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    MEASURING DEVICE AND DETECTION OF MEASUREMENT SIGNALS DURING A PENETRATING MOVEMENT OF PENETRATING MEMBER
    42.
    发明申请
    MEASURING DEVICE AND DETECTION OF MEASUREMENT SIGNALS DURING A PENETRATING MOVEMENT OF PENETRATING MEMBER 有权

    公开(公告)号：US20210208041A1

    公开(公告)日：2021-07-08

    申请号：US16070617

    申请日：2017-01-09

    Applicant: Helmut Fischer GmbH Institut für Elektronik und Messtechnik

    Inventor： Helmut Fischer

    IPC: G01N3/46

    Abstract: A measuring device for detection pf measurement signals during a penetrating movement of a penetrating member into a surface of a test object or during a sensing movement of the penetrating member on the surface of the test object. The measuring device includes a housing which accommodates a force generating device and on which a holding element is arranged remote from the force generating device, which holding element is movable relative to the housing at least in one direction along a longitudinal axis of the housing and which accommodates the penetrating member. The measuring device also includes at least one first measuring element for measuring the penetration depth of the penetrating member into the surface of the test object or a traversing movement of the penetrating member along the longitudinal axis relative to the housing during a sensing movement on the surface of the test object, wherein a transmission element is provided which extends between the force generating device and the penetrating member.

    Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers
    43.
    发明授权
    Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers 有权

    公开(公告)号：US10707112B2

    公开(公告)日：2020-07-07

    申请号：US15420690

    申请日：2017-01-31

    Applicant: Helmut Fischer GmbH Institut fur Elektronik und Messtechnik

    Inventor： Werner Volz ,  Paul Boos

    IPC: H01L21/683 ,  H01L21/687 ,  H01L21/677 ,  B25B11/00 ,  G01N23/223 ,  H01L21/67

    Abstract: A vacuum chuck for clamping workpieces, in particular wafers, and a measuring device and a method for checking workpieces by way of X-ray fluorescent radiation. The vacuum chuck has a clamping plate having a support surface, having at least one suction connection arranged on a base body for connecting to a negative-pressure device and for clamping the workpiece on the clamping plate by negative pressure received by the base body and having several suction grooves arranged in the clamping plate and are open towards the support surface. The support surface has concentric suction grooves having a suction opening to which a negative-pressure line is connected or which is connected to a work channel. Each suction groove having a separate negative pressure, which is separate to the adjacent suction groove, is selectively controlled by a control valve by a control for supplying the respective negative pressure in the respective suction groove.

    Measuring probe for non-destructive measuring of the thickness of thin layers
    44.
    发明授权
    Measuring probe for non-destructive measuring of the thickness of thin layers 有权

    公开(公告)号：US10584952B2

    公开(公告)日：2020-03-10

    申请号：US14723027

    申请日：2015-05-27

    Applicant: Helmut Fischer GmbH Institut fuer Elektronik and Messtechnik

    Inventor： Helmut Fischer

    IPC: G01B7/06 ,  G01B21/08 ,  G01B7/00

    Abstract: Measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which includes at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.

    Measuring probe for non-destructive measuring of the thickness of thin layers
    48.
    发明授权
    Measuring probe for non-destructive measuring of the thickness of thin layers 有权
    测量探头用于非破坏性测量薄层厚度

    公开(公告)号：US09074880B2

    公开(公告)日：2015-07-07

    申请号：US13066797

    申请日：2011-04-25

    Applicant: Helmut Fischer

    Inventor： Helmut Fischer

    IPC: G01B7/06 ,  G01B21/08

    CPC classification number: G01B7/10 ,  G01B7/001 ,  G01B7/105 ,  G01B21/08

    Abstract: The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers, in particular in cavities, which are accessible by an opening or on curved surfaces, with a measuring head, which comprises at least one sensor element and at least one contact spherical cap, assigned to the sensor element on a surface, to be checked, of the cavity, and with a gripping element for positioning and guiding the measuring probe on and/or along the surface to be measured, wherein on the gripping element, a long, elastically yielding guide bar is provided, which accepts the at least one measuring head on its end opposing the gripping element, in such a way that it is moveable with at least one degree of freedom in relation to the guide bar.

    Abstract translation: 本发明涉及一种用于非破坏性地测量薄层厚度的测量探针，特别是在通过开口或弯曲表面可访问的空腔中，测量头包括至少一个传感器元件并且至少包括 分配给待检查的空腔中的传感器元件的一个接触球形盖，以及用于在测量表面上和/或沿着待测量表面定位和引导测量探针的夹持元件，其中在夹持元件上 提供了一种长而弹性屈服的导向杆，其在其与夹持元件相对的端部上接收至少一个测量头，使得其可相对于导向杆至少一个自由度移动。

    MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS
    49.
    发明申请
    MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN LAYERS 有权
    测量薄层厚度的测量探头

    公开(公告)号：US20140225602A1

    公开(公告)日：2014-08-14

    申请号：US14119971

    申请日：2012-05-24

    Applicant: Helmut Fischer

    Inventor： Helmut Fischer

    IPC: G01B7/06

    CPC classification number: G01B7/10 ,  G01B7/105 ,  Y10T29/49071

    Abstract: The invention relates to a measuring probe for measuring the thickness of thin layers, having a housing (14) with at least one sensor element (17), which is received at least slightly moveably along a longitudinal axis (16) and which comprises at least one first winding device (44), which has a magnetic pot core (41) arranged in the longitudinal axis (16) of the housing (14), and to whose central pin (42) a first and second coil (70, 71) are allocated, and having a spherical positioning cap (21) on the central pin (42) pointing towards the measuring surface of an object to be measured, which cap comprises a bearing surface (57) for fitting on a measuring surface, wherein a second winding device (48) is provided allocated to the spherical positioning cap (21), which device is formed from a discoidal or annular carrier (49) having at least one Archimedean coil (51), and a shield (83, 85) is provided at least partially between the first and second winding device (44, 48).

    Abstract translation: 本发明涉及一种用于测量薄层厚度的测量探针，其具有具有至少一个传感器元件（17）的外壳（14），该传感器元件至少沿着纵向轴线（16）可稍微移动，并且至少包括 一个第一卷绕装置（44），其具有布置在壳体（14）的纵向轴线（16）中的磁性罐芯（41），并且其中心销（42）具有第一和第二线圈（70,71） 并且在中心销（42）上具有指向待测量物体的测量表面的球形定位盖（21），该盖包括用于装配在测量表面上的支承表面（57），其中第二 卷绕装置（48）被设置为分配给球形定位盖（21），该装置由具有至少一个阿弥式线圈（51）的盘形或环形载体（49）形成，并且提供屏蔽（83,85） 至少部分地在第一和第二卷绕装置（44,48）之间。

    Measuring probe for non-destructive measuring of the thickness of thin layers
    50.
    发明申请
    Measuring probe for non-destructive measuring of the thickness of thin layers 有权
    测量探头用于非破坏性测量薄层厚度

    公开(公告)号：US20110260720A1

    公开(公告)日：2011-10-27

    申请号：US13066796

    申请日：2011-04-25

    Applicant: Helmut Fischer

    Inventor： Helmut Fischer

    IPC: G01B7/06

    CPC classification number: G01B21/08 ,  G01B7/105

    Abstract: The invention relates to a measuring probe for non-destructive measuring of the thickness of thin layers on an object with a measuring head, which comprises at least one sensor element for contact on a measurement surface of an object, and with a support device for receiving the measuring head, which is at least partly surrounded by a housing, wherein at least one further measuring head, which is adjacent to and separated from the first measuring head, is arranged on the support device, which can be controlled independently of the first measuring head.

    Abstract translation: 本发明涉及一种测量探头，用于对具有测量头的物体上的薄层的厚度进行非破坏性测量，所述测量头包括用于接触物体的测量表面上的至少一个传感器元件和用于接收的支撑装置 所述测量头至少部分地被壳体包围，其中与所述第一测量头相邻并且与所述第一测量头分离的至少一个另外的测量头被布置在所述支撑装置上，所述测量头可独立于所述第一测量 头。

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