利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

91 条记录 (耗时 0.033 秒)

    Silicon-on-insulator substrate, fabricating method thereof, and method for fabricating floating structure using the same
    42.
    发明授权
    Silicon-on-insulator substrate, fabricating method thereof, and method for fabricating floating structure using the same 有权
    绝缘体上硅衬底及其制造方法以及使用其制造浮动结构的方法

    公开(公告)号：US07208800B2

    公开(公告)日：2007-04-24

    申请号：US11242824

    申请日：2005-10-05

    申请人： Seok-whan Chung ,  Hyung Choi

    发明人： Seok-whan Chung ,  Hyung Choi

    IPC分类号： H01L21/84 ,  H01L27/12

    CPC分类号： B81C1/00579 ,  B81C2201/0132

    摘要： A silicon-on-insulator (SOI) substrate including laminated layers of a substrate, an oxide layer, and a silicon layer in order. The oxide layer has an electrifying hole fluidly connected with the substrate and the electrifying hole is filled with a part of the silicon layer. A method for fabricating the floating structure is also disclosed which includes the steps of forming an oxide layer having a predetermined thickness on a substrate, forming one or more electrifying holes in an area of the oxide layer corresponding to an inner part of the floating structure, forming a silicon layer on the oxide layer including an electrification structure electrically connecting the silicon layer to the substrate, forming a pattern for the floating structure on the silicon layer, removing the oxide layer corresponding to an inner area of the pattern, forming a thermal oxide layer on a surface of the silicon layer, and removing the thermal oxide layer to form the floating structure.

    摘要翻译： 一种绝缘体上硅（SOI）衬底，包括衬底，氧化物层和硅层的叠层。 氧化物层具有与基板流体连接的带电孔，并且充电孔填充有硅层的一部分。 还公开了一种用于制造浮动结构的方法，其包括在衬底上形成具有预定厚度的氧化物层的步骤，在与浮动结构的内部对应的氧化物层的区域中形成一个或多个通电孔， 在所述氧化物层上形成硅层，所述硅层包括将所述硅层电连接到所述衬底的带电结构，在所述硅层上形成所述浮动结构的图案，除去与所述图案的内部区域对应的所述氧化物层，形成热氧化物 层，并且去除热氧化物层以形成浮动结构。

    Optical bench, slim optical pickup employing the same and method of manufacturing the optical bench
    43.
    发明授权
    Optical bench, slim optical pickup employing the same and method of manufacturing the optical bench 失效
    光学工作台，采用相同的纤细光学拾取器以及制造光学平台的方法

    公开(公告)号：US07202464B2

    公开(公告)日：2007-04-10

    申请号：US11049896

    申请日：2005-02-04

    申请人： Woong-lin Hwang ,  Hyung Choi ,  Jae-ho You ,  Yong-sung Kim

    发明人： Woong-lin Hwang ,  Hyung Choi ,  Jae-ho You ,  Yong-sung Kim

    IPC分类号： H01J40/14 ,  G02B27/64 ,  G02B27/40 ,  G02B7/04

    CPC分类号： H01L31/14 ,  G11B7/123 ,  G11B7/131 ,  G11B7/1362 ,  G11B7/22 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

    摘要： An optical bench is provided, as are a thin optical pickup that employs the optical bench, and a method of manufacturing the optical bench. The optical bench includes a light source for generating light for recording and reproducing information to and from an optical disc, a light source stand on which the light source is mounted, a mirror adjacent to the light source stand, and a bottom surface at a lower point than the light source stand and between the light source stand and the mirror surface. Sides of the light source stand besides the side facing the mirror are connected to the surface of the substrate by a flat sloped surface. Along the sloped surface, two electrodes for supplying power to the light source are connected to the light source stand. Since the metal wirings are formed along the sloped surface without trenches or windings between the light source stand and the silicon substrate, no disconnection of metal lines at a corner occurs.

    摘要翻译： 提供了一种光学台，以及使用光学台的薄型光学拾取器以及制造光学台的方法。 光学台包括用于产生用于从光盘记录和再现信息的光的光源，安装有光源的光源支架，与光源支架相邻的反射镜，以及位于下部的底部表面 点比光源支架和光源支架和镜面之间的点。 除了面向镜的一侧之外，光源的侧面通过平坦的倾斜表面连接到基板的表面。 沿着倾斜的表面，用于向光源供电的两个电极连接到光源支架。 由于在光源支架和硅基板之间没有沟槽或绕组的倾斜表面形成金属布线，所以不会发生角落处的金属线断开。

    Method of forming a via hole through a glass wafer
    45.
    发明授权
    Method of forming a via hole through a glass wafer 有权
    通过玻璃晶片形成通孔的方法

    公开(公告)号：US07084073B2

    公开(公告)日：2006-08-01

    申请号：US10681217

    申请日：2003-10-09

    申请人： Moon-chul Lee ,  Hyung Choi ,  Kyu-dong Jung ,  Mi Jang ,  Seog-woo Hong ,  Seok-whan Chung ,  Chan-bong Jun ,  Seok-jin Kang

    发明人： Moon-chul Lee ,  Hyung Choi ,  Kyu-dong Jung ,  Mi Jang ,  Seog-woo Hong ,  Seok-whan Chung ,  Chan-bong Jun ,  Seok-jin Kang

    IPC分类号： H01L21/302

    CPC分类号： B81C1/00087 ,  H01L21/486 ,  H01L23/13 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method of forming a via hole through a glass wafer includes depositing a material layer on an outer surface of the glass wafer, the material layer having a selection ratio higher than that of the glass wafer, forming a via-patterned portion on one side of the material layer, performing a first etching in which the via-patterned portion is etched to form a preliminary via hole, eliminating any remaining patterning material used in the formation of the via-patterned portion, performing a second etching in which the preliminary via hole is etched to form a via hole having a smooth surface and extending through the glass wafer, and eliminating the material layer. The method according to the present invention is able to form a via hole through a glass wafer without allowing formation of an undercut or minute cracks, thereby increasing the yield and reliability of MEMS elements.

    摘要翻译： 通过玻璃晶片形成通孔的方法包括在玻璃晶片的外表面上沉积材料层，该材料层的选择比率高于玻璃晶片的选择比，在玻璃晶片的一侧上形成通孔图案部分 所述材料层进行蚀刻所述通路图案部分以形成预备通孔的第一蚀刻，消除在形成所述通路图案部分中使用的剩余图案材料，进行第二蚀刻，其中所述预通孔 被蚀刻以形成具有光滑表面并延伸穿过玻璃晶片的通孔，并且消除材料层。 根据本发明的方法能够通过玻璃晶片形成通孔，而不会形成底切或微小的裂缝，从而提高MEMS元件的成品率和可靠性。

    Method for forming device isolation film of semiconductor device
    46.
    发明申请
    Method for forming device isolation film of semiconductor device 审中-公开
    半导体器件隔离膜形成方法

    公开(公告)号：US20060003541A1

    公开(公告)日：2006-01-05

    申请号：US10998806

    申请日：2004-11-30

    申请人： Hyung Choi ,  Bo Wi

    发明人： Hyung Choi ,  Bo Wi

    IPC分类号： H01L21/76

    CPC分类号： H01L21/76229 ,  H01L27/1052

    摘要： A method for forming device isolation film of semiconductor device is provided, the method including sequentially forming a pad oxide layer and a pad nitride layer on a semiconductor substrate having a cell region and a peripheral circuit region, etching a predetermined region of the pad nitride layer, the pad oxide layer, and the semiconductor substrate to form a trench, forming an sidewall oxide film on a surface of the trench, etching a predetermined thickness of the sidewall oxide film in the cell region, forming a liner nitride film and a liner oxide film on the semiconductor substrate including the trench and the pad nitride layer, depositing a HDP oxide film to fill up the trench, performing a planarization process to expose the pad nitride layer, and removing the pad nitride layer.

    摘要翻译： 提供了一种用于形成半导体器件的器件隔离膜的方法，该方法包括在具有单元区域和外围电路区域的半导体衬底上依次形成衬垫氧化物层和衬垫氮化物层，蚀刻衬垫氮化物层的预定区域 ，衬垫氧化物层和半导体衬底以形成沟槽，在沟槽的表面上形成侧壁氧化膜，蚀刻电池区域中的侧壁氧化物膜的预定厚度，形成衬里氮化物膜和衬里氧化物 在包括沟槽和衬垫氮化物层的半导体衬底上形成膜，沉积HDP氧化物膜以填充沟槽，执行平坦化工艺以露出衬垫氮化物层，以及去除焊盘氮化物层。

    Micromirror actuator and manufacturing method thereof
    48.
    发明授权
    Micromirror actuator and manufacturing method thereof 失效
    微镜致动器及其制造方法

    公开(公告)号：US06931171B2

    公开(公告)日：2005-08-16

    申请号：US10310134

    申请日：2002-12-05

    申请人： Yong-seop Yoon ,  Hyung Choi

    发明人： Yong-seop Yoon ,  Hyung Choi

    IPC分类号： B81B3/00 ,  B81C1/00 ,  G02B6/35 ,  G02B26/08 ,  G02B6/26

    CPC分类号： G02B6/357 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/3584 ,  G02B6/3586 ,  G02B26/0841

    摘要： An actuator which can be actively driven so as to precisely control a driving angle of a micromirror, and a manufacturing method thereof are provided. The micromirror actuator includes a substrate, a trench, a micromirror, and a driving angle control unit. The trench is formed in a predetermined position of the substrate and has at least one electrode. The micromirror rotates by an electrostatic force generated through an interaction with the at least one electrode so as to reflect incident light in a predetermined direction. The driving angle control unit supports the micromirror so as to control the position of an actuation shaft of the micromirror. Accordingly, the micromirror can stand erect at an accurate right angle without an additional actuator for correcting the error in the driving angle of the micromirror so as to reduce insertion loss.

    摘要翻译： 提供一种能够被主动驱动以致精确地控制微反射镜的驱动角的致动器及其制造方法。 微反射镜致动器包括基板，沟槽，微镜和驱动角度控制单元。 沟槽形成在基板的预定位置，并具有至少一个电极。 微镜通过与至少一个电极的相互作用产生的静电力旋转，以便沿预定方向反射入射光。 驱动角度控制单元支撑微镜，以便控制微镜的致动轴的位置。 因此，微镜可以以精确的直角直立，而不需要额外的致动器来校正微镜的驱动角度的误差，从而减小插入损耗。

    Optical bench, slim optical pickup employing the same and method of manufacturing the optical bench
    49.
    发明申请
    Optical bench, slim optical pickup employing the same and method of manufacturing the optical bench 失效
    光学工作台，采用相同的纤细光学拾取器以及制造光学平台的方法

    公开(公告)号：US20050173614A1

    公开(公告)日：2005-08-11

    申请号：US11049896

    申请日：2005-02-04

    申请人： Woong-Iin Hwang ,  Hyung Choi ,  Jae-ho You ,  Yong-sung Kim

    发明人： Woong-Iin Hwang ,  Hyung Choi ,  Jae-ho You ,  Yong-sung Kim

    IPC分类号： G11B7/125 ,  G02B27/40 ,  G11B7/12 ,  G11B7/13 ,  G11B7/135 ,  G11B7/22 ,  H01L31/12 ,  H01L31/14

    CPC分类号： H01L31/14 ,  G11B7/123 ,  G11B7/131 ,  G11B7/1362 ,  G11B7/22 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

    摘要： An optical bench is provided, as are a thin optical pickup that employs the optical bench, and a method of manufacturing the optical bench. The optical bench includes a light source for generating light for recording and reproducing information to and from an optical disc, a light source stand on which the light source is mounted, a mirror adjacent to the light source stand, and a bottom surface at a lower point than the light source stand and between the light source stand and the mirror surface. Sides of the light source stand besides the side facing the mirror are connected to the surface of the substrate by a flat sloped surface. Along the sloped surface, two electrodes for supplying power to the light source are connected to the light source stand. Since the metal wirings are formed along the sloped surface without trenches or windings between the light source stand and the silicon substrate, no disconnection of metal lines at a corner occurs.

    摘要翻译： 提供了一种光学台，以及使用光学台的薄型光学拾取器以及制造光学台的方法。 光学台包括用于产生用于从光盘记录和再现信息的光的光源，安装有光源的光源支架，与光源支架相邻的反射镜，以及位于下部的底部表面 点比光源支架和光源支架和镜面之间的点。 除了面向镜的一侧之外，光源的侧面通过平坦的倾斜表面连接到基板的表面。 沿着倾斜的表面，用于向光源供电的两个电极连接到光源支架。 由于在光源支架和硅基板之间没有沟槽或绕组的倾斜表面形成金属布线，所以不会发生角落处的金属线断开。

    Optical switch using micro-electromechanical system
    50.
    发明授权
    Optical switch using micro-electromechanical system 失效
    光开关采用微机电系统

    公开(公告)号：US06819809B2

    公开(公告)日：2004-11-16

    申请号：US10619503

    申请日：2003-07-16

    申请人： Yong-seop Yoon ,  Hyung Choi

    发明人： Yong-seop Yoon ,  Hyung Choi

    IPC分类号： G02F1295

    CPC分类号： G02B6/3584 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/357

    摘要： Provided is a 2×2 optical switch includes a substrate, a first input fiber and a first output fiber, a second input fiber and a second output fiber, a rotating mirror, torsion bars, and an electrostatic force generating part. The first input fiber and a first output fiber are arranged at a predetermined distance from a central point in a first optical path passing through the central point over the substrate. The second input fiber and a second output fiber are arranged at a predetermined distance from the central point in a second optical path that passes through the central point and is orthogonal to the first optical path. The rotating mirror is positioned at around the central point and turns on a turning shaft. The torsion bars support the rotating mirror and the electrostatic force generating part supplies a drive force to the rotating mirror.

    摘要翻译： 提供了一种2x2光开关，其包括基板，第一输入光纤和第一输出光纤，第二输入光纤和第二输出光纤，旋转镜，扭杆和静电力产生部。 第一输入光纤和第一输出光纤被布置在距离通过基板上方的中心点的第一光路中的中心点预定的距离处。 第二输入光纤和第二输出光纤布置在通过中心点并且与第一光路正交的第二光路中的中心点预定距离处。 旋转镜位于中心点周围，并转动转轴。 扭杆支撑旋转镜，静电力产生部分向旋转镜提供驱动力。