Abstract:
A method for fabricating an integrated MEMS device and the resulting structure therefore. A control process monitor comprising a MEMS membrane cover can be provided within an integrated CMOS-MEMS package to monitor package leaking or outgassing. The MEMS membrane cover can separate an upper cavity region subject to leaking from a lower cavity subject to outgassing. Differential changes in pressure between these cavities can be detecting by monitoring the deflection of the membrane cover via a plurality of displacement sensors. An integrated MEMS device can be fabricated with a first and second MEMS device configured with a first and second MEMS cavity, respectively. The separate cavities can be formed via etching a capping structure to configure each cavity with a separate cavity volume. By utilizing an outgassing characteristic of a CMOS layer within the integrated MEMS device, the first and second MEMS cavities can be configured with different cavity pressures.
Abstract:
A method and system for operating a hand-held computer system for navigation. Embodiments of the present invention includes novel improvements to a navigation method and implementation through a device, which can include inertial and/or magnetic field sensors integrated within a hand held device. The method can include using a single-fix method or a dual-fix method. The single fix method includes monitoring travel distance or time for a pre-specified condition and updating the heading from a dead reckoning process based on a first position fix by using a map. The dual-fix method includes obtaining a second position fix and updating the heading based on the difference in displacement vectors from the dead reckoning process based on the first position fix.
Abstract:
An integrated multi-axis mechanical device and integrated circuit system. The integrated system can include a silicon substrate layer, a CMOS device region, four or more mechanical devices, and a wafer level packaging (WLP) layer. The CMOS layer can form an interface region, on which any number of CMOS and mechanical devices can be configured. The mechanical devices can include MEMS devices configured for multiple axes or for at least a first direction. The CMOS layer can be deposited on the silicon substrate and can include any number of metal layers and can be provided on any type of design rule. The integrated MEMS devices can include, but not exclusively, any combination of the following types of sensors: magnetic, pressure, humidity, temperature, chemical, biological, or inertial. Furthermore, the overlying WLP layer can be configured to hermetically seal any number of these integrated devices.
Abstract:
A gyroscope device and method of operation therefor. The gyroscope device can include a power input, a charge pump portion coupled to the power input, a selection mechanism, a switching mechanism, an oscillator driving mechanism coupled to the switching mechanism, and an oscillator coupled to the charge pump portion and to the oscillator driving mechanism. The method of operation can include providing a first or second selection signal from a selection mechanism associated with the outputting of a DC input power or DC output power from a switching mechanism, respectively. These signals, along with an oscillator driving signal from an oscillator driving mechanism, can be used to initiate and maintain oscillation of an oscillator at a steady-state frequency within a predetermined range of frequencies.
Abstract:
A MEMS rate sensor device. In an embodiment, the sensor device includes a MEMS rate sensor configured overlying a CMOS substrate. The MEMS rate sensor can include a driver set, with four driver elements, and a sensor set, with six sensing elements, configured for 3-axis rotational sensing. This sensor architecture allows low damping in driving masses and high damping in sensing masses, which is ideal for a MEMS rate sensor design. Low driver damping is beneficial to MEMS rate power consumption and performance, with low driving electrical potential to achieve high oscillation amplitude.
Abstract:
A method for fabricating a multiple MEMS device. A semiconductor substrate having a first and second MEMS device, and an encapsulation wafer with a first cavity and a second cavity, which includes at least one channel, can be provided. The first MEMS can be encapsulated within the first cavity and the second MEMS device can be encapsulated within the second cavity. These devices can be encapsulated within a provided first encapsulation environment at a first air pressure, encapsulating the first MEMS device within the first cavity at the first air pressure. The second MEMS device within the second cavity can then be subjected to a provided second encapsulating environment at a second air pressure via the channel of the second cavity.
Abstract:
A computer-implemented method and device for determining a user position, implemented in a user handheld computing device programmed to perform the method. The method includes solving for the position of a user based on ranges, which are computed by estimating power loss between a user and a number of Wi-Fi Access Points. Embodiments of the present invention includes a method that is designed to accommodate the non-linear nature of solving a position solution using power estimates. This method includes solving a two-dimensional solution grid of position residuals, or magnitudes of error between true and computed ranges, using signal strength measurements from multiple Wi-Fi access points in order to determine local minima of the position residuals indicating a user position. Standard approaches in the area such as a Least Squares Solution overly simplify the non-linear components resulting in poor performance.
Abstract:
A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.
Abstract:
A method for a system includes applying power to a MEMS device while inhibiting applying power to a processor, thereafter determining first sensed data with the MEMS device in response to first event data, when the first sensed data exceeds a first threshold, determining second sensed data with a second MEMS device in response to second event data, when the second sensed data exceeds a second threshold, applying power to the processor, determining with the processor whether a seismic event is occurring in response to the first and the second sensed data, directing with the processor, an electronically-controllable mechanism to shut-off a utility supply, in response to the seismic event being determined.
Abstract:
A peripheral for an umbrella having a shaft, a handle and a canopy includes a power source, a sensor for determining when the canopy is open or closed, a light emitting diode (LED) on the top of the umbrella for outputting light, a MEMS accelerometer for determining physical orientations of the umbrella, and a processor for determining whether the umbrella is upright when the physical orientations of the umbrella are within a range of angles wherein the processor is for determining whether the umbrella is in a down configuration when the physical orientations of the umbrella are outside the range of angles, wherein the processor is for coupling the LED to the power source in response to the umbrella being upright and open, and wherein the processor is for decoupling the LED from the power source in response to the umbrella being in a down configuration and closed.