METHOD OF PERFORMING METROLOGY ON A MICROFABRICATION PATTERN

    公开(公告)号:US20230298854A1

    公开(公告)日:2023-09-21

    申请号:US18184366

    申请日:2023-03-15

    CPC classification number: H01J37/28 G06T7/001 H01J2237/2817 G06T2207/30148

    Abstract: A method includes generating, by a SEM, sets of frames corresponding to regions of a microfabrication pattern, for each set of frames, estimating feature data representing edge positions, linewidths, or centerline positions of one or more features of each region of the pattern, and computing a preliminary estimate of a roughness parameter from the feature data. The roughness parameter is indicative of a line edge roughness, a linewidth roughness, or a pattern placement roughness of the one or more features. The method further includes fitting a model equation to the preliminary estimates of the roughness parameter using a model parameter dependent on the number of frames of each set of frames, the model equation relating the model parameter to the roughness parameter; and computing a final estimate of the roughness parameter as an asymptotic value of the fitted model equation.

    Optical sensor and thin film photodiode

    公开(公告)号:US11757056B2

    公开(公告)日:2023-09-12

    申请号:US17081829

    申请日:2020-10-27

    Abstract: An aspect comprising an optical sensor is disclosed. The optical sensor comprises stacked layers comprising: a window layer configured to allow the passage of photons; a sensing layer configured to generate charges upon impinging of the photons through the window layer; and a bottom electrode layer comprising at least one bottom electrode for receiving charges generated in the sensing layer. The sensing layer is sandwiched between the window layer and the bottom electrode layer. The at least one bottom electrode of the bottom electrode layer comprises conductive material with reflectivity higher than 0.7 to reflect back received photons into the sensing layer; and the at least one bottom electrode is obtained by semiconductor device fabrication techniques.

    Motion segmentation in video from non-stationary cameras

    公开(公告)号:US11721028B2

    公开(公告)日:2023-08-08

    申请号:US17057468

    申请日:2019-05-28

    CPC classification number: G06T7/215 G06T7/174 G06T7/285 G06T2207/10021

    Abstract: A data processing device for motion segmentation in images obtained by cameras that move in a background environment includes an input for receiving a temporal sequence of images from the cameras and a processor. The processor is adapted for, for at least two images, of the temporal sequence of images, that are obtained by at least two cameras at different points in time, determining epipoles, defining corresponding image regions of limited image disparity due to parallax around the epipoles in the at least two images, and applying a motion segmentation algorithm to the corresponding image regions. Warping is applied to the corresponding image regions to compensate for camera rotation and misalignment beyond a threshold value.

    Solid nanocomposite electrolyte materials

    公开(公告)号:US11699810B2

    公开(公告)日:2023-07-11

    申请号:US16607126

    申请日:2018-02-20

    Abstract: A solid nanocomposite electrolyte material comprising a mesoporous dielectric material comprising a plurality of interconnected pores and an electrolyte layer covering inner surfaces of the mesoporous dielectric material. The electrolyte layer comprises: a first layer comprising a first dipolar compound or a first ionic compound, the first dipolar or ionic compound comprising a first pole of a first polarity and a second pole of a second polarity opposite to the first polarity, wherein the first layer is adsorbed on the inner surfaces with the first pole facing the inner surfaces; and a second layer covering the first layer, the second layer comprising a second ionic compound or a salt comprising first ions of the first polarity and second ions of the second polarity, wherein the first ions of the ionic compound or salt are bound to the first layer.

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