公开(公告)号：US5811020A

公开(公告)日：1998-09-22

申请号：US900368

申请日：1997-07-23

申请人： James J. Alwan

发明人： James J. Alwan

IPC分类号： G03F7/16 ,  H01J9/02 ,  H01L21/308 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/302

CPC分类号： G03F7/164 ,  H01J9/025 ,  H01L21/308 ,  H01L21/3081 ,  H01L21/3086 ,  H01L21/31144 ,  H01L21/32139

摘要： A non-photlithographic, physical patterning process, which is useful for selectively etching of a substrate, is provided. The process comprises electrostatically charging liquid droplets which are selectively etchable with respect to the substrate, dispersing the droplets onto substrate in a pattern; and etching the substrate using the droplets as a mask.

摘要翻译： 提供了一种用于选择性蚀刻衬底的非光刻的物理图案化工艺。 该方法包括静电充电相对于基底可选择性蚀刻的液滴，将液滴以图案分散在基底上; 并使用所述液滴作为掩模蚀刻所述基板。

公开(公告)号：US07447445B2

公开(公告)日：2008-11-04

申请号：US11513874

申请日：2006-08-31

申请人： James J. Alwan ,  Paul William Binun ,  Scott Harris Bloom ,  Victor J. Chan ,  Glenn Claude Hoiseth ,  Hugh Michael O'Brien, IV ,  Scott Platenberg ,  Werner Pyka ,  Raymond D. Rogers

发明人： James J. Alwan ,  Paul William Binun ,  Scott Harris Bloom ,  Victor J. Chan ,  Glenn Claude Hoiseth ,  Hugh Michael O'Brien, IV ,  Scott Platenberg ,  Werner Pyka ,  Raymond D. Rogers

IPC分类号： H04B10/04

CPC分类号： H04B10/0799 ,  H04B10/1123 ,  H04B10/674

摘要： Systems and methods for use with an optical communication beam are disclosed. The system allows the beam of light to operate at an adequate power level that provides a robust optical link while minimizing any safety risk to humans. The system calibrates and controls the gain for an avalanche photodiode detector (APD). A detector circuit is used to calibrate the APD. Once calibrated, the detector circuit further provides an electrical bias to the APD to process or condition the electrical signal to produce a detector output. The systems and methods disclosed herein attenuate the power level of an incoming communication beam to prevent oversaturation of an APD. The system further provides an alignment signal, which is effective over a wide dynamic range of incoming power levels.

摘要翻译： 公开了与光通信光束一起使用的系统和方法。 该系统允许光束以足够的功率水平运行，从而提供鲁棒的光学链路，同时最小化对人类的任何安全风险。 该系统校准并控制雪崩光电二极管检测器（APD）的增益。 检测器电路用于校准APD。 一旦被校准，检测器电路还向APD提供电偏压以处理或调节电信号以产生检测器输出。 本文公开的系统和方法衰减了入射通信波束的功率电平，以防止APD的过饱和。 该系统进一步提供对准信号，其在输入功率电平的宽动态范围内是有效的。

公开(公告)号：US07274138B2

公开(公告)日：2007-09-25

申请号：US11348933

申请日：2006-02-07

申请人： David A. Cathey ,  James J. Alwan

发明人： David A. Cathey ,  James J. Alwan

IPC分类号： H01J19/42 ,  H01J1/62 ,  H01J9/24

CPC分类号： H01J9/242 ,  H01J9/18 ,  H01J9/185 ,  H01J29/028 ,  H01J29/864 ,  H01J31/123 ,  H01J2329/864 ,  H01J2329/8645

摘要： The disclosed method for forming a field emission display includes forming a cathode and an anode, forming a plurality of photoresist posts over the cathode, and coating the posts with a layer of coating material. The layer of coating material forms sidewalls around the posts. The photoresist posts may then be removed from within the sidewalls. The anode may then be fitted onto the sidewalls so that the sidewalls function as spacers in the field emission display.

摘要翻译： 所公开的用于形成场致发射显示的方法包括形成阴极和阳极，在阴极上形成多个光致抗蚀剂柱，并用一层涂料涂覆柱。 涂层材料层在柱子周围形成侧壁。 然后可以在侧壁内去除光致抗蚀剂柱。 然后可以将阳极装配到侧壁上，使得侧壁在场发射显示器中用作间隔物。

公开(公告)号：US07203424B2

公开(公告)日：2007-04-10

申请号：US09941319

申请日：2001-08-28

申请人： James J. Alwan ,  Victor Jim Chan ,  Scott Harris Bloom ,  Glenn Claude Hoiseth ,  Scott Platenberg ,  Raymond Dennis Rogers

发明人： James J. Alwan ,  Victor Jim Chan ,  Scott Harris Bloom ,  Glenn Claude Hoiseth ,  Scott Platenberg ,  Raymond Dennis Rogers

IPC分类号： H04B10/00

CPC分类号： H04B10/11 ,  H04B10/1123 ,  H04B10/40

摘要： A system and method for use with an optical communication beam of light is disclosed. The system allows the beam of light to operate at an adequate power level that provides a robust optical link while minimizing any safety risk to humans. Such a system includes multiple operating modes which control the power output of the beam of light. In the normal mode, the beam of light operates at a selected power level which provides a desired signal to noise ratio. Once a blocking occurs, the beam of light enters a power reduction mode to prevent harm to the blocking object. An acquisition and recovery mode is then employed to reestablish the blocked communication link.

摘要翻译： 公开了一种用于光通信光束的系统和方法。 该系统允许光束以足够的功率水平运行，从而提供鲁棒的光学链路，同时最小化对人类的任何安全风险。 这种系统包括控制光束的功率输出的多种操作模式。 在正常模式下，光束以提供期望的信噪比的所选功率电平工作。 一旦发生阻塞，光束进入功率降低模式，以防止对阻挡物体的伤害。 然后采用采集和恢复模式来重新建立阻塞的通信链路。

公开(公告)号：US06780491B1

公开(公告)日：2004-08-24

申请号：US09621496

申请日：2000-07-21

申请人： David A. Cathey ,  Kevin Tjaden ,  James J. Alwan

发明人： David A. Cathey ,  Kevin Tjaden ,  James J. Alwan

IPC分类号： B44C122

CPC分类号： H01J9/025 ,  Y10T428/24355 ,  Y10T428/24372 ,  Y10T428/24421

摘要： A substrate is placed on a charging surface, to which a first voltage is applied. Etch-resistant dry particles are placed in a cup in a nozzle to which a second voltage, less than the first voltage, is applied. A carrier gas is directed through the nozzle, which projects the dry particles out of the nozzle toward the substrate. The particles pick up a charge from the potential applied to the nozzle and are electrostatically attracted to the substrate. The particles adhere to the substrate, where they form an etch mask. The substrate is etched and the particles are removed. Emitter tips for a field emission display may be formed in the substrate.

摘要翻译： 将基板放置在施加第一电压的充电表面上。 将耐蚀刻干燥颗粒放置在喷嘴中的杯中，其中施加小于第一电压的第二电压。 载气被引导通过喷嘴，其将干燥颗粒从喷嘴向衬底投射。 颗粒从施加到喷嘴的电位拾取电荷，并被静电吸引到基板上。 颗粒粘附到基底上，在那里它们形成蚀刻掩模。 蚀刻基板并除去颗粒。 用于场致发射显示器的发射极尖端可以形成在衬底中。

公开(公告)号：US06686690B1

公开(公告)日：2004-02-03

申请号：US10136909

申请日：2002-05-01

申请人： James J. Alwan

发明人： James J. Alwan

IPC分类号： H01J164

CPC分类号： H01J9/261 ,  H01J29/86

摘要： A process for fabricating a flat panel display having a faceplate and a baseplate comprises creating an electric field between the faceplate and the baseplate to temporarily attract the faceplate to the baseplate and attaching the baseplate and faceplate to each other while the electric field is present. Capacitor(s) are formed on the faceplate and/or baseplate of a flat panel display such that a portion of the capacitor(s) is formed on the faceplate and is aligned with the pixel matrix and/or a portion of the capacitor(s) is formed on the baseplate and is aligned with the cathode member. The first and second portions of the capacitor(s) are energized to opposite polarity voltages, and an electric field is generated which attracts and aligns the two portions of the capacitor(s) to each other. When the two portions of the capacitor(s) are aligned and attracted to each other, the pixel matrix and cathode assembly are inherently aligned with each other. Once the faceplate and the baseplate are attached to each other, the capacitor(s) are de-energized and the electric field is dissipated.

摘要翻译： 一种用于制造具有面板和基板的平板显示器的方法包括在面板和基板之间产生电场，以在电场存在的同时暂时将面板吸引到基板并将基板和面板彼此附接。 电容器形成在平板显示器的面板和/或底板上，使得电容器的一部分形成在面板上并与像素矩阵和/或电容器的一部分 ）形成在基板上并与阴极构件对准。 电容器的第一部分和第二部分被激励到相反的极性电压，并且产生电场，其吸引并对齐电容器的两个部分彼此。 当电容器的两个部分彼此对准并被吸引时，像素矩阵和阴极组件彼此固有地对准。 一旦面板和底板相互连接，电容就被断电并且电场消散。

公开(公告)号：US06239548B1

公开(公告)日：2001-05-29

申请号：US09643202

申请日：2000-08-21

申请人： Kanwal K. Raina ,  James J. Alwan

发明人： Kanwal K. Raina ,  James J. Alwan

IPC分类号： H01J162

CPC分类号： H01J9/025

摘要： The present disclosure describes microelectronic substrate assemblies, and methods for making and using such substrate assemblies in mechanical and chemical-mechanical planarizing processes. A microelectronic substrate assembly is fabricated in accordance with one aspect of the invention by forming a critical layer in a film stack on the substrate and manipulating the critical layer to have a low compression internal stress. The critical layer, more specifically, is a layer that is otherwise in a tensile state or a high compression state without being manipulated to control the internal stress in the critical layer to be in a low compression state. The stress in the critical layer can be manipulated by changing the chemistry, temperature or energy level of the process used to deposit or otherwise form the critical layer. The stress in the critical layer can also be manipulated using heat treatments and other processes. A critical layer composed of chromium, for example, can be manipulated by sputtering chromium in an argon/nitrogen atmosphere instead of solely an argon atmosphere to impart stress controlling elements (nitrogen molecules) into the chromium for producing a low compression chromium layer.

摘要翻译： 本公开描述了微电子衬底组件，以及用于在机械和化学机械平面化工艺中制造和使用这种衬底组件的方法。 根据本发明的一个方面通过在衬底上的膜堆叠中形成临界层并操纵临界层以具有低的压缩内部应力来制造微电子衬底组件。 更具体地说，临界层是否则处于拉伸状态或高压缩状态的层，而不被操纵以控制临界层中的内部应力处于低压缩状态。 临界层中的应力可以通过改变用于沉积或以其他方式形成临界层的方法的化学，温度或能量水平来操纵。 临界层中的应力也可以使用热处理和其他工艺进行操作。 例如，由铬构成的临界层可以通过在氩/氮气氛中溅射铬而不是仅仅氩气来操作，以将应力控制元素（氮分子）赋予铬以产生低压缩铬层。

公开(公告)号：US6120339A

公开(公告)日：2000-09-19

申请号：US453848

申请日：1999-12-01

申请人： James J. Alwan

发明人： James J. Alwan

IPC分类号： H01J9/18 ,  H01J9/24

CPC分类号： H01J9/185 ,  H01J9/242 ,  H01J2329/8625 ,  H01J2329/864

摘要： In one aspect, the invention includes a method of fabricating a flat panel evacuated display. An oxidizable material layer is formed over a substrate upper surface. The oxidizable material has an upper surface and is provided as a plurality of separate discrete elements. A layer of sacrificial material is formed over the oxidizable material upper surface and over intervening regions of the substrate between the separate discrete elements. The sacrificial material is selectively removable relative to the oxidizable material. The layer of sacrificial material is planarized to remove the sacrificial material from over the oxidizable material upper surface. A plurality of spacers are bonded to the oxidizable material upper surface. The sacrificial material is removed from between the separate discrete elements.

摘要翻译： 一方面，本发明包括一种制造平板抽空显示器的方法。 在基板上表面上形成可氧化材料层。 可氧化材料具有上表面并且被设置为多个单独的离散元件。 牺牲材料层形成在可氧化材料的上表面之上，并且在分离的离散元件之间的衬底的中间区域上。 牺牲材料可相对于可氧化材料选择性地去除。 将牺牲材料层平坦化以从可氧化材料上表面上除去牺牲材料。 多个间隔物结合到可氧化材料上表面。 牺牲材料从分离的离散元件之间移除。

公开(公告)号：US6010917A

公开(公告)日：2000-01-04

申请号：US725646

申请日：1996-10-15

申请人： James J. Alwan ,  Kevin Tjaden ,  David A. Cathey

发明人： James J. Alwan ,  Kevin Tjaden ,  David A. Cathey

IPC分类号： H01L21/00

CPC分类号： H01J31/127 ,  H01J29/467 ,  H01J3/022 ,  H01J9/148 ,  H01J2203/0228 ,  H01J2203/0232 ,  H01J2329/4626 ,  H01J2329/463

摘要： A method for fabricating microelectronic deices in which an interconnect layer is electrically isolated from large protuberances that project from a lower conductive layer to a desired endpoint of a chemical-mechanical planarization process. The lower conductive layer is covered with an insulating material to form an insulator layer that generally follows the contour of the lower conductive layer and any large protuberances. A highly conductive interconnect material is then deposited over the insulator layer to form an interconnect layer that generally follows the contour of the insulator layer. The interconnect layer may be deposited directly on the insulator layer, or it may be deposited on an intermediate layer between the interconnect layer and the insulator layer. After the upper conductive layer is deposited, the insulator layer and the upper conductive layer are planarized with a chemical-mechanical planarization process to a desired endpoint.

摘要翻译： 一种用于制造微电子器件的方法，其中互连层与从下导电层突出到化学机械平面化工艺的期望端点的大突起电隔离。 下导电层被绝缘材料覆盖以形成通常遵循下导电层和任何大突起的轮廓的绝缘体层。 然后将高度导电的互连材料沉积在绝缘体层上，以形成大致遵循绝缘体层的轮廓的互连层。 互连层可以直接沉积在绝缘体层上，或者它可以沉积在互连层和绝缘体层之间的中间层上。 在沉积上导电层之后，通过化学机械平面化工艺将绝缘体层和上导电层平坦化成期望的端点。

公开(公告)号：US06010385A

公开(公告)日：2000-01-04

申请号：US277379

申请日：1999-03-22

申请人： James J. Alwan

发明人： James J. Alwan

IPC分类号： C03B23/02 ,  C03B37/02 ,  H01J9/18 ,  H01J9/24 ,  H01J31/12

CPC分类号： H01J9/242 ,  C03B23/02 ,  C03B37/02 ,  H01J31/127 ,  H01J2329/8625

摘要： A method for forming spacers for a display device includes steps of contacting a substrate of one of a cathode and a faceplate substrate with a member, drawing the member from the substrate to form a filament, and detaching the member from the filament. The filament can be further planarized to a desired height and shape. The filament extends to the other of the cathode and faceplate.

摘要翻译： 用于形成用于显示装置的间隔件的方法包括以下步骤：将阴极和面板基板之一的基板与构件接触，从基板拉出构件以形成长丝，并将构件从灯丝上拆下。 丝可以进一步平坦化到所需的高度和形状。 灯丝延伸到阴极和面板中的另一个。