Method for producing a semiconductor crystal
    41.
    发明授权
    Method for producing a semiconductor crystal 有权
    半导体晶体的制造方法

    公开(公告)号:US08216365B2

    公开(公告)日:2012-07-10

    申请号:US12073178

    申请日:2008-02-29

    IPC分类号: C30B25/18

    CPC分类号: C30B29/403 C30B9/00 C30B9/10

    摘要: Objects of the invention are to further enhance crystallinity and crystallinity uniformity of a semiconductor crystal produced through the flux method, and to effectively enhance the production yield of the semiconductor crystal. The c-axis of a seed crystal including a GaN single-crystal layer is aligned in a horizontal direction (y-axis direction), one a-axis of the seed crystal is aligned in the vertical direction, and one m-axis is aligned in the x-axis direction. Thus, three contact points at which a supporting tool contacts the seed crystal are present on m-plane. The supporting tool has two supporting members, which extend in the vertical direction. One supporting member has an end part, which is inclined at 30° with respect to the horizontal plane α. The reasons for supporting a seed crystal at m-plane thereof are that m-plane exhibits a crystal growth rate, which is lower than that of a-plane, and that desired crystal growth on c-plane is not inhibited. Actually, a plurality of seed crystals and supporting tools are periodically placed along the y-axis direction.

    摘要翻译: 本发明的目的是进一步提高通过助焊剂法生产的半导体晶体的结晶度和结晶度均匀性,并有效提高半导体晶体的制造成品率。 包括GaN单晶层的晶种的c轴在水平方向(y轴方向)上排列,晶种的一个a轴在垂直方向上排列,并且一个m轴对齐 在x轴方向。 因此,在m平面上存在支撑工具与晶种接触的三个接触点。 支撑工具具有在垂直方向上延伸的两个支撑构件。 一个支撑构件具有相对于水平面α倾斜30°的端部。 在m面支撑晶种的原因在于,m面的晶体生长速度低于a面的晶体生长速度,c面上的期望的晶体生长没有被抑制。 实际上,沿着y轴方向周期性地放置多个晶种和支撑工具。

    Crystal growing apparatus
    42.
    发明授权
    Crystal growing apparatus 有权
    水晶生长装置

    公开(公告)号:US07708833B2

    公开(公告)日:2010-05-04

    申请号:US12073904

    申请日:2008-03-11

    IPC分类号: C30B35/00

    摘要: An object of the invention is to carry out the flux method with improved work efficiency while maintaining the purity of flux at high level and saving flux material cost. The sodium-purifying apparatus includes a sodium-holding-and-management apparatus for maintaining purified sodium (Na) in a liquid state. Liquid sodium is supplied into a sodium-holding-and-management apparatus through a liquid-sodium supply piping maintained at 100° C. to 200° C. The sodium-holding-and-management apparatus further has an argon-gas-purifying apparatus for controlling the condition of argon (Ar) gas that fills the internal space thereof. Thus, by opening and closing a faucet at desired timing, purified liquid sodium (Na) supplied from the sodium-purifying apparatus can be introduced into a crucible as appropriate via the liquid-sodium supply piping, the sodium-holding-and-management apparatus, and the piping.

    摘要翻译: 本发明的目的是在保持高水平的助焊剂纯度的同时,实现提高工作效率的助焊剂方法,节约焊剂材料成本。 钠纯化装置包括用于保持液态的纯化钠(Na)的钠保持和管理装置。 液态钠通过保持在100℃至200℃的液态钠供应管道供应到保钠管理装置中。钠保持和管理装置还具有氩气净化装置 用于控制填充其内部空间的氩(Ar)气体的状态。 因此,通过在期望的时间打开和关闭水龙头,可以通过液体钠供应管道,钠保持管理装置适当地将从钠纯化装置供应的纯化液体钠(Na) ,和管道。

    Production method for semiconductor crystal and semiconductor luminous element
    43.
    发明授权
    Production method for semiconductor crystal and semiconductor luminous element 有权
    半导体晶体和半导体发光元件的制造方法

    公开(公告)号:US07052979B2

    公开(公告)日:2006-05-30

    申请号:US10467566

    申请日:2002-02-12

    IPC分类号: H01L21/20

    摘要: When a substrate layer (desired semiconductor crystal) made of a group III nitride compound is grown on a base substrate comprising a lot of projection parts, a cavity in which a semiconductor crystal is not deposited may be formed between each projection part although it depends on conditions such as the size of each projection part, arranging interval between each projection part and crystal growth. So when the thickness of the substrate layer is sufficiently larger compared with the height of the projection part, inner stress or outer stress become easier to act intensively to the projection part. As a result, such stress especially functions as shearing stress toward the projection part. When the shearing stress becomes larger, the projection part is ruptured. So utilizing the shearing stress enables to separate the base substrate and the substrate layer easily. The larger the cavities are formed, the more stress tends to concentrate to the projection parts, to thereby enable to separate the base substrate and the substrate layer more securely.

    摘要翻译: 当在包括大量投影部分的基底基板上生长由III族氮化物化合物制成的衬底层(期望的半导体晶体)时,可以在每个突出部分之间形成其中不沉积半导体晶体的空腔,尽管它取决于 条件如每个投影部分的尺寸,每个投影部分之间的间隔和晶体生长。 因此,当基板层的厚度与突出部分的高度相比足够大时,内应力或外应力变得更容易集中于投影部分。 结果,这种应力特别地作用于朝向投影部分的剪切应力。 当剪切应力变大时,突出部分破裂。 因此,利用剪切应力使得能够容易地分离基底和基底层。 形成空穴越大,应力越倾向于集中到突出部分,从而能够更牢固地分离基底基底和基底层。

    Production method for semiconductor substrate and semiconductor element
    44.
    发明授权
    Production method for semiconductor substrate and semiconductor element 有权
    半导体衬底和半导体元件的制造方法

    公开(公告)号:US07011707B2

    公开(公告)日:2006-03-14

    申请号:US10473074

    申请日:2002-03-27

    IPC分类号: C30B25/22

    摘要: A reaction prevention layer is formed to prevent Si from reacting with a gallium nitride group semiconductor (semiconductor crystal A) which is deposited after the reaction prevention layer is formed. By forming a reaction prevention layer comprising a material whose melting point or thermal stability is higher than that of a gallium nitride group semiconductor, e.g., AlN, on a sacrifice layer, a reaction part is not formed in the semiconductor substrate deposited on the reaction prevention layer when the gallium nitride group semiconductor is grown by crystal growth for a long time. In short, owing to the effect that the reaction prevention layer prevents silicon (Si) from diffusing, the reaction part is generated only in the sacrifice layer and it is never formed at the upper portion of the reaction prevention layer even by growing the semiconductor crystal A at a high temperature for a long time.

    摘要翻译: 形成反应防止层,以防止Si与形成反应防止层之后沉积的氮化镓基半导体(半导体晶体A)发生反应。 通过在牺牲层上形成包含熔点或热稳定性高于氮化镓基半导体(例如AlN)的材料的反应防止层,在沉积在反应预防的半导体衬底中不形成反应部分 通过长时间的晶体生长生长氮化镓族半导体时的层。 简而言之,由于防反射层防止硅(Si)扩散,反应部分仅在牺牲层中产生,并且即使通过生长半导体晶体也不会形成在反应防止层的上部 A在高温下长时间。

    Method for fetching plural instructions using single fetch request in
accordance with empty state of instruction buffers and setting of flag
latches
    47.
    发明授权
    Method for fetching plural instructions using single fetch request in accordance with empty state of instruction buffers and setting of flag latches 失效
    根据指令缓冲区的空状态和标志锁存器的设置,使用单次提取请求取出多个指令的方法

    公开(公告)号:US5267350A

    公开(公告)日:1993-11-30

    申请号:US603998

    申请日:1990-10-25

    CPC分类号: G06F9/3814 G06F9/3802

    摘要: An instruction fetch control method is generally arranged so as to have a plurality of instruction buffers, issue an instruction read request to a memory when a part of the instruction buffers becomes in an empty state and store a fetched instruction in the instruction buffer in an empty state. A flag is provided for specifying another instruction buffer which becomes in an empty state after the instruction stored in the instruction buffer is transmitted to a decoder. The quantity of instructions to be stored in the instruction buffer is made variable in accordance with output of the flag latch, and the fetched instruction is stored in the instruction buffer in an empty state. This arrangement enables a plurality of instructions fetched upon an instruction read request to be stored in the empty instruction buffers, thereby reducing the number of read requests issued.

    摘要翻译: 指令获取控制方法通常被布置为具有多个指令缓冲器,当指令缓冲器的一部分变为空状态时,向存储器发出指令读取请求,并将指令缓冲器中的取指令存储在空 州。 提供了一种标志,用于指定在存储在指令缓冲器中的指令被发送到解码器之后变为空状态的另一指令缓冲器。 存储在指令缓冲器中的指令量根据标志锁存器的输出而变化,并且取出的指令以空状态存储在指令缓冲器中。 这种布置使得可以在指令读取请求中取出的多个指令被存储在空指令缓冲器中,从而减少发出的读请求数。

    Method and apparatus for casting an inner lining amorphous refractory
into a molten metal vessel
    48.
    发明授权
    Method and apparatus for casting an inner lining amorphous refractory into a molten metal vessel 失效
    将内衬无定形耐火材料浇注到熔融金属容器中的方法和装置

    公开(公告)号:US4421697A

    公开(公告)日:1983-12-20

    申请号:US375716

    申请日:1982-05-07

    IPC分类号: B22D41/02 F27D1/16 F27D3/00

    摘要: There is disclosed the distribution of an amorphous refractory in a case where a lining frame is positioned within a molten metal vessel preliminarily lined with a permanent lining refractory and the amorphous refractory is cast into the space between the permanent lining refractory and the lining frame thereby applying a lining to the inner surface of the vessel.A conical distributor is arranged above the lining frame and the amorphous refractory is continuously delivered from a rotary chute onto the distributor so as to describe a concentric path of moving falling points.

    摘要翻译: 公开了在衬里框架位于预先排列有永久性衬里耐火材料的熔融金属容器内的情况下的非晶态耐火材料的分布,并且将非晶态耐火材料浇注到永久性衬里耐火材料和衬里框架之间的空间中,从而施加 衬里到容器的内表面。 锥形分配器布置在衬里框架的上方,非晶态耐火材料从旋转滑道连续地传送到分配器上,以便描述移动落点的同心路径。