Abstract:
The present invention relates to metal oxide based memory devices and methods for manufacturing such devices, and more particularly to memory devices having data storage materials based on metal oxide compounds fabricated with a biased plasma oxidation process which improves the interface between the memory element and a top electrode for a more a uniform electrical field during operation, which improves device reliability.
Abstract:
A method for manufacturing a resistive memory device is disclosed and comprises following steps. Firstly, a bottom electrode is formed over a substrate. Next, an oxidation process is performed to the bottom electrode to form a metal oxide layer, wherein a hydrogen plasma and an oxygen plasma are provided during the oxidation process. Then, a top electrode is formed on the metal oxide layer.
Abstract:
A method for generating a data set on an integrated circuit including programmable resistance memory cells includes applying a forming pulse to all members of a set of the programmable resistance memory cells. The forming pulse has a forming pulse level characterized by inducing a change in resistance in a first subset of the set from an initial resistance range to an intermediate resistance range, while after the forming pulse a second subset of the set has a resistance outside the intermediate range. The method includes applying a programming pulse to the first and second subsets. The programming pulse has a programming pulse level characterized by inducing a change in resistance of the first subset from the intermediate range to a first final range, while after the programming pulse the second subset has a resistance in a second final range, whereby the first and second subsets store said data set.
Abstract:
A memory architecture has improved controllability of operations for bipolar current directions used to write data in programmable resistance memory cells, including ReRAM cells based on metal oxide memory materials. Instead of a fixed gate voltage on a specific decoder transistor or cell selection device, and a control voltage set to values that cause the decoder transistor or cell selection device to operate in a fully-on mode for one current direction or in a current moderating mode with opposite current direction. Using this technology allows symmetrical or close to symmetrical operation in both current directions with little or no effect on the array complexity.
Abstract:
A memory structure and a manufacturing method for the same are disclosed. The memory structure comprises a lower electrode, an upper insulating layer, a material layer, a dielectric film, and an upper electrode. The upper insulating layer is on the lower electrode. The material layer is on the upper insulating layer. The upper insulating layer and the material layer have a common opening to expose a portion of the lower electrode. The dielectric film is on the exposed portion of the lower electrode. The dielectric film and the material layer contain a same first transition metal. The upper electrode is on the dielectric film and fills the common opening.
Abstract:
A method is provided for manufacturing a memory. An insulating layer is formed over an array of interlayer conductors, and etched to define a first opening corresponding to a first interlayer conductor in the array, where the etching stops at a first top surface of the first interlayer conductor. A metal oxide layer is formed on the first top surface. A first layer of barrier material is deposited conformal with and contacting the metal oxide layer and surfaces of the first opening. Subsequently the insulating layer is etched to define a second opening corresponding to a second interlayer conductor in the array, where the etching stops at a second top surface of the second interlayer conductor. A second layer of barrier material is deposited conformal with and contacting the first layer of barrier material in the first opening. The first opening is filled with a conductive material.
Abstract:
A memory device comprises a substrate, a first electrode layer, a spacer, a memory layer and a second electrode layer. The substrate has a recess. The first electrode layer is formed in the recess and has a top surface exposed from an opening of the recess. The spacer covers on a portion of the top surface, so as to define a contact area on the top surface. The memory layer is formed on the contact area. The second electrode layer is formed on the memory layer and electrically connected to the memory layer.
Abstract:
A resistive memory device is provided, comprising a bottom electrode, a patterned dielectric layer with a via formed on the bottom electrode, a barrier layer formed at sidewalls and a bottom surface of the via as a liner, a ring-shaped metal layer formed at sidewalls and a bottom surface of the barrier layer, and a ring-shaped metal oxide formed on a top surface of the ring-shaped metal layer.
Abstract:
A TCAM comprises a plurality of first search lines, a plurality of second search lines, a plurality of memory cell strings and one or more current sensing units. The memory cell strings comprise a plurality of memory cells. The current sensing units are coupled to the memory cell strings. In a search operation, a determination that whether any of the data stored in the memory cell strings matches a data string to be searched is made according to whether the one or more current sensing units detect current from the memory cell strings, or according to the magnitude of the current flowing out from the memory cell strings detected by the one or more current sensing units. Each memory cell includes a first transistor, a second transistor and an inverter. The first search line is coupled to the second search line by the inverter.
Abstract:
A memory cell and a memory device are provided. The memory cell comprises: a write transistor; and a read transistor coupled to the write transistor, the write transistor and the read transistor coupled at a storage node, the storage node being for storing data; wherein, at least one among the write transistor and the read transistor includes a threshold voltage adjusting layer, and a threshold voltage of the write transistor and/or the read transistor is adjustable.