Radio frequency plasma enhanced chemical vapor deposition process and
reactor
    41.
    发明授权
    Radio frequency plasma enhanced chemical vapor deposition process and reactor 失效
    射频等离子体增强化学气相沉积工艺和反应器

    公开(公告)号:US5052339A

    公开(公告)日:1991-10-01

    申请号:US598500

    申请日:1990-10-16

    摘要: An improved capacitively coupled radio frequency-plasma enhanced chemical vapor deposition (PECVD) apparatus and process are disclosed for depositing a uniform coating of material on substrates. The apparatus includes a secondary electrode defining a reaction zone within an outer chamber and an RF electrode in concert with the secondary electrode for generating a plasma within the reaction zone. The electrode comprising a base and a finger extending through the reaction zone for distributing a plasma field uniformly throughout the reaction zone. The process comprises heating a substrate to a deposition temperature in the range of about 300.degree. to 650.degree. C. Reactant gases are introduced into the PECVD reactor and a coating of about 0.2 to about 20 .mu.m is deposited onto the heated substrate. This low temperature process is particularly adapted to coating three-dimensional objects of metals, metal alloys and mixtures of metals.

    摘要翻译: 公开了一种改进的电容耦合射频等离子体增强化学气相沉积(PECVD)装置和方法,用于在衬底上沉积均匀的材料涂层。 该装置包括限定外部室内的反应区的次级电极和与该次级电极协调的RF电极,用于在反应区内产生等离子体。 所述电极包括延伸穿过所述反应区的基部和手指,用于均匀地分布整个反应区中的等离子体场。 该方法包括将基底加热到约300至650℃范围内的沉积温度。将反应物气体引入PECVD反应器中,并将约0.2至约20μm的涂层沉积在加热的基底上。 该低温工艺特别适用于涂覆金属,金属合金和金属混合物的三维物体。

    High erosion/wear resistant multi-layered coating system
    42.
    发明授权
    High erosion/wear resistant multi-layered coating system 失效
    高侵蚀/耐磨多层涂层系统

    公开(公告)号:US4927713A

    公开(公告)日:1990-05-22

    申请号:US389206

    申请日:1989-08-02

    摘要: An improved highly erosive and abrasive wear resistant multi-layered coating system on a substrate which provides protection against impact of large particles is disclosed comprising a plurality of composite layers. In each of the composite layers, the first layer closest to the substrate comprises tungsten of sufficient thickness to confer substantial erosion and abrasion wear resistance characteristics to the coating system and a second layer deposited on the first layer comprises a mixture of tungsten and tungsten carbide and the tungsten carbide comprises W.sub.2 C, W.sub.3 C, or a mixture of both. Because the resulting coating system has enhanced high cycle fatigue strength over the substrate, the coating system is especially useful on such structures as turbine blades and similar articles of manufacture where such high stress cycles occur during normal operation. Also dislcosed is the method for preparing such improved composite coating systems.

    摘要翻译: 公开了一种改进的高侵蚀性和磨蚀性耐磨多层涂层系统,其在基板上提供防止大颗粒冲击的保护,其包括多个复合层。 在每个复合层中,最靠近基底的第一层包括足够厚度的钨,以赋予涂层体系显着的侵蚀和磨损耐磨特性,而沉积在第一层上的第二层包括钨和碳化钨的混合物,以及 碳化钨包括W2C,W3C或两者的混合物。 由于所得到的涂层体系在衬底上具有增强的高循环疲劳强度,所以涂覆系统在诸如涡轮机叶片和类似的制品之类的结构中是特别有用的,其中在正常操作期间发生如此高的应力循环。 制备这种改进的复合涂层体系的方法也是一个缺点。

    Fischer-Tropsch process
    45.
    发明授权
    Fischer-Tropsch process 失效
    费 - 托法

    公开(公告)号:US4670472A

    公开(公告)日:1987-06-02

    申请号:US862744

    申请日:1986-05-13

    摘要: A Fischer-Tropsch process utilizing a product selective and stable catalyst by which synthesis gas, particularly carbon-monoxide rich synthesis gas is selectively converted to higher hydrocarbons of relatively narrow carbon number range is disclosed. In general, the selective and notably stable catalyst, consist of an inert carrier first treated with a Group IV B metal compound (such as zirconium or titanium), preferably an alkoxide compound, and subsequently treated with an organic compound of a Fischer-Tropsch metal catalyst, such as cobalt, iron or ruthenium carbonyl. Reactions with air and water and calcination are specifically avoided in the catalyst preparation procedure.

    摘要翻译: 公开了一种利用产物选择性和稳定催化剂的费 - 托方法,其中合成气,特别是一氧化碳浓度合成气选择性地转化为相对较窄碳数范围的较高级烃。 通常,选择性和显着稳定的催化剂由首先用ⅣB族金属化合物(例如锆或钛),优选醇盐化合物处理的惰性载体组成,随后用费 - 托金属的有机化合物 催化剂,如钴,铁或羰基钌。 在催化剂制备过程中特别避免了与空气和水的反应和煅烧。