公开(公告)号：US5350479A

公开(公告)日：1994-09-27

申请号：US984797

申请日：1992-12-02

Applicant: Kenneth S. Collins ,  John R. Trow ,  Joshua C. W. Tsui ,  Craig A. Roderick ,  Nicolas J. Bright ,  Jeffrey Marks ,  Tetsuya Ishikawa

Inventor： Kenneth S. Collins ,  John R. Trow ,  Joshua C. W. Tsui ,  Craig A. Roderick ,  Nicolas J. Bright ,  Jeffrey Marks ,  Tetsuya Ishikawa

IPC: H01L21/683 ,  H01L21/68

CPC classification number: H01L21/6831 ,  H01L21/6833 ,  Y10T279/23

Abstract: An electrostatic chuck for holding an article to be processed in a plasma reaction chamber and comprising a metal pedestal coated with a layer of dielectric material in which is formed a cooling gas distribution system for passing and distributing a cooling gas between the upper surface of the layer and the article when supported on the pedestal. The gas distribution system comprises a plurality of intersecting grooves formed entirely in the upper surface of the layer with small gas distribution holes through intersections of the grooves over upper ends of cooling gas receiving holes formed in an underside of the pedestal.

Abstract translation: 一种用于在等离子体反应室中保持待处理物品的静电卡盘，包括涂覆有介电材料层的金属基座，其中形成有用于在层的上表面之间传递和分布冷却气体的冷却气体分配系统 和支撑在基座上的文章。 气体分配系统包括多个完全在层的上表面上形成的相交槽，该多个相交槽通过形成在基座的下侧的冷却气体接收孔的上端上的沟槽的交叉处形成小的气体分配孔。

公开(公告)号：US5187454A

公开(公告)日：1993-02-16

申请号：US825658

申请日：1992-01-23

Applicant: Kenneth S. Collins ,  John R. Trow ,  Craig A. Roderick ,  Jay D. Pinson, II ,  Douglas A. Buchberger, II

Inventor： Kenneth S. Collins ,  John R. Trow ,  Craig A. Roderick ,  Jay D. Pinson, II ,  Douglas A. Buchberger, II

IPC: H02J3/00 ,  H01L21/302 ,  H03H7/40 ,  H03H11/30 ,  H05H1/46

CPC classification number: H03H11/30 ,  H01F2029/143

Abstract: A method, and corresponding apparatus, for matching a generator impedance with an unknown and possibly changing load impedance, to maximize power transferred to the load. The apparatus includes an impedance matching network, and a network model, to estimate the load impedance from known present network values and a measurement of network input impedance, and to estimate optimum network values from the input impedance and the estimated load impedance. A controller computes new network values based on the present and optimum values, and outputs the new values to the network. The process is repeated using the new network values to estimate the load impedance and generate a new set of optimum values. The controller uses a control equation with parameters selected to ensure rapid convergence on the maximum-power condition, without overshoot or instability. Preferably, current and voltage measurements are made in the network to enable correction of the network values based on these measurements on the actual network. Although the invention may be used with any type of variable-impedance network hardware, preferably current-controlled inductances are used as the variable network impedances.

Abstract translation: 一种用于将发电机阻抗与未知且可能变化的负载阻抗进行匹配的方法和相应装置，以最大化传递到负载的功率。 该装置包括阻抗匹配网络和网络模型，以从已知的现有网络值估计负载阻抗和网络输入阻抗的测量，并根据输入阻抗和估计的负载阻抗来估计最佳网络值。 控制器根据当前和最佳值计算新的网络值，并将新值输出到网络。 使用新的网络值重复该过程以估计负载阻抗并产生一组新的最优值。 控制器使用具有选定参数的控制方程，以确保最大功率条件下的快速收敛，无过冲或不稳定。 优选地，在网络中进行电流和电压测量以使得能够基于在实际网络上的这些测量来校正网络值。 虽然本发明可以与任何类型的可变阻抗网络硬件一起使用，但优选地使用电流控制的电感作为可变网络阻抗。

公开(公告)号：US5065118A

公开(公告)日：1991-11-12

申请号：US558290

申请日：1990-07-26

Applicant: Kenneth S. Collins ,  Craig A. Roderick

Inventor： Kenneth S. Collins ,  Craig A. Roderick

IPC: G01R31/00 ,  H01J37/32 ,  H01P5/02 ,  H01P5/04

CPC classification number: H01J37/32256 ,  H01J37/32192 ,  H01P5/04

Abstract: A matching network matches an output impedance of a source with an input impedance of a load. The matching network includes a plurality of transmission line stubs. Each transmission line stub includes a first transmission line conductor, a second transmission line conductor running parallel to but not in electrical contact with the first transmission line conductor, and ferrite dielectric material between the first transmission line conductor and the second transmission line conductor. A magnetic field is used to vary the relative permeability of the ferrite dielectric material.

Abstract translation: 匹配的网络将源的输出阻抗与负载的输入阻抗匹配。 匹配网络包括多个传输线存根。 每个传输线短截线包括第一传输线导体，平行于但不与第一传输线导体电接触的第二传输线导体，以及在第一传输线导体和第二传输线导体之间的铁氧体介电材料。 使用磁场来改变铁氧体介电材料的相对磁导率。

公开(公告)号：US4951009A

公开(公告)日：1990-08-21

申请号：US392874

申请日：1989-08-11

Applicant: Kenneth S. Collins

Inventor： Kenneth S. Collins

IPC: G05F1/67 ,  G01R33/36 ,  H03H7/40

CPC classification number: H01J37/32183 ,  G01R33/3628 ,  H03H7/40

Abstract: A matching network matches an output impedance of a generator with an input impedance of a load. The matching network includes a first variable impedance element, a second variable impedance element, a reflected power detector and a control circuit. Each of the first variable impedance elements are constructed using magnetically saturable reactors. For example, each magnetically saturable reactor may be a transformer composed of primary and secondary windings wound around a non-linear ferromagnetic core. The reflected power detector detects power reflected from the matching network to the generator. The control circuit receives from the reflected power detector a signal which represents the changes in reflected power. Using this feedback the control means varies the impedance through the first variable impedance element and the second variable impedance element until the reflected power is negligible. The control circuit then separates out the component of the change in reflected power which is due to dithering of the first variable impedance element from the change in reflected power which is due to dithering of the second variable impedance element. Using the components of change, the control circuit continuously varies the steady state impedance of the first variable impedance and the steady state impedance of the second variable impedance in directions which minimize the reflected power.

公开(公告)号：US08920597B2

公开(公告)日：2014-12-30

申请号：US13047052

申请日：2011-03-14

Applicant: Kartik Ramaswamy ,  Igor Markovsky ,  Zhigang Chen ,  James D. Carducci ,  Kenneth S. Collins ,  Shahid Rauf ,  Nipun Misra ,  Leonid Dorf ,  Zheng John Ye

Inventor： Kartik Ramaswamy ,  Igor Markovsky ,  Zhigang Chen ,  James D. Carducci ,  Kenneth S. Collins ,  Shahid Rauf ,  Nipun Misra ,  Leonid Dorf ,  Zheng John Ye

IPC: H01L21/00 ,  C23C16/00 ,  H01J37/32

CPC classification number: H01J37/32091 ,  H01J37/32018 ,  H01J37/32082 ,  H01J37/32183 ,  H01J37/32541 ,  H01J37/32568 ,  H01J37/32577 ,  H01J37/32587 ,  H01J37/32596 ,  H01J37/3266 ,  H01J37/32715 ,  H01J37/32834

Abstract: The disclosure pertains to a capactively coupled plasma source in which VHF power is applied through an impedance-matching coaxial resonator having a folded structure and symmetrical power distribution.

Abstract translation: 本公开涉及一种通过具有折叠结构和对称功率分布的阻抗匹配同轴谐振器施加VHF功率的Capactively coupled等离子体源。

公开(公告)号：US08894805B2

公开(公告)日：2014-11-25

申请号：US13595452

申请日：2012-08-27

Applicant: Kallol Bera ,  Shahid Rauf ,  Leonid Dorf ,  Kenneth S. Collins ,  Ajit Balakrishna ,  Gary Leray

Inventor： Kallol Bera ,  Shahid Rauf ,  Leonid Dorf ,  Kenneth S. Collins ,  Ajit Balakrishna ,  Gary Leray

IPC: H05H1/46 ,  H01J37/32 ,  H05H7/00

CPC classification number: H01J37/3233 ,  H05H1/46 ,  H05H7/001

Abstract: A plasma reactor employs an e-beam source to generate plasma, and the e-beam source has a configurable magnetic shield.

Abstract translation: 等离子体反应器采用电子束源产生等离子体，并且电子束源具有可配置的磁屏蔽。

公开(公告)号：US08878926B2

公开(公告)日：2014-11-04

申请号：US13236039

申请日：2011-09-19

Applicant: Zheng John Ye ,  Kartik Ramaswamy ,  Troy S. Detrick ,  Kenneth S. Collins

Inventor： Zheng John Ye ,  Kartik Ramaswamy ,  Troy S. Detrick ,  Kenneth S. Collins

IPC: G01N25/72

CPC classification number: G01N25/72

Abstract: Embodiments of the present invention provide methods and apparatus for analyzing thermal properties of bonding materials within a composite structure. One embodiment of the present invention provides an apparatus for analyzing thermal property of a bonding material within a structure. The apparatus comprises a structure support having a supporting surface configured to support the structure, a heat source configured to direct a heat flux to the structure supported by the supporting surface of the structure support, and a camera facing the structure supported on the structure support and configured to capture thermal images of the structure supported on the structure support.

Abstract translation: 本发明的实施例提供了用于分析复合结构内的接合材料的热性能的方法和装置。 本发明的一个实施例提供一种用于分析结构内的接合材料的热性能的装置。 该装置包括：结构支撑件，其具有构造成支撑该结构的支撑表面;热源，其构造成将热通量引导到由结构支撑件的支撑表面支撑的结构;以及面向支撑在结构支撑上的结构的照相机， 被配置为捕获支持在结构支撑上的结构的热图像。

公开(公告)号：US08313664B2

公开(公告)日：2012-11-20

申请号：US12623243

申请日：2009-11-20

Applicant: Zhigang Chen ,  Shahid Rauf ,  Walter R. Merry ,  Leonid Dorf ,  Kartik Ramaswamy ,  Kenneth S. Collins

Inventor： Zhigang Chen ,  Shahid Rauf ,  Walter R. Merry ,  Leonid Dorf ,  Kartik Ramaswamy ,  Kenneth S. Collins

IPC: G01L21/30

CPC classification number: H01J37/32165 ,  H01J37/32082 ,  H01J37/3299 ,  H01L21/6833

Abstract: In a plasma reactor having an electrostatic chuck, wafer voltage may be determined from RF measurements at the bias input using previously determined constants based upon transmission line properties of the bias input, and this wafer voltage may be used to accurately control the DC wafer clamping voltage.

Abstract translation: 在具有静电卡盘的等离子体反应器中，可以使用基于偏置输入的传输线特性的先前确定的常数，在偏置输入处的RF测量来确定晶片电压，并且该晶片电压可用于精确地控制DC晶片钳位电压 。

公开(公告)号：US20120125488A1

公开(公告)日：2012-05-24

申请号：US13374980

申请日：2012-01-25

Applicant: Jennifer Y. Sun ,  Li Xu ,  Kenneth S. Collins ,  Thomas Graves ,  Ren-Guan Duan ,  Senh Thach

Inventor： Jennifer Y. Sun ,  Li Xu ,  Kenneth S. Collins ,  Thomas Graves ,  Ren-Guan Duan ,  Senh Thach

IPC: C23C8/10

CPC classification number: C23C16/4404 ,  H01J37/32467 ,  H01J37/32477

Abstract: A method of creating a plasma-resistant thermal oxide coating on a surface of an article, where the article is comprised of a metal or metal alloy which is typically selected from the group consisting of yttrium, neodymium, samarium, terbium, dysprosium, erbium, ytterbium, scandium, hafnium, niobium or combinations thereof. The oxide coating is formed using a time-temperature profile which includes an initial rapid heating rage, followed by a gradual decrease in heating rate, to produce an oxide coating structure which is columnar in nature. The grain size of the crystals which make up the oxide coating is larger at the surface of the oxide coating than at the interface between the oxide coating and the metal or metal alloy substrate, and the oxide coating is in compression at the interface between the oxide coating and the metal or metal alloy substrate.

Abstract translation: 一种在制品的表面上产生耐等离子体热氧化物涂层的方法，其中制品由金属或金属合金组成，金属或金属合金通常选自钇，钕，钐，铽，镝，铒， 镱，钪，铪，铌或其组合。 使用时间 - 温度曲线形成氧化物涂层，其包括初始的快速加热，然后逐渐降低加热速率，以产生本质上为柱状的氧化物涂层结构。 构成氧化物涂层的晶体的晶粒尺寸在氧化物涂层的表面比在氧化物涂层和金属或金属合金衬底之间的界面处大，并且氧化物涂层在氧化物之间的界面处被压缩 涂层和金属或金属合金基材。

公开(公告)号：US20120069174A1

公开(公告)日：2012-03-22

申请号：US13236039

申请日：2011-09-19

Applicant: Zheng John Ye ,  Kartik Ramaswamy ,  Troy S. Detrick ,  Kenneth S. Collins

Inventor： Zheng John Ye ,  Kartik Ramaswamy ,  Troy S. Detrick ,  Kenneth S. Collins

IPC: H04N7/18

CPC classification number: G01N25/72

Abstract: Embodiments of the present invention provide methods and apparatus for analyzing thermal properties of bonding materials within a composite structure. One embodiment of the present invention provides an apparatus for analyzing thermal property of a bonding material within a structure. The apparatus comprises a structure support having a supporting surface configured to support the structure, a heat source configured to direct a heat flux to the structure supported by the supporting surface of the structure support, and a camera facing the structure supported on the structure support and configured to capture thermal images of the structure supported on the structure support.

Abstract translation: 本发明的实施例提供了用于分析复合结构内的接合材料的热性能的方法和装置。 本发明的一个实施例提供一种用于分析结构内的接合材料的热性能的装置。 该装置包括：结构支撑件，其具有构造成支撑该结构的支撑表面;热源，其构造成将热通量引导到由结构支撑件的支撑表面支撑的结构;以及面向支撑在结构支撑上的结构的照相机， 被配置为捕获支持在结构支撑上的结构的热图像。