公开(公告)号：US20050196896A1

公开(公告)日：2005-09-08

申请号：US11110184

申请日：2005-04-19

Applicant: Satyadev Patel ,  Andrew Huibers ,  Chris Spindt ,  Peter Heureux

Inventor： Satyadev Patel ,  Andrew Huibers ,  Chris Spindt ,  Peter Heureux

IPC: G09G3/34

CPC classification number: G09G3/346 ,  G02B26/0833 ,  G09G2300/0426 ,  G09G2300/0465

Abstract: Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.

Abstract translation: 本文公开了一种微镜阵列器件，其包括反射偏转镜板阵列，每个反射镜阵列与一个单个寻址电极相关联以被偏转到ON状态角。 透光电极设置在靠近镜板的位置，用于将镜板偏转到非零OFF角度。 镜面阵列布置在阵列中，中心距离为10.17微米或更小。

公开(公告)号：US20050191790A1

公开(公告)日：2005-09-01

申请号：US11102295

申请日：2005-04-07

Applicant: Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

Inventor： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/44 ,  H01L21/48

CPC classification number: B81C1/00214 ,  B81B7/0077 ,  B81B2201/042 ,  B81C1/00333 ,  B81C1/00896 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  H01L24/97 ,  H01L2224/48091 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01058 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2224/85 ,  H01L2924/00

Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

公开(公告)号：US20050170614A1

公开(公告)日：2005-08-04

申请号：US11093927

申请日：2005-03-29

Applicant: Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

Inventor： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

IPC: B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  G02B26/08 ,  H01L21/301 ,  H01L21/00 ,  H01L21/44

CPC classification number: B81C1/00214 ,  B81B7/0077 ,  B81B2201/042 ,  B81C1/00333 ,  B81C1/00896 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  G02B26/0833 ,  H01L24/97 ,  H01L2224/48091 ,  H01L2224/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01058 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/15787 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00014 ,  H01L2224/85 ,  H01L2924/00

Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

公开(公告)号：US20050157375A1

公开(公告)日：2005-07-21

申请号：US11056752

申请日：2005-02-11

Applicant: Jonathan Doan ,  Andrew Huibers ,  Satyadev Patel ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

Inventor： Jonathan Doan ,  Andrew Huibers ,  Satyadev Patel ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

IPC: G02B26/00

CPC classification number: B82Y30/00

Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

Abstract translation: 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。

公开(公告)号：US20050054135A1

公开(公告)日：2005-03-10

申请号：US10969380

申请日：2004-10-19

Applicant: Satyadev Patel ,  Jonathan Doan ,  Andrew Huibers

Inventor： Satyadev Patel ,  Jonathan Doan ,  Andrew Huibers

IPC: B81B7/00 ,  B81C20060101 ,  B81C1/00 ,  H01L21/00 ,  H01L21/76

CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

Abstract translation: 本文公开了一种用于处理微机电装置的方法。 该方法通过在连续的牺牲层和结构层之间提供选定的阻挡层来防止牺牲层与微机电器件的结构层之间的扩散和相互作用。

公开(公告)号：US07436572B2

公开(公告)日：2008-10-14

申请号：US10927408

申请日：2004-08-25

Applicant: Andrew Huibers ,  Satyadev Patel

Inventor： Andrew Huibers ,  Satyadev Patel

IPC: G02B26/02 ,  G03B21/26

CPC classification number: H04N5/7458 ,  G02B26/008 ,  G02B26/0841 ,  G03B21/008

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each having a hinge and a micromirror plate held via a hinge on a substrate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis and the hinge structure is located between the micromirror plate and the light source. The mirror plate is formed between the hinge and the substrate on which the hinge is formed. As a result, the hinge is exposed to the incident light during the operation.

Abstract translation: 公开了一种空间光调制器以及用于制造这种调制器的方法。 空间光调制器包括微镜阵列，每个微镜具有通过基板上的铰链保持的铰链和微镜板，微镜板附接到铰链，使得微镜板可以沿着旋转轴线旋转并且铰链结构位于 在微镜板和光源之间。 镜板形成在铰链和形成有铰链的基板之间。 结果，在操作期间铰链暴露于入射光。

公开(公告)号：US07411717B2

公开(公告)日：2008-08-12

申请号：US11256035

申请日：2005-10-21

Applicant: Satyadev Patel ,  Andrew Huibers

Inventor： Satyadev Patel ,  Andrew Huibers

IPC: G02B26/00

CPC classification number: G02B26/0841

Abstract: A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is not parallel to the substrate on which the mirror plate is formed. The micromirror device may have an ON state stopper for limiting the rotation of the mirror plate at the ON state angle, but does not have an OFF state stopper. The non-zero OFF state is achieved by attaching the mirror plate to a deformable hinge held by a hinge support that is curved at the natural resting state.

Abstract translation: 空间光调制器包括微镜器件的阵列，每个微镜器件具有反射和可偏转的镜板。 在操作期间，镜板在ON和OFF状态之间移动，其中OFF状态是其中镜板不平行于其上形成有镜板的基板的状态。 微反射镜装置可以具有ON状态止动器，用于将镜板的旋转限制在ON状态角度，但不具有OFF状态挡块。 通过将镜板附接到由在自然静止状态下弯曲的铰链支撑件保持的可变形铰链来实现非零关闭状态。

公开(公告)号：US07394140B2

公开(公告)日：2008-07-01

申请号：US11110184

申请日：2005-04-19

Applicant: Satyadev Patel ,  Andrew Huibers ,  Chris Spindt ,  Peter H Heureux

Inventor： Satyadev Patel ,  Andrew Huibers ,  Chris Spindt ,  Peter H Heureux

IPC: H01L31/0232 ,  G02B26/00

CPC classification number: G09G3/346 ,  G02B26/0833 ,  G09G2300/0426 ,  G09G2300/0465

Abstract: Disclosed herein is a micromirror array device that comprises an array of reflective deflectable mirror plates each being associated with one single addressing electrode to be deflected to an ON state angle. A light transmissive electrode is disposed proximate to the mirror plates for deflecting the mirror plates to a non-zero OFF angle. The mirror plates are arranged in the array with a center-to-centre distance of 10.17 microns or less.

Abstract translation: 本文公开了一种微镜阵列器件，其包括反射偏转镜板阵列，每个反射镜阵列与一个单个寻址电极相关联以被偏转到ON状态角。 透光电极设置在靠近镜板的位置，用于将镜板偏转到非零OFF角度。 镜面阵列布置在阵列中，中心距离为10.17微米或更小。

公开(公告)号：US07215459B2

公开(公告)日：2007-05-08

申请号：US11056732

申请日：2005-02-11

Applicant: Andrew Huibers ,  Satyadev Patel ,  Jonathan Doan ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

Inventor： Andrew Huibers ,  Satyadev Patel ,  Jonathan Doan ,  James Dunphy ,  Dmitri Simonian ,  Hongqin Shi ,  Jianglong Zhang

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B27/1033 ,  Y10S359/904

Abstract: Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.

Abstract translation: 本文公开了一种具有面向可变形铰链的微反射镜装置，可偏转和反射的反射镜板附接到该反射镜。 响应于在镜板和与镜板相关联的寻址电极之间建立的静电场，镜板旋转到不同的角度。

公开(公告)号：US07042623B1

公开(公告)日：2006-05-09

申请号：US10969258

申请日：2004-10-19

Applicant: Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

Inventor： Andrew Huibers ,  Satyadev Patel ,  Terry Tarn

IPC: G02B26/00

CPC classification number: G02B26/0833

Abstract: Disclosed herein is a micromirror array device package having a light absorbing material disposed within the package for reducing undesired light scattering. The light absorbing material can be deposited as a thin film (or strip, frame, segments or a combination thereof), or as a vertical wall insert between the micromirror array device and a cover substrate of the package.

Abstract translation: 本文公开了一种微镜阵列器件封装，其具有设置在封装内的光吸收材料，用于减少不期望的光散射。 光吸收材料可以作为薄膜（或条，框架，段或其组合）沉积，或者作为微镜阵列器件和封装的覆盖衬底之间的垂直壁插入物沉积。