Semiconductor memory having charge trapping memory cells and fabrication method thereof
    41.
    发明申请
    Semiconductor memory having charge trapping memory cells and fabrication method thereof 有权
    具有电荷捕获存储单元的半导体存储器及其制造方法

    公开(公告)号:US20060192266A1

    公开(公告)日:2006-08-31

    申请号:US11067983

    申请日:2005-02-28

    IPC分类号: H01L29/00

    摘要: A semiconductor memory having charge trapping memory cells, where the direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.

    摘要翻译: 一种具有电荷捕获存储单元的半导体存储器,其中存储晶体管的每个沟道区域的电流方向相对于相关字线横向延伸,位线被布置在字线的顶侧,并且以某种方式 存在与源极 - 漏极区电气绝缘的导电局部互连件,其在字线之间的间隔中以部分布置并以与后者的电绝缘方式并且连接到位线的方式布置,其中栅极电极 布置在至少部分地形成在存储器基板中的沟槽中。

    Memory cell array
    42.
    发明授权
    Memory cell array 失效
    存储单元阵列

    公开(公告)号:US06940123B2

    公开(公告)日:2005-09-06

    申请号:US10713689

    申请日:2003-11-14

    申请人: Christoph Ludwig

    发明人: Christoph Ludwig

    摘要: In a matrix-shaped configuration of memory transistors, word lines are disposed on a top side of a semiconductor body and are parallel to one another. Bit lines run transversely with respect thereto and are formed by polysilicon strips which are applied on the top side and are isolated from the semiconductor body by barrier layers functioning as diffusion barriers.

    摘要翻译: 在存储晶体管的矩阵状配置中,字线被布置在半导体本体的顶侧并且彼此平行。 位线相对于其横向延伸,并且由施加在顶侧上的多晶硅条形成,并且通过用作扩散阻挡层的阻挡层与半导体本体隔离。

    1 T flash memory recovery scheme for over-erasure
    44.
    发明授权
    1 T flash memory recovery scheme for over-erasure 有权
    1 T闪存恢复方案进行超擦除

    公开(公告)号:US06711065B2

    公开(公告)日:2004-03-23

    申请号:US10109270

    申请日:2002-03-28

    IPC分类号: G11C700

    CPC分类号: G11C16/3404

    摘要: Flash EEPROM cells are erased and recovered to a common threshold voltage by a two step process. First, the cells are erased. Second, the fixed (control) gates are set at a voltage of the same polarity as the programming voltage and at a magnitude of about half the programming voltage. The source is allowed to float and the drain (bitline) and body are set at a low level and at a polarity opposite to the programming voltage polarity.

    摘要翻译: 闪存EEPROM单元被擦除并通过两步处理恢复到公共阈值电压。 首先,细胞被擦除。 第二,固定(控制)门被设置为与编程电压相同极性的电压,并且大约为编程电压的一半。 允许源浮动,漏极(位线)和体被设置在与编程电压极性相反的极低电平和极性。

    Method for generating an electrical contact with buried track conductors
    49.
    发明授权
    Method for generating an electrical contact with buried track conductors 有权
    用于产生与埋地轨道导体电接触的方法

    公开(公告)号:US07122434B2

    公开(公告)日:2006-10-17

    申请号:US11124726

    申请日:2005-05-09

    IPC分类号: H01L21/8234

    摘要: A semiconductor structure 300 comprises a plurality of first track conductors 303, a plurality of second track conductors 304, which are insulated with respect to the first track conductors 303 and form a grid together with these first track conductors 303, and a plurality of third track conductors 307 parallel above the first track conductors 303, which third track conductors 307 partly cover the second track conductors 304 and are insulated with respect thereto, in which semiconductor structure 300, between in each case two adjacent second track conductors 304, there is located an electrical contact 305 between each first track conductor 303 and the corresponding third track conductor 307 which lies above it.

    摘要翻译: 半导体结构300包括多个第一轨道导体303,多个第二轨道导体304,其相对于第一轨道导体303绝缘并与这些第一轨道导体303一起形成栅格,以及多个第三轨道 导体307平行于第一轨道导体303之上,第三轨道导体307部分地覆盖第二轨道导体304并相对于其彼此绝缘,其中半导体结构300在每种情况下在两个相邻的第二轨道导体304之间位于 每个第一轨道导体303和位于其上方的对应的第三轨道导体307之间的电接触305。

    Semiconductor configuration and corresponding production process
    50.
    发明授权
    Semiconductor configuration and corresponding production process 有权
    半导体配置及相应的生产工艺

    公开(公告)号:US06368970B1

    公开(公告)日:2002-04-09

    申请号:US09645238

    申请日:2000-08-24

    IPC分类号: H01L21302

    摘要: A process for producing a semiconductor configuration includes the steps of providing a semiconductor substrate, providing a buffer oxide layer on the semiconductor substrate and providing a hard mask on the buffer oxide layer. An STI trench is etched by using the hard mask and a liner oxide layer is provided in the STI trench. The hard mask is removed to expose the buffer oxide layer and the buffer oxide layer is removed by an etching process. The buffer oxide layer is etched more rapidly than the liner oxide layer in the etching process. A gate oxide layer is provided on the semiconductor substrate. A semiconductor configuration is also provided.

    摘要翻译: 一种制造半导体结构的方法包括以下步骤:提供半导体衬底,在半导体衬底上提供缓冲氧化物层,并在缓冲氧化物层上提供硬掩模。 通过使用硬掩模蚀刻STI沟槽,并且在STI沟槽中提供衬垫氧化物层。 去除硬掩模以暴露缓冲氧化物层,并通过蚀刻工艺除去缓冲氧化物层。 在蚀刻工艺中,缓冲氧化物层比衬垫氧化物层蚀刻得更快。 在半导体衬底上设置栅氧化层。 还提供半导体配置。