公开(公告)号：US07075738B2

公开(公告)日：2006-07-11

申请号：US10256794

申请日：2002-09-27

Applicant: Alan Ross ,  Edwin D. Tucker

Inventor： Alan Ross ,  Edwin D. Tucker

IPC: G02B7/02

CPC classification number: G01J3/45 ,  G01B2290/35 ,  G02B7/004

Abstract: A linear positioning apparatus includes an intermediate portion having an axis, and first and second end portions mounted with flexure legs thereto. The flexure legs accommodate motion of the intermediate portion relative to the end portions along the axis, but inhibit motion of the intermediate portion relative to the end portions in directions not parallel to the axis. The apparatus can accommodate forces having off-axis components, and produce motion that comprises substantially no off-axis component. The apparatus is useful in, for example, optical systems where precise linear motion is required.

Abstract translation: 线性定位装置包括具有轴的中间部分，以及安装有弯曲腿的第一和第二端部。 弯曲腿容纳中间部分相对于沿着轴线的端部的运动，但是阻止中间部分相对于端部在不平行于轴线的方向上的运动。 该装置可以适应具有离轴部件的力，并且产生基本上不包括离轴部件的运动。 该装置在例如需要精确的线性运动的光学系统中是有用的。

公开(公告)号：US20050007600A1

公开(公告)日：2005-01-13

申请号：US10615321

申请日：2003-07-07

Applicant: Robert Rafac

Inventor： Robert Rafac

IPC: G01J1/42 ,  G01J3/02 ,  G01J3/28 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01J1/4257 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A method and apparatus for measuring bandwidth of light emitted from a laser is disclosed which may comprise: a first and second wavelength sensitive optical bandwidth detectors providing, respectively, an output representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first and second bandwidth detectors, and an actual bandwidth calculation apparatus adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter or a second actual bandwidth parameter. The first actual bandwidth parameter may be a spectrum full width at some percent of the maximum (“FWXM”), and the second actual bandwidth parameter may be a portion containing some percentage of the energy (“EX”). The first and second bandwidth detectors may an etalon and the outputs may be representative of a fringe width of a fringe of an optical output of the respective etalon at FWXM. The precomputed calibration variables may be derived from respective three dimensional plots representing, respectively, detector outputs in relation to a calibrating input light with known values of the first and second actual bandwidth parameters, which may be FWXM and EX. The first/second three dimensional plot may provide a solution: (first/second output)=(a/d*(calibrating input light known value of FWXM))+(b/e*(calibrating input light known value of EX)+c/f; and the actual bandwidth calculation apparatus may use the derived equation: (first actual bandwidth parameter)=((b*(second output))−(e*(first output))+ce−bf)/(bd−ae), or the equation: (second actual bandwidth parameter)=((a*(second output))−(d*(first output))+cd−af)/(ae−bd). FWXM may be FWHM and EX may be E95. The transfer function of the first optical bandwidth detector may be selected to be much more sensitive to FWXM than to EX and the transfer function of the second optical bandwidth detector may be selected to be much more sensitive to EX than to FWXM.

公开(公告)号：US20040240517A1

公开(公告)日：2004-12-02

申请号：US10492889

申请日：2004-04-16

Inventor： John Howard

IPC: G01J005/00

CPC classification number: G01J5/58 ,  G01J3/45 ,  G01J5/00 ,  G01J5/0834 ,  G01J2005/583 ,  G01J2005/586

Abstract: Remote sensing of the temperature of a greybody or blackbody radiator is effected by passing its radiation (24) through a modulated infrared filter spectrometer. The infrared filter comprises, in sequence, a band pass filter (20), a first polariser (21) which polarises the radiation, an electro-optical element (22) which splits the polarised radiation into two orthogonally polarised components, and a second polariser (23). A lens (28) images the radiation leaving the second polariser onto a detector (27). The electrical signal from the detector (27) is input to a numerical analyser. The electro-optical element (22), typically comprising a birefringent crystal assembly (25) and a birefringent trim plate (26), is configured so that the net optical delay of the orthogonally polarised components passed through it is such that the recombined components are at or near a peak or trough in their interferogram. A sinusoidally varying voltage is applied to the electro-optical element to modulate the net delay of the components passed through the electro-optical element. The numerical analyser is programmed to compute the harmonic amplitude ratio (the ratio of signal amplitudes at the fundamental and second harmonic of the frequency of the modulating voltage) of the signal that it receives from the detector (27). The harmonic amplitude ratio is a function of the temperature of the radiator, which can be estimated by reference to a calibration look-up table.

Abstract translation: 通过使其辐射（24）通过调制的红外滤光器光谱仪来实现对灰体或黑体辐射体的温度的遥感。 红外滤光器依次包括带通滤波器（20），偏振辐射的第一偏振器（21），将偏振辐射分成两个正交极化分量的电光元件（22）和第二偏振器 （23）。 透镜（28）将离开第二偏振器的辐射图像到检测器（27）上。 来自检测器（27）的电信号被输入到数字分析器。 通常包括双折射晶体组件（25）和双折射装饰板（26）的电光元件（22）被配置为使得通过它的正交极化分量的净光学延迟使得重组组分为 在它们的干涉图中的峰或谷附近。 将正弦变化的电压施加到电光元件以调节通过电光元件的部件的净延迟。 数字分析仪被编程为计算其从检测器（27）接收的信号的谐波振幅比（在调制电压的频率的基波和二次谐波处的信号幅度的比率）。 谐波振幅比是散热器的温度的函数，可以通过参考校准查找表来估计。

公开(公告)号：US20020179839A1

公开(公告)日：2002-12-05

申请号：US09873813

申请日：2001-06-04

Inventor： Isaac Richman

IPC: G01J005/20

CPC classification number: G01J1/02 ,  G01J1/0209 ,  G01J1/0214 ,  G01J1/04 ,  G01J1/0477 ,  G01J1/4228 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0259 ,  G01J3/0262 ,  G01J3/2803 ,  G01J3/45

Abstract: A detector array that eliminates the channel spectrum effect. In one embodiment the detector consists of a charge couple device (CCD) detector having a photoactive layer supported on a wedge-shaped substrate. Incident radiation impinging any of the pixels and passing through the substrate to the wedge-shaped surface thereof is reflected back at an angle away from the pixel from which it passed through. An infrared array and a single element detector each including a wedge-shaped substrate are also disclosed. The detectors do not require costly signal processing equipment and further can be constructed in accordance with well known manufacturing techniques and with little or no additional cost beyond that normally associated with producing such devices.

Abstract translation: 一种消除信道频谱效应的检测器阵列。 在一个实施例中，检测器由具有支撑在楔形衬底上的光敏层的电荷耦合器件（CCD）检测器组成。 射入任何像素并穿过衬底到其楔形表面的入射辐射以远离其穿过的像素的角度被反射回来。 还公开了包括楔形基板的红外阵列和单个元件检测器。 检测器不需要昂贵的信号处理设备，并且还可以根据公知的制造技术构造，并且除了通常与生产这样的设备相关联的之外，几乎没有或没有额外的成本。

公开(公告)号：US06483113B1

公开(公告)日：2002-11-19

申请号：US09383239

申请日：1999-08-26

Applicant: George Robert Sealy ,  Simon Adrian Wells

Inventor： George Robert Sealy ,  Simon Adrian Wells

IPC: G01N2135

CPC classification number: G01J3/28 ,  G01J3/45

Abstract: A spectrometer, typically an FT-IR spectrometer, is operated in a continuous mode so that it is carrying out scans on a continuous basis. The acquired data is stored and can be retrieved when a sample measurement is made. This improves the response of the instrument.

Abstract translation: 光谱仪（通常是FT-IR光谱仪）以连续模式操作，以便连续进行扫描。 所获取的数据被存储并且可以在进行样本测量时被检索。 这提高了仪器的响应。

公开(公告)号：US06469790B1

公开(公告)日：2002-10-22

申请号：US09299022

申请日：1999-04-26

Applicant: Christopher J. Manning

Inventor： Christopher J. Manning

IPC: G01B902

CPC classification number: G01J9/0215 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/06 ,  G01J3/2889 ,  G01J3/45 ,  G01J3/453

Abstract: A novel variation of Michelson's interferometer uses tilt- and shear-compensation optics to allow various mirror motions to produce variation of path difference. The tilt-compensation mechanism consists of two complementary reflections from a single plane mirror and, in some cases, the beamsplitter, to produce a beam having a constant angle of propagation, typically the same as the input beam. Using a retroreflector to invert the image of a single plane mirror or a sequence of plane mirrors before the second reflections produces complementary reflections. A particularly efficient embodiment of the present invention uses one or more balanced disk-shaped mirrors to effect very rapid variation of path difference by nutation or precession. Other advantages of tilt-compensation include photometric stability. This interferometer has applications in spectrometry, spectral imaging and metrology.

Abstract translation: 迈克尔逊干涉仪的一个新颖变化使用倾斜和剪切补偿光学元件，以允许各种镜像运动产生路径差异的变化。 倾斜补偿机构包括来自单个平面镜的两个互补反射，并且在一些情况下由分束器组成，以产生具有恒定传播角的光束，通常与输入光束相同。 在第二次反射之前使用回射器反转单个平面镜或平面镜序列的图像产生互补反射。 本发明的一个特别有效的实施例使用一个或多个平衡的盘形反射镜通过章动或进动来实现路径差异的非常快速的变化。 倾斜补偿的其他优点包括光度稳定性。 该干涉仪具有光谱，光谱成像和计量学应用。

公开(公告)号：US06351307B1

公开(公告)日：2002-02-26

申请号：US09511411

申请日：2000-02-23

Applicant: David J. Erskine

Inventor： David J. Erskine

IPC: G01B902

CPC classification number: G01P15/16 ,  G01B9/02023 ,  G01B9/02028 ,  G01B9/02044 ,  G01B9/02045 ,  G01B9/0209 ,  G01B2290/10 ,  G01B2290/20 ,  G01B2290/25 ,  G01J3/2823 ,  G01J3/45 ,  G01J3/453 ,  G01J9/04 ,  G01J2005/583 ,  G01P3/36 ,  G01S11/12

Abstract: A method of measuring the spectral properties of broadband waves that combines interferometry with a wavelength disperser having many spectral channels to produce a fringing spectrum. Spectral mapping, Doppler shifts, metrology of angles, distances and secondary effects such as temperature, pressure, and acceleration which change an interferometer cavity length can be measured accurately by a compact instrument using broadband illumination. Broadband illumination avoids the fringe skip ambiguities of monochromatic waves. The interferometer provides arbitrarily high spectral resolution, simple instrument response, compactness, low cost, high field of view and high efficiency. The inclusion of a disperser increases fringe visibility and signal to noise ratio over an interferometer used alone for broadband waves. The fringing spectrum is represented as a wavelength dependent 2-d vector, which describes the fringe amplitude and phase. Vector mathematics such as generalized dot products rapidly computes average broadband phase shifts to high accuracy. A Moire effect between the interferometer's sinusoidal transmission and the illumination heterodynes high resolution spectral detail to low spectral detail, allowing the use of a low resolution disperser. Multiple parallel interferometer cavities of fixed delay allow the instantaneous mapping of a spectrum, with an instrument more compact for the same spectral resolution than a conventional dispersive spectrometer, and not requiring a scanning delay.

Abstract translation: 测量宽带波的光谱性质的方法，其将干涉测量与具有许多光谱通道的波长分散器组合以产生边缘光谱。 可以通过使用宽带照明的紧凑型仪器，精确地测量光谱映射，多普勒频移，角度，距离和二次效应（如改变干涉仪腔长度的温度，压力和加速度）。 宽带照明避免了单色波的边缘跳跃模糊。 干涉仪提供任意高的光谱分辨率，简单的仪器响应，紧凑性，低成本，高视野和高效率。 分散器的包含增加了单独用于宽带波的干涉仪的边缘可见度和信噪比。 边缘光谱表示为波长相关的2-d矢量，其描述条纹幅度和相位。 矢量数学，如广义点产品可以快速计算平均宽带相移到高精度。 干涉仪的正弦波传播与照明外差高分辨率光谱细节之间的莫尔效应可以降低光谱细节，允许使用低分辨率分散器。 具有固定延迟的多个并行干涉仪腔允许频谱的瞬时映射，与常规色散光谱仪相比，仪器更紧凑，并且不需要扫描延迟。

公开(公告)号：US20020021449A1

公开(公告)日：2002-02-21

申请号：US09855473

申请日：2001-05-15

Inventor： Frank C. Demarest

IPC: G01B009/02

CPC classification number: G01B9/02062 ,  G01B9/02003 ,  G01B9/02083 ,  G01B2290/70 ,  G01J3/45 ,  G03F7/70775 ,  G03F9/7049 ,  G03F9/7092

Abstract: A method for compensating data age in measurement signals from an interferometer includes measuring a value of the measurement signal and adjusting the measured value based on the measurement signal with a data age adjustment value to correct for data age.

Abstract translation: 用于补偿来自干涉仪的测量信号中的数据年龄的方法包括：测量测量信号的值，并根据具有数据年龄调整值的测量信号调整测量值，以校正数据年龄。

公开(公告)号：US06204925B1

公开(公告)日：2001-03-20

申请号：US09502860

申请日：2000-02-11

Applicant: Ivan Prikryl ,  Hollis O'Neal Hall

Inventor： Ivan Prikryl ,  Hollis O'Neal Hall

IPC: G01B902

CPC classification number: G01J3/45 ,  G01J3/4535 ,  G01J9/02

Abstract: An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transparent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector.

Abstract translation: 干涉仪包括用于将源束分解成测试光束和参考光束的分束器，用于检测干涉图案的成像装置，设置在测试光束的路径中以用于将测试光束反射到成像装置的反射镜， 设置在参考光束的路径中的微镜，用于将参考光束的一部分反射到成像装置;以及聚焦机构，设置成用于将参考光束聚焦在微镜上。 微镜的横向尺寸不超过由聚焦机构聚焦在其上的参考光束的中心波瓣的近似侧向尺寸。 用于减小光束中的像差影响的空间滤光器包括设置在透明基底上的反射器，其中反射器的横向尺寸不超过聚焦在反射器上的光束的空间强度分布的中心波瓣的近似侧向尺寸。

公开(公告)号：US06201628B1

公开(公告)日：2001-03-13

申请号：US09196476

申请日：1998-11-19

Applicant: David A. Basiji ,  Gerrit J. van den Engh

Inventor： David A. Basiji ,  Gerrit J. van den Engh

IPC: G02B2608

CPC classification number: G01J3/443 ,  G01J3/45 ,  G06K7/10801

Abstract: A scanning apparatus is provided to obtain automated, rapid and sensitive scanning of substrate fluorescence, optical density or phosphorescence. The scanner uses a constant path length optical train, which enables the combination of a moving beam for high speed scanning with phase-sensitive detection for noise reduction, comprising a light source, a scanning mirror to receive light from the light source and sweep it across a steering mirror, a steering mirror to receive light from the scanning mirror and reflect it to the substrate, whereby it is swept across the substrate along a scan arc, and a photodetector to receive emitted or scattered light from the substrate, wherein the optical path length from the light source to the photodetector is substantially constant throughout the sweep across the substrate. The optical train can further include a waveguide or mirror to collect emitted or scattered light from the substrate and direct it to the photodetector. For phase-sensitive detection the light source is intensity modulated and the detector is connected to phase-sensitive detection electronics. A scanner using a substrate translator is also provided. For two dimensional imaging the substrate is translated in one dimension while the scanning mirror scans the beam in a second dimension. For a high throughput scanner, stacks of substrates are loaded onto a conveyor belt from a tray feeder.

Abstract translation: 提供扫描装置以获得对衬底荧光，光密度或磷光的自动，快速和灵敏的扫描。 扫描仪使用恒定路径长度的光学列车，其使得用于高速扫描的移动光束与用于降噪的相敏检测的组合包括光源，扫描镜以接收来自光源的光并扫过它 转向镜，转向镜，用于接收来自扫描反射镜的光，并将其反射到基板上，由此沿着扫描弧扫过基板;以及光电检测器，用于接收来自基板的发射或散射的光，其中光路 在整个扫描过程中，从光源到光电检测器的长度基本恒定。 光学系统还可以包括波导或反射镜以收集来自基板的发射或散射的光并将其引导到光电检测器。 对于相敏检测，光源进行强度调制，检测器连接到相敏检测电路。 还提供了使用基板转换器的扫描仪。 对于二维成像，衬底在一个维度上被平移，而扫描镜在第二维度上扫描光束。 对于高通量扫描仪，将一堆基板从托盘进料器装载到传送带上。