摘要:
A method and apparatus for driving one or multiple microbodies having a size in the order of several nanometers, using a relatively simple system structure that does not require the use of large peripheral devices. Each body moves along a substrate that is hydrophobic at a low temperature and hydrophilic at a high temperature, and consists of an attachable flexible portion at the front and a detachable flexible portion adjoining the rear of the attachable flexible portion.
摘要:
A method for polishing a slight region of the surface of a workpiece utilizes an actuator or actuators having piezoelectric elements. The actuators cause slight movement of a polishing portion disposed at the leading end of a polishing tool in an XY-direction parallel with the surface of the workpiece and/or a Z-direction perpendicular to the surface of the workpiece. A polishing material, including a magnetic fluid and nonmagnetic abrasive grains dispersed in the magnetic fluid, is held magnetically in a space between the polishing portion and the workpiece.
摘要:
A linear pulse motor includes a primary side unit and a secondary side unit. The primary side unit includes a permanent magnet and at least two electromagnets, each formed with at least one projecting magnetic pole portion. One of the electromagnets is fixedly mounted on a table while the other electromagnet is slidably mounted on the table. The primary side unit also includes a spacing adjusting element, such as a piezoelectric element, interposed between the two electromagnets so as to adjust the spacing between the two electromagnets. The secondary side unit includes a plurality of inductor teeth arranged in a row at a predetermined pitch.
摘要:
Safe and structurally simple design for a finebore machine with a turning tool (3) mounted on a boring bar (2), whereby the excursion of the turning tool is produced by a piezoelectric servomotor without any magnetic actuation. This is achieved in the following manner: (a) the turning tool (3) is lodged in a spring-mounted tool holder (4) which is made to deflect by a translatory driving servomotor (6); (b) the driving direction of the servomotor (6) is perpendicular to the operating direction of the turning tool (3); (c) the driving strength of the servomotor (6) acts on the one end of a connecting rod (8) which is lodged separately from the servomotor (6); (d) the other end of the connecting rod (8) abuts on the free mobile end of the tool holder (4) in a fixed position relative to the latter. The shape of the bore to be produced can be preset as an electronic image.
摘要:
A six-legged, insect-like, self-propelled walking robot (hexapodal arthrobot), includes twistor-pairs in the waist, hip and knee of each leg and walks by pr0gramming fluid pressure in these twistor-pairs at the joints of respective legs in a predetermined controlled sequence. As a result of a predetermined sequence of six controlled variable pressures, this six-legged robot firmly plants three of its legs on the ground for providing stable ground support for walking. The three legs on the ground are propelling the robot forward with walking motion, while the other three legs are lifted and swing forward to an advanced position and are then lowered onto the ground for taking over their support and walking role in their turn, while the first three legs are then being lifted and swung forward to an advanced position, and so forth, for providing a stable forward walking motion. By reversing the sequence of six controlled variable pressures, a stable reverse walking motion is produced. Due to the fact that angular deflection of each twistor-pair joint is a predictable and predetermined linear function of the respective two fluid pressures fed into the two respective twistors of such twistor-pair joint, an open loop control method and system can be employed for operating these robots. In other words, closed loop feedback control systems with position sensors and electronic controls are not necessary to be employed for many different applications of the present invention.
摘要:
An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.
摘要:
An X-Y stage including a fixed plate, a moving plate adapted to linearly reciprocatively move relative to the fixed plate, and an ultrasonic linear motor provided on either the fixed plate or the moving plate. The ultrasonic linear motor is provided with at lest two leg portions oriented in a direction perpendicular to a moving direction of the moving plate, a body portion for connecting base ends of the leg portions, and vibration sources for vibrating the leg portions and the body portion. The leg portions have free ends pressed against the other of the fixed plate on which the motor is not provided and the moving plate.
摘要:
A diverter apparatus for use in conjunction with earth drilling operations to divert cuttings from the area surrounding the bore hole, and including a pneumatically extensible and retractable ground-engaging skirt which surrounds the bore hole.
摘要:
A flash removing method whereby flash is cut off by a reamer which is freely movable while being in contact with polymeric molded products within a predetermined range of pressing force. The reamer is provided with blades having normal clearance angles of substantially zero degree and the flanks of the blades follow the flash-forming region. The reamer is controlled in radial position according to the shape of the polymeric molded product, so that the reamer always receives a constant radial load from the product to leave even traces after the flash removal. A solidified gate is cut off before the flash removal. A flash removing apparatus for performing the method.
摘要:
A position adjustment device employs a holder on which a semiconductor wafer is attached. When placed on a surface plate, the wafer holder is turned upside-down, so that unlocked leg rods and the pattern transfer surface of the wafer are in direct contact with a reference surface of the plate. Piezoelectric elements are embedded in the holder as locking mechanism for the movable leg rods. In response to a variable DC voltage supplied by a voltage generating circuit, the piezoelectric elements deform to lock the rods with high accuracy.