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41.发明申请Surface acoustic wave device, its manufacturing method, and electronic circuit device 有权声表面波装置及其制造方法和电子电路装置公开(公告)号：US20060006760A1
公开(公告)日：2006-01-12
申请号：US11220815
申请日：2005-09-07
IPC分类号： H01L41/04
CPC分类号： H03H9/0542 , H01L21/568 , H01L21/6835 , H01L24/97 , H01L2224/16 , H01L2224/16245 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01021 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01058 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/15153 , H01L2924/1517 , H01L2924/16195 , H01L2924/16235 , H01L2924/181 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2924/351 , H03H3/08 , H03H9/059 , H03H9/1085 , H03H9/1092 , Y10T29/42 , Y10T29/49005 , Y10T29/49144 , Y10T29/49146 , Y10T29/49158 , Y10T29/49171 , H01L2224/81 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： A surface acoustic wave device which occupies a small mounting area and has a low profile, yet having an improved reliability, and can be made available at low cost. The surface acoustic wave device comprises a piezoelectric substrate, a function region formed of comb-like electrodes for exciting surface acoustic wave provided on a main surface of the piezoelectric substrate, a space formation member covering the function region, a plurality of bump electrodes provided on a main surface of the piezoelectric substrate and a terminal electrode provided opposed to the main surface of piezoelectric substrate. The bump electrode and the terminal electrode are having a direct electrical connection, and a space between piezoelectric substrate and terminal electrode is filled with resin. When the above-configured acoustic wave device is applied for a frequency filter, a resonator, in a portable telephone unit, a keyless entry or the like communication apparatus, the overall size of such apparatus can be reduced and a higher reliability is implemented.
摘要翻译： 表面声波装置占据小的安装面积并且具有低轮廓，但具有改进的可靠性，并且可以以低成本获得。 表面声波装置包括压电基板，由用于激发设置在压电基板的主表面上的表面声波的梳状电极形成的功能区域，覆盖该功能区域的空间形成部件，设置在该功能区域上的多个凸块电极 压电基板的主表面和与压电基板的主表面相对设置的端子电极。 突起电极和端子电极具有直接的电连接，并且压电基板和端子电极之间的空间填充有树脂。 当将上述构造的声波装置应用于频率滤波器，便携式电话单元中的谐振器，无钥匙进入等通信装置时，可以减少这种装置的总体尺寸并实现更高的可靠性。
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42.发明授权Surface acoustic wave device, method for manufacturing, and electronic circuit device 有权表面声波装置，制造方法和电子电路装置公开(公告)号：US06969945B2
公开(公告)日：2005-11-29
申请号：US10399305
申请日：2002-02-06
CPC分类号： H03H9/0542 , H01L21/568 , H01L21/6835 , H01L24/97 , H01L2224/16 , H01L2224/16245 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/97 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01019 , H01L2924/01021 , H01L2924/01024 , H01L2924/01029 , H01L2924/0103 , H01L2924/01033 , H01L2924/01039 , H01L2924/01046 , H01L2924/01047 , H01L2924/01057 , H01L2924/01058 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/15153 , H01L2924/1517 , H01L2924/16195 , H01L2924/16235 , H01L2924/181 , H01L2924/30105 , H01L2924/30107 , H01L2924/3025 , H01L2924/351 , H03H3/08 , H03H9/059 , H03H9/1085 , H03H9/1092 , Y10T29/42 , Y10T29/49005 , Y10T29/49144 , Y10T29/49146 , Y10T29/49158 , Y10T29/49171 , H01L2224/81 , H01L2924/00014 , H01L2924/00 , H01L2924/00012
摘要： A surface acoustic wave device which occupies a small mounting area and has a low profile, yet having an improved reliability, and can be made available at low cost. The surface acoustic wave device comprises a piezoelectric substrate, a function region formed of comb-like electrodes for exciting surface acoustic wave provided on a main surface of the piezoelectric substrate, a space formation member covering the function region, a plurality of bump electrodes provided on a main surface of the piezoelectric substrate and a terminal electrode provided opposed to the main surface of piezoelectric substrate. The bump electrode and the terminal electrode are having a direct electrical connection, and a space between piezoelectric substrate and terminal electrode is filled with resin. When the above-configured acoustic wave device is applied for a frequency filter, a resonator, in a portable telephone unit, a keyless entry or the like communication apparatus, the overall size of such apparatus can be reduced and a higher reliability is implemented.
摘要翻译： 表面声波装置占据小的安装面积并且具有低轮廓，但具有改进的可靠性，并且可以以低成本获得。 表面声波装置包括压电基板，由用于激发设置在压电基板的主表面上的表面声波的梳状电极形成的功能区域，覆盖该功能区域的空间形成部件，设置在该功能区域上的多个凸块电极 压电基板的主表面和与压电基板的主表面相对设置的端子电极。 突起电极和端子电极具有直接的电连接，并且压电基板和端子电极之间的空间填充有树脂。 当将上述构造的声波装置应用于频率滤波器，便携式电话机中的谐振器，无钥匙进入等通信装置时，可以减少这种装置的总体尺寸并实现更高的可靠性。
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公开(公告)号：US20050218753A1
公开(公告)日：2005-10-06
申请号：US11092722
申请日：2005-03-30
IPC分类号： H01L41/053 , H03B5/30 , H03H9/02 , H03H9/17 , H03H9/58
CPC分类号： H03H9/02157 , H03H9/02149 , H03H9/174 , H03H9/585 , H03H9/588
摘要： The area of an opening C of a cavity 31 is equal to or greater than the area of a horizontal cross section D of a vibrating section 10. The vibrating section 10 is placed on a support section 20 at a position such that a vertical projection of the vibrating section 10 onto a substrate 30 is accommodated within the opening C of the cavity 31. Moreover, the sum of a vertical thickness t1 of the vibrating section 10 and a vertical thickness t2 of the support section 20 is equal to one wavelength of a resonance frequency fr of an acoustic resonator 1 (one wavelength=t1+t2), while the thickness t1 of the vibrating section 10 and the thickness t2 of the support section 20 are different from each other (t1≠t2). Thus, neither the thickness t1 of the vibrating section 10 nor the thickness t2 of the support section 20 is equal to the half wavelength of the resonance frequency fr.
摘要翻译： 空腔31的开口C的面积等于或大于振动部分10的水平横截面D的面积。 振动部分10被放置在支撑部分20上，使得振动部分10在基片30上的垂直突起容纳在空腔31的开口C内。 此外，振动部10的垂直厚度t 1和支撑部20的垂直厚度t 2之和等于声谐振器1的共振频率fr的一个波长（一个波长= t 1 + t 2 ），而振动部10的厚度t 1和支撑部20的厚度t 2彼此不同（t 1> t 2）。 因此，振动部10的厚度t 1和支撑部20的厚度t 2都不等于共振频率fr的半波长。
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44.发明申请公开(公告)号：US20050099093A1
公开(公告)日：2005-05-12
申请号：US10979277
申请日：2004-11-03
CPC分类号： H03H9/173 , H03H3/04 , H03H2003/021
摘要： The present invention relates to a piezoelectric resonator including: a substrate; a lower electrode provided on or above the substrate; a piezoelectric member 101 provided on or above the lower electrode; an upper electrode 102 provided on or above the piezoelectric member; and a cavity 104 provided below a vibration member consisting of the lower electrode, the piezoelectric member, and the upper electrode. In the case where a resonance frequency of vibration with a thickness of the vibration member being a half of a wavelength is taken as fr1, an average of ultrasonic velocity in a material forming the cavity is taken as Vc2, and a value determined based on the resonance frequency fr1 and the average of ultrasonic velocity Vc2 is λc (=Vc2/fr1), a depth t2 of the cavity is set as shown below, ( 2 n - 1 ) × λ c 4 - λc 8 ≦ t2 ≦ ( 2 n - 1 ) × λ c 4 + λ c 8 , where n is an arbitrary natural number.
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45.发明申请Thin film bulk acoustic resonator, method for producing the same, filter, composite electronic component device, and communication device 失效薄膜体声波谐振器，其制造方法，滤波器，复合电子部件装置以及通信装置公开(公告)号：US20050057324A1
公开(公告)日：2005-03-17
申请号：US10935160
申请日：2004-09-08
CPC分类号： H03H9/564 , H03H3/02 , H03H9/02118 , H03H9/171 , H03H9/568
摘要： A thin film bulk acoustic resonator includes a piezoelectric film, and a pair of electrodes between which the piezoelectric film is interposed. The piezoelectric film includes an outer region extending outwards from at least a portion of the periphery of a resonator portion composed of the pair of electrodes and the piezoelectric film. The outer region includes, in at least a portion thereof, an acoustic damping region for damping acoustic waves.
摘要翻译： 薄膜体声波谐振器包括压电薄膜和介于其间的一对电极。 压电膜包括从由一对电极和压电膜组成的谐振器部分的周边的至少一部分向外延伸的外部区域。 外部区域在其至少一部分中包括用于阻尼声波的声阻尼区域。
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46.发明授权公开(公告)号：US08803401B2
公开(公告)日：2014-08-12
申请号：US13255135
申请日：2010-12-02
申请人： Hiroshi Nakatsuka , Keiji Onishi
发明人： Hiroshi Nakatsuka , Keiji Onishi
CPC分类号： H02N1/08
摘要： A vibration power generator includes a first substrate, a first electrode on the first substrate, a second substrate spaced from and opposite the first substrate, and a second electrode on the second substrate. The first electrode vibrates with respect to the second substrate, and the first electrode and the second electrode include a film retaining electric charges. The vibration generator includes a third electrode with a film retaining electric charges on the first substrate, and a fourth electrode with a film retaining electric charges on the second substrate. The third electrode and the fourth electrode are arranged so that the first substrate is retained in a predetermined position when an external force does not act on the first substrate, while an electrostatic force for returning the first substrate to a predetermined position acts on the first substrate and the first substrate moves with respect to the second substrate.
摘要翻译： 振动发电机包括第一基板，第一基板上的第一电极，与第一基板间隔开并与第一基板相对的第二基板，以及在第二基板上的第二电极。 第一电极相对于第二基板振动，第一电极和第二电极包括保持电荷的膜。 振动发生器包括具有在第一基板上保持电荷的膜的第三电极和在第二基板上具有保持电荷的膜的第四电极。 第三电极和第四电极被布置成使得当外力不作用在第一基板上时，第一基板保持在预定位置，而用于将第一基板返回到预定位置的静电力作用在第一基板 并且第一基板相对于第二基板移动。
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公开(公告)号：US08698257B2
公开(公告)日：2014-04-15
申请号：US13377898
申请日：2010-06-30
IPC分类号： H01L29/84
CPC分类号： H03H3/0072 , B81B2201/016 , B81B2201/0271 , B81B2203/019 , B81C1/00142 , B81C1/0015 , H03H9/02338 , H03H9/2463 , H03H2009/02291 , H03H2009/02511
摘要： A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.
摘要翻译： 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。
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48.发明授权公开(公告)号：US08653717B2
公开(公告)日：2014-02-18
申请号：US13517392
申请日：2010-12-22
申请人： Hiroshi Nakatsuka , Keiji Onishi
发明人： Hiroshi Nakatsuka , Keiji Onishi
CPC分类号： H02N1/08
摘要： A vibration power generator includes a first substrate, a first electrode disposed on a lower surface of the first substrate and including a film retaining electric charges, a second substrate opposing the lower surface of the first substrate, a second electrode disposed on an upper surface of the second substrate, a third electrode disposed on the upper surface of the first substrate and including a film retaining the electric charges, a third substrate opposing the upper surface of the first substrate, and a fourth electrode disposed on a lower surface of the third substrate and opposing the third electrode. The film of the first electrode has a polarity different from a polarity of the film of the third electrode, and the vibration power generator includes a restoring force generation member giving a restoring force when an external force is not exerted to the first substrate.
摘要翻译： 振动发电机包括第一基板，设置在第一基板的下表面上并包括保持电荷的膜的第一电极，与第一基板的下表面相对的第二基板，设置在第一基板的上表面上的第二电极 所述第二基板，设置在所述第一基板的上表面上并且包括保持所述电荷的膜的第三电极，与所述第一基板的上表面相对的第三基板和设置在所述第三基板的下表面上的第四电极 并与第三电极相对。 第一电极的膜具有与第三电极的膜极性不同的极性，并且振动发生器包括在不对第一基板施加外力时提供恢复力的恢复力产生部件。
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公开(公告)号：US08525605B2
公开(公告)日：2013-09-03
申请号：US13322263
申请日：2011-03-03
IPC分类号： H03B5/30
摘要： A MEMS oscillator including: an oscillator unit being capable of outputting an output from an amplifier as an original oscillator signal that includes a feedback type oscillator circuit including a MEMS resonator and an amplifier, and an automatic gain controller receiving the output from the amplifier and controlling a gain of the amplifier based on a level of the output to maintain a level of the output from the amplifier constant; and a corrector unit that receives the original oscillator signal, that generates from the original oscillator signal a signal of a predetermined set frequency, and that outputs the generated signal of the predetermined set frequency as an output signal. The corrector unit receives, separately from the original oscillator signal, an information signal that includes a signal having a correspondence relationship between a gain at a resonance frequency of the MEMS resonator from the oscillator unit, corrects a frequency of the original oscillator signal based on the information signal to generate the signal of the predetermined set frequency, and outputs the generated signal of the predetermined set frequency as the output signal.
摘要翻译： 一种MEMS振荡器，包括：振荡器单元，其能够输出来自放大器的输出作为原始振荡器信号，其包括包括MEMS谐振器和放大器的反馈型振荡器电路，以及接收来自放大器的输出的自动增益控制器 基于输出电平的放大器的增益来保持放大器的输出电平恒定; 以及校正单元，其接收原始振荡器信号，其从原始振荡器信号产生预定设定频率的信号，并将预定设定频率的所生成的信号作为输出信号输出。 校正单元与原始振荡器信号分离地接收包括具有来自振荡器单元的MEMS谐振器的谐振频率处的增益之间的对应关系的信号的信息信号，基于该振荡器信号校正原始振荡器信号的频率 信号信号以产生预定设定频率的信号，并输出预定设定频率的产生信号作为输出信号。
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公开(公告)号：US08516905B2
公开(公告)日：2013-08-27
申请号：US13583379
申请日：2012-04-02
CPC分类号： G01L9/0019 , H03H9/2463 , H03H2009/02488
摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.
摘要翻译： 包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力 基于由检测电路检测到的AC信号的传输特性。
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