System and method for enhanced ion pump lifespan

    公开(公告)号:US10262845B2

    公开(公告)日:2019-04-16

    申请号:US14874165

    申请日:2015-10-02

    Abstract: Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process. In various embodiments, one or more wire internal to the anode structure and having a time-varying electric potential may alter the trajectory of the ions leaving the anode tube, as may the shape of the anode near the ends of the anode tube.

    Ion pump with direct molecule flow channel through anode

    公开(公告)号:US09960026B1

    公开(公告)日:2018-05-01

    申请号:US14466711

    申请日:2014-08-22

    CPC classification number: H01J41/14 F04B37/14 H01J41/18

    Abstract: An ultra-high vacuum (UHV) system includes a UHV cell and an ion pump to maintain the UHV in the UHV cell. The ion pump has a GCC (glass, ceramic, or crystalline) housing. An interior wall of the ion-pump housing serves as an anode or bears a coating that serves as an anode. At least one cathode is disposed with respect to the housing so that it can cooperate with the anode to form an electric field for establishing a Penning trap. The GCC housing defines a flow channel that extends radially through the anode so that a molecule can flow directly into the most ionizing region of a Penning trap.

    Ion drag vacuum pump
    36.
    发明授权
    Ion drag vacuum pump 失效
    离子吸力真空泵

    公开(公告)号:US5899666A

    公开(公告)日:1999-05-04

    申请号:US918279

    申请日:1997-08-25

    CPC classification number: H01J41/18

    Abstract: An ion drag vacuum pump is installed in a body, one side of which is connected to and in communication with a sealed chamber. An ion generating device and a positive ion dragging device for dragging positive ions generated by the ion generating device to exhaust gases located near the ions by speeding up the ions is disposed in the body. The positive ions are neutralized by a positive ion neutralizing device. The ion generating device includes a corona electrode as a corona discharger to which a positive voltage is applied, a metal plate as a DC glow discharger to which a positive DC voltage is applied, or a first RF electrode and a second RF electrode to which RF power is applied. The ion dragging device includes a target electrode or a first and a second grids to which a positive and a negative voltage are respectively applied. The ion neutralizing device includes a grounded baffle plate.

    Abstract translation: 离子阻力真空泵安装在主体中,其一侧连接到密封室并与密封室连通。 离子产生装置和用于通过加速离子将由离子产生装置产生的正离子拖到位于离子附近的废气的离子产生装置和正离子拖曳装置设置在体内。 正离子被正离子中和装置中和。 离子产生装置包括作为施加正电压的电晕放电器的电晕电极,作为直流辉光放电器的金属板,施加正的直流电压,或第一RF电极和第二RF电极,RF 电源被施加。 离子牵引装置包括目标电极或分别施加有正电压和负电压的第一栅极和第二栅极。 离子中和装置包括接地挡板。

    Microminiaturized electrostatic pump
    38.
    发明授权
    Microminiaturized electrostatic pump 失效
    微型静电泵

    公开(公告)号:US5180288A

    公开(公告)日:1993-01-19

    申请号:US773897

    申请日:1991-10-29

    CPC classification number: H02N11/006 B05B5/16 F04D33/00 H01J41/18

    Abstract: An electrostatic pump includes two electrodes, which are spaced apart essentially in the pump flow direction and which are adapted to have applied thereto a potential for injecting an ion current flowing between the two electrodes. For further microminiaturization of the pump, the pump includes two semiconductor components, which are arranged one on top of the other in the pump flow direction and which are so structured that the electrodes form an integral constituent part of the semiconductor components.

    Abstract translation: PCT No.PCT / EP90 / 00611 Sec。 371日期1991年10月29日 102(e)日期1991年10月29日PCT 1990年04月17日PCT PCT。 出版物WO91 / 02375 日本1991年2月21日。静电泵包括两个电极,其基本上在泵流动方向上间隔开,并且适于向其施加注入在两个电极之间流动的离子电流的电位。 为了进一步微型化泵,泵包括两个半导体部件,它们在泵流动方向上一个在另一个的顶部上,并且其结构使得电极形成半导体部件的整体组成部分。

    Ion pump
    39.
    发明授权
    Ion pump 失效
    离子泵

    公开(公告)号:US4594054A

    公开(公告)日:1986-06-10

    申请号:US553241

    申请日:1983-11-18

    CPC classification number: H01J41/18 H01J41/12

    Abstract: An ion pump comprises a pump casing inserted in a magnetic field, with an anode supported by insulators in the pump casing. Both the pump casing and anode are made of alminum-based metals, and the pump casing serves also as a cathode, thereby the ion pump has a simpler structure and functions more efficiently than the conventional ones.

    Abstract translation: 离子泵包括插入磁场的泵壳体,阳极由泵壳体中的绝缘体支撑。 泵壳和阳极均由铝基金属制成,泵壳也用作阴极,因此离子泵具有比常规离子泵更简单的结构和功能。

    Electric-fluid energy converter
    40.
    发明授权
    Electric-fluid energy converter 失效
    电动液体转换器

    公开(公告)号:US3554669A

    公开(公告)日:1971-01-12

    申请号:US3554669D

    申请日:1968-12-04

    Applicant: GEN ELECTRIC

    Inventor: READER TREVOR D

    CPC classification number: H02N3/00 F04D33/00 F15C1/04 H01J41/18

    Abstract: A FLUERIC DEVICE FOR CONVERTING ELECTRICAL ENERGY INTO FLUID ENERGY AND VICE VERSA. THE BASIC DEVICE IS OF A LAMINATE STRUCTURE COMPRISED OF TWO ELECTRICALLY CONDUCTIVE, CHANNELLED ELECTRODE MEMBERS, AN EMITTER AND A RECEIVER, WHICH ARE SPACED A GIVEN DISTANCE FROM EACH OTHER AND JOINED BETWEEN LAYERS OF ELECTRICALLY INSULATING MATERIAL. THE CHANNELS OF THE EMITTER AND RECEIVER ARE ALIGNED SO AS TO FORM A FLOW PASSAGE THROUGH THE DEVICE.

    A DIRECT CURRENT ELECTRIC POWER SUPPLY IS IMPRESSED BETWEEN THE EMITTER AND RECEIVER TO CAUSE A FLOW OF IONS FROM THE EMITTER TO THE RECEIVER WHICH CAUSES FLUID TO BE PULLED FROM AN INLET THROUGH THE CHANNELS OF THE EMITTER AND RECEIVER AND OUT AN EXIT OF THE DEVICE.

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