Positive resist composition and pattern-forming method
    43.
    发明授权
    Positive resist composition and pattern-forming method 有权
    正抗蚀剂组成和图案形成方法

    公开(公告)号:US08062826B2

    公开(公告)日:2011-11-22

    申请号:US12058223

    申请日:2008-03-28

    申请人: Shinichi Kanna

    发明人: Shinichi Kanna

    IPC分类号: G03F7/004 G03F7/30

    摘要: A positive resist composition includes: (A) a resin capable of increasing the solubility in an alkali developing solution by the action of an acid, including: (a1) a repeating unit selected from repeating units represented by specific formulae (a1-1) to (a1-3); (a2) a repeating unit represented by a specific formula (a2); and (a3) a repeating unit selected from repeating units represented by specific formulae (a3-1) to (a3-4); (B) a compound capable of generating an acid upon irradiation with actinic ray or radiation, (C) a resin including: at least one of a fluorine atom and a silicon atom; and a group selected from specific groups (x) to (z):(x) an alkali-soluble group, (y) a group capable of decomposing by the action of an alkali developing solution to increase the solubility in the alkali developing solution, and (z) a group capable of decomposing by the action of an acid; and (D) a solvent.

    摘要翻译: 正型抗蚀剂组合物包括:(A)能够通过酸的作用增加在碱性显影液中的溶解度的树脂,其包括:(a1)选自由特定式(a1-1)至 (a1-3); (a2)由特定式(a2)表示的重复单元; 和(a3)选自由特定式(a3-1)〜(a3-4)表示的重复单元的重复单元; (B)能够在用光化射线或辐射照射时能够产生酸的化合物,(C)含有氟原子和硅原子中的至少一种的树脂; 和选自碱溶性基团(x)〜(z):( x)中的基团,(y)能够通过碱性显影液的作用分解以提高在碱性显影液中的溶解度的基团, 和(z)能够通过酸的作用分解的基团; 和(D)溶剂。

    Positive resist composition and pattern forming method using the same
    44.
    发明申请
    Positive resist composition and pattern forming method using the same 有权
    正型抗蚀剂组合物和使用其的图案形成方法

    公开(公告)号:US20070065752A1

    公开(公告)日:2007-03-22

    申请号:US11523551

    申请日:2006-09-20

    IPC分类号: G03C1/00

    摘要: A positive resist composition comprising: at least one compound selected from a compound capable of generating an acid represented by the formula (I) as defined herein upon irradiation with actinic rays or radiation and a compound capable of generating an acid represented by the following formula (II) upon irradiation with actinic rays or radiation; and a compound capable of generating an acid represented by the formula (III) as defined herein upon irradiation with actinic rays or radiation.

    摘要翻译: 一种正型抗蚀剂组合物,其包含:在用光化学射线或辐射照射时,选自能够产生如本文所定义的式(I)表示的酸的化合物的化合物和能够产生由下式表示的酸的化合物 II)用光化射线或辐射照射时; 以及当用光化射线或辐射照射时能够产生如本文所定义的式(III)表示的酸的化合物。

    Positive radiation-sensitive composition
    46.
    发明授权
    Positive radiation-sensitive composition 有权
    正辐射敏感组合物

    公开(公告)号:US06806023B2

    公开(公告)日:2004-10-19

    申请号:US09851113

    申请日:2001-05-09

    IPC分类号: G03F7004

    摘要: A positive radiation-sensitive composition comprising: (a) a resin whose solubility in an alkali developer increases by the action of an acid; (b) a compound which generates a carboxylic acid having a molecular weight of 100 or less upon irradiation with an actinic ray or a radiant ray; (c) a surfactant; and (d) a solvent.

    摘要翻译: 一种正性辐射敏感性组合物,其包含:(a)其在碱性显影剂中的溶解度随着酸的作用而增加的树脂;(b)在光化反应下产生分子量为100以下的羧酸的化合物 射线或辐射线;(c)表面活性剂; 和(d)溶剂。

    Positive photoresist composition
    48.
    发明授权
    Positive photoresist composition 有权
    正光致抗蚀剂组合物

    公开(公告)号:US06376152B2

    公开(公告)日:2002-04-23

    申请号:US09775620

    申请日:2001-02-05

    IPC分类号: G03F7004

    摘要: A positive photoresist composition comprises (A) a compound which generates an acid upon irradiation with an actinic ray or radiation, (B) a resin which is insoluble or sparingly soluble in alkali but becomes soluble in alkali by the action of an acid, and (C) a nitrogen-containing compound containing at least one partial structure represented by formula (I) shown below in its molecule: The positive photoresist composition of the present invention is suitable for exposure to a far ultraviolet ray, particularly a KrF excimer laser beam, improved in line edge roughness and also excellent in sensitivity, resolution, depth of focus and resist profile.

    摘要翻译: 正型光致抗蚀剂组合物包含(A)在用光化学射线或辐射照射时产生酸的化合物,(B)不溶于或微溶于碱但通过酸作用而溶于碱的树脂和( C)在其分子中含有至少一种由式(I)表示的部分结构的含氮化合物:本发明的正性光致抗蚀剂组合物适用于暴露于远紫外线,特别是KrF准分子激光束, 线边缘粗糙度提高,灵敏度,分辨率,聚焦深度和抗蚀剂轮廓优异。