,  Kyosuke Katsuyama ,  Kenshin Kitoh

    IPC分类号： G01N15/06 ,  G01R27/08

    CPC分类号： G01N15/0656 ,  F01N2560/05 ,  F01N2560/06 ,  F01N2560/07 ,  F01N2560/12 ,  G01N15/0618

    摘要： There are disclosed an instrument for measuring the concentration of particulates in a fluid, which is capable of determining the concentration of the particulates in the fluid with high accuracy. The instrument for measuring the concentration of the particulates in the fluid includes particulate collecting means, temperature measuring means, flow rate measuring means, impedance measuring means, time measuring means, constant determining means for determining an impedance change per unit time-particulate concentration constant from temperature and flow rate, impedance change per unit time computing means for computing the change of an impedance per unit time, and particulate concentration determining means for determining the concentration of the particulates from the change of the impedance per unit time computed by the impedance change per unit time computing means.

    摘要翻译： 公开了一种用于测量流体中的微粒浓度的仪器，其能够高精度地确定流体中微粒的浓度。 用于测量流体中微粒浓度的仪器包括颗粒收集装置，温度测量装置，流量测量装置，阻抗测量装置，时间测量装置，用于确定每单位时间 - 颗粒浓度常数的阻抗变化的常数确定装置 温度和流量，用于计算每单位时间阻抗变化的每单位时间计算装置的阻抗变化;以及颗粒浓度确定装置，用于根据每单位时间内的阻抗变化计算每单位时间的阻抗的变化来确定微粒的浓度 单位时间计算手段。

    IMPEDANCE MEASURING INSTRUMENT AND IMPEDANCE MEASURING METHOD FOR FINE PARTICLE COLLECTOR
    36.
    发明申请
    IMPEDANCE MEASURING INSTRUMENT AND IMPEDANCE MEASURING METHOD FOR FINE PARTICLE COLLECTOR 审中-公开
    用于微粒收集器的阻抗测量仪和阻抗测量方法

    公开(公告)号：US20090315569A1

    公开(公告)日：2009-12-24

    申请号：US12548737

    申请日：2009-08-27

    申请人： Kyosuke Katsuyama ,  Kenshin Kitoh ,  Takeshi Sakuma

    发明人： Kyosuke Katsuyama ,  Kenshin Kitoh ,  Takeshi Sakuma

    IPC分类号： G01R27/28

    CPC分类号： F01N9/002 ,  F01N2560/05 ,  G01N15/0656 ,  G01N27/043 ,  Y02T10/47

    摘要： An impedance measuring instrument of a fine particle collector comprising a fine particle collection body for collecting fine particles in a fluid, a conductive can body for containing the fine particle collection body, and a buffering body disposed between the fine particle collection body and the conductive can body, wherein two or more electrodes are arranged on the fine particle collection body, at least one of the electrodes is connected with an AC power supply, at least the other electrode is connected with an ammeter, the AC power supply and the ammeter are interconnected and further connected with the conducive can body, and the conducive can body is grounded.

    摘要翻译： 一种细粒子收集器的阻抗测量装置，包括用于收集流体中的细颗粒的微粒收集体，用于容纳微粒收集体的导电罐本体和设置在细粒收集体与导电罐之间的缓冲体 主体，其中两个或多个电极布置在所述微粒收集体上，所述电极中的至少一个与AC电源连接，至少所述另一个电极与电流表连接，所述AC电源和所述电流表互连 并进一步与有利的罐体相连，并有利于罐身接地。

    Shower head structure for processing semiconductor
    37.
    发明授权
    Shower head structure for processing semiconductor 失效
    用于加工半导体的淋浴头结构

    公开(公告)号：US07540923B2

    公开(公告)日：2009-06-02

    申请号：US10505169

    申请日：2003-02-28

    申请人： Toshio Takagi ,  Takeshi Sakuma ,  Yuji Kato ,  Kenji Matsumoto

    发明人： Toshio Takagi ,  Takeshi Sakuma ,  Yuji Kato ,  Kenji Matsumoto

    IPC分类号： C23C16/52 ,  C23F1/00 ,  H01L21/306 ,  C23C16/18

    CPC分类号： H01J37/32935 ,  H01J37/3244 ,  H01L21/67115

    摘要： A shower head structure disposed in a device 2 for processing a semiconductor while supplying processing gas to a processing space S for storing a heated processed substrate W, comprising a shower head 12 having a plurality of gas injection holes 20B for supplying the processing gas and a light introducing rod 68 of a radiation thermometer 66 inserted into at least one of the gas injection holes 20B.

    摘要翻译： 一种淋浴喷头结构，其设置在用于处理半导体的装置2中，同时向处理空间S供应处理气体，所述处理空间S用于存储加热的处理基板W，包括具有多个用于供应处理气体的气体注入孔20B的喷头12， 插入至少一个气体注入孔20B的辐射温度计66的光导入杆68。

    Photo-excited gas processing apparatus for semiconductor process
    40.
    发明授权
    Photo-excited gas processing apparatus for semiconductor process 失效

    公开(公告)号：US06506253B2

    公开(公告)日：2003-01-14

    申请号：US09948577

    申请日：2001-09-10

    申请人： Takeshi Sakuma

    发明人： Takeshi Sakuma

    IPC分类号： B05C500

    CPC分类号： C23C16/45519 ,  C23C16/4405 ,  C23C16/4411 ,  C23C16/452 ,  C23C16/482 ,  H01J37/32339

    摘要： A CVD apparatus includes a process chamber connected to a process chamber through a connection path. A window made of a light transmission material is disposed in a wall that defines the excitation chamber. A light source is disposed outside the excitation chamber to face the window. The light source irradiates a flow of a process gas with light through the window, thereby exciting the process gas. A surface purge system is arranged to supply a purge gas along the inner surface of the window. The surface purge system has a purge gas port open to the excitation chamber.