摘要:
A polymer obtained through copolymerization of a monomer having a hexafluoroalcohol pendant and a monomer having a hexafluoroalcohol pendant whose hydroxyl moiety has been protected is useful as an additive to a photoresist composition and as a protective coating material for immersion lithography. When processed by immersion lithography, the resist composition and protective coating composition exhibit good water repellency and water slip and produce few development defects.
摘要:
With the damascene process in which an interconnection is formed using a conventional chemically amplified positive photoresist composition, there arises a problem that the photoresist within the via hole (as well as in its vicinity) may remain even after the exposure and the development are carried out. The present invention relates to a chemically amplified resist composition comprising, at least, a photo acid generator, a quencher and a salt having a buffering function for an acid which is generated from the acid generator by irradiation, wherein the salt having the buffering function for the acid generated from the acid generator is a salt derived from a long chain alkylbenzenesulfonic acid or a long chain alkoxybenzenesulfonic acid and an organic amine that is a basic compound.
摘要:
A microwave oven includes a heating chamber for heating and cooking foods, a heating unit for supplying heat energy to the heating chamber; a controller for controlling an operation of the heating unit, and an input unit for inputting cooking information into the controller. The input unit includes as one unit a display unit for displaying the cooking information to be inputted and an electrode unit having one or more switches directly formed on the display unit.
摘要:
The object of the invention is to improve the safety of a cooking apparatus, the efficiency of the door opening and shutting operation of the door opening and shutting part, and the quality of a cooked food. An opening and shutting door 4 includes a handle 5 for opening and shutting the door, and a door key 11 removably mounted on the door and including engaging portions 11a and 11b provided on two portions of the door key spaced a given distance from each other and projected toward the heating chamber side. In the interior of a cooking apparatus main body, there is provided a door hook 13 which, in the door shut state, is engaged with the engaging portions 11a and 11b inserted to thereby hold the door key 11. The door hook 13 includes door switches 14 and 16 which, when they are contacted with the engaging portions 11a and 11b, can be respectively switched so as to allow a power supply circuit for heating to conduct. The door key 11 has play in its connecting portion with the handle 5, while the play corresponds to the distance that the door key 11 moves in the longitudinal direction thereof when the opening and shutting door 4 is switched from its opened state to its shut state.
摘要:
The present invention-provides a positive resist composition wherein at least a polymer included in a base resin has a repeating unit with an acid labile group having absorption at the 248 nm wavelength light and the repeating unit is included with a ratio of 1-10% of all repeating units of polymers included in the base resin. There can be provided a positive resist composition with equal or higher sensitivity and resolution than those of conventional positive resist compositions, and in particular, by which a pattern profile on a substrate with high reflectivity is excellent and generation of a standing wave and line edge roughness are reduced.
摘要:
A semiconductor storage device includes command decoder for decoding an input command to output a decoded result and for simultaneously outputting A and B bank activation signal for activating said first and second banks, during a parallel test; a set of bank A control circuits for generating a control signal for a bank A based on a bank A activating signal, a selector circuit receiving a bank B activation signal output from the command decoder and the control signal for a bank A, for selecting outputting a bank B activating signal during the normal operation and for selecting and outputting the control signal for a bank A during parallel test, and a set of bank B control circuits receiving the output from the selector circuit to generate a control signal for the bank B.
摘要:
A semiconductor device, such as a SDRAM, having internal signals (FICLK and ICLK) generated with similar timings with respect to each other, even when operating at a frequency that is too low for proper operation of a synchronous circuit (103). According to one embodiment, the semiconductor device may include an internal signal generator (100) having a first stage circuit (101), timing control circuit (110) and synchronous circuit (103). The first stage circuit (101) may receive an external CLK and generate an internal signal ICLK′. The timing control circuit (110) may be coupled to receive internal signal ICLK′ and generate internal signal ICLK′. The synchronous circuit (103) may be coupled to receive internal signal ICLK′ and generate internal signal FICLK. Internal signals (FICLK and ICLK) may have a timing with respect to one another in a normal mode of operation. When operating at a frequency too low for a synchronous circuit (103), internal signal generator (100) may include a test mode of operation in which timing control circuit (110) allows internal signals (FICLK and ICLK) to have similar timings with respect to one another in the test mode as in a normal mode of operation.
摘要:
Disclosed is a semiconductor memory device, which comprises a plurality of circuits using a voltage obtained by boosting an external power source voltage and power source noises produced by operations of these circuits have no influence on other circuits. The semiconductor memory device including a boost circuit comprises a plurality of circuits using boost voltages, for example, a memory cell array, an output circuit and a plurality of boost circuits, each being provided for the corresponding one of these circuits. With such constitution, a problem of noise interference among the circuits using the boost voltages can be removed.
摘要:
A semiconductor synchronous dynamic random access memory device supplies a series of data bits to an external device through a burst access; a first boosting circuit produces a first boosted voltage from a pulse signal internally generated by a ring oscillator, a second boosting circuit produces a second boosted voltage from a system clock, and the output node of the first boosting circuit is electrically connected to the output node of the second boosting circuit; while an output circuit is producing an output data signal from read-out data bits in synchronism with the system clock during the burst access, the second boosting circuit pumps electric charge to the output circuit in synchronism with the system clock so as to stably supply the second boosted voltage, and the output circuit converts the read-out data bits to the output data signal at high-speed.