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公开(公告)号：US10026623B2
公开(公告)日：2018-07-17
申请号：US15556728
申请日：2016-02-15
发明人： Michinobu Mizumura
IPC分类号： H01L21/324 , H01L21/268 , B23K26/06 , H01L29/786 , B23K26/066
摘要： A thin film transistor substrate includes a plurality of thin film transistors arranged in columns and rows respectively on a substrate. Each of the thin film transistors includes a laser annealed part in which an amorphous silicon layer that forms a channel region is laser annealed to be a polysilicon layer, each laser annealed part is disposed with a designed pitch in a scanning direction in which a laser light for laser annealing and the substrate move relatively to each other, and the laser annealed part is provided within a channel width formed in a direction orthogonal to the scanning direction and being narrower than the channel width.
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公开(公告)号：US09964857B2
公开(公告)日：2018-05-08
申请号：US15124701
申请日：2015-02-26
CPC分类号： G03F7/7015 , B41J2/447 , B41J2/47 , G03F7/2057 , G03F7/70391 , G03F7/704 , G03G15/04054
摘要： A beam exposure device includes a light-emitting unit for emitting light beams from a plurality of light-emitting positions, a scan unit, an optical condensing system for condensing a spot of the light beams onto a surface to be exposed, and a micro-deflection unit for micro-deflecting the plurality of light beams to expose the space between the beams in the plurality of light beams. The optical condensing system includes a first microlens array arranged between the light-emitting unit and the micro-deflection unit and provided with a plurality of microlenses corresponding to the light-emitting positions; and a second microlens array arranged between the micro-deflection unit and the surface to be exposed and provided with a plurality of microlenses each microlens corresponding to the light-emitting unit.
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公开(公告)号：US09921482B2
公开(公告)日：2018-03-20
申请号：US14902044
申请日：2014-06-16
CPC分类号： G03F7/7015 , G03F7/201 , G03F7/70275
摘要： The present invention relates to an exposure device which forms an image of a pattern on a mask onto a substrate with microlens arrays to expose the substrate, and reduces a size of an lighting unit which emits an exposure light. Microlens arrays include plural microlenses which are arranged two-dimensionally and arranged in a direction intersecting a movement direction. Lighting unit includes an LD array bar in which plural laser diodes are arranged, and lighting optical system which transforms plural emitted lights emitted from the plural laser diodes into an exposure flux having a slit form. The slit form spreads across plural pieces of the microlenses, and which, with respect to the movement direction, is limited in an area not reaching a microlens arranged in an adjacent row in the movement direction, and illuminates plural microlenses arranged in a row with an exposure light by the exposure light flux.
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公开(公告)号：US09746435B2
公开(公告)日：2017-08-29
申请号：US14475327
申请日：2014-09-02
摘要： A nondestructive inspection apparatus of a structure includes: an inspection apparatus body 1 provided with an infrared light irradiation unit irradiating a structure 3 to be inspected with heating infrared light, a temperature variation measuring unit measuring a variation in temperature of the structure due to the irradiation with infrared light from the infrared light irradiation unit, a drive-control-and-accumulation unit performing drive control of the infrared light irradiation unit and the temperature variation measuring unit and performing data accumulation; and a self-running mechanism unit 2 enabling the inspection apparatus body 1 to move along the structure 3. The structure 3 is inspected for an internal defect by irradiating the structure 3 with heating infrared light while the apparatus moves along the structure 3 through the use of the self-running mechanism unit 2 and measuring the variation in temperature of the structure 3 due to the irradiation with infrared light.
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公开(公告)号：US20160288163A1
公开(公告)日：2016-10-06
申请号：US15175365
申请日：2016-06-07
发明人： Michinobu Mizumura
IPC分类号： B05C21/00
CPC分类号： B05C21/005 , B05B12/20 , C23C14/04 , C23C14/042
摘要： The present invention provides a mask having a plurality of elongate openings formed in a substrate, including: a plurality of reinforcement portions having a thickness smaller than a thickness of the substrate and bridging the openings across a longitudinal direction thereof on one side of the substrate; and a recess portion having a step formed by excavating an area around the openings on each side of the reinforcement portions along the longitudinal direction. The mask accordingly achieves and retains high mechanical strength without increasing the mask thickness.
摘要翻译： 本发明提供了一种掩模，其具有形成在基板中的多个细长开口，包括：多个加强部分，其厚度小于基板的厚度，并使开口跨过基板的一侧的纵向方向; 以及凹部，其具有通过沿着长度方向挖掘加强部的每一侧的开口周围的区域而形成的台阶。 因此，掩模相应地实现并保持高机械强度，而不增加掩模厚度。
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56.发明授权Laser irradiation apparatus and bright point correction method for liquid crystal display panel using the same 有权激光照射装置和使用其的液晶显示面板的亮点校正方法公开(公告)号：US09377637B2
公开(公告)日：2016-06-28
申请号：US14022617
申请日：2013-09-10
发明人： Kazuya Otaki
IPC分类号： B23K26/066 , B23K26/06 , G02F1/13 , G02F1/1335 , G02F1/133
CPC分类号： G02F1/13306 , B23K26/0613 , B23K26/066 , G02F1/1309 , G02F1/133509
摘要： The present invention is a laser irradiation apparatus which is capable of selecting a laser light of a wavelength among a plurality of laser lights having different wavelengths according to a purpose of irradiation and irradiating an object to be irradiated with the laser light having the wavelength. The laser irradiation apparatus includes, on an optical path of a mixed light beam of the plurality of laser lights having different wavelengths, a slit having a width corresponding to a diffraction limit of the laser light having the shortest wavelength among the plurality of laser lights having different wavelengths, and an objective lens for focusing a laser light that has passed through the slit on the object to be irradiated.
摘要翻译： 本发明是一种激光照射装置，其能够根据照射的目的选择具有不同波长的多个激光之中的波长的激光，并照射具有波长的激光的被照射物体。 激光照射装置在具有不同波长的多个激光的混合光束的光路上包括具有对应于多个激光中具有最短波长的激光的衍射极限的宽度的狭缝，其具有 不同波长的物镜，以及用于将穿过狭缝的激光聚焦在被照射物体上的物镜。
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公开(公告)号：US20160115580A1
公开(公告)日：2016-04-28
申请号：US14980683
申请日：2015-12-28
发明人： Michinobu MIZUMURA
IPC分类号： C23C14/04 , B23K11/11 , B23K26/382 , C23C16/04
CPC分类号： C23C14/042 , B23K11/11 , B23K26/382 , C23C16/042 , H01L51/0011
摘要： A deposition mask is provided. The deposition mask including: a resin film 1 in which penetrating opening patterns 4 are formed and a frame-shaped metal thin film 5 having an opening is provided on one face 1a of the film 1; a metal mask 2 provided at a position corresponding to the opening of the metal thin film 5 on one face 1a side of the film 1, the metal mask 2 being separated from and independent of the film 1, the metal mask 2 being provided with through holes 6; and a metal frame 3 positioned on one face 1a side of the film 1, the metal frame 3 supporting the film 1 and the metal mask 2 by spot-welding a portion of the metal thin film 5 and an edge region of the metal mask 2 to one end face 3a.
摘要翻译： 提供沉积掩模。 沉积掩模包括：在膜1的一个表面1a上设置有形成有穿透开口图案4的树脂膜1和具有开口的框状金属薄膜5; 金属掩模2设置在与膜1的一个面1a侧的金属薄膜5的开口对应的位置处，金属掩模2与膜1分离并且独立于膜1，金属掩模2设置有通孔 孔6; 以及位于膜1的一个面1a侧的金属框架3，通过点焊金属薄膜5的一部分和金属掩模2的边缘区域来支撑膜1的金属框架3和金属掩模2 到一个端面3a。
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公开(公告)号：US20150346443A1
公开(公告)日：2015-12-03
申请号：US14654593
申请日：2013-12-10
发明人： Michinobu Mizumura
CPC分类号： G02B6/4298 , G02B6/122 , H01L27/15 , H01L31/103 , H01S5/0424 , H01S5/06203 , H01S5/32 , H01S5/50
摘要： The semiconductor optical integrated circuit has a semiconductor substrate; a pn junction part formed in the semiconductor substrate so as to continuously extend along a signal transmission route, a light emitting part formed on a part of the pn junction part; and an optical waveguide part formed continuous to the light emitting part on the pn junction part. The light emitting part supplies a drive current to the pn junction part to generate an optical signal from the pn junction part, and the optical waveguide part transmits the optical signal while amplifying the optical signal by an amplification current supplied to the pn junction part.
摘要翻译： 半导体光集成电路具有半导体基板; 形成在所述半导体衬底中以沿着信号传输路线连续延伸的pn接合部，形成在所述pn接合部的一部分上的发光部; 以及与pn结部的发光部连续地形成的光波导部。 发光部分向pn结部分提供驱动电流以从pn结部分产生光信号，并且光波导部分通过提供给pn结部分的放大电流放大光信号来传输光信号。
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公开(公告)号：US20150328662A1
公开(公告)日：2015-11-19
申请号：US14809086
申请日：2015-07-24
发明人： Michinobu MIZUMURA
CPC分类号： B05D3/06 , B05D1/02 , B23K26/066 , B23K26/08 , B23K26/382 , B23K26/40 , B23K37/0235 , B23K37/0408 , B23K2101/40 , C23C14/04
摘要： A method including: a first step of forming a mask member having a structure in which a magnetic metal member provided with through-holes is in tight contact with one surface of a film; a second step of forming a plurality of preliminary opening patterns by subjecting the film to penetration processing by irradiating laser beams at predetermined regular positions in the plurality of through-holes; and a third step of performing laser processing so as to form each opening pattern over the corresponding preliminary opening pattern, is provided.
摘要翻译： 一种方法，包括：形成具有其中设置有通孔的磁性金属构件与膜的一个表面紧密接触的结构的掩模构件的第一步骤; 第二步骤，通过在所述多个通孔中的预定规则位置照射激光来对所述膜进行穿透处理来形成多个初步打开图案; 并且提供了进行激光加工以便形成相应的初步打开图案上的每个打开图案的第三步骤。
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公开(公告)号：US20150280835A1
公开(公告)日：2015-10-01
申请号：US14441498
申请日：2013-10-03
IPC分类号： H04B10/80 , H01L31/167
CPC分类号： H04B10/803 , H01L25/167 , H01L31/167 , H01L2924/0002 , H01L2924/00
摘要： An optical interconnection device for transmitting and receiving an optical signal between a plurality of laminated semiconductor substrates. The optical interconnection device has a plurality of light emitting elements or a plurality of light receiving elements arranged in one of the semiconductor substrates that have pn junction parts using the semiconductor substrate as a common semiconductor layer. The light emitting element and the light receiving element, which form a pair and which transmit and receive an optical signal between the different semiconductor substrates, emit and receive light at a common wavelength.
摘要翻译： 一种用于在多个层叠的半导体衬底之间发送和接收光信号的光学互连装置。 光学互连装置具有多个发光元件或多个光接收元件，其布置在使用半导体衬底作为公共半导体层的具有pn结部分的半导体衬底中的一个中。 形成一对并且在不同半导体衬底之间传输和接收光信号的发光元件和光接收元件发射和接收共同波长的光。
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