Piezoelectric actuator having embedded electrodes
    53.
    发明授权
    Piezoelectric actuator having embedded electrodes 失效
    具有嵌入电极的压电致动器

    公开(公告)号:US08668311B2

    公开(公告)日:2014-03-11

    申请号:US13384101

    申请日:2009-10-30

    摘要: A piezoelectric actuator includes a thin film sheet, a first electrode, and a second electrode. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet. The first electrode is embedded within the thin film sheet. The second electrode is embedded within the thin film sheet, and is interdigitated in relation to the first electrode. The electric field is induced within the thin film sheet via application of a voltage across the first and the second electrodes.

    摘要翻译: 压电致动器包括薄膜片,第一电极和第二电极。 薄膜片是为了响应于在薄膜片内感应的电场而物理地变形的。 第一电极嵌入薄膜片内。 第二电极嵌入在薄膜片内,并且相对于第一电极交错。 通过施加跨越第一和第二电极的电压,在薄膜片内感应出电场。

    Thermal Fluid-Ejection Echanism Having Heating Resistor On Cavity Sidewalls
    55.
    发明申请
    Thermal Fluid-Ejection Echanism Having Heating Resistor On Cavity Sidewalls 有权
    在腔侧壁上具有加热电阻的热流体喷射机构

    公开(公告)号:US20130286104A1

    公开(公告)日:2013-10-31

    申请号:US13978571

    申请日:2011-01-31

    IPC分类号: B41J2/05

    摘要: A thermal fluid-ejection mechanism includes a substrate having a top surface. A cavity formed within the substrate has one or more sidewalls and a floor. The angle of the sidewalls from the floor is greater than or equal to nominally ninety degrees. The thermal fluid-ejection mechanism includes a patterned conductive layer on one or more of the substrate's top surface and the cavity's sidewalls. The thermal fluid-ejection mechanism includes a patterned resistive layer on the sidewalls of the cavity. The patterned resistive layer is located over the patterned conductive layer where the patterned conductive layer is formed on the sidewalls of the cavity. The patterned resistive layer is formed as a heating resistor of the thermal-fluid ejection mechanism. The conductive layer is formed as a conductor of the thermal-fluid ejection mechanism, to permit electrical activation of the heating resistor to cause fluid to be ejected from the thermal fluid-ejection mechanism.

    摘要翻译: 热流体喷射机构包括具有顶表面的基板。 在衬底内形成的空腔具有一个或多个侧壁和底板。 来自地板的侧壁的角度大于或等于标称九十度。 热流体喷射机构包括在基板的顶表面和空腔的侧壁的一个或多个上的图案化导电层。 热流体喷射机构包括在腔的侧壁上的图案化电阻层。 图案化电阻层位于图案化导电层上方,其中图案化的导电层形成在空腔的侧壁上。 图案化电阻层形成为热流体喷射机构的加热电阻器。 导电层形成为热流体喷射机构的导体,以允许加热电阻器的电激活以使流体从热流体喷射机构喷出。

    ARCHITECTURE FOR PIEZOELECTRIC MEMS DEVICES
    57.
    发明申请
    ARCHITECTURE FOR PIEZOELECTRIC MEMS DEVICES 有权
    压电MEMS器件的结构

    公开(公告)号:US20120187804A1

    公开(公告)日:2012-07-26

    申请号:US13013494

    申请日:2011-01-25

    IPC分类号: H01L41/04 H01L41/22

    摘要: A piezoelectric thin film device comprises a piezoelectric thin film having upper and lower surfaces and a defined tilted crystal morphology, a top electrode disposed on the upper surface, a substrate having a surface morphology that corresponds to the defined crystallographically tilted morphology, and a bottom electrode disposed between and crystallographically linked to both the lower surface of the piezoelectric thin film and the substrate surface, the bottom and top electrodes having a parallel planar configuration relative to the plane of the substrate and the defined crystallographically tilted morphology having a crystallographic c-axis direction oriented at a >0° angle relative to the normal to the plane of the electrodes; and method of making the device.

    摘要翻译: 压电薄膜器件包括具有上表面和下表面的压电薄膜和限定的倾斜晶体形态,设置在上表面上的顶电极,具有对应于限定的晶体倾斜形态的表面形态的基底,以及底电极 设置在晶体学上与压电薄膜的下表面和基板表面相关联,底部和顶部电极相对于基板的平面具有平行的平面结构,并且具有限定的晶体学倾斜的形态,具有晶体c轴方向 相对于电极平面的法线> 0°角定向; 以及制造该装置的方法。

    Printhead unit
    59.
    发明申请
    Printhead unit 有权
    打印头单元

    公开(公告)号:US20110102516A1

    公开(公告)日:2011-05-05

    申请号:US12610196

    申请日:2009-10-30

    IPC分类号: B41J2/045 H04R17/00 H01L41/00

    摘要: Piezoelectric unit, comprising a fluid chamber, a fluid outlet, an actuator, comprising a thin film piezoceramic element and a membrane, acting as a wall of the fluid chamber, and a support element arranged for preventing a supported portion of the actuator from movement in a main direction of actuation movement of the actuator, while allowing such actuation movement on at least two sides of the supported portion, wherein the support element is connected to a unit portion that extends approximately opposite to the actuator.

    摘要翻译: 压电单元,包括流体室,流体出口,致动器,其包括用作流体室的壁的薄膜压电陶瓷元件和膜;以及支撑元件,其布置成用于防止致动器的支撑部分在 致动器的致动运动的主要方向,同时允许在被支撑部分的至少两侧上的这种致动运动,其中支撑元件连接到大致相对于致动器延伸的单元部分。