公开(公告)号：US20210057413A1

公开(公告)日：2021-02-25

申请号：US16954126

申请日：2018-03-28

申请人： Gilbert DEWEY ,  Ravi PILLARISETTY ,  Jack T. KAVALIEROS ,  Aaron D. LILAK ,  Willy RACHMADY ,  Rishabh MEHANDRU ,  Kimin JUN ,  Anh PHAN ,  Hui Jae YOO ,  Patrick MORROW ,  Cheng-Ying HUANG ,  Matthew V. METZ ,  Intel Corporation

发明人： Gilbert DEWEY ,  Ravi PILLARISETTY ,  Jack T. KAVALIEROS ,  Aaron D. LILAK ,  Willy RACHMADY ,  Rishabh MEHANDRU ,  Kimin JUN ,  Anh PHAN ,  Hui Jae YOO ,  Patrick MORROW ,  Cheng-Ying HUANG ,  Matthew V. METZ

IPC分类号： H01L27/092 ,  H01L21/822 ,  H01L29/08 ,  H01L29/78 ,  H01L21/8238 ,  H01L27/06 ,  H01L29/66 ,  H01L29/06

摘要： An integrated circuit structure comprises a lower device layer that includes a first structure comprising a plurality of PMOS transistors. An upper device layer is formed on the lower device layer, wherein the upper device layer includes a second structure comprising a plurality of NMOS transistors having a group III-V material source/drain region.

公开(公告)号：US20140091360A1

公开(公告)日：2014-04-03

申请号：US13630527

申请日：2012-09-28

申请人： Ravi PILLARISETTY ,  Seung Hoon SUNG ,  Niti GOEL ,  Jack T. KAVALIEROS ,  Sansaptak DASGUPTA ,  Van H. LE ,  Willy RACHMADY ,  Marko RADOSAVLJEVIC ,  Gilbert DEWEY ,  Han Wui THEN ,  Niloy MUKHERJEE ,  Matthew V. METZ ,  Robert S. CHAU

发明人： Ravi PILLARISETTY ,  Seung Hoon SUNG ,  Niti GOEL ,  Jack T. KAVALIEROS ,  Sansaptak DASGUPTA ,  Van H. LE ,  Willy RACHMADY ,  Marko RADOSAVLJEVIC ,  Gilbert DEWEY ,  Han Wui THEN ,  Niloy MUKHERJEE ,  Matthew V. METZ ,  Robert S. CHAU

IPC分类号： H01L29/78 ,  H01L27/092 ,  H01L21/336

CPC分类号： H01L21/845 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/02639 ,  H01L21/823807 ,  H01L21/8258 ,  H01L27/092 ,  H01L27/1211 ,  H01L29/0673 ,  H01L29/42392 ,  H01L29/66439 ,  H01L29/6653 ,  H01L29/66795 ,  H01L29/6681 ,  H01L29/775 ,  H01L29/78 ,  H01L29/785 ,  H01L29/7853 ,  H01L29/78696

摘要： Trench-confined selective epitaxial growth process in which epitaxial growth of a semiconductor device layer proceeds within the confines of a trench. In embodiments, a trench is fabricated to include a pristine, planar semiconductor seeding surface disposed at the bottom of the trench. Semiconductor regions around the seeding surface may be recessed relative to the seeding surface with Isolation dielectric disposed there on to surround the semiconductor seeding layer and form the trench. In embodiments to form the trench, a sacrificial hardmask fin may be covered in dielectric which is then planarized to expose the hardmask fin, which is then removed to expose the seeding surface. A semiconductor device layer is formed from the seeding surface through selective heteroepitaxy. In embodiments, non-planar devices are formed from the semiconductor device layer by recessing a top surface of the isolation dielectric. In embodiments, non-planar devices CMOS devices having high carrier mobility may be made from the semiconductor device layer.

摘要翻译： 沟槽限制的选择性外延生长工艺，其中半导体器件层的外延生长在沟槽的范围内进行。 在实施例中，制造沟槽以包括设置在沟槽底部的原始平面半导体晶种表面。 接种表面周围的半导体区域可以相对于接种表面凹陷，其中隔离电介质设置在其上以包围半导体晶种层并形成沟槽。 在形成沟槽的实施例中，牺牲性硬掩模翅片可以被覆盖在电介质中，然后将其平坦化以暴露硬掩模翅片，然后将其去除以暴露接种表面。 通过选择性异质外延从种子表面形成半导体器件层。 在实施例中，通过使隔离电介质的顶表面凹陷，从半导体器件层形成非平面器件。 在实施例中，可以从半导体器件层制造具有高载流子迁移率的非平面器件CMOS器件。

公开(公告)号：US20200091274A1

公开(公告)日：2020-03-19

申请号：US16134876

申请日：2018-09-18

申请人： Abhishek SHARMA ,  Ravi PILLARISETTY ,  Brian DOYLE ,  Elijah KARPOV ,  Prashant MAJHI ,  Gilbert DEWEY ,  Benjamin CHU-KUNG ,  Van H. LE ,  Jack T. KAVALIEROS ,  Tahir GHANI

发明人： Abhishek SHARMA ,  Ravi PILLARISETTY ,  Brian DOYLE ,  Elijah KARPOV ,  Prashant MAJHI ,  Gilbert DEWEY ,  Benjamin CHU-KUNG ,  Van H. LE ,  Jack T. KAVALIEROS ,  Tahir GHANI

IPC分类号： H01L49/02 ,  H01L29/51 ,  H01L29/66

摘要： Embodiments herein describe techniques for a thin-film transistor (TFT), which may include a substrate and a transistor above the substrate. The transistor includes a channel layer above the substrate, a gate dielectric layer adjacent to the channel layer, and a gate electrode separated from the channel layer by the gate dielectric layer. The gate dielectric layer includes a non-linear gate dielectric material. The gate electrode, the channel layer, and the gate dielectric layer form a non-linear capacitor. Other embodiments may be described and/or claimed.

公开(公告)号：US20150111358A1

公开(公告)日：2015-04-23

申请号：US14500915

申请日：2014-09-29

申请人： Ravi PILLARISETTY ,  Mantu K. HUDAIT ,  Marko RADOSAVLJEVIC ,  Gilbert DEWEY ,  Jack T. KAVALIEROS

发明人： Ravi PILLARISETTY ,  Mantu K. HUDAIT ,  Marko RADOSAVLJEVIC ,  Gilbert DEWEY ,  Jack T. KAVALIEROS

IPC分类号： H01L29/66 ,  H01L29/12 ,  H01L29/10

CPC分类号： H01L29/66522 ,  H01L29/1054 ,  H01L29/122 ,  H01L29/205 ,  H01L29/66477

摘要： A surface channel transistor is provided in a semiconductive device. The surface channel transistor is either a PMOS or an NMOS device. Epitaxial layers are disposed above the surface channel transistor to cause an increased bandgap phenomenon nearer the surface of the device. A process of forming the surface channel transistor includes grading the epitaxial layers.

摘要翻译： 表面沟道晶体管设置在半导体器件中。 表面沟道晶体管是PMOS或NMOS器件。 外延层设置在表面沟道晶体管的上方，导致更接近器件表面的带隙现象增加。 形成表面沟道晶体管的工艺包括对外延层进行分级。

公开(公告)号：US20140167108A1

公开(公告)日：2014-06-19

申请号：US13717282

申请日：2012-12-17

申请人： Willy RACHMADY ,  Van H. LE ,  Ravi PILLARISETTY ,  Jessica S. KACHIAN ,  Marc C. FRENCH ,  Aaron A. BUDREVICH

发明人： Willy RACHMADY ,  Van H. LE ,  Ravi PILLARISETTY ,  Jessica S. KACHIAN ,  Marc C. FRENCH ,  Aaron A. BUDREVICH

IPC分类号： H01L29/78 ,  H01L29/66

CPC分类号： H01L29/0673 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/02381 ,  H01L21/0245 ,  H01L21/02532 ,  H01L21/02584 ,  H01L21/30604 ,  H01L21/30608 ,  H01L21/3065 ,  H01L29/1054 ,  H01L29/161 ,  H01L29/165 ,  H01L29/167 ,  H01L29/365 ,  H01L29/42392 ,  H01L29/511 ,  H01L29/66439 ,  H01L29/66477 ,  H01L29/66628 ,  H01L29/66742 ,  H01L29/775 ,  H01L29/7781 ,  H01L29/78 ,  H01L29/7848 ,  H01L29/785 ,  H01L29/786 ,  H01L29/78696 ,  Y02E10/50

摘要： Semiconductor device stacks and devices made there from having Ge-rich device layers. A Ge-rich device layer is disposed above a substrate, with a p-type doped Ge etch suppression layer (e.g., p-type SiGe) disposed there between to suppress etch of the Ge-rich device layer during removal of a sacrificial semiconductor layer richer in Si than the device layer. Rates of dissolution of Ge in wet etchants, such as aqueous hydroxide chemistries, may be dramatically decreased with the introduction of a buried p-type doped semiconductor layer into a semiconductor film stack, improving selectivity of etchant to the Ge-rich device layers.

摘要翻译： 在那里制造的半导体器件堆叠和器件具有富锗器件层。 富锗器件层设置在衬底之上，其中设置有p型掺杂Ge蚀刻抑制层（例如，p型SiGe），以在去除牺牲半导体层期间抑制富锗器件层的蚀刻 Si比设备层更丰富。 随着在半导体膜堆叠中引入掩埋的p型掺杂半导体层，可以显着降低Ge在湿蚀刻剂（例如氢氧化物水溶液）中的溶解速率，从而提高蚀刻剂对Ge富集器件层的选择性。

公开(公告)号：US20140084387A1

公开(公告)日：2014-03-27

申请号：US13627971

申请日：2012-09-26

申请人： Gilbert DEWEY ,  Robert S. CHAU ,  Marko RADOSAVLJEVIC ,  Han Wui THEN ,  Scott B. CLENDENNING ,  Ravi PILLARISETTY

发明人： Gilbert DEWEY ,  Robert S. CHAU ,  Marko RADOSAVLJEVIC ,  Han Wui THEN ,  Scott B. CLENDENNING ,  Ravi PILLARISETTY

IPC分类号： H01L29/78 ,  H01L21/336

CPC分类号： H01L29/66803 ,  B82Y10/00 ,  H01L21/2233 ,  H01L21/228 ,  H01L21/28264 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/20 ,  H01L29/42392 ,  H01L29/66522 ,  H01L29/78681 ,  H01L29/78696

摘要： A high-k gate dielectric interface with a group III-V semiconductor surface of a non-planar transistor channel region is non-directionally doped with nitrogen. In nanowire embodiments, a non-directional nitrogen doping of a high-k gate dielectric interface is performed before or concurrently with a conformal gate electrode deposition through exposure of the gate dielectric to liquid, vapor, gaseous, plasma, or solid state sources of nitrogen. In embodiments, a gate electrode metal is conformally deposited over the gate dielectric and an anneal is performed to uniformly accumulate nitrogen within the gate dielectric along the non-planar III-V semiconductor interface.

摘要翻译： 具有非平面晶体管沟道区域的III-V族半导体表面的高k栅极电介质界面是非定向掺杂氮气的。 在纳米线实施例中，通过将栅极电介质暴露于液体，蒸气，气体，等离子体或固态氮源，在共形栅极电极沉积之前或同时进行高k栅介质界面的非定向氮掺杂 。 在实施例中，栅极电极金属被共形沉积在栅极电介质上，并且执行退火以沿着非平面III-V半导体界面均匀地在栅极电介质内积累氮。

公开(公告)号：US20140091308A1

公开(公告)日：2014-04-03

申请号：US13631534

申请日：2012-09-28

申请人： Sansaptak DASGUPTA ,  Han Wui THEN ,  Marko RADOSAVLJEVIC ,  Niloy MUKHERJEE ,  Niti GOEL ,  Sanaz KABEHIE ,  Seung Hoon SUNG ,  Ravi PILLARISETTY ,  Robert S. CHAU

发明人： Sansaptak DASGUPTA ,  Han Wui THEN ,  Marko RADOSAVLJEVIC ,  Niloy MUKHERJEE ,  Niti GOEL ,  Sanaz KABEHIE ,  Seung Hoon SUNG ,  Ravi PILLARISETTY ,  Robert S. CHAU

IPC分类号： H01L29/778 ,  H01L21/335

CPC分类号： H01L29/7784 ,  H01L21/0254 ,  H01L21/2233 ,  H01L21/2236 ,  H01L21/2654 ,  H01L21/26546 ,  H01L21/31111 ,  H01L21/31144 ,  H01L29/0847 ,  H01L29/2003 ,  H01L29/205 ,  H01L29/207 ,  H01L29/42376 ,  H01L29/66462 ,  H01L29/7786 ,  H01L29/7787

摘要： Embodiments include high electron mobility transistors (HEMT). In embodiments, a gate electrode is spaced apart by different distances from a source and drain semiconductor region to provide high breakdown voltage and low on-state resistance. In embodiments, self-alignment techniques are applied to form a dielectric liner in trenches and over an intervening mandrel to independently define a gate length, gate-source length, and gate-drain length with a single masking operation. In embodiments, III-N HEMTs include fluorine doped semiconductor barrier layers for threshold voltage tuning and/or enhancement mode operation.

摘要翻译： 实施例包括高电子迁移率晶体管（HEMT）。 在实施例中，栅电极与源极和漏极半导体区间隔开不同的距离以提供高击穿电压和低导通状态电阻。 在实施例中，应用自对准技术以在沟槽中和在中间心轴上形成电介质衬垫，以通过单个掩蔽操作独立地限定栅极长度，栅极源长度和栅极 - 漏极长度。 在实施例中，III-N HEMT包括用于阈值电压调谐和/或增强模式操作的氟掺杂半导体势垒层。

公开(公告)号：US20200098824A1

公开(公告)日：2020-03-26

申请号：US16142040

申请日：2018-09-26

申请人： Abhishek SHARMA ,  Gregory K. CHEN ,  Ram KRISHNAMURTHY ,  Ravi PILLARISETTY ,  Sasikanth MANIPATRUNI ,  Amrita MATHURIYA ,  Raghavan KUMAR ,  Phil KNAG ,  Huseyin SUMBUL ,  Urusa ALAAN ,  Noriyuki SATO

发明人： Abhishek SHARMA ,  Gregory K. CHEN ,  Ram KRISHNAMURTHY ,  Ravi PILLARISETTY ,  Sasikanth MANIPATRUNI ,  Amrita MATHURIYA ,  Raghavan KUMAR ,  Phil KNAG ,  Huseyin SUMBUL ,  Urusa ALAAN ,  Noriyuki SATO

IPC分类号： H01L27/24 ,  H01L45/00

摘要： Embodiments herein describe techniques for a semiconductor device including a RRAM memory cell. The RRAM memory cell includes a substrate, a RRAM storage cell above the substrate, and a diode adjacent to the RRAM storage cell. The RRAM storage cell includes a first electrode located in a first metal layer above the substrate, a resistive switching material layer adjacent to the first electrode, and a second electrode adjacent to the resistive switching material layer. The second electrode is shared between the RRAM storage cell and the diode. The diode includes the second electrode shared with the RRAM storage cell, a semiconductor layer adjacent to the second electrode, and a third electrode located in a second metal layer above the substrate. Other embodiments may be described and/or claimed.

公开(公告)号：US20170069596A1

公开(公告)日：2017-03-09

申请号：US15121759

申请日：2014-03-27

申请人： Ravi PILLARISETTY ,  Sansaptak DASGUPTA ,  Niloy MUKHERJEE ,  Brian S. DOYLE ,  Marko RADOSAVLJEVIC ,  Han Wui THEN

发明人： Ravi PILLARISETTY ,  Sansaptak DASGUPTA ,  Niloy MUKHERJEE ,  Brian S. DOYLE ,  Marko RADOSAVLJEVIC ,  Han Wui THEN

IPC分类号： H01L25/065 ,  H01L29/24 ,  H01L29/20 ,  H01L23/498 ,  H01L25/00

CPC分类号： H01L25/0652 ,  G06F1/1652 ,  G09F9/301 ,  G09G3/3648 ,  H01L21/8221 ,  H01L21/8258 ,  H01L23/145 ,  H01L23/15 ,  H01L23/49811 ,  H01L23/4985 ,  H01L25/00 ,  H01L25/50 ,  H01L27/0688 ,  H01L29/2003 ,  H01L29/24 ,  H01L2225/06527 ,  H01L2225/06555 ,  H01L2924/0002

摘要： Embodiments of the present disclosure describe multi-device flexible systems on a chip (SOCs) and methods for making such SOCs. A multi-material stack may be processed sequentially to form multiple integrated circuit (IC) devices in a single flexible SOC. By forming the IC devices from a single stack, it is possible to form contacts for multiple devices through a single metallization process and for those contacts to be located in a common back-plane of the SOC. Stack layers may be ordered and processed according to processing temperature, such that higher temperature processes are performed earlier. In this manner, intervening layers of the stack may shield some stack layers from elevated processing temperatures associated with processing upper layers of the stack. Other embodiments may be described and/or claimed.

摘要翻译： 本公开的实施例描述了芯片上的多设备灵活系统（SOC）以及用于制造这种SOC的方法。 可以依次处理多材料堆叠，以在单个柔性SOC中形成多个集成电路（IC）装置。 通过从单个堆叠形成IC器件，可以通过单个金属化工艺为多个器件形成触点，并且可以将这些触点位于SOC的公共背面中。 堆叠层可以根据处理温度进行排序和处理，使得较早进行较高温度处理。 以这种方式，堆叠的中间层可以屏蔽一些堆叠层与处理堆叠的上层相关联的升高的处理温度。 可以描述和/或要求保护其他实施例。

公开(公告)号：US20220109025A1

公开(公告)日：2022-04-07

申请号：US17552546

申请日：2021-12-16

申请人： Intel Corporation

发明人： Prashant MAJHI ,  Ravi PILLARISETTY ,  Elijah V. KARPOV ,  Brian S. DOYLE ,  Abhishek A. SHARMA

IPC分类号： H01L27/24 ,  H01L27/22 ,  H01L45/00

摘要： Embedded non-volatile memory structures having double selector elements are described. In an example, a memory device includes a word line. A double selector element is above the word line. The double selector element includes a first selector material layer, a second selector material layer different than the first selector material layer, and a conductive layer directly between the first selector material layer and the second selector material layer. A bipolar memory element is above the word line. A conductive electrode is between the double selector element and the bipolar memory element. A bit line is above the word line.