Wafer alignment method for dual beam system

    公开(公告)号:US20080174779A1

    公开(公告)日:2008-07-24

    申请号:US11987828

    申请日:2007-12-05

    IPC分类号: G01B11/00

    摘要: A gradient charged particle beam apparatus capable of moving highly accurately to a specific position by eliminating influences of warp inside a wafer surface is provided. A portion 46 having a mark 47 for aligning visual field alignment positioned in advance to the same horizontal and the same height as a stage plane as a reference point is arranged on a wafer holder. A height of an observation point on a sample is adjusted to the height of the mark 47 and the visual field of a gradient column is brought into conformity with the visual field of a vertical column by use of a known offset between the gradient column and the vertical column at that time.

    Biomagnetic field measuring method and apparatus
    42.
    发明授权
    Biomagnetic field measuring method and apparatus 有权
    生物磁场测量方法及装置

    公开(公告)号:US07403809B2

    公开(公告)日:2008-07-22

    申请号:US10810812

    申请日:2004-03-29

    IPC分类号: A61B5/05

    摘要: A biomagnetic field measuring apparatus has a plurality of fluxmeters disposed externally of a living body and each including a superconducting quantum interference device (SQUID) for detecting a biomagnetic field generated from the living body, the plurality of fluxmeters being operative to detect a temporal change of a component of the biomagnetic field in a first direction which is vertical to the surface of the living body, an operation processor for performing computation for determining a temporal change of a value proportional to a root of square sum of differential value of the first-direction magnetic field component in second and third directions which cross the first direction and computation for integrating the temporal change of the value over a predetermined interval to determine an integral value, and a display for displaying the determined integral value. Distribution of magnetic fields generated from the heart is determined with a small number of fluxmeters.

    摘要翻译: 生物磁场测量装置具有设置在生物体的外部的多个磁通量计,每个磁通量计包括用于检测从生物体产生的生物磁场的超导量子干涉装置(SQUID),所述多个磁通量计可操作以检测时间变化 生物磁场在与活体表面垂直的第一方向上的分量;运算处理器,用于执行计算,以确定与第一方向的差分值的平方和的根数成正比的值的时间变化 与第一方向交叉的第二方向和第三方向的磁场分量和用于对预定间隔内的值的时间变化进行积分的运算以确定积分值,以及用于显示所确定的积分值的显示。 由心脏产生的磁场的分布由少量的磁通计确定。

    Sample Inspection Apparatus and Sample Inspection Method
    43.
    发明申请
    Sample Inspection Apparatus and Sample Inspection Method 审中-公开
    样品检验仪器和样品检验方法

    公开(公告)号:US20080149848A1

    公开(公告)日:2008-06-26

    申请号:US11961348

    申请日:2007-12-20

    IPC分类号: G01N23/00

    CPC分类号: G01R31/307

    摘要: The present invention provides an inspection apparatus capable of suppressing leak electric current to a specimen and a probe, and thus capable of measuring highly sensitive electrical characteristics, when the specimen is heated by a heater. A specimen heating unit that heats a specimen is configured of: a heater; a grounded metallic shield, which coats the heater as electrically insulated; and an insulation sheet disposed on a side of the metallic shield facing the mounted specimen. Likewise, a probe heating unit is configured of: a heater; a grounded metallic shield, which coats the heater as electrically insulated; and an insulation sheet.

    摘要翻译: 本发明提供一种检测装置,其能够通过加热器对样本进行加热时,能够抑制对试样和探针的泄漏电流,能够测定高灵敏度的电气特性。 加热试样的试样加热单元由加热器构成, 一个接地的金属屏蔽层,它将加热器涂覆为电绝缘; 以及设置在面向安装的样品的金属屏蔽的一侧上的绝缘片。 同样地,探针加热单元构成为:加热器; 一个接地的金属屏蔽层,它将加热器涂覆为电绝缘; 和绝缘片。

    Image Processing Apparatus, Image Processing Method, And Recording Medium
    44.
    发明申请
    Image Processing Apparatus, Image Processing Method, And Recording Medium 有权
    图像处理装置,图像处理方法和记录介质

    公开(公告)号:US20080104685A1

    公开(公告)日:2008-05-01

    申请号:US11876641

    申请日:2007-10-22

    IPC分类号: H04L9/32

    摘要: An image processing apparatus, comprising: an input portion that inputs image data of a plurality of pages of document; a password detector that detects a password given to each of the pages; a password judger that judges from a detecting result drew by the password detector about each of the pages, whether or not a shared password issued for each page in common is detected in addition to an individual password uniquely issued for each page; an entry requester that requests entry of a shared password if it is judged by the password detector that a shared password is detected, and requests entry of an individual password about each of the pages if it is judged by the password detector that a shared password is not detected; and an output permitting portion that permits image data of all the pages each having a shared password, which is the image data inputted by the input portion, if the appropriate shared password is entered in response to the request for entry of a shared password, and permits image data of a page having an individual password, if the appropriate individual password is entered about that page in response to the request for entry of an individual password.

    摘要翻译: 一种图像处理装置,包括:输入部分,其输入多页文档的图像数据; 密码检测器,其检测给予每个页面的密码; 除了密码检测器对每个页面绘制的检测结果判断出的密码判断器,除了针对每个页面唯一地发行的个人密码之外,是否检测到针对每个共同页面发布的共享密码; 如果由密码检测器判断出共享密码被检测到请求输入共享密码的条目请求者,并且如果密码检测器判断出共享密码是 没有检测到; 以及输出许可部分,其允许响应于输入共享密码的请求而输入适当的共享密码,每个具有共享密码的所有页面的图像数据(其是由输入部分输入的图像数据),以及 如果响应于输入个人密码的请求而输入关于该页面的适当的个人密码,则允许具有单独密码的页面的图像数据。

    Dry Etching Method And Dry Etching Apparatus
    45.
    发明申请
    Dry Etching Method And Dry Etching Apparatus 审中-公开
    干蚀刻法和干蚀刻设备

    公开(公告)号:US20080093338A1

    公开(公告)日:2008-04-24

    申请号:US11792238

    申请日:2005-12-06

    IPC分类号: H01L21/306 B44C1/22

    摘要: An object of the present invention is suppressing notches in dry etching of a processing object where an etched layer made of a silicon material is formed on an etching stop layer. A substrate 12 has an etched layer 22 made of a silicon material on an etching stop layer 21. SF6/C4F8 gas, as an etching gas, is supplied to generate plasma, and a portion of the etched layer exposed through a resist mask 23 is etched. A sidewall protection layer 24 made of polymer is formed on a sidewall of a trench or hole.

    摘要翻译: 本发明的目的是抑制在蚀刻停止层上形成由硅材料制成的蚀刻层的处理对象的干蚀刻中的凹口。 衬底12在蚀刻停止层21上具有由硅材料制成的蚀刻层22。 供应作为蚀刻气体的SF 6 / C 4 F 8气体以产生等离子体,并且蚀刻层的一部分暴露于 蚀刻抗蚀剂掩模23。 在沟槽或孔的侧壁上形成由聚合物制成的侧壁保护层24。

    Transmission apparatus for automobile or the like
    46.
    发明授权
    Transmission apparatus for automobile or the like 有权
    汽车用传动装置等

    公开(公告)号:US07353733B2

    公开(公告)日:2008-04-08

    申请号:US11295440

    申请日:2005-12-07

    IPC分类号: F16H57/04 F16H57/02

    摘要: A transmission apparatus for an automobile or the like includes: a transmission gear mechanism including, therein, a speed-reducing small gear at an axial one side of an intermediate shaft; a final driving mechanism including, therein, a speed-reducing large gear at an axial one side of an axle; a casing including: a first chamber; a second chamber; a first inner surface; a second inner surface; and a case rib; and a wall which is positioned between the first inner surface and the end surface of the speed-reducing large gear that faces the first inner surface; the wall including: a lower portion; and an edge portion, and the wall covering, at a short distance away, the end surface of the speed-reducing large gear that faces the first inner surface.

    摘要翻译: 一种用于汽车等的传动装置包括:传动齿轮机构,其中包括在中间轴的轴向一侧的减速小齿轮; 其中包括在轴的轴向一侧的减速大齿轮的最终驱动机构; 壳体,包括:第一室; 第二个房间 第一内表面; 第二内表面; 和外壳肋; 以及位于减速大齿轮的面向第一内表面的第一内表面和端表面之间的壁; 该墙包括:下部; 和边缘部分,并且所述壁在远离所述减速大齿轮的面向所述第一内表面的端表面短距离地覆盖。

    Image processing apparatus
    47.
    发明授权
    Image processing apparatus 有权
    图像处理装置

    公开(公告)号:US07339699B1

    公开(公告)日:2008-03-04

    申请号:US09495899

    申请日:2000-02-02

    IPC分类号: G06F15/00 H04N1/46 G03F3/08

    CPC分类号: H04N1/46 H04N1/48

    摘要: An image processing apparatus includes a first sensor having a plurality of reading elements arranged in the primary scanning direction, a second sensor disposed in parallel with the first sensor and by a predetermined lines in the secondary scanning direction, an integral correction portion for correcting a time difference of data output due to a position difference between the first sensor and the second sensor by a line unit, and a fractional correction portion for correcting a time difference of data output due to a position difference between the first sensor and the second sensor by a sub line unit. Thus, the correction of the phase shift between element arrays can be performed as precisely as possible and the reproducibility of a black fine line is increased.

    摘要翻译: 一种图像处理设备包括:具有沿主扫描方向布置的多个读取元件的第一传感器,与第一传感器平行设置的第二传感器和辅助扫描方向上的预定线;一个校正部分,用于校正时间 由于第一传感器和第二传感器之间的位置差由于线单元而导致的数据输出的差异,以及用于校正由于第一传感器和第二传感器之间的位置差引起的数据输出的时间差的分数校正部分 子线单位。 因此,可以精确地执行元件阵列之间的相移的校正,并且增加黑色细线的再现性。

    Color image processing apparatus with background control
    48.
    发明授权
    Color image processing apparatus with background control 有权
    具有背景控制的彩色图像处理装置

    公开(公告)号:US07317828B2

    公开(公告)日:2008-01-08

    申请号:US10350054

    申请日:2003-01-24

    IPC分类号: G06K9/36 G06K9/00

    CPC分类号: H04N1/60 H04N1/64

    摘要: In an image processing apparatus, a compression processor compresses a color image data, a storage device stores the compressed data, and an expansion processor expands the data read from the storage device. A first background controller controls background of the color image data not yet compressed by the compression processor, while a second background controller controls background of the image data expanded by the expansion processor. A controller activates either the first background controller or the second background controller.

    摘要翻译: 在图像处理装置中,压缩处理器压缩彩色图像数据,存储装置存储压缩数据,并且扩展处理器扩展从存储装置读取的数据。 第一背景控制器控制压缩处理器尚未压缩的彩色图像数据的背景,而第二背景控制器控制由扩展处理器扩展的图像数据的背景。 控制器激活第一个后台控制器或第二个后台控制器。

    Battery and Center Pin
    50.
    发明申请
    Battery and Center Pin 有权
    电池和中心针

    公开(公告)号:US20070269711A1

    公开(公告)日:2007-11-22

    申请号:US11718844

    申请日:2005-11-01

    IPC分类号: H01M4/00

    摘要: A battery with improved safety that can more surely short-circuit electrodes when flattened out by the external force is provided. A center pin (30) is inserted in the center of a spirally wound electrode body formed by layering and spirally winding a cathode and an anode with a separator in between. The center pin (30) has a cut line (31) provided in the longitudinal direction and a first cutout (32) vertically crossing the cut line (31). When flattened out by the external force, a corner (33) at an intersection of the cut line (31) and the first cutout (32) is projected, and short-circuit is surely generated. Further, it is preferable that the center pin (30) has a second cutout (34) in the direction perpendicular to the cut line (31) in a position facing the cut line (31) in the circumferential direction. It is also preferable that the center pin (30) has a cross sectional shape of an oval or an ellipse, and the cut line (31) is provided in a position where the diameter of the oval or the ellipse is the largest.

    摘要翻译: 提供了一种具有改进的安全性的电池,其可以在由外力平坦化时更可靠地短路电极。 中心销(30)插入螺旋卷绕的电极体的中心,该电极主体通过层压并螺旋地缠绕阴极和阳极而形成。 中心销(30)具有沿纵向设置的切割线(31)和垂直于切割线(31)的第一切口(32)。 当被外力平坦化时,突出了切割线(31)与第一切口(32)交点处的角部(33),并且可靠地产生短路。 此外,优选的是,所述中心销(30)在与所述切割线(31)相对的圆周方向上与所述切割线(31)垂直的方向上具有第二切口(34)。 还优选的是,中心销(30)具有椭圆形或椭圆形的横截面形状,并且切割线(31)设置在椭圆或椭圆的直径最大的位置。