Soft adjacent layer (SAL) magnetoresistive (MR) sensor element with
electrically insulated soft adjacent layer (SAL)
    41.
    发明授权
    Soft adjacent layer (SAL) magnetoresistive (MR) sensor element with electrically insulated soft adjacent layer (SAL) 失效
    具有电绝缘软相邻层(SAL)的软相邻层(SAL)磁阻(MR)传感器元件

    公开(公告)号:US06007731A

    公开(公告)日:1999-12-28

    申请号:US46008

    申请日:1998-03-23

    摘要: A soft adjacent layer (SAL) magnetoresistive (MR) sensor element and a method for fabricating the soft adjacent layer (SAL) magnetoresistive (MR) sensor element. To practice the method, there is first provided a substrate. There is formed over the substrate a dielectric layer which has a first surface of the dielectric layer and a second surface of the dielectric layer opposite the first surface of the dielectric layer. The is also formed over the substrate a magnetoresistive (MR) layer in contact with the first surface of the dielectric layer. Similarly, there is also formed over the substrate a soft adjacent layer (SAL) in contact with the second surface of the dielectric layer, where the magnetoresistive (MR) layer, the soft adjacent layer (SAL) and the dielectric layer are planar and preferably at least substantially co-extensive. The invention contemplates a soft adjacent layer (SAL) magnetoresistive (MR) sensor element formed employing the method of the invention.

    摘要翻译: 软相邻层(SAL)磁阻(MR)传感器元件和用于制造软相邻层(SAL)磁阻(MR)传感器元件的方法。 为了实践该方法,首先提供了一种衬底。 在衬底上形成介电层,其具有电介质层的第一表面和与电介质层的第一表面相对的电介质层的第二表面。 还在衬底上形成与电介质层的第一表面接触的磁阻(MR)层。 类似地,还在衬底上形成与电介质层的第二表面接触的软相邻层(SAL),其中磁阻(MR)层,软相邻层(SAL)和电介质层是平面的并且优选地 至少基本上共同广泛。 本发明考虑使用本发明的方法形成的软相邻层(SAL)磁阻(MR)传感器元件。

    Process to form a flux concentration stitched write head
    42.
    发明授权
    Process to form a flux concentration stitched write head 失效
    形成通量集中缝合写头的工艺

    公开(公告)号:US06596468B1

    公开(公告)日:2003-07-22

    申请号:US09659790

    申请日:2000-09-11

    IPC分类号: G03C556

    摘要: A general process for filling a trench is described with particular emphasis on the formation of step P1 during the manufacture of a magnetic write head. The main feature of this process is that a liftoff mask is used for both the trench formation and the filling processes. As a result of this approach, the area surrounding the trench is not disturbed, the trench depth is not reduced, and the original overall planarity, prior to etching and filling, is maintained.

    摘要翻译: 描述了用于填充沟槽的一般过程,其特别强调在制造磁写头期间形成步骤P1。 该过程的主要特征是使用剥离掩模进行沟槽形成和填充过程。 作为这种方法的结果,沟槽周围的区域不受干扰,沟槽深度不减小,并且在蚀刻和填充之前保持原始的整体平面度。

    High track density dual stripe magnetoresistive (DSMR) head
    43.
    发明授权
    High track density dual stripe magnetoresistive (DSMR) head 失效
    高轨道密度双条磁阻(DSMR)头

    公开(公告)号:US5684658A

    公开(公告)日:1997-11-04

    申请号:US727264

    申请日:1996-10-07

    IPC分类号: G11B5/012 G11B5/39 G11B5/48

    摘要: A method for forming a dual stripe magnetoresistive (DSMR) sensor element, and the dual stripe magnetoresistive (DSMR) sensor element formed through the method. To practice the method, there is formed upon a substrate a first magnetoresistive (MR) layer, where the first magnetoresistive (MR) layer has a first sensor region longitudinally magnetically biased in a first longitudinal bias direction through a patterned first longitudinal magnetic biasing layer. There is then formed a second magnetoresistive (MR) layer parallel with and separated from the first magnetoresistive (MR) layer by an insulator layer. The second magnetoresistive (MR) layer has a second sensor region longitudinally magnetically biased in a second longitudinal bias direction through a patterned second longitudinal magnetic biasing layer. The first longitudinal bias direction and the second longitudinal bias direction are substantially parallel. In addition, the first sensor region and the second sensor region are physically offset. Finally, the first magnetoresistive (MR) layer is electromagnetically biased with a first bias current in a first bias current direction and the second magnetoresistive (MR) layer is electromagnetically biased with a second bias current in a second bias current direction, where the first bias current direction and the second bias current direction are substantially parallel.

    摘要翻译: 一种用于形成双条磁阻(DSMR)传感器元件的方法和通过该方法形成的双条带磁阻(DSMR)传感器元件。 为了实施该方法,在衬底上形成第一磁阻(MR)层,其中第一磁阻(MR)层具有通过图案化的第一纵向磁偏置层在第一纵向偏置方向上纵向磁偏置的第一传感器区。 然后通过绝缘体层形成与第一磁阻(MR)层平行并与第一磁阻(MR)层分离的第二磁阻(MR)层。 第二磁阻(MR)层具有通过图案化的第二纵向磁偏置层在第二纵向偏置方向上纵向磁偏置的第二传感器区。 第一纵向偏置方向和第二纵向偏置方向基本平行。 此外,第一传感器区域和第二传感器区域被物理偏移。 最后,第一磁阻(MR)层在第一偏置电流方向上以第一偏置电流进行电磁偏置,第二磁阻(MR)层在第二偏置电流方向上以第二偏置电流进行电磁偏置,其中第一偏置 电流方向和第二偏置电流方向基本上平行。

    Robust protective layer for MTJ devices
    44.
    发明申请
    Robust protective layer for MTJ devices 审中-公开
    坚固的MTJ设备保护层

    公开(公告)号:US20070080381A1

    公开(公告)日:2007-04-12

    申请号:US11248965

    申请日:2005-10-12

    IPC分类号: H01L29/94

    摘要: MTJ devices commonly degrade when subjected to the heat treatments required by subsequent further processing. This problem has been overcome by protecting the MTJ's sidewalls with a two layer laminate. The first layer is laid down under oxygen-free conditions, no attempt being made to replace any oxygen that is lost during the deposition. This is followed immediately by the deposition of the second layer (usually, but not mandatorily, of the same material as the first layer) in the presence of some oxygen.

    摘要翻译: 当经过后续进一步处理所需的热处理时,MTJ装置通常会降解。 通过用双层层压板保护MTJ的侧壁已经克服了这个问题。 第一层被放置在无氧条件下,没有试图取代沉积过程中损失的任何氧气。 这是在存在一些氧气的情况下立即通过沉积第二层(通常但不强制地与第一层相同的材料)沉积。

    Narrow track stitched GMR head
    45.
    发明授权
    Narrow track stitched GMR head 失效
    窄轨缝合GMR头

    公开(公告)号:US06416677B1

    公开(公告)日:2002-07-09

    申请号:US09585785

    申请日:2000-06-05

    IPC分类号: B44C122

    CPC分类号: G11B5/37

    摘要: As the read capabilities of magnetic disk systems improve due to advanced GMR heads, it becomes necessary to correspondingly reduce the area of recorded data. This requires a narrowing of the stitched sub-pole at the write gap. This has proved difficult for pole widths less than about 0.4 microns because of problems in filling the mold. In the present invention this is overcome by introducing a layer of PMGI (polydimethylglutarimide) between the planarized positive photoresist layer that comprises the mold and the non-magnetic write gap layer on which the mold rests. This greatly facilitates formation of a high aspect ratio hole with a clean flat bottom and essentially vertical sides as well as the subsequent removal of the photoresist after said hole has been filled through electroplating to form a stitched sub-pole.

    摘要翻译: 由于高级GMR磁头的磁盘系统的读取能力得到改善,所以有必要相应地减少记录数据的面积。 这需要在写入间隙处的缝合子极的变窄。 由于填充模具的问题,对于小于约0.4微米的极宽度来说,这已被证明是困难的。 在本发明中,通过在包括模具的平坦化正性光致抗蚀剂层和模具所在的非磁性写入间隙层之间引入一层PMGI(聚二甲基戊二酰亚胺)来克服这一点。 这大大有利于形成具有干净的平坦底部和基本上垂直的侧面的高纵横比孔,以及随后在通过电镀填充所述孔以形成缝合的子极之后去除光致抗蚀剂。

    Pole trimming method for fabricating a magnetic transducer structure
    47.
    发明授权
    Pole trimming method for fabricating a magnetic transducer structure 失效
    用于制造磁换能器结构的极修整方法

    公开(公告)号:US5878481A

    公开(公告)日:1999-03-09

    申请号:US845875

    申请日:1997-04-28

    IPC分类号: G11B5/31 G11B5/39 G11B5/127

    摘要: A method for forming a magnetic transducer structure. There is first provided a substrate. There is then formed over the substrate a lower magnetic pole layer. There is then formed upon the lower magnetic pole layer a gap filling dielectric layer. There is then formed at least in part upon the gap filling dielectric layer a patterned positive photoresist layer employed in defining through a plating method an upper magnetic pole layer formed at least in part upon the gap filling dielectric layer. The patterned photoresist layer has a first region defining a pole tip of the upper magnetic pole layer and a second region defining a magnetic coil region of the upper magnetic pole layer. The first region of the patterned positive photoresist layer is photoexposed either before or after forming through the plating method the upper magnetic pole layer defined by the patterned positive photoresist layer. The first region of the patterned positive photoresist layer is developed after forming through the plating method the upper magnetic pole layer. Finally, there is then anisotropically etched the upper magnetic pole layer, the gap filling dielectric layer and the lower magnetic pole layer at the location of the first region of the patterned photoresist layer to form an etched upper magnetic pole layer, an etched gap filling dielectric layer and an etched lower magnetic pole layer while employing an anisotropic etch method having a first etch selectivity of the gap filling dielectric layer with respect to the upper magnetic pole layer of at least about 2:1 and a second etch selectivity of the lower magnetic pole layer with respect to the upper magnetic pole layer of at least about 1:1.

    摘要翻译: 一种形成磁换能器结构的方法。 首先提供基板。 然后在衬底上形成下磁极层。 然后在下磁极层上形成间隙填充介电层。 然后至少部分地形成有间隙填充介电层的图案化的正性光致抗蚀剂层,其用于通过电镀方法限定至少部分地形成在间隙填充介电层上的上部磁极层。 图案化光致抗蚀剂层具有限定上磁极层的极尖的第一区域和限定上磁极层的磁性线圈区域的第二区域。 图案化的正性光致抗蚀剂层的第一区域在通过镀覆方法形成通过图案化的正性光致抗蚀剂层限定的上部磁极层之前或之后被曝光。 图案化的正性光致抗蚀剂层的第一区域通过电镀法形成上磁极层而显影。 最后,然后在图案化光致抗蚀剂层的第一区域的位置处各向异性地蚀刻上磁极层,间隙填充介电层和下磁极层,以形成蚀刻的上磁极层,蚀刻间隙填充电介质 层和蚀刻的下磁极层,同时采用具有相对于上磁极层的间隙填充电介质层的至少约2:1的第一蚀刻选择性的各向异性蚀刻方法和下磁极的第二蚀刻选择性 相对于上磁极层的至少约1:1的层。

    Magnetic write head with thin and thick portions for balancing writability and ate
    49.
    发明授权
    Magnetic write head with thin and thick portions for balancing writability and ate 有权
    磁性写头,薄而厚的部分,用于平衡书写和吃

    公开(公告)号:US08184399B2

    公开(公告)日:2012-05-22

    申请号:US12924416

    申请日:2010-09-27

    IPC分类号: G11B5/127

    摘要: A perpendicular magnetic recording (PMR) head is fabricated with a tapered main pole having a variable thickness. The tapered portion of the pole is at the ABS tip and it can be formed by bevels at the leading or trailing edges or both. The taper terminates to form a region with a maximum thickness, t1, which extends for a certain distance proximally. Beyond this region of maximum thickness t1, the pole is then reduced to a constant minimum thickness t2. A yoke is attached to this region of constant minimum thickness. This pole design requires less flux because of the thinner region of the pole where it attaches to the yoke, but the thicker region just before the tapered ABS provides additional flux to drive the pole just before the ABS, so that high definition and field gain is achieved, yet fringing is significantly reduced.

    摘要翻译: 制造具有可变厚度的锥形主极的垂直磁记录(PMR)头。 极的锥形部分在ABS尖端处,并且其可以由前缘或后缘处的斜面或两者形成。 锥形终止形成最大厚度的区域t1,其向近处延伸一定距离。 超过该最大厚度的区域t1,然后将极减小到恒定的最小厚度t2。 磁轭连接到恒定最小厚度的区域。 这个极设计需要更少的通量,因为它附着在磁轭上的磁极的较薄区域,而刚好在锥形ABS之前较厚的区域提供额外的磁通来驱动刚好在ABS之前的极点,因此高清晰度和场增益是 实现了,但边缘明显减少。

    ABS through aggressive stitching
    50.
    发明申请
    ABS through aggressive stitching 失效
    ABS通过积极的拼接

    公开(公告)号:US20070266551A1

    公开(公告)日:2007-11-22

    申请号:US11881316

    申请日:2007-07-26

    IPC分类号: G11B5/127 H04R31/00

    摘要: Aggressive (i.e. tight tolerance) stitching offers several advantages for magnetic write heads but at the cost of some losses during pole trimming. This problem has been overcome by replacing the alumina filler layer, that is used to protect the stitched pole during trimming, with a layer of electroplated material. Because of the superior step coverage associated with the plating method of deposition, pole trimming can then proceed without the introduction of stresses to the stitched pole while it is being trimmed.

    摘要翻译: 积极(即紧公差)缝合为磁性写入头提供了几个优点,但是在极修整期间以一些损失为代价。 通过用一层电镀材料替换用于在修整期间保护缝合极的氧化铝填料层已经克服了这个问题。 由于与沉积电镀方法相关的优越的台阶覆盖,因此可以进行极细修剪,而不会在缝合极被修剪时引入应力。