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公开(公告)号：US08808808B2
公开(公告)日：2014-08-19
申请号：US11734542
申请日：2007-04-12
CPC分类号： C08L59/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/855 , Y10T428/31663 , Y10T428/31678 , Y10T428/31692
摘要： The invention provides a method of applying an adhesion primer layer for an imprint lithography process that includes contacting a fluid with a surface of a substrate in a coating process and initiating a chemical reaction that forms a covalent bond between a component in the fluid and the surface of the substrate such that an adhesion primer layer is adhered to the surface of the substrate. A polymeric layer may be adhered to the surface of the substrate coated with the adhesion primer layer. The method allows adhesion primer coating for double-sided imprinting applications including patterned magnetic media.
摘要翻译： 本发明提供了一种施加用于压印光刻工艺的粘合底漆层的方法，该方法包括在涂布过程中使流体与基材的表面接触并引发在流体和表面之间形成共价键的化学反应 的基底，使得粘合底漆层粘附到基底的表面。 聚合物层可以粘附到涂覆有粘合底漆层的基材的表面上。 该方法允许用于包括图案化磁性介质的双面印刷应用的粘合底漆涂层。
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公开(公告)号：US20110190463A1
公开(公告)日：2011-08-04
申请号：US13017259
申请日：2011-01-31
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A lithography method for forming nanoparticles includes patterning sacrificial material on a multilayer substrate. In some cases, the pattern is transferred to or into a removable layer of the multilayer substrate, and functional material is disposed on the removable layer of the multilayer substrate and solidified. At least a portion of the functional material is then removed to expose protrusions of the removable layer, and pillars of the functional material are released from the removable layer to yield nanoparticles. In other cases, the multilayer substrate includes the functional material, and the pattern is transferred to or into a removable layer of the multilayer substrate. The sacrificial layer is removed, and pillars of the functional material are released from the removable layer to yield nanoparticles.
摘要翻译： 用于形成纳米颗粒的光刻方法包括在多层基板上图案化牺牲材料。 在一些情况下，将图案转移到多层基板的可移除层或其中，并且将功能材料设置在多层基板的可移除层上并固化。 然后去除功能材料的至少一部分以暴露可移除层的突起，并且功能材料的柱从可除去的层释放以产生纳米颗粒。 在其他情况下，多层基板包括功能材料，并且图案被转移到多层基板的可移除层中或其中。 去除牺牲层，并且功能材料的柱从可除去的层中释放出来以产生纳米颗粒。
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公开(公告)号：US20100102029A1
公开(公告)日：2010-04-29
申请号：US12604866
申请日：2009-10-23
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F7/0017 , Y10T156/10
摘要： Systems, methods, and processes for forming imprint lithography templates from a multi-layer substrate are described. The multi-layer substrate may include a block copolymer layer positioned on a substrate layer. The block copolymer layer may include two or more domains. At least one domain may have a different composition sensitivity than another domain such that the domains have different reactions to a specific process. Reaction of the domains to the specific process may provide a pattern in the block copolymer layer. The pattern may be transferred into the substrate layer to form the imprint lithography template.
摘要翻译： 描述了用于从多层基板形成压印光刻模板的系统，方法和工艺。 多层基材可以包括位于基材层上的嵌段共聚物层。 嵌段共聚物层可以包括两个或更多个结构域。 至少一个结构域可能具有与另一个结构域不同的组成敏感性，使得这些结构域对特定过程具有不同的反应。 结构域与特定方法的反应可以提供嵌段共聚物层中的图案。 该图案可以被转移到基底层中以形成压印光刻模板。
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公开(公告)号：US20100112310A1
公开(公告)日：2010-05-06
申请号：US12607547
申请日：2009-10-28
申请人： Van Nguyen Truskett , Gerard M. Schmid , Michael N. Miller , Douglas J. Resnick , Benjamin G. Eynon, JR. , Byung-Jin Choi , Kosta S. Selinidis , Sidlgata V. Sreenivasan , Nicholas A. Stacey
发明人： Van Nguyen Truskett , Gerard M. Schmid , Michael N. Miller , Douglas J. Resnick , Benjamin G. Eynon, JR. , Byung-Jin Choi , Kosta S. Selinidis , Sidlgata V. Sreenivasan , Nicholas A. Stacey
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/708 , G03F9/7084 , Y10T428/24802
摘要： Systems and methods for providing identification patterns on substrates are described.
摘要翻译： 描述了在基板上提供识别图案的系统和方法。
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公开(公告)号：US09616614B2
公开(公告)日：2017-04-11
申请号：US13773217
申请日：2013-02-21
申请人： Byung-Jin Choi , Se Hyun Ahn , Mahadevan GanapathiSubramanian , Michael N. Miller , Sidlgata V. Sreenivasan
发明人： Byung-Jin Choi , Se Hyun Ahn , Mahadevan GanapathiSubramanian , Michael N. Miller , Sidlgata V. Sreenivasan
CPC分类号： B29C59/026 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： Methods and systems are provided for patterning polymerizable material dispensed on flexible substrates or flat substrates using imprint lithography techniques. Template replication methods and systems are also presented where patterns from a master are transferred to flexible substrates to form flexible film templates. Such flexible film templates are then used to pattern large area flat substrates. Contact between the imprint template and substrate can be initiated and propagated by relative translation between the template and the substrate.
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公开(公告)号：US20130214452A1
公开(公告)日：2013-08-22
申请号：US13773217
申请日：2013-02-21
申请人： Byung-Jin Choi , Se Hyun Ahn , Mahadevan GanapathiSubramanian , Michael N. Miller , Sidlgata V. Sreenivasan
发明人： Byung-Jin Choi , Se Hyun Ahn , Mahadevan GanapathiSubramanian , Michael N. Miller , Sidlgata V. Sreenivasan
IPC分类号： B29C59/02
CPC分类号： B29C59/026 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： Methods and systems are provided for patterning polymerizable material dispensed on flexible substrates or flat substrates using imprint lithography techniques. Template replication methods and systems are also presented where patterns from a master are transferred to flexible substrates to form flexible film templates. Such flexible film templates are then used to pattern large area flat substrates. Contact between the imprint template and substrate can be initiated and propagated by relative translation between the template and the substrate.
摘要翻译： 提供了使用压印光刻技术对分配在柔性基板或平坦基板上的可聚合材料进行图案化的方法和系统。 还提供了模板复制方法和系统，其中来自主机的模式被转移到柔性基板以形成柔性膜模板。 然后使用这种柔性膜模板来对大面积的平坦基板进行图案化。 可以通过模板和衬底之间的相对平移来启动和传播压印模板和衬底之间的接触。
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47.发明授权Patterning substrates employing multi-film layers defining etch-differential interfaces 有权使用定义蚀刻差分界面的多层图案的基板公开(公告)号：US07205244B2
公开(公告)日：2007-04-17
申请号：US10946574
申请日：2004-09-21
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01L21/02126 , H01L21/02216 , H01L21/02282 , H01L21/3086 , H01L21/31138 , H01L21/31144 , H01L21/312 , H01L21/3121 , H01L21/3122
摘要： The present invention features a method of patterning a substrate that includes forming, on the substrate, a multi-layer film with a surface, an etch rate interface and an etch-differential interface. The etch-differential interface is defined between the etch rate interface and the surface. A recorded pattern is transferred onto the substrate defined, in part, by the etch-differential interface.
摘要翻译： 本发明的特征在于一种图案化衬底的方法，其包括在衬底上形成具有表面，蚀刻速率界面和蚀刻差分界面的多层膜。 蚀刻差分界面界定在蚀刻速率界面和表面之间。 将记录图案转移到基板上，部分地由蚀刻差分界面限定。
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48.发明授权Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template 有权模板具有不同的厚度以便于排出位于基板和模板之间的气体公开(公告)号：US08556616B2
公开(公告)日：2013-10-15
申请号：US13073533
申请日：2011-03-28
IPC分类号： B29C59/02
CPC分类号： H01L21/67126 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/6715
摘要： A nanoimprint lithography template including, inter alia, a body having first and second opposed sides with a first surface disposed on the first side, the second side having a recess disposed therein, the body having first and second regions with the second region surrounding the first region and the recess in superimposition with the first region, with a portion of the first surface in superimposition with the first region being spaced-apart from the second side a first distance and a portion of the first surface in superimposition with the second region being spaced-apart from the second side a second distance, with the second distance being greater than the first distance; and a mold disposed on the first side of the body in superimposition a portion of the first region.
摘要翻译： 一种纳米压印光刻模板，其特别包括具有第一和第二相对侧的主体，第一表面设置在第一侧上，第二侧具有设置在其中的凹部，该主体具有第一和第二区域，第二区域围绕第一 所述凹部与所述第一区域叠加，所述第一表面的与所述第一区域重叠的部分与所述第二侧面间隔开第一距离，并且所述第一表面的与所述第二区域重叠的部分间隔开 从第二侧排出第二距离，第二距离大于第一距离; 以及模具，其设置在所述主体的第一侧上，以叠加所述第一区域的一部分。
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公开(公告)号：US08123514B2
公开(公告)日：2012-02-28
申请号：US12717664
申请日：2010-03-04
IPC分类号： B29C59/02
CPC分类号： B29C43/003 , B29C2043/025 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/887
摘要： The present invention includes a template for patterning liquids disposed on a substrate. The template includes a body having opposed first and second surfaces with one surface having at least one recess and the other surface having a patterning region. In one embodiment, the template may be mounted to a fluid chamber having an inlet and a throughway. The template may be connected to the throughway and the inlet is connected to a fluid source.
摘要翻译： 本发明包括用于图案化液体的模板，该模板设置在基板上。 模板包括具有相对的第一和第二表面的主体，一个表面具有至少一个凹部，另一个表面具有图案化区域。 在一个实施例中，模板可以安装到具有入口和通道的流体室。 模板可以连接到通道，并且入口连接到流体源。
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公开(公告)号：US08066930B2
公开(公告)日：2011-11-29
申请号：US12749552
申请日：2010-03-30
CPC分类号： G03F7/0002 , B29C59/02 , B82Y10/00 , B82Y40/00
摘要： The present invention is directed to a method of forming an imprinting layer on a substrate including high resolution features, and transferring the features into a solidified region of the substrate. Desired thickness of the residual layer may be minimized in addition to visco-elastic behavior of the material.
摘要翻译： 本发明涉及一种在包括高分辨率特征的基板上形成压印层的方法，并将特征转移到基板的固化区域中。 除了材料的粘弹性行为之外，残留层的期望厚度可以最小化。
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