摘要:
The present invention provides a manufacturing method of a thin film transistor array panel, which includes forming a gate line on a substrate; forming a gate insulating layer, a semiconductor layer, and an ohmic contact on the gate line; forming a first conducting film including Mo, a second conducting film including Al, and a third conducting film including Mo on the ohmic contact; forming a first photoresist pattern on the third conducting film; etching the first, second, and third conducting films, the ohmic contact, and the semiconductor layer using the first photoresist pattern as a mask; removing the first photoresist pattern by a predetermined thickness to form a second photoresist pattern; etching the first, second, and third conducting films using the second photoresist pattern as a mask to expose a portion of the ohmic contact; and etching the exposed ohmic contact using a Cl-containing gas and a F-containing gas.
摘要:
A liquid crystal display device including a first substrate, a common electrode formed over the first substrate, and a second substrate disposed opposite the first substrate. A common voltage-applying member applies a common voltage to the common electrode and maintains a cell gap between the first substrate and the second substrate. The common voltage-applying member includes an insulator and a conductor formed over the insulator.
摘要:
A display substrate includes a thin film transistor layer, a color filter layer, a plurality of pixel electrodes, a first cover layer and an alignment layer. The thin film transistor layer includes a plurality of pixel regions. The color filter layer is formed on the thin film transistor layer. The pixel electrodes are formed on the color filter layer with at least one gap defined between adjacent pixel electrodes. The first cover layer is provided in the gap between adjacent pixel electrodes and covers a portion of the color filter layer exposed by the gap between the pixel electrodes. The alignment layer is formed on the pixel electrodes and the first cover layer. Therefore, the color filter layer is spaced apart from the alignment layer to decrease an afterimage, thereby improving an image display quality
摘要:
A method of fabricating a semiconductor device is provided. The method includes forming at least one etch target film on a substrate, forming a first reflowable etch mask on the at least one etch target film, patterning the etch target film using the first reflowable etch mask. The method further includes reflowing the first reflowable etch mask to form a second etch mask and patterning the etch target film using the second etch mask.
摘要:
A thin film transistor array panel comprising: an insulating substrate; a plurality of gate lines formed on the insulating substrate and including a plurality of gate electrodes and end portions; a plurality of storage electrode lines formed on the insulating substrate; a gate insulating layer formed on the gate lines and storage electrode lines; a semiconductor layer formed on the gate insulating layer; a ohmic contact layer formed on the semiconductor layer; a plurality of data lines formed on the gate insulating layer, intersecting the gate lines to define a display area, and having source electrodes and end portions; a plurality of drain electrodes facing the source electrodes; a passivation layer formed on the data lines and drain electrodes and having contact holes; a plurality of pixel electrodes formed on the passivation layer and connected to the drain electrodes through the contact holes; a storage line connecting bar connecting the storage electrode lines; and a redundant connecting line connecting the storage electrode lines is provided.
摘要:
A gate line extending in a horizontal direction is formed on an insulating substrate, and a data line is formed perpendicular to the gate line defining a pixel of a matrix array. Pixel electrodes receiving image signals through the data line are formed in a pixel, and a thin film transistor having a gate electrode connected to the gate line, a source electrode connected to the data line, and a drain electrode connected to the pixel electrode is formed on the portion where the gate lines and the data lines intersect. A storage wire including a storage electrode line in the horizontal direction, a storage electrode connected to the storage electrode line, and at least one of the storage electrode connection portions connecting storage electrodes of neighboring pixels is formed in the same direction as the gate line. A redundant repair line overlaps and is insulated from the storage wire at one end and overlaps the storage wire or the gate wire of a neighboring pixel at the other end is formed in the same layer as the data wire. Also, a storage wire connection portion connecting the storage wires of a neighboring pixel is formed in the same layer as the pixel electrode. In this structure, if portions of the gate wire or the data wire are disconnected, the portions overlapping the disconnected wire, the storage wire, and the redundant repair line are shorted to repair an open wire defect.
摘要:
Embodiments of the present invention relate to a thin film transistor and a manufacturing method of a display panel, and include forming a gate line including a gate electrode on a substrate, forming a gate insulating layer on the gate electrode, forming an intrinsic semiconductor on the gate insulating layer, forming an extrinsic semiconductor on the intrinsic semiconductor, forming a data line including a source electrode and a drain electrode on the extrinsic semiconductor, and plasma-treating a portion of the extrinsic semiconductor between the source electrode and the drain electrode to form a protection member and ohmic contacts on respective sides of the protection member. Accordingly, the process for etching the extrinsic semiconductor and forming an inorganic insulating layer for protecting the intrinsic semiconductor may be omitted such that the manufacturing process of the display panel may be simplified, manufacturing cost may be reduced, and productivity may be improved.
摘要:
A thin film transistor array panel includes a substrate; a plurality of gate lines that are formed on the substrate; a plurality of data lines that intersect the gate lines; a plurality of thin film transistors that are connected to the gate lines and the data lines; a plurality of color filters that are formed on upper parts of the gate lines, the data lines, and the thin film transistors; a common electrode that is formed on the color filters and that includes a transparent conductor; a passivation layer that is formed on an upper part of the common electrode; and a plurality of pixel electrodes that are formed on an upper part of the passivation layer and that are connected to a drain electrode of each of the thin film transistors.
摘要:
A display panel comprises a first substrate, a second substrate including a display area and a peripheral area surrounding the display area, a transistor layer including, formed in the display area of the substrate, at least one transistor connected to a gate line and a data line, at least one color filter formed in a plurality of pixel regions on the transistor layer, a light blocking member disposed between the color filters, at least one pixel electrode formed on the color filter, an opaque spacing part formed on the color filter corresponding to the transistor so as to maintain a cell gap between the first and second substrates. The light blocking member in some embodiments of the invention is not formed on the first and second transistors to allow for inspection of a channel in the transistor.
摘要:
A thin film transistor array panel includes a substrate; a plurality of gate lines that are formed on the substrate; a plurality of data lines that intersect the gate lines; a plurality of thin film transistors that are connected to the gate lines and the data lines; a plurality of color filters that are formed on upper parts of the gate lines, the data lines, and the thin film transistors; a common electrode that is formed on the color filters and that includes a transparent conductor; a passivation layer that is formed on an upper part of the common electrode; and a plurality of pixel electrodes that are formed on an upper part of the passivation layer and that are connected to a drain electrode of each of the thin film transistors.