公开(公告)号：US11774380B1

公开(公告)日：2023-10-03

申请号：US18107026

申请日：2023-02-08

申请人： SICHUAN UNIVERSITY

发明人： Yuanjun Xu ,  Ze He ,  Peng Wang ,  Ning Huang ,  Zhu An

IPC分类号： G01N23/20008 ,  G01N23/207 ,  G01N23/2206 ,  G01N23/223

CPC分类号： G01N23/2206 ,  G01N23/207 ,  G01N23/20008 ,  G01N23/223 ,  G01N2223/045 ,  G01N2223/056 ,  G01N2223/076 ,  G01N2223/1016 ,  G01N2223/301 ,  G01N2223/306 ,  G01N2223/316 ,  G01N2223/321 ,  G01N2223/323 ,  G01N2223/3303 ,  G01N2223/402 ,  G01N2223/605

摘要： A diffraction analysis device and a method for a full-field X-ray fluorescence imaging analysis are disclosed. The device includes a switching assembly, collimation assemblies, an X-ray source, an X-ray detector, a laser indicator, and a computer control system. The switching assembly combines with the collimation assemblies to achieve a functional effect that is previously achieved by two different types of devices through only one device by changing the positioning layout of the X-ray source and the X-ray detector. The full-field X-ray fluorescence imaging analysis can be realized, and the crystal phase composition information and the element distribution imaging information of the sample can be quickly obtained through the same device without scanning, which not only greatly improves the utilization rate of each assembly in the device, reduces the assemblies cost of the device, makes the device structure more compact, but also greatly improves the analysis efficiency and detection accuracy.

公开(公告)号：US11579099B2

公开(公告)日：2023-02-14

申请号：US17037115

申请日：2020-09-29

申请人： INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

发明人： Chun-Ting Liu ,  Wen-Li Wu ,  Bo-Ching He ,  Guo-Dung Chen ,  Sheng-Hsun Wu ,  Wei-En Fu

IPC分类号： G01N23/20 ,  G01N23/20008 ,  G01N23/2206 ,  G01N23/223 ,  G01N23/2273

摘要： This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes.

公开(公告)号：US20220065804A1

公开(公告)日：2022-03-03

申请号：US17462933

申请日：2021-08-31

申请人： FEI Company

发明人： Oleksii Kaplenko ,  Ondrej Machek ,  Tomás Vystavel ,  Jan Klusácek ,  Kristýna Bukvisová ,  Mykola Kaplenko

IPC分类号： G01N23/2206 ,  G01N23/203 ,  G01N23/2204

摘要： The invention relates to a method of, and apparatus for, examining a sample using a charged particle beam apparatus. The method as defined herein comprises the step of detecting, using a first detector, emissions of a first type from the sample in response to the charged particle beam illuminating the sample. The method further comprises the step of acquiring spectral information on emissions of a second type from the sample in response to the charged particle beam illuminating the sample. As defined herein, said step of acquiring spectral information comprises the steps of providing a spectral information prediction algorithm and using said algorithm for predicting said spectral information based on detected emissions of the first type as an input parameter of said algorithm. With this it is possible to gather EDS data using only a BSE detector.

公开(公告)号：US20210181128A1

公开(公告)日：2021-06-17

申请号：US17153765

申请日：2021-01-20

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Dror Shemesh

IPC分类号： G01N23/2252 ,  G01N23/2206

摘要： A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

公开(公告)号：US10928336B1

公开(公告)日：2021-02-23

申请号：US16525037

申请日：2019-07-29

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Dror Shemesh

IPC分类号： G01N23/22 ,  G01N23/2252 ,  G01N23/2206

摘要： A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

公开(公告)号：US20210033550A1

公开(公告)日：2021-02-04

申请号：US16525037

申请日：2019-07-29

申请人： APPLIED MATERIALS ISRAEL LTD.

发明人： Dror Shemesh

IPC分类号： G01N23/2252 ,  G01N23/2206

摘要： A method for x-ray based evaluation of a status of a structure of a substrate, the method may include acquiring an electron image of a region of the substrate, the region comprises the structure; acquiring an x-ray image of the structure; and evaluating the status of the structure, wherein the evaluating is based at least on a number of x-ray photons that were emitted from the structure.

公开(公告)号：US20200284928A1

公开(公告)日：2020-09-10

申请号：US16882556

申请日：2020-05-25

申请人： SHANGHAI UNITED IMAGING HEALTHCARE CO., LTD.

发明人： Xinyu LYU ,  Qixiang ZHANG ,  Wenbing SONG ,  Zijun JI ,  Weiping LIU

IPC分类号： G01T7/00 ,  G01T1/29 ,  G01N23/2206

摘要： A method and system for calibrating a PET scanner are described. The PET scanner may have a field of view (FOV) and multiple detector rings. A detector ring may have multiple detector units. A line of response (LOR) connecting a first detector unit and a second detector unit of the PET scanner may be determined. The LOR may correlate to coincidence events resulting from annihilation of positrons emitted by a radiation source. A first time of flight (TOF) of the LOR may be calculated based on the coincidence events. The position of the radiation source may be determined. A second TOF of the LOR may be calculated based on the position of the radiation source. A time offset may be calculated based on the first TOF and the second TOF. The first detector unit and the second detector unit may be calibrated based on the time offset.

公开(公告)号：US10739326B2

公开(公告)日：2020-08-11

申请号：US15977496

申请日：2018-05-11

申请人： Saudi Arabian Oil Company

发明人： David Jacobi ,  John Longo ,  Jordan Kone ,  Qiushi Sun

IPC分类号： G06K9/00 ,  G01N33/24 ,  G01N23/2251 ,  G06T7/00 ,  G01N23/223 ,  G01N23/20091 ,  G01N23/2209 ,  G01N23/2206

摘要： An example method includes analyzing rock from an image of a sample region of the rock. The example method includes accessing element maps of the sample region in a database, with each element map including an array of pixels, and with each pixel having a value that represents how closely the pixel correlates to a chemical element; accessing a database storing threshold values for multiple chemical elements including the chemical element; determining a presence of a substance in a portion of the sample region corresponding to the pixel by determining whether a value of the pixel in each of the element maps is greater than, or less than, a threshold value for a corresponding chemical element; labeling the pixel based on the presence of the substance in the pixel; and outputting data representing the substance map for rendering on a graphical interface.

公开(公告)号：US20200225175A1

公开(公告)日：2020-07-16

申请号：US16603663

申请日：2018-03-16

申请人： HITACHI, LTD.

发明人： Akiko KAGATSUME ,  Minseok PARK ,  Momoyo ENYAMA ,  Yasuhiro SHIRASAKI ,  Michio HATANO

IPC分类号： G01N23/2206 ,  G01N23/2204

摘要： The purpose of the present invention is to provide a multi-coordinated analyzing device that makes it possible to readily observe the same visual field by using a plurality of different kinds of analyzing device and in which observation results for the same visual field are recorded collectively. An analyzing system according to the present invention includes: a first analyzing unit that obtains first observation data by analyzing a sample and that also obtains position information about the analyzed sample; a position setting unit that performs position alignment of the sample on the basis of the position information obtained by the first analyzing unit; and a second analyzing unit that obtains second observation data by analyzing, by using a method different from the method used by the first analyzing unit, the sample placed at the position aligned by the position setting unit (see FIG. 1).

公开(公告)号：US20200182806A1

公开(公告)日：2020-06-11

申请号：US16586386

申请日：2019-09-27

申请人： Siemens Healthcare GmbH

发明人： Steffen Kappler ,  Marcus Radicke ,  Jörg Freudenberger ,  Anja Fritzler ,  Peter Geithner ,  Peter Hackenschmied ,  Thomas Weber

IPC分类号： G01N23/04 ,  G01N23/20008 ,  G01N23/2206

摘要： An x-ray imaging system includes an x-ray source configured to emit x-ray radiation towards a sample, and a primary detector configured to detect x-ray radiation from the x-ray source passing through the sample. The x-ray imaging system also includes a secondary detector configured to detect x-ray radiation from the x-ray source scattered in the sample, and imaging optics configured to guide x-ray radiation scattered in the sample onto the secondary detector.