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51.
公开(公告)号:US20230284427A1
公开(公告)日:2023-09-07
申请号:US17686241
申请日:2022-03-03
Applicant: Intel Corporation
Inventor: Charles AUGUSTINE , Seenivasan SUBRAMANIAM , Patrick MORROW , Muhammad M. KHELLAH
IPC: H01L27/11 , G11C11/412 , G11C11/419
CPC classification number: H01L27/1104 , G11C11/412 , G11C11/419
Abstract: Embodiments herein relate to scaling of Static Random Access Memory (SRAM) cells. An SRAM cell include nMOS transistors on one level above pMOS transistors on a lower level. Transistors on the two levels can have overlapping footprints to save space. Additionally, the SRAM cell can use pMOS access transistors in place of nMOS access transistors to allow reuse of areas of the cell which would otherwise be used by the nMOS access transistors. In one approach, gate interconnects are provided in these areas, which have an overlapping footprint with underlying pMOS access transistors to save space. The SRAM cells can be connected to bit lines and word lines in overhead and/or bottom metal layers. In another aspect, SRAM cells of a column are connected to bit lines in an overlying M0 metal layer and an underlying BM0 metal layers to reduce capacitance.
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公开(公告)号:US20230275135A1
公开(公告)日:2023-08-31
申请号:US18131336
申请日:2023-04-05
Applicant: Intel Corporation
Inventor: Patrick MORROW , Rishabh MEHANDRU , Aaron D. LILAK , Kimin JUN
IPC: H01L29/417 , H01L29/423 , H01L27/12 , H01L29/78 , H01L29/66 , H01L21/8234 , H01L29/08 , H01L29/40
CPC classification number: H01L29/41791 , H01L21/823431 , H01L27/1266 , H01L29/78 , H01L29/401 , H01L29/785 , H01L29/0847 , H01L29/4236 , H01L29/6653 , H01L29/66553 , H01L29/66795 , H01L29/66803 , H01L21/2254 , H01L29/66545
Abstract: An apparatus including a circuit structure including a device stratum including a plurality of devices including a first side and an opposite second side; and a metal interconnect coupled to at least one of the plurality of devices from the second side of the device stratum. A method including forming a transistor device including a channel between a source region and a drain region and a gate electrode on the channel defining a first side of the device; and forming an interconnect to one of the source region and the drain region from a second side of the device.
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公开(公告)号:US20220115372A1
公开(公告)日:2022-04-14
申请号:US17555296
申请日:2021-12-17
Applicant: Intel Corporation
Inventor: Aaron LILAK , Patrick MORROW , Gilbert DEWEY , Willy RACHMADY , Rishabh MEHANDRU
IPC: H01L27/06 , H01L29/78 , H01L29/06 , H01L27/02 , H01L23/522 , H01L21/8234 , H01L21/822
Abstract: Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a lower device layer that includes a first transistor structure, an upper device layer above the lower device layer including a second transistor structure, and an isolation wall that extends between the upper device layer and the lower device layer. The isolation wall may be in contact with an edge of a first gate structure of the first transistor structure and an edge of a second gate structure of the second transistor structure, and may have a first width to the edge of the first gate structure at the lower device layer, and a second width to the edge of the second gate structure at the upper device layer. The first width may be different from the second width. Other embodiments may be described and/or claimed.
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54.
公开(公告)号:US20220102246A1
公开(公告)日:2022-03-31
申请号:US17547066
申请日:2021-12-09
Applicant: Intel Corporation
Inventor: Aaron D. LILAK , Anh PHAN , Patrick MORROW , Stephanie A. BOJARSKI
IPC: H01L23/48 , H01L21/8234 , H01L27/088
Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a first set of transistor fins and a first set of contact metallization. An upper device layer is bonded onto the lower device layer, where the upper device layer includes a second structure comprising a second set of transistor fins and a second set of contact metallization. At least one power isolation wall extends from a top of the upper device layer to the bottom of the lower device layer, wherein the power isolation wall is filled with a conductive material such that power is routed between transistor devices on the upper device layer and the lower device layer.
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55.
公开(公告)号:US20210057413A1
公开(公告)日:2021-02-25
申请号:US16954126
申请日:2018-03-28
Applicant: Gilbert DEWEY , Ravi PILLARISETTY , Jack T. KAVALIEROS , Aaron D. LILAK , Willy RACHMADY , Rishabh MEHANDRU , Kimin JUN , Anh PHAN , Hui Jae YOO , Patrick MORROW , Cheng-Ying HUANG , Matthew V. METZ , Intel Corporation
Inventor: Gilbert DEWEY , Ravi PILLARISETTY , Jack T. KAVALIEROS , Aaron D. LILAK , Willy RACHMADY , Rishabh MEHANDRU , Kimin JUN , Anh PHAN , Hui Jae YOO , Patrick MORROW , Cheng-Ying HUANG , Matthew V. METZ
IPC: H01L27/092 , H01L21/822 , H01L29/08 , H01L29/78 , H01L21/8238 , H01L27/06 , H01L29/66 , H01L29/06
Abstract: An integrated circuit structure comprises a lower device layer that includes a first structure comprising a plurality of PMOS transistors. An upper device layer is formed on the lower device layer, wherein the upper device layer includes a second structure comprising a plurality of NMOS transistors having a group III-V material source/drain region.
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公开(公告)号:US20200303238A1
公开(公告)日:2020-09-24
申请号:US16358520
申请日:2019-03-19
Applicant: Intel Corporation
Inventor: Ehren MANNEBACH , Aaron LILAK , Rishabh MEHANDRU , Hui Jae YOO , Patrick MORROW , Kevin LIN
IPC: H01L21/768 , H01L29/417 , H01L21/762 , H01L21/683 , H01L23/31
Abstract: Embodiments herein describe techniques for a semiconductor device including a carrier wafer, and an integrated circuit (IC) formed on a device wafer bonded to the carrier wafer. The IC includes a front end layer having one or more transistors at front end of the device wafer, and a back end layer having a metal interconnect coupled to the one or more transistors. One or more gaps may be formed by removing components of the one or more transistors. Furthermore, the IC includes a capping layer at backside of the device wafer next to the front end layer of the device wafer, filling at least partially the one or more gaps of the front end layer. Moreover, the IC includes one or more air gaps formed within the one or more gaps, and between the capping layer and the back end layer. Other embodiments may be described and/or claimed.
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公开(公告)号:US20200258894A1
公开(公告)日:2020-08-13
申请号:US16272816
申请日:2019-02-11
Applicant: Intel Corporation
Inventor: Aaron LILAK , Patrick MORROW , Sayed HASAN
IPC: H01L27/11556 , H01L27/11519 , H03K19/23
Abstract: A multiple input device is disclosed. The multiple input device includes a semiconductor structure extending in a first direction, a first dielectric material surrounding a portion of the semiconductor structure, a floating gate on the first dielectric material and surrounding the portion of the semiconductor structure, and a second dielectric material on the floating gate and surrounding the portion of the semiconductor structure. The multiple input device also includes a plurality of control gates on the second dielectric material. At least one of the control gates extends vertically away from the semiconductor structure in a second direction and at least one of the control gates extends vertically away from the semiconductor structure in a third direction.
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58.
公开(公告)号:US20200219979A1
公开(公告)日:2020-07-09
申请号:US16240369
申请日:2019-01-04
Applicant: Intel Corporation
Inventor: Willy RACHMADY , Gilbert DEWEY , Jack T. KAVALIEROS , Aaron LILAK , Patrick MORROW , Anh PHAN , Cheng-Ying HUANG , Ehren MANNEBACH
IPC: H01L29/10 , H01L27/092 , H01L29/06 , H01L29/423 , H01L29/786 , H01L21/02 , H01L21/8238 , H01L29/66
Abstract: Gate-all-around integrated circuit structures having depopulated channel structures, and methods of fabricating gate-all-around integrated circuit structures having depopulated channel structures using a bottom-up oxidation approach, are described. For example, an integrated circuit structure includes a vertical arrangement of nanowires above a substrate. The vertical arrangement of nanowires has one or more active nanowires above one or more oxidized nanowires. A gate stack is over the vertical arrangement of nanowires and around the one or more oxidized nanowires.
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公开(公告)号:US20200035560A1
公开(公告)日:2020-01-30
申请号:US16316330
申请日:2017-08-25
Applicant: Intel Corporation
Inventor: Bruce BLOCK , Valluri R. RAO , Patrick MORROW , Rishabh MEHANDRU , Doug INGERLY , Kimin JUN , Kevin O'BRIEN , Patrick MORROW , Szyua S. LIAO
IPC: H01L21/822 , H01L29/04 , H01L29/08 , H01L23/528 , H01L23/00 , H01L29/16 , H01L29/20 , H01L27/092 , H01L27/12 , H01L23/532 , H01L21/8238 , H01L21/306 , H01L21/683 , H01L29/06 , H01L21/66
Abstract: Integrated circuit cell architectures including both front-side and back-side structures. One or more of back-side implant, semiconductor deposition, dielectric deposition, metallization, film patterning, and wafer-level layer transfer is integrated with front-side processing. Such double-side processing may entail revealing a back side of structures fabricated from the front-side of a substrate. Host-donor substrate assemblies may be built-up to support and protect front-side structures during back-side processing. Front-side devices, such as FETs, may be modified and/or interconnected during back-side processing. Back-side devices, such as FETs, may be integrated with front-side devices to expand device functionality, improve performance, or increase device density.
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公开(公告)号:US20200006388A1
公开(公告)日:2020-01-02
申请号:US16024696
申请日:2018-06-29
Applicant: Intel Corporation
Inventor: Gilbert DEWEY , Patrick MORROW , Aaron LILAK , Willy RACHMADY , Anh PHAN , Ehren MANNEBACH , Hui Jae YOO , Abhishek SHARMA , Van H. LE , Cheng-Ying HUANG
IPC: H01L27/12 , H01L29/786 , H01L29/78 , H01L21/8258
Abstract: Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a first transistor, an insulator layer above the first transistor, and a second transistor above the insulator layer. The first transistor may be a p-type transistor including a channel in a substrate, a first source electrode, and a first drain electrode. A first metal contact may be coupled to the first source electrode, while a second metal contact may be coupled to the first drain electrode. The insulator layer may be next to the first metal contact, and next to the second metal contact. The second transistor may include a second source electrode, and a second drain electrode. The second source electrode may be coupled to the first metal contact, or the second drain electrode may be coupled to the second metal contact. Other embodiments may be described and/or claimed.
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