ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF
    47.
    发明申请
    ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF 审中-公开
    抗反射涂料组合物及其工艺

    公开(公告)号:US20150309403A1

    公开(公告)日:2015-10-29

    申请号:US14264766

    申请日:2014-04-29

    IPC分类号: G03F1/46 G03F7/20 G03F7/30

    摘要: The present invention relates to a novel absorbing antireflective coating composition comprising a novel crosslinkable polymer comprising at least one repeat unit (A) having structure (1), at least repeat (B) unit having a structure (2), and at least one repeat unit (C) having structure (3) where D is a direct valence bound or C(R1)(R2) methylene moiety where R1 and R2 are independently H, C1-C8 alkyl, C3-C24 cycloalkyl or C6-C24 aryl; Ari, Arii, Ariii and Ariv are independently phenylenic and naphthalenic moiety, R3 and R4 are independently hydrogen or C1-C8 alkyl; and R5 and R6 are independently hydrogen or C1-C8 alkyl; and a solvent. The invention also relates to a process for forming an image using the novel antireflective coating composition.

    摘要翻译: 本发明涉及一种新颖的吸收抗反射涂料组合物,其包含新颖的可交联聚合物,其包含至少一种具有结构(1)的重复单元(A),至少具有结构(2)的重复(B)单元,以及至少一个重复单元 具有结构(3)的单元(C),其中D是直接键合键或C(R1)(R2)亚甲基部分,其中R1和R2独立地为H,C1-C8烷基,C3-C24环烷基或C6-C24芳基; Ari,Ari​​i,Ari​​ii和Ariv独立地是苯基和萘基,R3和R4独立地是氢或C1-C8烷基; 且R 5和R 6独立地为氢或C 1 -C 8烷基; 和溶剂。 本发明还涉及使用新型抗反射涂料组合物形成图像的方法。

    Polymer composition and method of making the same
    49.
    发明授权
    Polymer composition and method of making the same 有权
    聚合物组合物及其制备方法

    公开(公告)号:US08952121B2

    公开(公告)日:2015-02-10

    申请号:US13489515

    申请日:2012-06-06

    申请人: Jyri Paulasaari

    发明人: Jyri Paulasaari

    IPC分类号: C08G8/02

    摘要: A novel novolac prepared by acid catalyzed condensation between biphenols or bisphenofluorenes and fluorenone is presented. The polymers exhibit excellent oxidative thermal stability and high carbon content, suitable for dielectric, etch stop applications as spin-on material.

    摘要翻译: 提出了通过双酚或双酚芴和芴酮之间的酸催化缩合制备的新型酚醛清漆。 聚合物表现出优异的氧化热稳定性和高碳含量,适用于电介质,蚀刻停止应用作为旋涂材料。