公开(公告)号：US20200348704A1

公开(公告)日：2020-11-05

申请号：US16760726

申请日：2018-11-20

Applicant: FUJIKIN INCORPORATED

Inventor： Katsuyuki SUGITA ,  Ryousuke DOHI ,  Kaoru HIRATA ,  Koji KAWADA ,  Nobukazu IKEDA ,  Kouji NISHINO

IPC: G05D7/06

Abstract: A flow rate control device (100) comprises: a pressure control valve (6) provided in a flow path; a flow rate control valve (8) provided downstream side of the pressure control valve; and a first pressure sensor (3) for measuring pressure on the downstream side of the pressure control valve and on the upstream side of the flow rate control valve. The flow rate control valve has a valve element (13) seated on/separated from a valve seat (12); a piezoelectric element (10b) for moving the valve element so as be seated on/separated from the valve seat; and a strain sensor (20) provided on a side surface of the piezoelectric element. The pressure control valve (6) is configured to control the pressure control valve (6) on the basis of a signal output from the first pressure sensor (3), and to control the driving of the piezoelectric element of the flow rate control valve (8) based on a signal output from the strain sensor (20).

公开(公告)号：US20200159257A1

公开(公告)日：2020-05-21

申请号：US16634603

申请日：2018-07-24

Applicant: FUJIKIN INCORPORATED

Inventor： Satoru YAMASHITA ,  Yohei SAWADA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05D7/06

Abstract: A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).

公开(公告)号：US20200033895A1

公开(公告)日：2020-01-30

申请号：US16499174

申请日：2018-03-20

Applicant: FUJIKIN INCORPORATED

Inventor： Katsuyuki SUGITA ,  Kaoru HIRATA ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masahiko TAKIMOTO ,  Takahiro IMAI ,  Shinya OGAWA

IPC: G05D7/06 ,  G01F1/36

Abstract: A pressure-type flow rate control device includes a restriction part; a control valve provided upstream of the restriction part; an upstream pressure sensor for detecting pressure between the restriction part and the control valve; and an arithmetic processing circuit connected to the control valve and the upstream pressor sensor. The device is configured to perform flow rate control by controlling the control valve according to an output of the upstream pressure sensor. The arithmetic processing circuit performs an operation of closing the control valve in order to reduce a flow rate of a fluid flowing through the restriction part, and performs an operation of closing the control valve by feedback control in which a target value is an exponential function more gradual than the pressure drop characteristic data when a gas flows out of the restriction part.

公开(公告)号：US20190271636A1

公开(公告)日：2019-09-05

申请号：US16320002

申请日：2017-07-25

Applicant: TOKUSHIMA UNIVERSITY ,  FUJIKIN INCORPORATED

Inventor： Yoshihiro DEGUCHI ,  Takashi FUKAWA ,  Taiki HATTORI ,  Masaaki NAGASE ,  Kazuteru TANAKA ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G01N21/05 ,  G01N21/59 ,  G01N21/03

Abstract: A concentration measuring device includes a measuring cell having a flow passage and a translucent window, a light source for emitting light to the measuring cell through the window, a reflective member for reflecting light propagating through the measuring cell to the window, a light detector for detecting the light exiting from the window, a calculation part for calculating the concentration of the fluid on the basis of a detection signal from the light detector, and an optical device for guiding the light from the light source to the window and guiding the light from the window to the light detector.

公开(公告)号：US20190178389A1

公开(公告)日：2019-06-13

申请号：US16310866

申请日：2017-07-25

Applicant: FUJIKIN INCORPORATED

Inventor： Yohei SAWADA ,  Kaoru HIRATA ,  Masaaki NAGASE ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: F16K1/52 ,  G01F1/42 ,  G05D7/06

Abstract: A valve with a built-in orifice includes a base section having a housing recess and first and second flow passages; a valve seat body; an inner disc; a valve element; and an orifice body, wherein the housing recess has a wide-diameter section and a narrow-diameter section, the first flow passage is connected to a space between a wall surface of the narrow-diameter section and the orifice body to communicate with a valve chamber, and the second flow passage communicates with the valve chamber through a through hole of the orifice body and a through hole of the valve seat body.

公开(公告)号：US20180314271A1

公开(公告)日：2018-11-01

申请号：US15771148

申请日：2016-10-24

Applicant: FUJIKIN INCORPORATED

Inventor： Katsuyuki SUGITA ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Kaoru HIRATA ,  Masahiko TAKIMOTO ,  Masayoshi KAWASHIMA ,  Takahiro IMAI

IPC: G05D7/06

CPC classification number: G05D7/06

Abstract: A flow rate signal correction method applicable to a pressure-type flow rate control device that controls a flow rate by controlling pressure existing upstream of a restriction part includes a step of generating a primary signal indicating the flow rate in accordance with an output of a pressure sensor provided upstream of the restriction part and a step of generating a secondary signal as a corrected signal of the primary signal such that the current value of the primary signal and a value including information regarding one or a plurality of past values of the primary signal are used to derive a current value corrected according to a predetermined relational expression. The secondary signal is output as a flow rate signal during a stable flow rate period, and the secondary signal is not output as a flow rate signal during a transient change period.

公开(公告)号：US20180217054A1

公开(公告)日：2018-08-02

申请号：US15748264

申请日：2016-08-09

Applicant: TOKUSHIMA UNIVERSITY ,  FUJIKIN INCORPORATED

Inventor： Yoshihiro DEGUCHI ,  Masaaki NAGASE ,  Michio YAMAJI ,  Nobukazu IKEDA ,  Kouji NISHINO ,  Masayoshi KAWASHIMA ,  Kazuteru TANAKA

IPC: G01N21/31 ,  G01N21/59 ,  G01J3/42 ,  G01J3/10

CPC classification number: G01N21/3103 ,  G01J3/10 ,  G01J3/42 ,  G01N21/33 ,  G01N21/3504 ,  G01N21/59 ,  G01N2021/157 ,  G01N2021/3133 ,  G01N2201/0627 ,  G01N2201/08 ,  G01N2201/1211

Abstract: A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.

公开(公告)号：US20180071702A1

公开(公告)日：2018-03-15

申请号：US15565696

申请日：2016-04-11

Applicant: FUJIKIN INCORPORATED

Inventor： Atsushi HIDAKA ,  Masaaki NAGASE ,  Kaoru HIRATA ,  Katsuyuki SUGITA ,  Takatoshi NAKATANI ,  Satoru YAMASHITA ,  Kouji NISHINO ,  Nobukazu IKEDA ,  Keiji HIRAO

IPC: B01J4/00 ,  B01J7/02 ,  C23C16/448 ,  H01L21/3213 ,  H01L21/67

CPC classification number: B01J4/008 ,  B01J7/02 ,  C23C16/448 ,  C23C16/4485 ,  C23C16/52 ,  H01L21/205 ,  H01L21/31 ,  H01L21/32135 ,  H01L21/6708

Abstract: A vaporization supply apparatus comprises a vaporizer which heats and vaporize a liquid, a flow-rate control device which controls a flow rate of a gas sent out from the vaporizer, a first control valve interposed in a supply channel of a liquid to the vaporizer, a pressure detector for detecting a pressure of a gas vaporized by the vaporizer, a liquid detection part for measuring parameters of a liquid in an amount higher than a predetermined amount in the vaporizer, and a control device which controls the first control valve to supply a predetermined amount of a liquid to the vaporizer based on the pressure value detected by the pressure detector, and to close the first control valve when the liquid detection part detect a liquid in an amount higher than the predetermined amount.

公开(公告)号：US20170212531A1

公开(公告)日：2017-07-27

申请号：US15327592

申请日：2015-07-09

Applicant: FUJIKIN INCORPORATED

Inventor： Masaaki NAGASE ,  Kaoru HIRATA ,  Ryousuke DOHI ,  Kouji NISHINO ,  Nobukazu IKEDA

IPC: G05D7/06

CPC classification number: G05D7/0635

Abstract: The pressure-type flow controller includes a main body provided with a fluid passage, a control valve for pressure control fixed in a horizontal position to the main body, an on/off valve fixed in a vertical position to the main body on the downstream side of the control valve for pressure control, an orifice provided in the fluid passage on the upstream side of the on/off valve, and a pressure sensor fixed to the main body for detecting the internal pressure of the fluid passage between the control valve for pressure control and the orifice. The fluid passage includes a first passage portion in a horizontal position connected to the control valve for pressure control, a second passage portion in a vertical position connecting the first passage portion to the orifice, and a third passage portion in a horizontal position connecting the second passage portion to the pressure sensor.

公开(公告)号：US20170199117A1

公开(公告)日：2017-07-13

申请号：US15321398

申请日：2015-07-23

Applicant: TOKUSHIMA UNIVERSITY ,  FUJIKIN INCORPORATED

Inventor： Yoshihiro DEGUCHI ,  Masaaki NAGASE ,  Nobukazu IKEDA ,  Michio YAMAJI ,  Tadayuki YAKUSHIJIN

IPC: G01N21/27 ,  G01N21/15 ,  G01N21/05

CPC classification number: G01N21/27 ,  G01N21/05 ,  G01N21/15 ,  G01N2021/151 ,  G01N2201/08

Abstract: An inline concentration measurement device comprises: a measurement cell main body with a gas flow path formed; a light incident part with a window member connected to the main body; and a light receiving part with a window member connected to the main body, wherein the gas flow path includes a gas flow path for an optical path extending straight between the window members of the light incident part and the light receiving part, a first communication part making a gas inlet formed in the main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the main body communicate with the gas flow path part for the optical path, and the first communication part obliquely extends from the gas inlet towards the window member of the light incident part.