公开(公告)号：US07403279B2

公开(公告)日：2008-07-22

申请号：US11248612

申请日：2005-10-13

Applicant: Keiichi Tohyama ,  Nobuharu Noji ,  Shoji Yoshikawa

Inventor： Keiichi Tohyama ,  Nobuharu Noji ,  Shoji Yoshikawa

IPC: G01N21/00

CPC classification number: G11B7/268 ,  H01J2237/2441 ,  H01J2237/2446

Abstract: In an examining apparatus, an electron gun irradiates an intended position of an information recording medium with an electron beam. A stage holds the information recording medium such that the information recording medium can be moved along a rotation direction and a radial direction. A detector detects electrons which have acquired information of a surface of the information recording medium by irradiating the information recording medium with the electron beam. An image producing unit acquires an image of the surface of the information recording medium based on the electrons detected by the detector. The examining apparatus can examine as to whether or not a defect of an information recording medium such as a CD and a DVD is present, but also can examine a shape of the defect thereof. The examining apparatus can also examine an information recording medium having a large storage capacity.

Abstract translation: 在检查装置中，电子枪用电子束照射信息记录介质的预定位置。 信息记录介质可以沿着旋转方向和径向移动，从而保持信息记录介质。 检测器通过用电子束照射信息记录介质来检测已经获取信息记录介质的表面的信息的电子。 图像产生单元基于由检测器检测到的电子来获取信息记录介质的表面的图像。 检查装置可以检查诸如CD和DVD之类的信息记录介质的缺陷是否存在，还可以检查其缺陷的形状。 检查装置还可以检查具有大存储容量的信息记录介质。

公开(公告)号：US07351969B2

公开(公告)日：2008-04-01

申请号：US11290688

申请日：2005-12-01

Applicant: Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

Inventor： Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

IPC: G21K7/00

CPC classification number: H01J37/28 ,  H01J37/224 ,  H01J37/244 ,  H01J2237/006 ,  H01J2237/20221 ,  H01J2237/2445 ,  H01J2237/2817

Abstract: An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.

Abstract translation: 图像投影型的电子束检查系统包括用于将从电子枪发射的电子束成形为矩形构造的一次电子光学系统，并将成形的电子束施加到要检查的样品表面。 二次电子光学系统收敛从样品发射的二次电子。 检测器通过荧光屏将会聚的二次电子转换成光学图像，并将图像聚焦到线传感器。 一个控制器控制线传感器的电荷转移时间，该线传感器在行传感器中设置的每对相邻像素行之间与用于移动样本的平台的移动速度相关联地传送拾取线图像。

公开(公告)号：US07305149B2

公开(公告)日：2007-12-04

申请号：US10230251

申请日：2002-08-29

Applicant: Shoji Yoshikawa ,  Katsuhiko Yamada ,  Masafumi Yamaguchi ,  Akito Takeya

Inventor： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Masafumi Yamaguchi ,  Akito Takeya

IPC: G06K9/54 ,  G06K9/60

CPC classification number: G06T19/006 ,  G01C21/26 ,  G06T7/74 ,  G06T17/05 ,  G06T2200/16

Abstract: An image collating center has a communication unit, a processing unit, and a memory unit. The processing unit accesses a geographic information database through a communication network, extracts appropriate geographic information from the geographic information database based on a picked-up image and additional information transmitted from an image provider, and generates a simulated image assumed to be viewed from the image provider. Further, the image collating center estimates the image pickup position and the image pickup attitude of the image provider through collating the simulated image with the picked-up image and returns the estimated image pickup position and image pickup attitude of the image provider to the image provider through the communication network.

Abstract translation: 图像对照中心具有通信单元，处理单元和存储单元。 处理单元通过通信网络访问地理信息数据库，基于拍摄的图像和从图像提供者发送的附加信息从地理信息数据库中提取适当的地理信息，并且生成假设从图像中观看的模拟图像 提供者 此外，图像对照中心通过将模拟图像与拾取图像进行核对来估计图像提供者的图像拾取位置和图像拾取姿势，并将图像提供者的估计图像拾取位置和图像拾取姿态返回给图像提供者 通过通信网络。

公开(公告)号：US20070272859A1

公开(公告)日：2007-11-29

申请号：US11808497

申请日：2007-06-11

Applicant: Mamoru Nakasuji ,  Tohru Satake ,  Nobuharu Noji ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Yoshiaki Kohama ,  Yukiharu Okubo

Inventor： Mamoru Nakasuji ,  Tohru Satake ,  Nobuharu Noji ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Toshifumi Kimba ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima ,  Yoshiaki Kohama ,  Yukiharu Okubo

IPC: G01N23/00

CPC classification number: H01J37/20 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: The purpose of the invention is to provide an improved electron beam apparatus with improvements in throughput, accuracy, etc.. One of the characterizing features of the electron beam apparatus of the present invention is that it has a plurality of optical systems, each of which comprises a primary electron optical system for scanning and irradiating a sample with a plurality of primary electron beams; a detector device for detecting a plurality of secondary beams emitted by irradiating the sample with the primary electron beams; and a secondary electron optical system for guiding the secondary electron beams from the sample to the detector device; all configured so that the plurality of optical systems scan different regions of the sample with their primary electron beams, and detect the respective secondary electron beams emitted from each of the respective regions. This is what makes higher throughput possible. To provide high accuracy, the apparatus is configured such that the axes of its optical systems can be aligned, and aberrations corrected, by a variety of methods.

Abstract translation: 本发明的目的是提供一种改进的电子束装置，其处理量，精度等得到改进。本发明的电子束装置的特征之一是具有多个光学系统，每个光学系统 包括用于用多个一次电子束扫描和照射样品的一次电子光学系统; 用于检测通过用一次电子束照射样品而发射的多个次级光束的检测器装置; 以及用于将二次电子束从样品引导到检测器装置的二次电子光学系统; 全部配置为使得多个光学系统用其一次电子束扫描样品的不同区域，并且检测从各个区域中的每一个发射的各个二次电子束。 这是什么使得更高的吞吐量成为可能。 为了提供高精度，该装置被配置为使得其光学系统的轴线可以通过各种方法对准和校正像差。

公开(公告)号：US20070045536A1

公开(公告)日：2007-03-01

申请号：US11350009

申请日：2006-02-09

Applicant: Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

Inventor： Mamoru Nakasuji ,  Nobuharu Noji ,  Tohru Satake ,  Toshifumi Kimba ,  Masahiro Hatakeyama ,  Kenji Watanabe ,  Hirosi Sobukawa ,  Tsutomu Karimata ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito ,  Muneki Hamashima

IPC: G21K7/00

CPC classification number: G01N23/225 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/222 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/082 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2816 ,  H01J2237/2817

Abstract: The present invention relates to a substrate inspection apparatus for inspecting a pattern formed on a substrate by irradiating a charged particle beam onto the substrate. The substrate inspection apparatus comprises: an electron beam apparatus including a charged particle beam source for emitting a charged particle beam, a primary optical system for irradiating the charged particle beam onto the substrate, a secondary optical system into which a secondary charged particle beam is introduced, the secondary charged particle beam being emitted from the substrate by an irradiation of the charged particle beam, a detection system for detecting the secondary charged particle beam introduced into said secondary optical system and outputting as an electric signal, and a process control system for processing and evaluating the electric signal; a stage unit for holding the substrate and moving the substrate relatively to said electron beam apparatus; a working chamber capable of shielding at least an upper region of the stage unit form outside to control under desired atmosphere; and a substrate load-unload mechanism for transferring the substrate into or out of the stage.

Abstract translation: 本发明涉及一种基板检查装置，用于通过将带电粒子束照射到基板上来检查形成在基板上的图案。 基板检查装置包括：电子束装置，其包括用于发射带电粒子束的带电粒子束源，用于将带电粒子束照射到基板上的主光学系统，引入二次带电粒子束的二次光学系统 通过照射带电粒子束从基板发射的二次带电粒子束，用于检测引入到所述二次光学系统中并输出作为电信号的二次带电粒子束的检测系统和用于处理的过程控制系统 并评估电信号; 用于保持基板并相对于所述电子束装置移动基板的载物台单元; 能够至少屏蔽舞台单元的上部区域的工作室形成外部以在期望的气氛下进行控制; 以及用于将衬底转移到或离开工作台的衬底装载 - 卸载机构。

公开(公告)号：US06992290B2

公开(公告)日：2006-01-31

申请号：US09985317

申请日：2001-11-02

Applicant: Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

Inventor： Kenji Watanabe ,  Hirosi Sobukawa ,  Nobuharu Noji ,  Tohru Satake ,  Shoji Yoshikawa ,  Tsutomu Karimata ,  Mamoru Nakasuji ,  Masahiro Hatakeyama ,  Takeshi Murakami ,  Yuichiro Yamazaki ,  Ichirota Nagahama ,  Takamitsu Nagai ,  Kazuyoshi Sugihara

IPC: H01J37/26

CPC classification number: H01J37/28 ,  H01J37/224 ,  H01J37/244 ,  H01J2237/006 ,  H01J2237/20221 ,  H01J2237/2445 ,  H01J2237/2817

Abstract: An electron beam inspection system of the image projection type includes a primary electron optical system for shaping an electron beam emitted from an electron gun into a rectangular configuration and applying the shaped electron beam to a sample surface to be inspected. A secondary electron optical system converges secondary electrons emitted from the sample. A detector converts the converged secondary electrons into an optical image through a fluorescent screen and focuses the image to a line sensor. A controller controls the charge transfer time of the line sensor at which the picked-up line image is transferred between each pair of adjacent pixel rows provided in the line sensor in association with the moving speed of a stage for moving the sample.

公开(公告)号：US06855929B2

公开(公告)日：2005-02-15

申请号：US09985324

申请日：2001-11-02

Applicant: Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

Inventor： Toshifumi Kimba ,  Tohru Satake ,  Tsutomu Karimata ,  Kenji Watanabe ,  Nobuharu Noji ,  Takeshi Murakami ,  Masahiro Hatakeyama ,  Mamoru Nakasuji ,  Hirosi Sobukawa ,  Shoji Yoshikawa ,  Shin Oowada ,  Mutsumi Saito

IPC: G01N23/225 ,  G01Q30/02 ,  H01J37/06 ,  H01J37/073 ,  H01J37/18 ,  H01J37/20 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  G01N23/00 ,  G21K7/00

CPC classification number: H01J37/222 ,  G01N23/225 ,  G01N23/2251 ,  H01J37/06 ,  H01J37/073 ,  H01J37/185 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/082 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/204 ,  H01J2237/22 ,  H01J2237/24564 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/2816 ,  H01J2237/2817 ,  H01L2224/48227 ,  H01L2924/01019 ,  H01L2924/01025 ,  H01L2924/01057 ,  H01L2924/01067 ,  H01L2924/01078 ,  H01L2924/10253 ,  H01L2924/12032 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A substrate inspection apparatus 1-1 (FIG. 1) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23-1 maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26-1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10-1; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20-1 and guiding it to a detecting system 35-1; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37-1; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput.

Abstract translation: 本发明的基板检查装置1-1（图1）执行以下步骤：将要检查的基板“S”运送到在检查室中保持真空的检查室23-1中; 将所述检查室与振动隔离; 通过具有至少一个自由度的平台26-1连续移动所述衬底; 照射具有指定宽度的电子束; 帮助所述电子束经由一次电子光学系统10-1到达所述衬底的表面; 通过二次电子光学系统20-1捕获从所述衬底发射的二次电子并将其引导到检测系统35-1; 基于由所述检测系统获得的二次电子束的检测信号，在图像处理系统中形成二次电子图像; 基于由所述图像处理系统形成的二次电子图像检测所述基板中的缺陷位置; 通过CPU37-1指示和/或存储所述衬底中的所述缺陷位置; 并将完全检查的基板从检查室中取出。 因此，可以以高水平的精度和效率以及更高的生产量连续地执行基板上的缺陷检查。

公开(公告)号：US06480787B2

公开(公告)日：2002-11-12

申请号：US09903744

申请日：2001-07-13

Applicant: Shoji Yoshikawa ,  Katsuhiko Yamada ,  Jun Tsukui

Inventor： Shoji Yoshikawa ,  Katsuhiko Yamada ,  Jun Tsukui

IPC: G01C2100

CPC classification number: G01S19/51 ,  B64G1/36 ,  G01S5/0072 ,  G01S19/23 ,  G01S19/52

Abstract: A global positioning system (GPS) receiving system which achieves an equivalent synchronization in time measurement of GPS signals utilizing software without requiring highly accurate synchronization for receiver clocks with time information embedded in the GPS signals. The GPS receiving system performs a relative navigation process after correcting a pseudorange with a time tag error which is attributable to inaccuracy of receiver clocks of first and second moving objects. A relative navigation process correcting an absolute error of a time tag with a clock bias is also described. A differential computation unit calculates a difference between the first pseudorange and the second pseudorange commonized by the time tag commonizing unit. Correction in a time tag error correction unit is performed for the selected GPS data with a common GPS satellite identification number.

Abstract translation: 一种全球定位系统（GPS）接收系统，其利用软件实现GPS信号的时间测量中的等效同步，而不需要在GPS信号中嵌入时间信息的接收机时钟的高精度同步。 GPS接收系统在利用可归因于第一和第二移动物体的接收器时钟的不准确的时间标签误差校正伪距之后执行相对导航处理。 还描述了用时钟偏差校正时间标签的绝对误差的相对导航处理。 差分计算单元计算第一伪距和由时间标签公用化单元公共的第二伪距之差。 对于具有公共GPS卫星识别号码的所选择的GPS数据执行时间标签误差校正单元的校正。

公开(公告)号：US5109367A

公开(公告)日：1992-04-28

申请号：US585566

申请日：1990-09-20

Applicant: Shoji Yoshikawa

Inventor： Shoji Yoshikawa

IPC: G02B7/28 ,  G11B7/09

CPC classification number: G11B7/094

Abstract: For an output signal of an error signal generating circuit generating a focus error signal and/or track error signal, it is materialized that a highly precise servo system can sufficiently deal with the case in which the change of the light intensity by switching recording and reproducing or the like and the dispersion of offset and sensitivity by an optical system exist, by providing with a compensating operational circuit generating a normalized focus and/or track error signal being independent of the reflected light intensity from a recording medium and/or the light intensity distribution and also the difference of sensitivity, and by providing with a bias applying circuit applying a bias component for deleting offset and so forth in the signal of this compensating operational circuit.

Abstract translation: 对于产生聚焦误差信号和/或轨道误差信号的误差信号发生电路的输出信号，实现高精度伺服系统能够充分地处理通过切换记录和再现的光强度变化的情况 存在通过光学系统的偏移和灵敏度的偏差，通过提供补偿操作电路，产生与来自记录介质的反射光强度和/或光强度无关的标准化焦点和/或轨道误差信号 分布以及灵敏度的差异，并且通过提供施加偏置分量的偏置施加电路来消除该补偿运算电路的信号中的偏移等。

公开(公告)号：US4797866A

公开(公告)日：1989-01-10

申请号：US16687

申请日：1987-02-19

Applicant: Shoji Yoshikawa

Inventor： Shoji Yoshikawa

IPC: G11B7/085 ,  G11B7/10 ,  G11B7/135 ,  G11B11/105 ,  G11B7/00

CPC classification number: G11B7/1362 ,  G11B11/10543 ,  G11B7/08505 ,  G11B7/08588 ,  G11B7/10

Abstract: A light beam for recording, reproducing, and erasing information is divided by a half mirror into a transmitted light beam directed to a recording medium and a light beam for detecting a position of a reflected movable optical pickup. Since no additional light source is necessary for detecting the position of the optical pickup the apparatus is small in size, low in cost and reduces the number of adjustments required when the optical pickup is replaced.

Abstract translation: 用于记录，再现和擦除信息的光束被半反射镜分成指向记录介质的透射光束和用于检测反射的可移动光学拾取器的位置的光束。 由于不需要额外的光源来检测光学拾取器的位置，装置尺寸小，成本低，并且减少了当更换光学拾取器时所需的调节数量。