公开(公告)号：US12237141B2

公开(公告)日：2025-02-25

申请号：US18694081

申请日：2022-09-20

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Katsumi Nagaoka ,  Takashi Aizawa ,  Shun-Ichiro Ohmi

IPC: H01J37/075 ,  H01J9/04 ,  H01J37/26

Abstract: The purpose of the present invention, relating to lanthanide boride, which is known as a low work function material, is to provide a novel low work function material with low chemical reactivity, in particular a low work function material of which the material surface, after being exposed to atmospheric gases, can be cleaned at a heating temperature lower than in the prior art. The present invention is a laminate containing a lanthanide boride film formed on a substrate, the surface of said film being covered by a thin film, wherein the thin film is a monatomic layer of a hexagonal boron nitride thin film.

公开(公告)号：US11972931B2

公开(公告)日：2024-04-30

申请号：US17129753

申请日：2020-12-21

Applicant: HAMAMATSU PHOTONICS K.K. ,  ENERGETIQ TECHNOLOGY, INC.

Inventor： Akio Suzuki ,  Toru Fujita ,  Akinori Asai ,  Yusei Nagata ,  Shinichi Ohba ,  Matthew Partlow ,  Ron Collins ,  Stephen F. Horne ,  Laura Owens

IPC: H01J37/32 ,  H01J37/075 ,  H05H1/00 ,  C23C16/455

CPC classification number: H01J37/32513 ,  H01J37/075 ,  H01J37/32009 ,  H05H1/00 ,  H05H1/01 ,  C23C16/45544

Abstract: A light emitting sealed body includes a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted. The housing includes at least one flow path which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion.

公开(公告)号：US20240038490A1

公开(公告)日：2024-02-01

申请号：US17876812

申请日：2022-07-29

Applicant: Axcelis Technologies, Inc.

Inventor： Steven T. Drummond ,  Joshua Max Abeshaus

IPC: H01J37/317 ,  H01J37/075

CPC classification number: H01J37/3171 ,  H01J37/075

Abstract: A cathode apparatus for an ion source has a cathode with a positioning feature and a blind hole. A cathode holder has an aperture defined by a thru-hole and a locating feature defined along an aperture axis. The thru-hole receives the cathode along the aperture axis in first and second alignment positions based on a rotational orientation of the positioning feature with respect to the locating feature. The first alignment position locates the cathode at a first axial position along the aperture axis. The second alignment position locates the cathode at a second axial position along the axial axis. A filament device has a filament clamp, a filament rod defining a filament axis, and a filament coupled to the filament rod. The filament clamp is in selective engagement with the filament rod to selectively position the filament along the filament axis within the blind hole.

公开(公告)号：US11798775B2

公开(公告)日：2023-10-24

申请号：US17491084

申请日：2021-09-30

Applicant: Axcelis Technologies, Inc.

Inventor： Wilhelm Platow ,  Neil Bassom ,  Jonathan David

IPC: H01J27/00 ,  H01J37/08 ,  H01J37/075 ,  H01J37/317

CPC classification number: H01J37/08 ,  H01J37/075 ,  H01J37/3171

Abstract: An ion source has an arc chamber with a first end and a second end. A first cathode at the first end of the arc chamber has a first cathode body and a first filament disposed within the first cathode body. A second cathode at the second end of the arc chamber has a second cathode body and a second filament disposed within the second cathode body. A filament switch selectively electrically couples a filament power supply to each of the first filament and the second filament, respectively, based on a position of the filament switch. A controller controls the position of the filament switch to alternate the electrical coupling of the filament power supply between the first filament and the second filament for a plurality of switching cycles based on predetermined criteria. The predetermined criteria can be a duration of operation of the first filament and second filament.

公开(公告)号：US11636996B2

公开(公告)日：2023-04-25

申请号：US17465068

申请日：2021-09-02

Applicant: KLA Corporation

Inventor： Nikolai N. Chubun ,  Martin Brutsch ,  Laurence S. Hordon

IPC: H01J37/141 ,  H01J37/075

Abstract: The present disclosure provides a magnetic immersion electron gun and a method of generating an electron beam using a magnetic immersion electron gun. The electron gun includes a magnetic lens forming a magnetic field, a cathode tip disposed in the magnetic field, and a multi-filament heater configured to directly heat the cathode tip to emit electrons through the magnetic lens. The multi-filament heater includes a first filament connected at each end to first and second positive terminals of a power source and a second filament connected at each end to first and second negative terminals of the power source. The first positive terminal, the second positive terminal, the first negative terminal, and the second negative terminal are arranged alternately around the cathode tip such that the first filament and the second filament intersect at the cathode tip and a resultant magnetic force applied to the cathode tip is reduced.

公开(公告)号：US20220351934A1

公开(公告)日：2022-11-03

申请号：US17621503

申请日：2019-07-02

Applicant: Hitachi High-Tech Corporation

Inventor： Erina KAWAMOTO ,  Soichiro MATSUNAGA ,  Souichi KATAGIRI ,  Keigo KASUYA ,  Takashi DOI ,  Tetsuya SAWAHATA ,  Minoru YAMAZAKI

IPC: H01J37/077 ,  H01J37/18 ,  H01J37/075

Abstract: The invention provides an electron beam apparatus that reduces a time required for an electron gun chamber to which a sputter ion pump and a non-evaporable getter pump are connected to reach an extreme high vacuum state. The electron beam apparatus includes an electron gun configured to emit an electron beam and the electron gun chamber to which the sputter ion pump and the non-evaporable getter pump are connected. The electron beam apparatus further includes a gas supply unit configured to supply at least one of hydrogen, oxygen, carbon monoxide, and carbon dioxide to the electron gun chamber.

公开(公告)号：US20220301806A1

公开(公告)日：2022-09-22

申请号：US17835872

申请日：2022-06-08

Applicant: Mohammed Nasser

Inventor： Mohammed Nasser

IPC: H01J37/075 ,  H01J37/28

Abstract: A system and method for injecting a medication, the system comprising an injection syringe comprising a sensor, an indicator light, and/or a digital meter. The sensor can be a blood vessel sensor, such as, a blood pressure sensor, a pressure sensor, and/or a RAMAN spectroscopy tool. The method can comprise, obtaining the syringe filled with a fluid, inserting the needle, checking the indicator, and based on the indicator, dispensing the fluid.

公开(公告)号：US20210151278A1

公开(公告)日：2021-05-20

申请号：US17064023

申请日：2020-10-06

Applicant: JEOL Ltd.

Inventor： Shinichi Kitamura ,  Takuma Iwasaki ,  Takashi Sato ,  Atsushi Kimura

IPC: H01J37/075 ,  H01J37/073 ,  H01J37/26

Abstract: An electron gun includes a cathode that is heated to emit thermions; a cathode heating power supply that supplies a cathode heating current for heating the cathode; a grid that has a first aperture formed therein and that has a grid voltage applied thereto, the grid voltage having a potential lower than that of the cathode, wherein the grid converges the thermions passing through the first aperture by the grid voltage; an anode that has a second aperture formed therein and that has an anode voltage applied thereto, wherein the anode causes the thermions extracted from the cathode to pass through the second aperture as an electron beam by the anode voltage; an anode-voltage power supply that applies the anode voltage to the anode; and a controller that causes the anode voltage having a positive potential to be applied from the anode-voltage power supply to the anode.

公开(公告)号：US20210074506A1

公开(公告)日：2021-03-11

申请号：US17015255

申请日：2020-09-09

Applicant: JEOL Ltd.

Inventor： Mitsuru Koizumi

IPC: H01J37/075 ,  H01J37/28 ,  H01J37/26 ,  H01J37/24

Abstract: There is provided a control method for an electron microscope including a thermionic-emission gun of self-bias type using a fixed bias resistor, an accelerating voltage power supply supplying an accelerating voltage to the thermionic-emission gun, and an optical system for irradiating a specimen with an electron beam. The control method includes: obtaining a value of a load current which is a current passing through an accelerating voltage power supply; determining a filament height of the thermionic-emission gun based on the value of the load current; and setting a condition of the optical system based on the filament height.

公开(公告)号：US10607807B2

公开(公告)日：2020-03-31

申请号：US16096938

申请日：2017-02-28

Applicant: BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY

Inventor： Chong-Yu Ruan

IPC: H01J37/075 ,  H01J37/26 ,  H01J37/21 ,  H01J37/244 ,  H01J37/073 ,  H01J37/147 ,  H01J49/48

Abstract: An electron spectroscopy system and method are disclosed. In another aspect, an ultrabright and ultrafast angle-resolved electron spectroscopy system is provided. A further aspect of the present system employs an electron gun, a radio frequency cavity and multiple spectrometers. Yet another aspect uses spectrometers in an aligned manner to deflect and focus electrons emitted by the electron gun. Moreover, an ultrafast laser is coupled to an electron spectroscopy system. A bunch of monochromatic electrons have their energy compressed and reoriented in an additional aspect of the present system. A further aspect of the present electron spectroscopy system employs adaptive and/or adjustable optics to optimize both time and energy compression. Another aspect provides at least two RF lenses or cavities, one before a specimen and one after the specimen.