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    Cold cathode ion beam deposition apparatus with segregated gas flow
    41.
    发明授权
    Cold cathode ion beam deposition apparatus with segregated gas flow 有权
    具有分离气流的冷阴极离子束沉积装置

    公开(公告)号：US06359388B1

    公开(公告)日：2002-03-19

    申请号：US09649010

    申请日：2000-08-28

    申请人： Rudolph Hugo Petrmichl

    发明人： Rudolph Hugo Petrmichl

    IPC分类号： H01J724

    CPC分类号： C23C16/45576 ,  C23C14/221 ,  C23C16/4401 ,  C23C16/4558 ,  C23C16/513 ,  H01J27/143 ,  H01J37/08 ,  H01J37/3178

    摘要： A cold cathode closed drift ion source is provided with segregated gas flow. A first gas may be caused to flow through or along a path around a peripheral portion of an anode so as to pass through the electric gap between the anode and cathode. A second gas (different from the first gas) may be caused to flow toward the ion emitting slit, without much of the second gas having to pass through the electric gap(s). If it is desired to utilize a gas which produces insulative material (e.g., an organosilicon gas), this gas may be used as the second gas. Accordingly, insulative material buildup in the electric gap between the anode and cathode may be reduced, and changes in beam chemistry can be achieved without unduly altering ion beam characteristics.

    摘要翻译： 冷阴极闭合漂移离子源设有隔离气流。 可以使第一气体流过或沿着围绕阳极的周边部分的路径流过阳极和阴极之间的电气间隙。 可以使第二气体（不同于第一气体）朝向离子发射狭缝流动，而不会有大量第二气体通过电气间隙。 如果需要利用产生绝缘材料（例如有机硅气体）的气体，则该气体可以用作第二气体。 因此，可以减少在阳极和阴极之间的电气间隙中的绝缘材料积聚，并且可以在不过度改变离子束特性的情况下实现光束化学变化。

    Method of making coated article including ion beam treatment of metal oxide protective film
    43.
    发明授权
    Method of making coated article including ion beam treatment of metal oxide protective film 失效
    制造涂层制品的方法，包括金属氧化物保护膜的离子束处理

    公开(公告)号：US07964238B2

    公开(公告)日：2011-06-21

    申请号：US11984542

    申请日：2007-11-19

    申请人： Nestor P. Murphy ,  Maximo Frati ,  Rudolph Hugo Petrmichl ,  Jiangping Wang

    发明人： Nestor P. Murphy ,  Maximo Frati ,  Rudolph Hugo Petrmichl ,  Jiangping Wang

    IPC分类号： B05D5/06 ,  C23C16/26

    CPC分类号： C03C17/3441 ,  C03C17/22 ,  C03C2217/78 ,  C03C2217/91 ,  C03C2218/154 ,  C03C2218/328 ,  C03C2218/355 ,  Y10T428/30

    摘要： A method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention relate to a method of making a coated article including a step of heat treating a glass substrate coated with at least a layer of or including diamond-like carbon (DLC) and an overlying protective film (e.g., of or including zinc oxide) thereon. In certain example embodiments, the protective film may be ion beam treated with at least carbon ions. It has been found that the ion beam treatment improves the shelf-life of the product prior to HT. Following and/or during heat treatment (e.g., thermal tempering, or the like), the protective film may be removed.

    摘要翻译： 制造用于淋浴门应用，窗户应用或需要透明涂层制品的任何其它合适应用的热处理（HT）涂覆制品的方法。 例如，本发明的某些实施方案涉及一种制备涂覆制品的方法，包括热处理涂覆有至少一层或类金刚石碳（DLC）的玻璃基板和上覆保护膜（例如， 的或包括氧化锌）。 在某些示例性实施例中，保护膜可以用至少碳离子进行离子束处理。 已经发现离子束处理改善了HT之前的产品的保质期。 继续和/或在热处理（例如，热回火等）期间，可以去除保护膜。

    Method of making coated article including ion beam treatment of metal oxide protective film
    46.
    发明申请
    Method of making coated article including ion beam treatment of metal oxide protective film 失效
    制造涂层制品的方法，包括金属氧化物保护膜的离子束处理

    公开(公告)号：US20080199702A1

    公开(公告)日：2008-08-21

    申请号：US11984542

    申请日：2007-11-19

    申请人： Nestor P. Murphy ,  Maximo Frati ,  Rudolph Hugo Petrmichl ,  Jiangping Wang

    发明人： Nestor P. Murphy ,  Maximo Frati ,  Rudolph Hugo Petrmichl ,  Jiangping Wang

    IPC分类号： B32B37/06 ,  B05D1/36 ,  B05D3/00

    CPC分类号： C03C17/3441 ,  C03C17/22 ,  C03C2217/78 ,  C03C2217/91 ,  C03C2218/154 ,  C03C2218/328 ,  C03C2218/355 ,  Y10T428/30

    摘要： There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention relate to a method of making a coated article including a step of heat treating a glass substrate coated with at least a layer of or including diamond-like carbon (DLC) and an overlying protective film (e.g., of or including zinc oxide) thereon. In certain example embodiments, the protective film may be ion beam treated with at least carbon ions. It has been found that the ion beam treatment improves the shelf-life of the product prior to HT. Following and/or during heat treatment (e.g., thermal tempering, or the like), the protective film may be removed.

    摘要翻译： 提供了一种制造用于淋浴门应用，窗户应用或需要透明涂层制品的任何其它合适应用的热处理（HT）涂覆制品的方法。 例如，本发明的某些实施方案涉及一种制备涂覆制品的方法，其包括热处理涂覆有至少一层或类金刚石碳（DLC）的玻璃基板和上覆保护膜（例如， 的或包括氧化锌）。 在某些示例性实施例中，保护膜可以用至少碳离子进行离子束处理。 已经发现离子束处理改善了HT之前的产品的保质期。 继续和/或在热处理（例如，热回火等）期间，可以去除保护膜。

    Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film
    47.
    发明申请
    Method of making heat treated coated article using diamond-like carbon (DLC) coating and protective film 有权
    使用类金刚石碳（DLC）涂层和保护膜制造热处理涂层制品的方法

    公开(公告)号：US20080178632A1

    公开(公告)日：2008-07-31

    申请号：US11798920

    申请日：2007-05-17

    申请人： Rudolph Hugo Petrmichl ,  Jiangping Wang ,  Nestor P. Murphy ,  Maximo Frati ,  Jose Nunez-Regueiro

    发明人： Rudolph Hugo Petrmichl ,  Jiangping Wang ,  Nestor P. Murphy ,  Maximo Frati ,  Jose Nunez-Regueiro

    IPC分类号： C03C17/00

    CPC分类号： C03C17/3435 ,  C03C17/3423 ,  C03C17/3441 ,  C03C23/007 ,  C03C2217/78 ,  C03C2217/91 ,  C03C2218/322 ,  C03C2218/328 ,  C03C2218/355

    摘要： There is provided a method of making a heat treated (HT) coated article to be used in shower door applications, window applications, or any other suitable applications where transparent coated articles are desired. For example, certain embodiments of this invention relate to a method of making a coated article including a step of heat treating a glass substrate coated with at least a layer of or including diamond-like carbon (DLC) and an overlying protective film thereon. In certain example embodiments, the protective film may be of or include both (a) an oxygen blocking or barrier layer, and (b) a release layer. Following and/or during heat treatment (e.g., thermal tempering, or the like) the protective film may be removed. Other embodiments of this invention relate to the pre-HT coated article, or the post-HT coated article.

    摘要翻译： 提供了一种制造用于淋浴门应用，窗户应用或需要透明涂层制品的任何其它合适应用的热处理（HT）涂覆制品的方法。 例如，本发明的某些实施方案涉及一种制备涂覆制品的方法，包括对涂覆有至少一层或类金刚石碳（DLC）的玻璃基板和其上覆盖的保护膜进行热处理的步骤。 在某些示例性实施方案中，保护膜可以由（a）氧阻挡层或阻挡层或（b）释放层构成或包括两者。 继续和/或在热处理（例如热回火等）期间，可以去除保护膜。 本发明的其它实施方案涉及预HT涂覆制品或后HT涂覆制品。

    Cold cathode ion beam deposition apparatus with segregated gas flow
    49.
    再颁专利
    Cold cathode ion beam deposition apparatus with segregated gas flow 有权
    具有分离气流的冷阴极离子束沉积装置

    公开(公告)号：USRE38358E1

    公开(公告)日：2003-12-23

    申请号：US10267860

    申请日：2002-10-10

    申请人： Rudolph Hugo Petrmichl

    发明人： Rudolph Hugo Petrmichl

    IPC分类号： H01J724

    CPC分类号： C23C16/45576 ,  C23C14/221 ,  C23C16/4401 ,  C23C16/4558 ,  C23C16/513 ,  H01J27/143 ,  H01J37/08 ,  H01J37/3178

    摘要： A cold cathode closed drift ion source is provided with segregated gas flow. A first gas may be caused to flow through or along a path around a peripheral portion of an anode so as to pass through the electric gap between the anode and cathode. A second gas (different from the first gas) may be caused to flow toward the ion emitting slit, without much of the second gas having to pass through the electric gap(s). If it is desired to utilize a gas which produces insulative material (e.g., an organosilicon gas), this gas may be used as the second gas. Accordingly, insulative material buildup in the electric gap between the anode and cathode may be reduced, and changes in beam chemistry can be achieved without unduly altering ion beam characteristics.

    Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings
    50.
    发明授权
    Highly wear-resistant thermal print heads with silicon-doped diamond-like carbon protective coatings 失效
    高耐磨热敏打印头，带有掺杂硅的金刚石碳保护涂层

    公开(公告)号：US6046758A

    公开(公告)日：2000-04-04

    申请号：US264753

    申请日：1999-03-09

    申请人： David Ward Brown ,  Melissa Baylog ,  Fred M. Kimock ,  Bradley J. Knapp ,  Rudolph Hugo Petrmichl ,  Edward George Thear

    发明人： David Ward Brown ,  Melissa Baylog ,  Fred M. Kimock ,  Bradley J. Knapp ,  Rudolph Hugo Petrmichl ,  Edward George Thear

    IPC分类号： B41J2/335

    CPC分类号： B41J2/3353 ,  B41J2/33545 ,  B41J2/3355 ,  B41J2/3357 ,  B41J2/3359

    摘要： The invention provides a thermal print head with a protective coating of silicon-doped diamond-like carbon (Si-DLC) which imparts superior wear resistance, and improved lifetime. The Si-DLC is comprised of the elements C, H, Si and possibly O, N and Ar. The highly wear and abrasion-resistant Si-DLC diamond-like carbon coating is deposited by ion-assisted plasma deposition including direct ion beam deposition and capacitive radio frequency plasma deposition, from carbon-containing and silicon-containing precursor gases consisting of hydrocarbon, silane, organosilane, organosilazane and organo-oxysilicon compounds, or mixtures thereof. The resulting Si-DLC coating has the properties of Nanoindentation hardness in the range of approximately 10 to 35 GPa, thickness in the range of approximately 0.5 to 20 micrometers, dynamic friction coefficient of less than approximately 0.2, and a silicon concentration in the range of approximately 5 atomic % to approximately 40 atomic %. Optimum performance is obtained when the Si-DLC coating hardness is in the range of approximately 15 to 35 GPa, preferably in the range of about 15 GPa to about 19 GPa, and the Si-DLC layer thickness is in the range of approximately 2 micrometers to approximately 10 micrometers, dynamic friction coefficient of less than approximately 0.15, and a silicon concentration in the range of approximately 10 atomic % to 30 atomic %, preferably in the range of about 15 atomic percent to about 24 atomic percent.

    摘要翻译： 本发明提供一种具有硅掺杂的类金刚石碳（Si-DLC）保护涂层的热打印头，其具有优异的耐磨性和改善的寿命。 Si-DLC由元素C，H，Si和可能的O，N和Ar组成。 通过离子辅助等离子体沉积（包括直接离子束沉积和电容射频等离子体沉积）沉积高耐磨和耐磨Si-DLC类金刚石碳涂层，由含碳和硅的前体气体，由烃，硅烷 ，有机硅烷，有机硅氮烷和有机硅氧烷化合物，或其混合物。 所得的Si-DLC涂层具有在约10至35GPa范围内的纳米压痕硬度，约0.5至20微米范围内的厚度，小于约0.2的动摩擦系数，以及硅浓度在 约5原子％至约40原子％。 当Si-DLC涂层硬度在约15至35GPa的范围内，优选在约15GPa至约19GPa的范围内时，获得最佳性能，并且Si-DLC层的厚度在约2微米的范围内 至约10微米，动摩擦系数小于约0.15，硅浓度在约10原子％至30原子％的范围内，优选在约15原子％至约24原子％的范围内。