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公开(公告)号：US20050151557A1
公开(公告)日：2005-07-14
申请号：US11053119
申请日：2005-02-07
Applicant: Paul Tervo , Clarence Cowan
Inventor： Paul Tervo , Clarence Cowan
CPC classification number: G01R1/07342 , G01R1/067 , G01R1/06711 , G01R1/06733 , G01R1/06772
Abstract: A low-current pogo probe card for measuring currents down to the femtoamp region includes a laminate board having a layer of conductive traces interposed between two dielectric layers. A plurality of probing devices, such as ceramic blades, are edge-mounted about a central opening so that the probing needles or needles included therein terminate below the opening in a pattern suitable for probing a test subject workpiece. A plurality of pogo pin receiving pad sets, each including a guard pad, occupy the periphery of the board. Each guard pad is electrically connected to a trace from the layer of conductive traces. The pad sets may be connected to the probing devices by low noise cables or traces. Air trenches separate the pad sets for reducing cross talk and signal settling times.
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公开(公告)号：US06860009B2
公开(公告)日：2005-03-01
申请号：US09814584
申请日：2001-03-22
Applicant: Reed Gleason , Michael A. Bayne , Kenneth Smith , Timothy Lesher , Martin Koxxy
Inventor： Reed Gleason , Michael A. Bayne , Kenneth Smith , Timothy Lesher , Martin Koxxy
CPC classification number: G01R1/0735 , G01R1/06733 , G01R1/06738 , G01R3/00 , H01R13/2414 , H01R13/2464 , H01R43/16 , H05K3/20 , H05K3/4007 , Y10T29/49002 , Y10T29/49004 , Y10T29/49117 , Y10T29/49121 , Y10T29/4913 , Y10T29/49139 , Y10T29/49155 , Y10T29/49165 , Y10T29/49169 , Y10T29/49174 , Y10T29/49204 , Y10T29/49208 , Y10T29/49218 , Y10T29/49815 , Y10T29/49824 , Y10T29/49826 , Y10T29/53509
Abstract: A method of constructing a probe which includes providing a substrate and creating a first substantially asymmetrical recess within the substrate. A conductive material is located within the recess and a conductive trace is electrically connected with the conductive material. A membrane supports the conductive trace, wherein the conductive material is located between the membrane and the substrate. The substrate is removed from the conductive material.
Abstract translation: 一种构建探针的方法，其包括提供衬底并在衬底内产生第一基本不对称的凹槽。 导电材料位于凹槽内，导电迹线与导电材料电连接。 膜支撑导电迹线，其中导电材料位于膜和基底之间。 将衬底从导电材料上去除。
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公开(公告)号：US06847219B1
公开(公告)日：2005-01-25
申请号：US10666219
申请日：2003-09-18
Applicant: Timothy Lesher , Brad Miller , Clarence E. Cowan , Michael Simmons , Frank Gray , Cynthia L. McDonald
Inventor： Timothy Lesher , Brad Miller , Clarence E. Cowan , Michael Simmons , Frank Gray , Cynthia L. McDonald
CPC classification number: G01R1/18 , G01R19/0053 , G01R31/2886 , G01R31/2889 , H01B11/206
Abstract: A cable includes an inner conductor, an inner dielectric, and a guard conductor, where the inner dielectric is between the inner conductor and the guard conductor. The cable also includes an outer dielectric, and a shield conductor, where the outer dielectric is between the guard conductor and the shield conductor. The cable further includes an additional layer of material between the outer dielectric and the shield conductor of suitable composition for reducing triboelectric current generation between the outer dielectric and the shield conductor to less than that which would occur were the outer dielectric and the shield conductor to directly adjoin each other.
Abstract translation: 电缆包括内部导体，内部电介质和保护导体，其中内部电介质位于内部导体和保护导体之间。 电缆还包括外部电介质和屏蔽导体，其中外部电介质位于保护导体和屏蔽导体之间。 电缆还包括在外部电介质和屏蔽导体之间的适当组合物的附加材料层，用于减少外部电介质和屏蔽导体之间产生的摩擦电流，使其小于外电介质和屏蔽导体直接发生的摩擦电流 相邻。
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公开(公告)号：US06842024B2
公开(公告)日：2005-01-11
申请号：US10615724
申请日：2003-07-08
Applicant: Ron A. Peters , Leonard A. Hayden , Jeffrey A. Hawkins , R. Mark Dougherty
Inventor： Ron A. Peters , Leonard A. Hayden , Jeffrey A. Hawkins , R. Mark Dougherty
CPC classification number: G01R1/18 , G01R1/04 , G01R31/002 , G01R31/2808 , G01R31/286 , G01R31/2886 , G01R31/2889
Abstract: A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
Abstract translation: 用于探测测试装置的探测台具有用于支撑测试装置的卡盘元件。 导电外屏蔽外壳至少部分地包围这种卡盘元件以提供EMI屏蔽。 导电内屏蔽外壳被插入在外屏蔽外壳和卡盘元件之间并且与外屏蔽外壳和卡盘元件绝缘，并且至少部分地包围卡盘元件。
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公开(公告)号：US6130544A
公开(公告)日：2000-10-10
申请号：US359989
申请日：1999-07-22
Applicant: Eric W. Strid , Jerry B. Schappacher , Dale E. Carlton , K. Reed Gleason
Inventor： Eric W. Strid , Jerry B. Schappacher , Dale E. Carlton , K. Reed Gleason
CPC classification number: B82Y15/00 , G01R1/06705 , G01R1/073 , G01R31/2886 , G01R35/00 , G01R35/005 , G01R1/06772
Abstract: An interconnect assembly for evaluating a probe measurement network includes a base, respective inner and outer probing areas in mutually coplanar relationship on the upper face of the base, a reference junction, and a high-frequency transmission structure connecting the probing areas and the reference junction so that high-frequency signals can be uniformly transferred therebetween despite, for example, variable positioning of the device-probing ends of the network on the probing areas. A preferred method for evaluating the signal channels of the network includes connecting a reference unit to the reference junction and successively positioning each device-probing end that corresponds to a signal channel of interest on the inner probing area. Because the transmission structure uniformly transfers signals, the relative condition of the signals as they enter or leave each end will substantially match the condition of the signals as measured or presented by the reference unit, thereby enabling calibration of the network in reference to the device-probing ends. The assembly is particularly well-adapted for the evaluation of probe measurement networks of the type used for testing planar microelectronic devices.
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Patent Agency Ranking
公开(公告)号：US6034533A
公开(公告)日：2000-03-07
申请号：US871609
申请日：1997-06-10
Applicant: Paul A. Tervo , Clarence E. Cowan
Inventor： Paul A. Tervo , Clarence E. Cowan
CPC classification number: G01R1/07342 , G01R1/067 , G01R1/06711 , G01R1/06733 , G01R1/06772
Abstract: A low-current pogo probe card for measuring currents down to the femtoamp region includes a laminate board having a layer of conductive traces interposed between two dielectric layers. A plurality of probing devices, such as ceramic blades, are edge-mounted about a central opening so that the probing needles or needles included therein terminate below the opening in a pattern suitable for probing a test subject workpiece. A plurality of pogo pin receiving pad sets, each including a guard pad, occupy the periphery of the board. Each guard pad is electrically connected to a trace from the layer of conductive traces. The pad sets may be connected to the probing devices by low noise cables or traces. Air trenches separate the pad sets for reducing cross talk and signal settling times.
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47.发明授权
公开(公告)号：US5610529A
公开(公告)日：1997-03-11
申请号：US431104
申请日：1995-04-28
Applicant: Randy Schwindt
Inventor： Randy Schwindt
CPC classification number: G01R19/32
Abstract: A probe station suitable for low noise measurements includes a chuck for supporting a test device and a supporting surface for the test device. The probe station has means for controlling the temperature in the vicinity of the test device by sensing the temperature and, in response to the sensing, alternatively raising or lowering the temperature. At least two layers including a first electrically conductive layer adhered to an insulator layer are disposed between the supporting surface and the chuck. The electrically conductive layer is electrically connected to one of the chuck and supporting surface.
Abstract translation: 适用于低噪声测量的探测台包括用于支撑测试装置的卡盘和用于测试装置的支撑表面。 探测台具有用于通过感测温度来控制测试装置附近的温度的装置，并且响应于感测，交替地升高或降低温度。 至少两层包括粘附到绝缘体层上的第一导电层设置在支撑表面和卡盘之间。 导电层电连接到卡盘和支撑表面之一。
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公开(公告)号：US5506515A
公开(公告)日：1996-04-09
申请号：US277835
申请日：1994-07-20
Applicant: Edward M. Godshalk , Jeffrey A. Williams , Jeremy N. Burr
Inventor： Edward M. Godshalk , Jeffrey A. Williams , Jeremy N. Burr
CPC classification number: G01R1/06772
Abstract: A probe suitable for low-loss microwave frequency operation has a tip assembly including a semi-rigid coaxial cable having a Teflon.TM. dielectric for temperature stability and a freely-suspended end. On this end a semicylindrical recess is formed defining a shelf along which an inner finger and outer pair of fingers are mounted, each made of resilient conductive material, so as to form a coplanar transmission line. Cantilevered portions of the fingers extend past the end of the cable to form an air-dielectric transmission path of uniform and stable characteristic despite exposure to numerous contact cycles and to provide suitable means for probing nonplanar device pads while also offering good visibility of device pads generally. Corresponding sections of the cantilevered portions are equivalently configured in terms of material composition, cross-sectional geometry and spatial orientation to provide a uniform deflection characteristic relative to each finger for even wearing of the pads and fingers and for stability of transmission characteristic despite contact pressure variation. A rearwardly-inclining end face on each finger reflects dark background shading to cause a dark line to form on each extreme finger end in sharp contrast to the device pads thus facilitating finger visibility. The fingers are originally formed in one-piece and are joined by a carrier strip which is trimmed off after the fingers are connected to the cable so that their transverse spacing is precisely determined.
Abstract translation: 适用于低损耗微波频率操作的探头具有尖端组件，其包括具有用于温度稳定性的Teflon TM电介质和自由悬挂端的半刚性同轴电缆。 在该端部形成半圆柱形凹槽，形成一个限定一个搁板的架子，一个内部指状物和一对外面的指状物安装在其上，每一个由弹性导电材料制成，以便形成一个共面的传输线。 手指的悬臂部分延伸越过电缆的端部，以形成均匀且稳定的特性的空气 - 电介质传输路径，尽管暴露于大量的接触周期，并且提供用于探测非平面装置焊盘的合适装置，同时还提供装置焊盘的良好可视性 。 悬臂部分的相应部分在材料组成，横截面几何形状和空间取向方面等同地构成，以便相对于每个手指提供均匀的偏转特性，以便均匀地磨损垫和手指，以及尽管接触压力变化 。 每个手指上的向后倾斜的端面反映暗背景阴影，从而在每个极端手指端形成暗线，与装置垫形成鲜明对比，从而便于手指可见。 手指最初形成为一体，并且通过在手指连接到电缆之后被修整的载体带连接，使得它们的横向间隔被精确地确定。
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公开(公告)号：US5457398A
公开(公告)日：1995-10-10
申请号：US100494
申请日：1993-08-02
Applicant: Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo
Inventor： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo
CPC classification number: G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
Abstract: A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting component and upper component each with a surface portion extending opposite the first element for guarding thereof. The connector mechanism is so connected to the second chuck element as to enable, during low-level current measurements, the potential on each component to follow that on the first chuck element as measured relative to an outer shielding enclosure surrounding each element. Leakage current from the first chuck element is thus reduced to virtually zero, hence enabling increased current sensitivity, and the reduced capacitance thus provided by the second chuck element decreases charging periods, hence reducing settling times. With similar operation and effect, where any signal line element of the connector mechanism is arranged exterior of its corresponding guard line element, such as adjacent the chuck assembly or on the probe-holding assembly, a guard enclosure is provided to surround and fully guard such signal line element in interposed relationship between that element and the outer shielding enclosure.
Abstract translation: 探测台包括一个完全防护的卡盘组件和连接器机构，用于在降低沉降时间的同时提高对低电平电流的灵敏度。 卡盘组件包括由第二卡盘元件围绕的晶片支撑的第一卡盘元件，所述第二卡盘元件具有下部元件，裙边元件和上部元件，每个元件具有与第一元件相对延伸的表面部分，用于保护其。 连接器机构被连接到第二卡盘元件，以便在低电平电流测量期间，每个部件上的电位能够相对于围绕每个元件的外部屏蔽外壳测量到第一卡盘元件上的电位。 因此，来自第一卡盘元件的泄漏电流几乎为零，因此能够提高电流灵敏度，并且由第二卡盘元件提供的减小的电容减少了充电周期，因此降低了稳定时间。 具有类似的操作和效果，其中连接器机构的任何信号线元件布置在其对应的保护线元件的外部，例如邻近卡盘组件或探针保持组件，提供保护外壳以围绕并完全保护 信号线元件在该元件和外屏蔽外壳之间的插入关系中。
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50.发明授权Wafer probe station having integrated guarding, Kelvin connection and shielding systems 失效晶圆探头具有集成防护，开尔文连接和屏蔽系统
公开(公告)号：US5434512A
公开(公告)日：1995-07-18
申请号：US245581
申请日：1994-05-18
Applicant: Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner , Peter D. Andrews
Inventor： Randy J. Schwindt , Warren K. Harwood , Paul A. Tervo , Kenneth R. Smith , Richard H. Warner , Peter D. Andrews
CPC classification number: G01R31/2886 , A46D1/00 , G01R1/0416 , G01R1/06705 , G01R1/06794 , G01R1/07392 , G01R1/18 , G01R31/2887 , H01L21/68785
Abstract: A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.
Abstract translation: 探测台配备有集成的防护系统，便于使用站进行低电流测量，以及集成开尔文连接，以消除线路电阻引起的电压损耗。 该站具有由至少三个卡盘组件元件组成的卡盘组件。 第一个元件支持测试设备，而底层的第二个元件用作防护装置，以减少漏电流。 这些元件彼此电绝缘，并且与其下面的支撑结构电绝缘，其是第三元件。 准备使用的，可选择性地拆卸的电连接器组件分别提供到第一和第二卡盘组件元件的信号和保护连接以及提供与开尔文的连接。 由于提供空气作为主电绝缘体，相应的卡盘组件元件之间的电容极低。 用于单独定位探头的独特电气连接器提供保护和开尔文连接能力，以及单独的EMI屏蔽，可以单独与每个探头一致移动。
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