摘要:
Provided is a method of manufacturing a semiconductor device having a capacitor. The method includes forming a composite layer, including sequentially stacking on a substrate alternating layers of first through nth sacrificial layers and first through nth supporting layers. A plurality of openings that penetrate the composite layer are formed. A lower electrode is formed in the plurality of openings. At least portions of the first through nth sacrificial layers are removed to define a support structure for the lower electrode extending between adjacent ones of the plurality of openings and the lower electrode formed therein, the support structure including the first through nth supporting layers and a gap region between adjacent ones of the first through nth supporting layers where the first through nth sacrificial layers have been removed. A dielectric layer is formed on the lower electrode and an upper electrode is formed on the dielectric layer.
摘要:
An encapsulation apparatus capable of securely sealing a gap of a display panel and improving intensity of the display panel, and a method of manufacturing an organic light emitting display device using the encapsulation apparatus are taught. The encapsulation apparatus includes an injection port having tapered projecting edges formed in both sides of one end the injection port, and injecting a reinforcing material into a gap of a display panel in a dual surface contact manner, the first substrate and the second substrate being attached to each other using a sealant; and a supporter coupled to the injection port and supporting the injection port.
摘要:
Provided is a method of synthesizing an ITO electron beam resist and a method of forming an ITO pattern. The ITO electron beam resist is synthesized by dissolving indium chloride tetrahydrate and tin chloride dihydrate in 2-ethoxy ethanol. The method of forming an ITO pattern includes: forming an ITO electron beam resist film on a substrate, forming an ITO electron beam resist pattern by patterning the ITO electron beam resist film, and forming an ITO pattern by annealing the ITO electron beam resist pattern.
摘要:
An apparatus for cutting a flat display panel prevents a light emitting surface of a flat display panel from being damaged due to a pit or a scratch. The apparatus for cutting a flat display panel includes a stage supporting a rear substrate of the flat display panel, a chip blocking unit disposed to correspond to a non-scrap portion of the flat display panel, and a scrap breaker to grip a scrap portion of the flat display panel that is to be separated from the flat display panel. A scribing line is formed between the scrap portion and a non-scrap portion of the flat display panel.
摘要:
Liquid chemical delivery systems are provided which include a liquid chemical storage canister, a pressurized gas source that feeds a pressurized gas into the storage canister, a vaporizer that may be used to vaporize the liquid chemical supplied from the storage canister, a delivery line that connects the storage canister to the vaporizer, a liquid mass flow controller that controls the flow rate of the liquid chemical through the delivery line, a reaction chamber that is connected to the vaporizer, and a liquid chemical recycling element that collects at least some of the chemical flowing through the system during periods when the liquid chemical delivery system is isolated from the reaction chamber.
摘要:
A method for manufacturing a dielectric layer structure for a non-volatile memory cell is provided. A method includes forming a first dielectric layer for tunneling on a semiconductor substrate, a second dielectric layer on the first dielectric layer to store charges, nitrogenizing surface of the second dielectric layer, and forming a third dielectric layer the nitridedsecond dielectric layer.
摘要:
A method of fabricating a semiconductor device having a stress enhanced MOS transistor is provided. A MOS transistor may be formed in a desired, or alternatively, a predetermined region of a semiconductor substrate. A first sacrificial pattern, formed over the source and drain regions of a MOS transistor, may expose sidewall spacers and cover the upper region of the gate pattern. Thinner spacers may be formed by etching the exposed sidewall spacers using the first sacrificial pattern as an etch mask. A stress liner may be formed over the MOS transistor having the thinner spacers.
摘要:
A semiconductor device and a method of manufacturing the same, including obtaining a semiconductor substrate, forming a device isolating layer having a depression part and a protrusion part in the semiconductor substrate, forming a gate insulating layer and a gate electrode on the semiconductor substrate, forming a spacer in communication with the gate electrode, removing a portion of the semiconductor substrate to form at least one substrate recess region in an upper surface of the semiconductor substrate and at least one substrate remaining portion extending to a same height as the semiconductor substrate, so that the substrate remaining portion forms a sidewall of the substrate recess region and is in communication with the device isolating layer, and forming a substrate epitaxial layer in the substrate recess region.
摘要:
A semiconductor wafer processing apparatus may include a chuck and/or a focus ring. The chuck may be configured to hold a wafer. The focus ring may be disposed surrounding a rim of the chuck. The focus ring may include a first section formed of a first material and a second section formed of a second material. The first material and the second material may have different conductivities. A method of forming a semiconductor wafer processing apparatus may include forming a first section of a focus ring from a first material, forming a second section of the focus ring from a second material having a different conductivity than the first material, combining the first and second sections to form a focus ring, and/or arranging the focus ring so as to surround a chuck.
摘要:
Provided herein are methods of forming a trench including forming a mask layer on a substrate, forming a mask pattern to expose the substrate, using plasma to at least partially remove by-products produced during formation of the mask pattern; and etching the exposed substrate to form a trench having side surfaces including a uniform slope.