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    Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler
    52.
    发明授权
    Lithographic apparatus and device manufacturing method utilizing a flat panel display handler with conveyor device and substrate handler 失效
    利用带有输送装置和基板处理器的平板显示处理器的平版印刷设备和装置制造方法

    公开(公告)号：US07738081B2

    公开(公告)日：2010-06-15

    申请号：US11123232

    申请日：2005-05-06

    申请人： Hernes Jacobs

    发明人： Hernes Jacobs

    IPC分类号： G03B27/60

    CPC分类号： G03F7/7075 ,  Y10S414/141

    摘要： A lithographic apparatus can include an illumination system that conditions a radiation beam, a patterning device that modulates the radiation beam, a substrate table that supports a substrate, and a projection system that projects the modulated radiation beam onto a target portion of the substrate. The lithographic apparatus can also include a substrate handler that loads and/or unloads a substrate on/from the substrate table. The substrate handler supports the substrate in a support plane and can include a conveyor device for moving the substrate in a direction substantially parallel to the support plane. The conveyor device can include a gripping device configured to push or pull the substrate in the indicated direction and a driving device for driving the gripping device in the indicated direction.

    摘要翻译： 光刻设备可以包括调节辐射束的照明系统，调制辐射束的图案形成装置，支撑衬底的衬底台，以及将调制的辐射束投影到衬底的目标部分上的投影系统。 光刻设备还可以包括在衬底台上/从衬底台上加载和/或卸载衬底的衬底处理器。 衬底处理器在支撑平面中支撑衬底，并且可以包括用于沿基本上平行于支撑平面的方向移动衬底的输送装置。 传送装置可以包括构造成沿所示方向推动或拉动基板的夹持装置和用于沿所示方向驱动夹持装置的驱动装置。

    Lithographic apparatus and method
    54.
    发明申请
    Lithographic apparatus and method 失效
    平版印刷设备和方法

    公开(公告)号：US20080165331A1

    公开(公告)日：2008-07-10

    申请号：US11987009

    申请日：2007-11-26

    申请人： Hernes Jacobs ,  Eva Mondt ,  Alexander Nikolov Zdravkov

    发明人： Hernes Jacobs ,  Eva Mondt ,  Alexander Nikolov Zdravkov

    IPC分类号： G03B27/52

    CPC分类号： G03F7/70341 ,  G03F7/707

    摘要： A lithographic apparatus is disclosed that includes a seal provided in a substrate table, the seal being actuatable from an open configuration to a closed configuration, the closed configuration being such that when a substrate is located on the substrate table, the seal closes a gap between the substrate and the substrate table.

    摘要翻译： 公开了一种光刻设备，其包括设置在基板台中的密封件，所述密封件可从打开构造致动至封闭构造，所述封闭构造使得当基板位于所述基板台上时，所述密封件封闭 基板和基板台。

    Lithographic apparatus, device manufacturing method, and device manufactured thereby
    59.
    发明申请
    Lithographic apparatus, device manufacturing method, and device manufactured thereby 有权
    平版印刷设备，器件制造方法和由此制造的器件

    公开(公告)号：US20050007574A1

    公开(公告)日：2005-01-13

    申请号：US10845604

    申请日：2004-05-14

    申请人： Frits Van Der Meulen ,  Hernes Jacobs ,  Martinus Terken

    发明人： Frits Van Der Meulen ,  Hernes Jacobs ,  Martinus Terken

    IPC分类号： H01L21/027 ,  G03F7/20 ,  G03B27/58

    CPC分类号： G03F7/70733 ,  G03F7/70716 ,  G03F7/70725

    摘要： A lithographic projection apparatus is presented herein that includes a collision protection system for protecting internal components against damage from a collision. The collision protection apparatus includes at least one damper for applying a braking force and/or for absorbing a collision force, reducing or eliminating any damage to delicate and costly parts. The collision protection apparatus can also monitor the position and velocity of a moving part to determine when a collision is likely to occur.

    摘要翻译： 本文提出了一种光刻投影装置，其包括用于保护内部部件免受碰撞破坏的防撞系统。 碰撞保护装置包括用于施加制动力和/或吸收碰撞力的至少一个阻尼器，减少或消除对精细和昂贵部件的任何损坏。 碰撞保护装置还可以监视移动部件的位置和速度，以确定何时可能发生碰撞。

    Color display tube with improved suspension of the color selection electrode
    60.
    发明授权
    Color display tube with improved suspension of the color selection electrode 失效
    彩色显示管具有改进的选色电极的悬浮液

    公开(公告)号：US06674226B2

    公开(公告)日：2004-01-06

    申请号：US09853938

    申请日：2001-05-10

    申请人： Jörg Meissner ,  Jan Harmannus Post ,  Hernes Jacobs

    发明人： Jörg Meissner ,  Jan Harmannus Post ,  Hernes Jacobs

    IPC分类号： H01J2980

    CPC分类号： H01J29/073

    摘要： A color display tube (1) is disclosed having an improved suspension system of the color selection electrode (12). The positional stability of the color selection electrode (12) is of eminent importance for the color purity of the color display tube (1). If the color selection electrode (12) slightly shifts, the electron beams (7,8,9) may impinge on electroluminescent material of the wrong color, leading to discolorations. It is recognized that this positional stability is improved by applying free end portions (22) of a smaller diameter on the supporting elements (17) because this will lower the friction between the free end portions (22) and the suspension means (20). This smaller diameter has the disadvantage that the insertion of the color selection electrode (12) into the display window (3) of the color display tube (1) becomes more difficult. This invention solves this problem by applying free end portions (22), which are provided with a centering tip (44). In order to prevent scratches—which lead to loose particles in the color display tube (1)—when the color selection electrode (12) is inserted or extracted, the free end portion (22) is smoothly shaped.

    摘要翻译： 公开了一种彩色显像管（1），其具有改色的选色电极（12）的悬挂系统。 选色电极（12）的位置稳定性对于彩色显像管（1）的色纯度是非常重要的。 如果选色电极（12）略微移动，则电子束（7,8,9）可能会撞击错误颜色的电致发光材料，导致变色。 可以认识到，通过将较小直径的自由端部（22）施加在支撑元件（17）上，因此这将降低自由端部分（22）和悬挂装置（20）之间的摩擦，从而提高了这种位置稳定性。 这种较小的直径具有将选色电极（12）插入彩色显像管（1）的显示窗（3）中变得更加困难的缺点。 本发明通过施加设置有定心尖端（44）的自由端部（22）来解决这个问题。 为了防止在颜色显示管（1）中导致松散的颗粒的划痕 - 当选色电极（12）插入或拔出时，自由端部分22被平滑地成形。