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公开(公告)号：US08830465B2
公开(公告)日：2014-09-09
申请号：US13700150
申请日：2011-06-17
IPC分类号： G01J4/00 , G01N21/956 , G01N21/95 , G01N21/94
CPC分类号： G01N21/956 , G01N21/94 , G01N21/9501
摘要： A defect inspecting apparatus includes an irradiation optical system having a light source that emits illumination light and a polarization generation part that adjusts polarization state of the illumination light emitted from the light source, a detection optical system having a polarization analysis part that adjusts polarization state of scattered light from a sample irradiated by the irradiation optical system and a detection part that detects the scattered light adjusted by the polarization analysis part, and a signal processing system that processes the scattered light detected by the detection optical system to detect a defect presenting in the sample. The polarization generation part adjusts the polarization state of the illumination light emitted from the light source on the basis of predetermined illumination conditions and the polarization analysis part adjusts the polarization state of the illumination light emitted from the light source on the basis of predetermined detection conditions.
摘要翻译： 缺陷检查装置包括具有发出照明光的光源的照射光学系统和调整从光源发出的照明光的偏振状态的偏振光产生部，具有调整偏振状态的偏振光分析部的检测光学系统 由照射光学系统照射的样本的散射光和检测由偏振分析部调节的散射光的检测部，以及处理由检测光学系统检测出的散射光的信号处理系统， 样品。 偏光产生部根据规定的照明条件来调整从光源发出的照明光的偏光状态，偏光分析部基于规定的检测条件来调整从光源发出的照明光的偏振状态。
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公开(公告)号：US20140233024A1
公开(公告)日：2014-08-21
申请号：US14235916
申请日：2012-05-14
IPC分类号： G01N21/95
CPC分类号： G01N21/95 , G01B11/0641 , G01N21/211 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/8822 , G01N2021/9513 , G02F1/1303 , G02F1/136259
摘要： An invention being applied is a defect detecting apparatus that has: an illuminating optical system with a laser light source for irradiating a sample on whose surface a pattern is formed with light; a detecting optical system with a sensor for detecting light generated from the sample illuminated by the illuminating optical system; and a signal processing unit that extracts a defect from an image based on the light detected by the detecting optical system, in which an amplification rate of the sensor is dynamically changed during a time when the light is detected by the detecting optical system.
摘要翻译： 一种应用的发明是一种缺陷检测装置，其具有：具有激光光源的照明光学系统，用于对其表面形成有图案的样品进行照射; 检测光学系统，其具有用于检测由照明光学系统照射的样本产生的光的传感器; 以及信号处理单元，其基于由检测光学系统检测到的光的时间期间传感器的放大率动态地改变的检测光学系统检测到的光，从图像中提取缺陷。
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公开(公告)号：US20130293879A1
公开(公告)日：2013-11-07
申请号：US13993888
申请日：2011-11-08
IPC分类号： G01N21/95
CPC分类号： G01N21/00 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8896
摘要： To process a signal from a plurality of detectors without being affected by a variation in the height of a substrate, and to detect more minute defects on the substrate, a defect inspection device is provided with a photoelectric converter having a plurality of rows of optical sensor arrays in each of first and second light-collecting/detecting unit and a processing unit for processing a detection signal from the first and the second light-collecting/detecting unit to determine the extent to which the positions of the focal points of the first and the second light-collecting/detecting unit are misaligned with respect to the surface of a test specimen, and processing the detection signal to correct a misalignment between the first and the second light-collecting/detecting unit, and the corrected detection signal outputted from the first and the second light-collecting/detecting unit are combined together to detect the defects on the test specimen.
摘要翻译： 为了处理来自多个检测器的信号而不受基板高度的变化的影响，并且在基板上检测更多的微小缺陷，缺陷检查装置设置有具有多行光学传感器的光电转换器 在第一和第二集光/检测单元中的每一个中的阵列，以及处理单元，用于处理来自第一和第二聚光/检测单元的检测信号，以确定第一和第二聚光/ 第二聚光/检测单元相对于试样的表面不对准，并且处理检测信号以校正第一和第二聚光/检测单元之间的未对准，并且校正的检测信号从 第一和第二聚光/检测单元组合在一起以检测试样上的缺陷。
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44.发明申请公开(公告)号：US20110286001A1
公开(公告)日：2011-11-24
申请号：US13142328
申请日：2010-01-20
IPC分类号： G01N21/55
CPC分类号： G01N21/9501 , G01N21/21 , G01N21/47 , G01N21/4788 , G01N21/93 , G01N21/94 , G01N21/956 , G01N2021/8822
摘要： By including an illumination system and a detection system, an information collecting function of monitoring an environment, such as temperature and atmospheric pressure, and an apparatus state managing function having a feedback function of comparing the monitoring result and a design value, a theoretical calculation value or an ideal value derived from simulation results and calibrating an apparatus so that the monitoring result is brought close to the ideal value, a unit for keeping the apparatus state and apparatus sensitivity constant is provided. A control unit 800 is configured to include a recording unit 801, a comparing unit 802, a sensitivity predicting unit 803, and a feedback control unit 804. In the comparing unit 802, the monitoring result transmitted from the recording unit 801 and an ideal value stored in a database 805 are compared with each other. When a difference between the ideal value and the monitoring result exceeds a predetermined threshold, the feedback control unit 804 corrects the illumination system and the detection system.
摘要翻译： 通过包括照明系统和检测系统，监视诸如温度和大气压力之类的环境的信息收集功能，以及具有比较监视结果和设计值的反馈功能的设备状态管理功能，理论计算值 或者从模拟结果导出的理想值，并且对设备进行校准，使得监视结果接近理想值，提供用于保持设备状态和设备灵敏度恒定的单元。 控制单元800被配置为包括记录单元801，比较单元802，灵敏度预测单元803和反馈控制单元804.在比较单元802中，从记录单元801发送的监视结果和理想值 存储在数据库805中进行比较。 当理想值与监视结果之间的差异超过预定阈值时，反馈控制单元804校正照明系统和检测系统。
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45.发明授权公开(公告)号：US08017255B2
公开(公告)日：2011-09-13
申请号：US12551184
申请日：2009-08-31
IPC分类号： B32B15/00
CPC分类号： H01F1/00 , H01F1/28 , H01F17/04 , H01F27/365 , H01F41/20 , H01F2017/065 , H01L23/552 , H01L27/14618 , H01L2924/0002 , H01L2924/3011 , H05K1/0233 , H05K3/284 , H05K3/285 , H05K9/0083 , H05K9/009 , H05K2201/083 , H05K2201/086 , Y10T428/269 , Y10T428/32 , Y10T428/325 , H01L2924/00
摘要： An electromagnetic noise suppressor of the present invention has magnetic resonance frequency of 8 GHz or higher, and the imaginary part of complex magnetic permeability at 8 GHz is higher than the imaginary part of complex magnetic permeability at 5 GHz. Such an electromagnetic noise suppressor is capable of achieving sufficient electromagnetic noise suppressing effect over the entire sub-microwave band. The electromagnetic noise suppressor can be manufactured by forming a composite layer on the surface of a binding agent through physical deposition of a magnetic material on the binding agent. The structure with an electromagnetic noise suppressing function of the present invention is a printed wiring board, a semiconductor integrated circuit or the like that is covered with the electromagnetic noise suppressor on at least a part of the surface of the structure.
摘要翻译： 本发明的电磁噪声抑制器的磁共振频率为8GHz以上，8GHz的复磁导率的虚部高于5GHz的复磁导率的虚部。 这样的电磁噪声抑制器能够在整个子微波带上实现足够的电磁噪声抑制效果。 可以通过在粘合剂上物理沉积磁性材料，在粘合剂的表面上形成复合层来制造电磁噪声抑制器。 本发明的具有电磁噪声抑制功能的结构是在该结构体的至少一部分表面被电磁噪声抑制器覆盖的印刷电路板，半导体集成电路等。
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46.发明申请COMMUNICATION NODE APPARATUS, COMMUNICATION SYSTEM, AND PATH RESOURCE ASSIGNMENT METHOD 有权通信节点设备，通信系统和路径资源分配方法公开(公告)号：US20100208584A1
公开(公告)日：2010-08-19
申请号：US12443917
申请日：2007-10-05
申请人： Yoshiaki Sone , Wataru Imajyuku , Naohide Nagatsu , Yukio Tsukishima , Kazuhisa Yamada , Atsushi Taniguchi
发明人： Yoshiaki Sone , Wataru Imajyuku , Naohide Nagatsu , Yukio Tsukishima , Kazuhisa Yamada , Atsushi Taniguchi
CPC分类号： H04L45/00 , H04L45/245 , H04L45/28 , H04L47/125 , H04L47/41 , Y02D50/30
摘要： In a communication system, including a plurality of communication node apparatuses, for establishing a path for communication by exchanging a message among the plurality of communication node apparatuses, before establishing a path, an identifier of a path for which reuse of resources of the path to be established is permitted or inhibited is determined, and the determined identification information is included in a control message so that the path is established. A communication node apparatus in which the path has been established determines availability of reuse of resources the path based on the identification information in the control message. When an event such as failure occurrence, occurrence of resource reuse or dissolution of resource reuse occurs, the communication node apparatus executes path priority change processing, so that priority can be changed such that resource reuse can be performed most efficiently.
摘要翻译： 在包括多个通信节点装置的通信系统中，在建立路径之前，通过在多个通信节点装置之间交换消息来建立通信路径，将路径的资源重用的路径的标识符 确定被允许或禁止被建立，并且所确定的识别信息被包括在控制消息中，使得建立路径。 已经建立了路径的通信节点装置基于控制消息中的识别信息来确定资源的再利用的可用性。 当发生诸如故障发生，资源重用或资源重用的发生的事件发生时，通信节点设备执行路径优先级改变处理，使得可以改变优先级，使得可以最有效地执行资源重用。
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47.发明授权Optical signal quality monitoring circuit and optical signal quality monitoring method 有权光信号质量监控电路和光信号质量监控方法公开(公告)号：US07684697B2
公开(公告)日：2010-03-23
申请号：US10585532
申请日：2005-06-03
申请人： Ippei Shake , Hidehiko Takara , Atsushi Taniguchi
发明人： Ippei Shake , Hidehiko Takara , Atsushi Taniguchi
IPC分类号： H04B10/08
CPC分类号： H04L1/20 , H04B10/07953
摘要： The present invention provides an optical signal quality monitoring circuit and an optical signal quality monitoring method for measuring correct optical signal quality parameters when a signal bit rate is changed. The optical signal quality monitoring circuit which samples and converts an electrical signal converted from an optical signal with a given repeated frequency f1 to digital sampling data through an analog to digital conversion, thereafter, evaluates an optical signal quality parameter of the optical signal by subjecting sampling data to electrical signal processing in an integrated circuit in which a signal processing function is programmed, receives a control signal notifying that the bit rate of the optical signal is changed, or detects that the bit rate of the optical signal is changed to correct optical the signal quality parameter of the optical signal corresponding to the signal bit rate of the optical signal which is changed.
摘要翻译： 本发明提供一种光信号质量监测电路和光信号质量监测方法，用于在信号比特率改变时测量正确的光信号质量参数。 光信号质量监测电路对从具有给定重复频率f1的光信号转换成的电信号通过模数转换进行数字采样数据进行采样和转换，此后通过对采样信号进行采样来评估光信号的光信号质量参数 在其中对信号处理功能进行编程的集成电路中的电信号处理的数据接收通知光信号的比特率改变的控制信号，或者检测到光信号的比特率被改变以校正光信号 对应于改变的光信号的信号比特率的光信号的信号质量参数。
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公开(公告)号：US20090314539A1
公开(公告)日：2009-12-24
申请号：US12551156
申请日：2009-08-31
CPC分类号： H05K9/0083 , H01F10/08 , H01F41/18 , H01F2017/065 , H05K1/0233 , H05K3/28 , Y10T156/10 , Y10T428/25 , Y10T428/26 , Y10T428/31504 , Y10T428/32
摘要： An electromagnetic noise suppressor of the present invention includes a base material containing a binding agent and a composite layer formed by integrating the binding agent that is a part of the base material and the magnetic material. This electromagnetic noise suppressor has high electromagnetic noise suppressing effect in the sub-microwave band, and enables it to reduce the space requirement and weight. The electromagnetic noise suppressor can be manufactured by forming the composite layer on the surface of the base material by physical vapor deposition of the magnetic material onto the surface of the base material. The article with an electromagnetic noise suppressing function of the present invention is an electronic component, a printed wiring board, a semiconductor integrated circuit or other article of which at least a part of the surface is covered by the electromagnetic noise suppressor of the present invention.
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49.发明授权Electromagnetic noise suppressor, article with electromagnetic noise suppressing function, and their manufacturing methods 有权电磁噪声抑制器，具有电磁噪声抑制功能的制品及其制造方法公开(公告)号：US07625633B2
公开(公告)日：2009-12-01
申请号：US10540825
申请日：2004-03-23
IPC分类号： B32B9/04
CPC分类号： H05K9/0083 , H01F10/08 , H01F41/18 , H01F2017/065 , H05K1/0233 , H05K3/28 , Y10T156/10 , Y10T428/25 , Y10T428/26 , Y10T428/31504 , Y10T428/32
摘要： An electromagnetic noise suppressor of the present invention includes a base material 2 containing a binding agent and a composite layer 3 formed by integrating the binding agent that is a part of the base material 2 and the magnetic material. This electromagnetic noise suppressor has high electromagnetic noise suppressing effect in the sub-microwave band, and enables it to reduce the space requirement and weight. The electromagnetic noise suppressor can be manufactured by forming the composite layer 3 on the surface of the base material 2 by physical vapor deposition of the magnetic material onto the surface of the base material 2. The article with an electromagnetic noise suppressing function of the present invention is an electronic component, a printed wiring board, a semiconductor integrated circuit or other article of which at least a part of the surface is covered by the electromagnetic noise suppressor of the present invention.
摘要翻译： 本发明的电磁噪声抑制器包括含有粘合剂的基材2和通过将作为基材2的一部分的粘结剂与磁性材料整合而形成的复合层3。 该电磁噪声抑制器在亚微波带中具有高电磁噪声抑制效果，能够减小空间要求和重量。 可以通过在基材2的表面物理气相沉积基材2的表面上形成复合层3来制造电磁噪声抑制器。具有本发明的具有电磁噪声抑制功能的物品 是本发明的电磁噪声抑制器覆盖表面的至少一部分的电子部件，印刷线路板，半导体集成电路或其他物品。
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50.发明申请Optical Signal Quality Monitoring Circuit and Optical Signal Quality Monitoring Method 有权光信号质量监测电路和光信号质量监测方法公开(公告)号：US20080285970A1
公开(公告)日：2008-11-20
申请号：US10585532
申请日：2005-06-03
申请人： Ippei Shake , Hidehiko Takara , Atsushi Taniguchi
发明人： Ippei Shake , Hidehiko Takara , Atsushi Taniguchi
CPC分类号： H04L1/20 , H04B10/07953
摘要： The present invention provides an optical signal quality monitoring circuit and an optical signal quality monitoring method for measuring correct optical signal quality parameters when a signal bit rate is changed. The optical signal quality monitoring circuit which samples and converts an electrical signal converted from an optical signal with a given repeated frequency f1 to digital sampling data through an analog to digital conversion, thereafter, evaluates an optical signal quality parameter of the optical signal by subjecting sampling data to electrical signal processing in an integrated circuit in which a signal processing function is programmed, receives a control signal notifying that the bit rate of the optical signal is changed, or detects that the bit rate of the optical signal is changed to correct optical the signal quality parameter of the optical signal corresponding to the signal bit rate of the optical signal which is changed.
摘要翻译： 本发明提供一种光信号质量监测电路和光信号质量监测方法，用于在信号比特率改变时测量正确的光信号质量参数。 此后，光信号质量监测电路通过模/数转换将具有给定重复频率f 1的光信号转换的电信号进行采样和转换为数字采样数据，此后评估光信号质量 通过对其中对信号处理功能进行编程的集成电路中的采样数据进行电信号处理的光信号的参数，接收通知光信号的比特率改变的控制信号，或者检测到 光信号被改变以校正对应于改变的光信号的信号比特率的光信号的信号质量参数。
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