Probe card for high-frequency applications

    公开(公告)号:US11112431B2

    公开(公告)日:2021-09-07

    申请号:US16537727

    申请日:2019-08-12

    Inventor: Stefano Felici

    Abstract: A probe card of a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane. Suitably, the testing head is arranged between the support plate and a first portion of the flexible membrane, which is connected to the support plate through a second portion thereof, the probe card further comprising a plurality of contact tips arranged on a first face of the flexible membrane at the first portion thereof, the second end portion of each contact element being apt to abut onto a second face of the flexible membrane, opposite to the first face, the number and distribution of the contact elements being different to the number and distribution of the contact tips.

    TESTING HEAD HAVING IMPROVED FREQUENCY PROPERTIES

    公开(公告)号:US20210270869A1

    公开(公告)日:2021-09-02

    申请号:US17325783

    申请日:2021-05-20

    Inventor: Flavio MAGGIONI

    Abstract: A testing head apt to verify the operation of a device under test integrated on a semiconductor wafer includes a plurality of contact elements, each including a body that extends between a first end portion and a second end portion, and a guide provided with a plurality of guide holes apt to house the contact elements. The guide includes a conductive portion that includes and electrically connects the holes of a group of guide holes to each other and is apt to contact a corresponding group of contact elements apt to carry a same type of signal.

    Vertical probe testing head with improved frequency properties

    公开(公告)号:US11029337B2

    公开(公告)日:2021-06-08

    申请号:US16550089

    申请日:2019-08-23

    Abstract: A testing head comprises at least one guide provided with a plurality of guide holes, and a plurality of contact elements housed in the plurality of guide holes. Suitably, the at least one guide comprises a plurality of conductive layers, each conductive layer: including holes of a corresponding plurality of group of the plurality of guide holes and electrically connecting a corresponding group of contact elements housed in the guide holes of the group, contact elements of a group being adapted to carry a same type of signal. The at least one guide is a multilayer comprising a plurality of non-conductive layers, and the conductive layers are arranged on respective faces of a layer of the plurality of non-conductive layers.

    Probe card for a testing apparatus of electronic devices with enhanced filtering properties

    公开(公告)号:US10761113B2

    公开(公告)日:2020-09-01

    申请号:US15718561

    申请日:2017-09-28

    Inventor: Flavio Maggioni

    Abstract: A probe card for a testing apparatus of electronic devices comprises at least one testing head housing a plurality of contact probes, each contact probe having at least one contact tip abutting onto contact pads of a device under test, as well as at least one space transformer realizing a spatial transformation of the distances between contact pads made on its opposite sides and connected by means of suitable conductive tracks or planes, as well as a plurality of filtering capacitors provided between the space transformer and a PCB, which comprises direct conductive tracks or planes contacting conductive portions of the filtering capacitors.

    CONTACT PROBE FOR A TESTING HEAD FOR TESTING HIGH-FREQUENCY DEVICES

    公开(公告)号:US20200271692A1

    公开(公告)日:2020-08-27

    申请号:US16870794

    申请日:2020-05-08

    Abstract: A contact probe for a testing head of an apparatus for testing electronic devices comprises a body extending along a longitudinal axis between a first end portion and a second end portion, the second end portion being adapted to contact pads of a device under test. Suitably, the contact probe comprises a first section, which extends along the longitudinal axis from the first end portion and is made of an electrically non-conductive material, and a second section, which extends along the longitudinal axis from the second end portion up to the first section, the second section being electrically conductive and extending over a distance less than 1000 μm.

    Testing head comprising vertical probes for reduced pitch applications

    公开(公告)号:US10698003B2

    公开(公告)日:2020-06-30

    申请号:US15801067

    申请日:2017-11-01

    Abstract: A testing head for testing the working of a device under test comprises a plurality of contact probes, each contact probe having a rod-like body of a predetermined length that extends between a first end and a second end and being housed in respective guide holes made in at least one plate-like lower guide and one plate-like upper guide that are parallel to each other and spaced apart by a bending zone. Suitably, at least one of the lower guide and upper guide is equipped with at least one recessed portion formed at a plurality of those guide holes and realizing lowered portions thereof adapted to reduce a thickness of the plurality of those guide holes.

    Contact probe and corresponding testing head

    公开(公告)号:US10386388B2

    公开(公告)日:2019-08-20

    申请号:US15718430

    申请日:2017-09-28

    Abstract: It is described a contact probe for a testing head for a testing apparatus of electronic devices, the probe comprising a probe body extended in a longitudinal direction between respective end portions adapted to contact respective contact pads, the second end being a contact tip adapted to abut onto a contact pad of the device under test, the body of each contact probe having a length of less than 5000 μm, and including at least one pass-through opening extending along its longitudinal dimension. Conveniently, the at least one pass-through opening is filled by a filling material, in order to define at least one first and one second lateral portions in the body, being parallel and joined to each other by a connecting central portion realized by the filling material at the pass-through opening, the connecting central portion made of the filling material acting as a strengthening element.

    PROBE CARD FOR ELECTRONIC DEVICES
    49.
    发明申请

    公开(公告)号:US20190113539A1

    公开(公告)日:2019-04-18

    申请号:US16219783

    申请日:2018-12-13

    Abstract: A probe card for testing of electronic devices comprises a testing head with plural contact probes inserted into guide holes of an upper guide and a lower guide, and a space transformer, each of the contact probes having a first terminal portion projecting from the lower guide with a first length and ending with a contact tip adapted to abut onto a respective contact pad of a device to be tested, and a second terminal portion projecting from the upper guide with a second length and ending with a contact head adapted to abut onto a contact pad of the space transformer. The probe card comprises a spacer element interposed between the space transformer and the upper guide and removable to adjust the first length of the first terminal portion by changing the second length of the second terminal portion and approaching the upper guide and the space transformer.

    TESTING HEAD COMPRISING VERTICAL PROBES
    50.
    发明申请

    公开(公告)号:US20180011126A1

    公开(公告)日:2018-01-11

    申请号:US15703627

    申请日:2017-09-13

    Inventor: Daniele Acconcia

    Abstract: A testing head for functionality testing a device under test comprises a plurality of contact probes, each contact probe having a rod-like body having a preset length less than 5000 μm extending between a first and a second end, the second end being a contact tip and an opening extending all over its length and defining a plurality of arms, parallel to each other, separated by the opening and connected to the end portions of the contact probe, and an auxiliary guide, arranged transverse to the body and provided with suitable guide holes, the contact probes sliding through each of them, the auxiliary guide defining a gap including one end of the opening being a critical portion of the body and a zone more prone to breakings in the body undergoing low or even no bending stresses in the gap with respect to the rest of the body.

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