METHOD AND DEVICE OF MEMS PROCESS CONTROL MONITORING AND PACKAGED MEMS WITH DIFFERENT CAVITY PRESSURES

    公开(公告)号:US20160107883A1

    公开(公告)日:2016-04-21

    申请号:US14977481

    申请日:2015-12-21

    Applicant: mCube, Inc.

    Abstract: A method for fabricating an integrated MEMS device and the resulting structure therefore. A control process monitor comprising a MEMS membrane cover can be provided within an integrated CMOS-MEMS package to monitor package leaking or outgassing. The MEMS membrane cover can separate an upper cavity region subject to leaking from a lower cavity subject to outgassing. Differential changes in pressure between these cavities can be detecting by monitoring the deflection of the membrane cover via a plurality of displacement sensors. An integrated MEMS device can be fabricated with a first and second MEMS device configured with a first and second MEMS cavity, respectively. The separate cavities can be formed via etching a capping structure to configure each cavity with a separate cavity volume. By utilizing an outgassing characteristic of a CMOS layer within the integrated MEMS device, the first and second MEMS cavities can be configured with different cavity pressures.

    Dead reckoning based initialization of position and heading using discrete position indicators
    52.
    发明授权
    Dead reckoning based initialization of position and heading using discrete position indicators 有权
    使用离散位置指示器对位置和航向进行航位推算

    公开(公告)号:US09175963B2

    公开(公告)日:2015-11-03

    申请号:US14152890

    申请日:2014-01-10

    Applicant: mCube Inc.

    Inventor: Joseph M. Kelly

    CPC classification number: G01C21/12 G01C21/165 H04W4/80

    Abstract: A method and system for operating a hand-held computer system for navigation. Embodiments of the present invention includes novel improvements to a navigation method and implementation through a device, which can include inertial and/or magnetic field sensors integrated within a hand held device. The method can include using a single-fix method or a dual-fix method. The single fix method includes monitoring travel distance or time for a pre-specified condition and updating the heading from a dead reckoning process based on a first position fix by using a map. The dual-fix method includes obtaining a second position fix and updating the heading based on the difference in displacement vectors from the dead reckoning process based on the first position fix.

    Abstract translation: 一种用于操作用于导航的手持计算机系统的方法和系统。 本发明的实施例包括对通过装置的导航方法和实现的新颖改进,其可以包括集成在手持装置内的惯性和/或磁场传感器。 该方法可以包括使用单一修复方法或双重修复方法。 单一修复方法包括监视预定条件的行驶距离或时间,并且基于通过使用地图的第一位置定位来更新来自航位推算过程的航向。 双重定位方法包括:基于第一位置锁定,基于来自航位推算过程的位移矢量的差异来获得第二定位并更新标题。

    Multi-axis integrated MEMS devices with CMOS circuits and method therefor
    53.
    发明授权
    Multi-axis integrated MEMS devices with CMOS circuits and method therefor 有权
    具有CMOS电路的多轴集成MEMS器件及其方法

    公开(公告)号:US09150406B2

    公开(公告)日:2015-10-06

    申请号:US14084415

    申请日:2013-11-19

    Applicant: mCube Inc.

    Abstract: An integrated multi-axis mechanical device and integrated circuit system. The integrated system can include a silicon substrate layer, a CMOS device region, four or more mechanical devices, and a wafer level packaging (WLP) layer. The CMOS layer can form an interface region, on which any number of CMOS and mechanical devices can be configured. The mechanical devices can include MEMS devices configured for multiple axes or for at least a first direction. The CMOS layer can be deposited on the silicon substrate and can include any number of metal layers and can be provided on any type of design rule. The integrated MEMS devices can include, but not exclusively, any combination of the following types of sensors: magnetic, pressure, humidity, temperature, chemical, biological, or inertial. Furthermore, the overlying WLP layer can be configured to hermetically seal any number of these integrated devices.

    Abstract translation: 集成多轴机械装置和集成电路系统。 集成系统可以包括硅衬底层,CMOS器件区域,四个或更多个机械器件以及晶片级封装(WLP)层。 CMOS层可以形成接口区域,可以在其上配置任何数量的CMOS和机械装置。 机械装置可以包括被配置用于多个轴或至少第一方向的MEMS装置。 CMOS层可以沉积在硅衬底上,并且可以包括任何数量的金属层,并且可以以任何类型的设计规则提供。 集成MEMS器件可以包括但不限于以下类型的传感器的任何组合:磁性,压力,湿度,温度,化学,生物或惯性。 此外,覆盖的WLP层可以被配置为密封任何数量的这些集成设备。

    METHOD OF REDUCING GYROSCOPE OSCILLATOR START-UP TIME AND DEVICE THEREFOR
    54.
    发明申请
    METHOD OF REDUCING GYROSCOPE OSCILLATOR START-UP TIME AND DEVICE THEREFOR 有权
    减少陀螺振荡器启动时间的方法及其设备

    公开(公告)号:US20150090034A1

    公开(公告)日:2015-04-02

    申请号:US14497317

    申请日:2014-09-25

    Applicant: mCube Inc.

    Inventor: WENHUA ZHANG

    CPC classification number: G01C19/5776 B81B2201/0242 H03B2200/0094

    Abstract: A gyroscope device and method of operation therefor. The gyroscope device can include a power input, a charge pump portion coupled to the power input, a selection mechanism, a switching mechanism, an oscillator driving mechanism coupled to the switching mechanism, and an oscillator coupled to the charge pump portion and to the oscillator driving mechanism. The method of operation can include providing a first or second selection signal from a selection mechanism associated with the outputting of a DC input power or DC output power from a switching mechanism, respectively. These signals, along with an oscillator driving signal from an oscillator driving mechanism, can be used to initiate and maintain oscillation of an oscillator at a steady-state frequency within a predetermined range of frequencies.

    Abstract translation: 陀螺仪装置及其操作方法。 陀螺仪装置可以包括功率输入,耦合到功率输入的电荷泵部分,选择机构,开关机构,耦合到开关机构的振荡器驱动机构,以及耦合到电荷泵部分和振荡器 驱动机制。 操作方法可以包括分别从与切换机构输出DC输入功率或DC输出功率相关的选择机构提供第一或第二选择信号。 这些信号以及来自振荡器驱动机构的振荡器驱动信号可以用于启动并保持在预定频率范围内的稳态频率的振荡器的振荡。

    MULTI-AXIS MEMS RATE SENSOR DEVICE
    55.
    发明申请
    MULTI-AXIS MEMS RATE SENSOR DEVICE 审中-公开
    多轴MEMS速率传感器器件

    公开(公告)号:US20140311247A1

    公开(公告)日:2014-10-23

    申请号:US14163789

    申请日:2014-01-24

    Applicant: mCube Inc.

    CPC classification number: G01C19/574

    Abstract: A MEMS rate sensor device. In an embodiment, the sensor device includes a MEMS rate sensor configured overlying a CMOS substrate. The MEMS rate sensor can include a driver set, with four driver elements, and a sensor set, with six sensing elements, configured for 3-axis rotational sensing. This sensor architecture allows low damping in driving masses and high damping in sensing masses, which is ideal for a MEMS rate sensor design. Low driver damping is beneficial to MEMS rate power consumption and performance, with low driving electrical potential to achieve high oscillation amplitude.

    Abstract translation: MEMS速率传感器装置。 在一个实施例中,传感器装置包括配置在CMOS衬底上的MEMS速率传感器。 MEMS速率传感器可以包括具有四个驱动器元件的驱动器组和具有六个感测元件的传感器组,用于三轴旋转感测。 该传感器结构允许驱动质量中的低阻尼和感测质量中的高阻尼,这对于MEMS速率传感器设计是理想的。 低驱动器阻尼有利于MEMS速率功耗和性能,具有低驱动电位以实现高振荡幅度。

    METHOD TO PACKAGE MULTIPLE MEMS SENSORS AND ACTUATORS AT DIFFERENT GASES AND CAVITY PRESSURES
    56.
    发明申请
    METHOD TO PACKAGE MULTIPLE MEMS SENSORS AND ACTUATORS AT DIFFERENT GASES AND CAVITY PRESSURES 有权
    在不同气体和气压下封装多个MEMS传感器和执行器的方法

    公开(公告)号:US20140227816A1

    公开(公告)日:2014-08-14

    申请号:US14102465

    申请日:2013-12-10

    Applicant: mCube Inc.

    Abstract: A method for fabricating a multiple MEMS device. A semiconductor substrate having a first and second MEMS device, and an encapsulation wafer with a first cavity and a second cavity, which includes at least one channel, can be provided. The first MEMS can be encapsulated within the first cavity and the second MEMS device can be encapsulated within the second cavity. These devices can be encapsulated within a provided first encapsulation environment at a first air pressure, encapsulating the first MEMS device within the first cavity at the first air pressure. The second MEMS device within the second cavity can then be subjected to a provided second encapsulating environment at a second air pressure via the channel of the second cavity.

    Abstract translation: 一种用于制造多个MEMS器件的方法。 可以提供具有第一和第二MEMS器件的半导体衬底以及包括至少一个通道的具有第一腔和第二腔的封装晶片。 第一MEMS可以封装在第一腔内,并且第二MEMS器件可被封装在第二腔内。 这些装置可以以第一空气压力封装在所提供的第一封装环境内,在第一空气压力下将第一MEMS装置封装在第一空腔内。 然后可以在第二空腔内的第二MEMS装置经由第二空腔的通道在第二空气压力下经受所提供的第二封装环境。

    METHODS AND DEVICES FOR POSITION DETERMINATION USING REGIONAL MINIMAL RESIDUAL ESTIMATION
    57.
    发明申请
    METHODS AND DEVICES FOR POSITION DETERMINATION USING REGIONAL MINIMAL RESIDUAL ESTIMATION 有权
    使用区域最小剩余估计的位置确定的方法和设备

    公开(公告)号:US20130244692A1

    公开(公告)日:2013-09-19

    申请号:US13846917

    申请日:2013-03-18

    Applicant: MCUBE, INC.

    Abstract: A computer-implemented method and device for determining a user position, implemented in a user handheld computing device programmed to perform the method. The method includes solving for the position of a user based on ranges, which are computed by estimating power loss between a user and a number of Wi-Fi Access Points. Embodiments of the present invention includes a method that is designed to accommodate the non-linear nature of solving a position solution using power estimates. This method includes solving a two-dimensional solution grid of position residuals, or magnitudes of error between true and computed ranges, using signal strength measurements from multiple Wi-Fi access points in order to determine local minima of the position residuals indicating a user position. Standard approaches in the area such as a Least Squares Solution overly simplify the non-linear components resulting in poor performance.

    Abstract translation: 一种用于确定用户位置的计算机实现的方法和装置,其在被​​编程为执行所述方法的用户手持计算设备中实现。 该方法包括基于通过估计用户与多个Wi-Fi接入点之间的功率损耗来计算的范围来解决用户的位置。 本发明的实施例包括一种被设计为适应使用功率估计求解位置解的非线性特性的方法。 该方法包括使用来自多个Wi-Fi接入点的信号强度测量来求解位置残差的二维解网格或真实和计算范围之间的误差大小,以便确定指示用户位置的位置残差的局部最小值。 最小二乘解决方案中的标准方法过度简化了非线性元件,导致性能不佳。

    DIFFERENTIAL MEMS DEVICE AND METHODS

    公开(公告)号:US20220229084A1

    公开(公告)日:2022-07-21

    申请号:US17667180

    申请日:2022-02-08

    Applicant: mCube, Inc.

    Abstract: A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.

    Ultra-low power sensor systems for vibration and motion detection

    公开(公告)号:US10982944B1

    公开(公告)日:2021-04-20

    申请号:US15917505

    申请日:2018-03-09

    Applicant: mCube, Inc.

    Abstract: A method for a system includes applying power to a MEMS device while inhibiting applying power to a processor, thereafter determining first sensed data with the MEMS device in response to first event data, when the first sensed data exceeds a first threshold, determining second sensed data with a second MEMS device in response to second event data, when the second sensed data exceeds a second threshold, applying power to the processor, determining with the processor whether a seismic event is occurring in response to the first and the second sensed data, directing with the processor, an electronically-controllable mechanism to shut-off a utility supply, in response to the seismic event being determined.

    Umbrella, umbrella peripheral and methods

    公开(公告)号:US10561210B1

    公开(公告)日:2020-02-18

    申请号:US16534978

    申请日:2019-08-07

    Applicant: mCube, Inc.

    Abstract: A peripheral for an umbrella having a shaft, a handle and a canopy includes a power source, a sensor for determining when the canopy is open or closed, a light emitting diode (LED) on the top of the umbrella for outputting light, a MEMS accelerometer for determining physical orientations of the umbrella, and a processor for determining whether the umbrella is upright when the physical orientations of the umbrella are within a range of angles wherein the processor is for determining whether the umbrella is in a down configuration when the physical orientations of the umbrella are outside the range of angles, wherein the processor is for coupling the LED to the power source in response to the umbrella being upright and open, and wherein the processor is for decoupling the LED from the power source in response to the umbrella being in a down configuration and closed.

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